Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| A60-010-01 | GaSonics | XFORMER,FILAMENT,MAGNETRON,120V,50/60HZ | New OEM | Contact Us | |
| A62-004-01 | CMP | WIRE,BRAID,TINNED COPPER,5/8 IN | New OEM | Contact Us | |
| A63-023-01 | GaSonics | CABLE,BNC MALE TO BNC MALE;4 FT | New OEM | Contact Us | |
| A78-005-01 | GaSonics | O-RING, 2-267, 8.250 ID X .125 W,SILICON | New OEM | Contact Us | |
| A78-006-01 | GaSonics | O-RING, 2-274, 10 ID X .125 W,SILICONE | New OEM | Contact Us | |
| A78-007-01 | Gasonics | O-RING, 2-270, 9 ID X .125 W,SILICONE | New OEM | Contact Us | |
| A78-008-01 | Gasonics | O-RING, 2-259, 6.250 ID X .125 W,SILICON | New OEM | Contact Us | |
| A78-009-01 | Gasonics | O-RING, 2-250, 5 ID X .125 W,SILICONE | New OEM | Contact Us | |
| A78-014-01 | GaSonics | O-RING, 2-123, 1.174 ID X .103 W, SILIC | New OEM | Contact Us | |
| A78-015-01 | GaSonics | O-RING, 2-118, .862 ID X .103 W,SILICONE | New OEM | Contact Us | |
| A78-016-01 | GaSonics | O-RING, 2-117, .799 ID X .103 W,SILICONE | New OEM | Contact Us | |
| A78-021-01 | GaSonics | O-RING, 2-010, .239 ID X .070 W,SILICONE | New OEM | Contact Us | |
| A78-022-01 | GaSonics | O-RING, 2-233, 2.859 ID X .139 W, | New OEM | Contact Us | |
| A78-024-01 | GaSonics | O-RING, 2-014, .489 ID X .070 W, CONDUC | New OEM | Contact Us | |
| A78-029-01 | GaSonics | O-RING, 2.213, .921 X .139 W, SILICONE,T | New OEM | Contact Us | |
| A78-030-01 | GaSonics | 2-223(1.609IDX.139C/S)SILICONE ,TFLN ENC | New OEM | Contact Us | |
| A78-034-01 | GaSonics | O-RING, 9-120, .987 ID X .103 W, CHEMRAZ | New OEM | Contact Us | |
| A78-036-01 | GaSonics | O-RING, 9-010, .239 ID X .070 W, CHEMRAZ | New OEM | Contact Us | |
| A78-052-01 | GaSonics | O-RING, 9-159, 4.987 ID X .103 W, CHEMRAZ 550 | New OEM | Contact Us | |
| A78-055-01 | GaSonics | O-RING, 9-123, 1.174 ID X .103 W, CHEMRA | New OEM | Contact Us | |
| A78-063-01 | GaSonics | O-RING, 2-389, 19.955 ID X .210 W,SILICO | New OEM | Contact Us | |
| A78-072-01 | GaSonics | O-RING, 2-128, 1.487 ID X .103 W, SILIC | New OEM | Contact Us | |
| A78-073-01 | GaSonics | O-RING, 2-168, 7.237 ID X .103 W,SILICON | New OEM | Contact Us | |
| A78-094-01 | GaSonics | O-RING, 9-213, .921 ID X .139 W, CHEMRAZ | New OEM | Contact Us | |
| A78-096-01 | GaSonics | O-RING, 9-120, .987 ID X .103 W, CHEMRAZ | New OEM | Contact Us | |
| A78-107-01 | GaSonics | RING, CENTERING,NW40, CHEMRAZ, 550,9-326 | New OEM | Contact Us | |
| A78-300-01 | GaSonics | O-RING, 2-162, 5.737 ID X .103 W,SILICON | New OEM | Contact Us | |
| A78-301-01 | GaSonics | O-RING, 2-232, 2.734 ID X .139 W,SILICON | New OEM | Contact Us | |
| A78-302-01 | GaSonics | O-RING, 2-271,SILICONE | New OEM | Contact Us | |
| A78-303-01 | GaSonics | O-RING, 2-281,14.984 ID X .139 W,SILICON | New OEM | Contact Us | |
