Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 931086-13 | CMP | SCRW, HSS, CUP PT, 6-32UNCX1/2, SS | New OEM | Contact Us | |
| 931086-15 | CMP | SCRW,HSS,CUP PT,8-32UNCX3/16,SST | New OEM | Contact Us | |
| 931086-24 | CMP | SCRW,HSS,CUP PT,10-32UNFX1/4,SST | New OEM | Contact Us | |
| 931086-30 | CMP | SCRW,HSS,CUP PT,1/4-20UNCX5/16,SST | New OEM | Contact Us | |
| 931086-48 | CMP | SCRW,HSS,CUP PT,3/8-16UNCX3/8,SST | New OEM | Contact Us | |
| 931086-50 | CMP | SCRW,HSS,CUP PT,5/16-24UNFX3/8,SST-400 | New OEM | Contact Us | |
| 931086-59 | CMP | SCRW,HSS,CUP PT 1/4-20UNCS5/16,TFE | New OEM | Contact Us | |
| 931111-4 | CMP | NUT,HEX,MACHINE SCRW,8-32UNC,A2-SST | New OEM | Contact Us | |
| 931119-17 | CMP | PIN,DOWEL,HDN GND MACH,3/16X1/2XSST | New OEM | Contact Us | |
| 931119-18 | CMP | PIN, DOWEL, HDN GND MACH, 3/16X3/4XSST | New OEM | Contact Us | |
| 931119-30 | PVD | PIN,DOWEL, HDN GND MACH, 1/16 x 5/8, SST | New OEM | Contact Us | |
| 931119-34 | CMP | PIN,DOWEL,HDNGND MACH,5/16X1/2,316SST | New OEM | Contact Us | |
| 931123-3 | CMP | PIN,TAPER,NO 5/0X1,18-8 SST | New OEM | Contact Us | |
| 931126-4 | CMP | KEY,SQUARE,PL HD,3/16X3/16X1/2,SST | New OEM | Contact Us | |
| 931126-5 | CMP | KEY,SQUARE,PL HD,1/4X1/4X1-5/16,SST | New OEM | Contact Us | |
| 931129-2 | CMP | SPRING,CPRSN,3.05ODX0.46WDX9.65L,302-SST | New OEM | Contact Us | |
| 931129-3 | CMP | SPRING,CPRSN,4.57ODX0.61WDX44.45L,SST | New OEM | Contact Us | |
| 931153-3 | CMP | O-RING,5.94ID X 3.53W FFKM | New OEM | Contact Us | |
| 931166-2 | CMP | WSHR,FLAT,USS,#10,NYL | New OEM | Contact Us | |
| 931166-41 | CMP | WSHR,FLAT,USS,#4,SST | New OEM | Contact Us | |
| 931166-44 | CMP | WSHR,FLAT,USS,#6,SST | New OEM | Contact Us | |
| 93119-17 | CMP | PIN,DOWEL,HDN GND MACH,3/16X1/2XSST | New OEM | Contact Us | |
| 931201-2 | CMP | SCRW,PHH,SLTD,INT SEAL,2-56UNCX3/8,SST | New OEM | Contact Us | |
| 931207-9 | CMP | FTG, MALE CONN, HEX, 1-TCH, 1/4TX1 | New OEM | Contact Us | |
| 931210-1 | CMP | RING,RETAINING,EXT E,DIA .094,SST | New OEM | Contact Us | |
| 931210-5 | CMP | RING,RETAINING,EXT E,DIA .188,SST | New OEM | Contact Us | |
| 931211-2 | CMP | SPRING,TRSN,0.249ODX0.017WD180DEG,SST | New OEM | Contact Us | |
| 931211-4 | CMP | SPRING,TRSN,0.16ODX0.017WDX230DEG,SST | New OEM | Contact Us | |
| 931212-1 | CMP | SPACER,SHAFT,0.093IDX0.010T,SST | New OEM | Contact Us | |
| 931212-12 | CMP | SPACER,SHAFT,0.125IDX0.010T,SST | New OEM | Contact Us | |
| 931229-2 | CMP | FTG,UNION TEE,1-TCH,5/32T,NKL | New OEM | Contact Us | |
| 931232-2 | CMP | FTG,PLUG,1-TCH,5/32,PBT | New OEM | Contact Us | |
| 931233-2 | CMP | FTG,MALE CONN,HEX,1-TCH,5/32TX10-32,NKL | New OEM | Contact Us | |
| 931235-5 | CMP | FTG,BRANCH TEE,1-TCH,5/32TX10-32UNF,NKL | New OEM | Contact Us | |
| 931236-26 | CMP | FTG,MALE ELBOW,1-TCH,1/4TX10-32UNF,SST | New OEM | Contact Us | |
| 931236-31 | CMP | FTG, MALE ELBOW, 1/TCH, 1/8TX1/8NPT, SST | New OEM | Contact Us | |
| 931236-32 | CMP | FTG,MALE ELBOW,1-TCH,5/32TX10-32UNF,SST | New OEM | Contact Us | |
| 931236-8 | CMP | FTG,MALE ELBOW,1-TCH,5/32TX1/4NPT,PBT | New OEM | Contact Us | |
| 931241-7 | GaSonics | NUT,LOCK,NYL INSERT,5/16-18UNC(JAM),SST | New OEM | Contact Us | |
| 931253-6 | CMP | FTG,90 DEG ELBOW,SXS,1-1/2,PVC-40 | New OEM | Contact Us | |
| 931285-17 | CMP | FTG,MALE CONN,1-TCH,3/8TX1/4NPT,SST | New OEM | Contact Us | |
| 931287-14 | CMP | FTG,MALE ELBOW,1-TCH,5/32TX10-32UNF,NKL | New OEM | Contact Us | |
| 931287-17 | CMP | FTG,MALE ELBOW,1-TCH,1/4TX10-32UNF,SST | New OEM | Contact Us | |
| 931287-9 | CMP | FTG,MALE ELBOW,1-TCH,1/4TX1/8NPT,SST | New OEM | Contact Us | |
| 931288-4 | CMP | FTG, PLUG-IN RDC, 1-TCH, 1/4TX3/8, SST | New OEM | Contact Us | |
| 931297-1 | CMP | FTG,PLUG,1/4NPT,PFA | New OEM | Contact Us | |
| 931367-1 | CMP | FTG,UNION Y,1-TCH,1/4T,SST | New OEM | Contact Us | |
| 931397-1 | CMP | CAP,FINISHING,1/2,LOW DENSITY HDPE,NAT | New OEM | Contact Us | |
| 931398-1 | CMP | BEARING,BALL,SINGLE ROW,.3125X.500OD,SST | New OEM | Contact Us | |
| 931399-1 | CMP | BEARING,BALL,DBL ROW,25X52OD,SST | New OEM | Contact Us | |
| 931410-2 | CMP | FTG,UNION TEE,FLARE,3/8,PFA | New OEM | Contact Us | |
| 931423-10 | CMP | FTG,MALE ELBOW,FLARE,1/2TX1/4NPT,PFA | New OEM | Contact Us | |
| 931423-4 | CMP | FTG,MALE ELBOW,FLARE,3/8TX1/4NPT,PFA | New OEM | Contact Us | |
| 931430-1 | CMP | FTG, BUSHING, RDC, 1/4NPTX1/8NPT, SST | New OEM | Contact Us | |
| 931434-1 | CMP | GAUGE,0-30PSI,1/4NPT | New OEM | Contact Us | |
| 931434-2 | CMP | GAUGE,PRESSURE 0-60PSI,1/4NPT | New OEM | Contact Us | |
| 931438-13 | CMP | SCRW,HEX HD,M10X30,PEEK | New OEM | Contact Us | |
| 931438-2 | CMP | SCRW,HEX HD,M6X25,PEEK | New OEM | Contact Us | |
| 931438-6 | CMP | SCRW,HEX HD,M6X20,PEEK | New OEM | Contact Us | |
| 931438-8 | CMP | SCRW,HEX HD,M6X30,PEEK | New OEM | Contact Us | |
| 931449-1 | CMP | SCRW,THUMB,DIAMOND KNURL,6-32X3/8,SST | New OEM | Contact Us | |
| 931459-1 | CMP | FTG,BARB CONN 3/32TX 10/32UNF PPRO | New OEM | Contact Us | |
| 931475-1 | CMP | FTG,UNION,RDC,PUSH-CONN,3/8TX1/4T,ACETAL | New OEM | Contact Us | |
| 931485-1 | CMP | FTG,MALE CONN 1/4TX 1/8MNPT PVDF | New OEM | Contact Us | |
| 931502-1 | CMP | SCRW,PNH,REC,M4X16,PEEK | New OEM | Contact Us | |
| 931502-13 | CMP | SCRW,PNH,REC,M5X15,PEEK | New OEM | Contact Us | |
| 931502-14 | CMP | SCRW,PNH,REC,M5X20,PEEK | New OEM | Contact Us | |