| A88-005-01 | GaSonics | LABEL,HOT SURFACE CAUTION | New OEM | Contact Us | |
| A88-011-01 | GaSonics | LABEL,MICROWAVE CAUTION | New OEM | Contact Us | |
| A89-039-01 | GaSonics | PCB,AURA,LAMP CURRENT SENSOR | New OEM | Contact Us | |
| A90-003-01 | GaSonics | PCA INTERLOCK | New OEM | Contact Us | |
| A90-004-01 | GaSonics | PCB ASSY, OPTICAL INTERRUPT SENSOR | New OEM | Contact Us | |
| A90-004-02 | GaSonics | SENSOR OPTICAL INTERRUPT ASSEMBLY LD/UNLD CHUCK POSITION | New OEM | Contact Us | |
| A90-004-03 | GaSonics | PCA,ROBOTOLOAD,OPTICAL INTERRUPT | New OEM | Contact Us | |
| A90-005-02 | GaSonics | PCA,AURA,CONTROLLER BD PICK & PLACE W/SE | New OEM | Contact Us | |
| A90-005-05 | GaSonics | PCA,AURA CONTROLLER BOARD ETCHER, 6 INCH | New OEM | Contact Us | |
| A90-014-02 | GaSonics | PCA, AE, DISPLAY DECODER | New OEM | Contact Us | |
| A90-020-01 | GaSonics | PCA, LAMP ALARM | New OEM | Contact Us | |
| A90-027-01 | GaSonics | PCA,AE,RF POWR CONTROLLER | New OEM | Contact Us | |
| A90-028-01 | GaSonics | PCA,AE,FAILURE DETECTION & SIGNAL INTERF | New OEM | Contact Us | |
| A90-031-01 | GaSonics | PCA,AURA,FAILURE DETECT,60HZ | New OEM | Contact Us | |
| A90-031-03 | GaSonics | PCA, PLASMA FAILURE DETECTION | New OEM | Contact Us | |
| A90-033-03 | GaSonics | PCA, TC, AMP & COLD JUNCTION CLTC | New OEM | Contact Us | |
| A90-039-01 | GaSonics | PCA, AURA, LAMP CURRENT SENSOR | New OEM | Contact Us | |
| A90-042-01 | GaSonics | PCA,A3000,LAMP CONTROLLER | New OEM | Contact Us | |
| A92-002-01 | GaSonics | ELBOW,PRIMARY VACUUM | New OEM | Contact Us | |
| A92-022-01 | GaSonics | GUARD,EO SWITCH | New OEM | Contact Us | |
| A93-021-05 | CMP | WAVEGUIDE STPR-SHORT PLENUM | New OEM | Contact Us | |
| A93-032-01 | GaSonics | MOD TBG,FLEX GL END.25 NOM OD,W/WELDED T | New OEM | Contact Us | |
| A93-038-01 | GaSonics | GAS CAP,WELDMENT,GAS FEED | New OEM | Contact Us | |
| A93-038-02 | GaSonics | GAS CAP,MOD,GAS FEED ASSY,AE | New OEM | Contact Us | |
| A93-051-01 | GaSonics | WAVEGUIDE,LLE,LONG PLENUM | New OEM | Contact Us | |
| a94-005-01 | GaSonics | ASSY CABLE, W7A | New OEM | Contact Us | |
| A94-009-01 | GaSonics | CABLE ASSY, W13 | New OEM | Contact Us | |
| A94-011-02 | GaSonics | ASSY,CABLE,W7B,23.5 IN LG | New OEM | Contact Us | |
| A94-021-01 | GaSonics | DETECTOR,DIODE,ZERO-BIAS 100 KHZ-4.0 GHZ | New OEM | Contact Us | |
| A95-013-03 | GaSonics | ASSAY,AURA,MAGNETRON/WAVE,PLASMA DETECT | New OEM | Contact Us | |
| A95-026-01 | GaSonics | BLOWER ASSY | New OEM | Contact Us | |
| A95-028-01 | GaSonics | SWITCH ASSY,INTERLOCK, MODIFIED | New OEM | Contact Us | |
| A95-035-00 | GaSonics | ASSY,CORE DOOR NEST | New OEM | Contact Us | |
| A95-041-01 | GaSonics | SENSOR, ASSY, LOAD | New OEM | Contact Us | |
| A95-045-01 | GaSonics | MAGNETRON ASSY | New OEM | Contact Us | |
| A95-053-02 | GaSonics | LAMP TRAY ASSY - WATER COOLED 8in | New OEM | Contact Us | |