| 931502-17 | CMP | SCRW,PNH,REC,M5X10,PEEK | New OEM | Contact Us | |
| 931502-9 | CMP | SCRW,PNH,REC,M4X12,PEEK | New OEM | Contact Us | |
| 931506-10 | CMP | SCRW,SHC,INT SEAL,6-32UNCX3/8,SST | New OEM | Contact Us | |
| 931506-3 | CMP | SCRW,SHC,INT SEAL,1/4-20UNCX1,SST | New OEM | Contact Us | |
| 931506-7 | CMP | SCRW,SHC,INT SEAL,10-32X1-1/4,SST | New OEM | Contact Us | |
| 931506-8 | CMP | SCRW,SHC,INT SEAL,6-32UNCX3/4,316SST | New OEM | Contact Us | |
| 931506-9 | CMP | SCRW,SHC,INT SEAL,8-32UNCX1/2,316 SST | New OEM | Contact Us | |
| 931517-2 | CMP | FTG,MALE CONN,HOSE NIP,6TXM5,SST | New OEM | Contact Us | |
| 931532-1 | CMP | VALVE,PNEU,1/4NPTX1/4NPTX1/4NPT,PTFE | New OEM | Contact Us | |
| 931537-1 | CMP | PLUG,PRESSURE,DRYSEAL,1/8NPT,BRASS | New OEM | Contact Us | |
| 931540-1 | CMP | BEARING,SLEEVE,3/8X9/16ODX1/2LG,RULON-LR | New OEM | Contact Us | |
| 931541-1 | CMP | BUSHING,FLANGED,3/8IDX5/8ODX1/2LG,RULON | New OEM | Contact Us | |
| 931556-001 | CMP | FTG,SCRW PLUG,10-32UNF,303 SST | New OEM | Contact Us | |
| 931603-02 | CMP | SHIM,3/8IDX5/8ODX.06THK,18-8SST | New OEM | Contact Us | |
| 931628-01 | CMP | NUT,LOCKING,M12-1.0,NYLON | New OEM | Contact Us | |
| 931630-01 | CMP | SCRW,FHC,8-32UNCX3/8,316 SST | New OEM | Contact Us | |
| 931645-001 | CMP | BEARING,BALL,DIA 10 X 26OD(ANG CNTCT)SST | New OEM | Contact Us | |
| 931646-001 | CMP | SEAL,LIP,.25DIA SHAFT,.25THK,SST | New OEM | Contact Us | |
| 931900-040 | CMP | TUBE,1/4ODX.16ID,POLY,RED,95A | New OEM | Contact Us | |
| 931900-052 | CMP | TUBE, 1/4ODX.161ID, POLY, NEON-GRN, 95A | New OEM | Contact Us | |
| 931900-064 | CMP | TUBE,3/8ODX.245ID,POLY,NEON-GRN,95A | New OEM | Contact Us | |
| 93-2005 | GaSonics | ACTUATOR, MODIFIED,SWITCH | New OEM | Contact Us | |
| 93-2657 | GaSonics | LAMP,HG-OZONE FREE,2.125 IN, WITH 12 IN | New OEM | Contact Us | |
| 93-2681 | GaSonics | CABLE ASSY, WATER FLOW SENSOR | New OEM | Contact Us | |
| 93-2696 | GaSonics | ATM SENSOR, 0-15 PSIA, MODEL SA, MOD | New OEM | Contact Us | |
| 93-2722 | GaSonics | PCA, SCR CONTROLLER, MOD W/TEST POINTS | New OEM | Contact Us | |
| 93-2734 | GaSonics | SWITCH, PUSHBUTTON,ENGRAVED | New OEM | Contact Us | |
| 93-2791 | GaSonics | MOTOR, SERVO,ENCODER | New OEM | Contact Us | |
| 93-2812 | GaSonics | WASHER, .344 ID X .600 OD X .05 TH TITAN | New OEM | Contact Us | |
| 93-2826 | GaSonics | SCREW, CAPTIVE, ALTERED | New OEM | Contact Us | |
| 93-2858 | GaSonics | BEARING, FLANGED,LINEAR-ALTERED | New OEM | Contact Us | |
| 93-2864 | GaSonics | KIT, PRESSURE CONTROLLER, ALTERED | New OEM | Contact Us | |
| 93-2930 | GaSonics | SMALL PULLEY MODIFICATION | New OEM | Contact Us |