| A95-056-01 | GaSonics | DOWN STREAM ASSY, EOP,ELECTRONICS | New OEM | Contact Us | |
| A95-060-01 | GaSonics | DOWN STREAM ASSY,EOP HOUSING | New OEM | Contact Us | |
| A95-070-01 | GaSonics | XFMR ASSY, 50/60HZ,HIGH VOLTAGE | New OEM | Contact Us | |
| A95-072-01 | GaSonics | ASSY,STRIPPER,LAMP TRAY | New OEM | Contact Us | |
| A95-097-01 | GaSonics | VACUUM SWITCH ASSY,GECO | New OEM | Contact Us | |
| A95-100-01 | GaSonics | ASSY,AURA,GAS LINE,MFC-3,STD | New OEM | Contact Us | |
| A95-125-02 | GaSonics | BLOWER ASSY,LOADLOCK | CE! | New OEM | Contact Us | |
| A95-143-01 | GaSonics | PANEL ASSY,DISPLAY, AE | New OEM | Contact Us | |
| A95-206-01 | GaSonics | TUNING ROD ASSY,AURA | New OEM | Contact Us | |
| A95-214-01 | GaSonics | HALOGEN-DUAL(BURN-IN) | New OEM | Contact Us | |
| A95-215-01 | GaSonics | ASSY,LLS,LAMP.HGR,HAL-SGL(BN-IN) | New OEM | Contact Us | |
| A96-013-01 | GaSonics | SERIAL COMMUNICATIONS KIT (RS232)REV.A | New OEM | Contact Us | |
| A96-014-02 | GaSonics | ASSY, HARNESS,WAFER HANDLING | New OEM | Contact Us | |
| A96-018-03 | GaSonics | CABLE ASSY, AURA, 50/60HZ HV HOOK-UP | New OEM | Contact Us | |
| A96-018-04 | GaSonics | CBL ASSY,HIGH VOLTAGE HOOK-UP | New OEM | Contact Us | |
| A96-032-01 | GaSonics | HARNESS ASSY,RELAY TUBE W/BRD SLV-LOAD | New OEM | Contact Us | |
| A96-032-02 | GaSonics | HARNESS ASSY,RELAY TUBE W/BRD SLV-UNLOAD | New OEM | Contact Us | |
| A96-058-02 | GaSonics | CABLE ASSY, PIN SENSOR, UP | New OEM | Contact Us | |
| A96-062-01 | GaSonics | CABLE ASSY, AURA PLASMA SENSOR | New OEM | Contact Us | |
| A96-062-02 | GaSonics | ASSY,CABLE,LLE,PLASMA SENSOR | New OEM | Contact Us | |
| A96-062-03 | GaSonics | ASSY,CABLE-A3000,PLASMA SENSOR | New OEM | Contact Us | |
| A96-110-01 | GaSonics | CABLE ASSY, RF ON INDICATOR | New OEM | Contact Us | |
| A96-113-02 | GaSonics | CA a96-113-02 REV B, FP BUSS CABLE 11" | New OEM | Contact Us | |
| A96-187-01 | GaSonics | CBL ASSY,LLE,LIMIT SENSOR,CYLINDER, PINS UP | New OEM | Contact Us | |
| A96-187-03 | GaSonics | CBL ASSY,LLE LIMIT SENSOR,CYLINDER, PLATEN UP | New OEM | Contact Us | |
| A96-187-04 | GaSonics | CBL ASSY,LLE LIMIT SENSOR,CYLINDER, PLATEN | New OEM | Contact Us | |
| A96-190-01 | GaSonics | ASSY,CABLE,LLE,PROCESS CHAMBER GROUND | New OEM | Contact Us | |
| A97-021-05 | GaSonics | KIT, AURA, WAFER SIZE 5 | New OEM | Contact Us | |
| A97-095-01 | GaSonics | KIT,TOOLING REQT-FINE ADJ,P&P HANDLING SYSTEM | New OEM | Contact Us | |
| AA211254 | CMP | SCREW,SHC 1/4-20 X 3-1/2 SST | New OEM | Contact Us | |
| AA211313 | CMP | SCRW,SHC 3/8-16 X 1 SST | New OEM | Contact Us | |
| AA211328 | CMP | SCRW,SHC 3/8-16 X 4-1/4 SST | New OEM | Contact Us | |
| AB210181 | CMP | SCRW,BHC 10-32 X 1/2 SST | New OEM | Contact Us | |
| AC2026A1 | CMP | BEARING,TAPERED ROLLER | New OEM | Contact Us |