Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| A01-400-01 | GaSonics | SHAFT, PEDESTAL | New OEM | Contact Us | |
| A01-407-01 | GaSonics | BLOCK,FILLER,LEFT | New OEM | Contact Us | |
| A01-407-02 | GaSonics | BLOCK,FILLER,RIGHT | New OEM | Contact Us | |
| A01-409-01 | GaSonics | LOCK RING,PLATEN | New OEM | Contact Us | |
| A01-411-01 | GaSonics | COVER,BOTTOM,HEATED PLATEN | New OEM | Contact Us | |
| A01-416-03 | GaSonics | SHOWER HEAD,ETCHER (8 IN) .06/.10 DIA | New OEM | Contact Us | |
| A01-424-01 | GaSonics | SUPPORT,SPRING,THERMOCOUPLE | New OEM | Contact Us | |
| A01-432-01 | GaSonics | STANDOFF,PLATEN SUPPORT(MODIF) | New OEM | Contact Us | |
| A01-434-01 | GaSonics | ROD, TUNING | New OEM | Contact Us | |
| A01-435-01 | GaSonics | HOUSING, TUNING | New OEM | Contact Us | |
| A01-436-01 | GaSonics | LOCKNUT, TUNING | CE! | New OEM | Contact Us | |
| A01-438-01 | GaSonics | HOUSING,SHOWER HEAD,REDUCED PATTERN-ETCHER | New OEM | Contact Us | |
| A01-462-01 | GaSonics | NEST, CENTERING-WAFER(8 IN), CE! | New OEM | Contact Us | |
| A02-048-01 | GaSonics | DUCT,MAGNETRON | New OEM | Contact Us | |
| A02-068-02 | GaSonics | FLAG,ARM OUT,LEFT | New OEM | Contact Us | |
| A02-082-01 | GaSonics | BRACKET, FRONT WAFER SUPPORT | New OEM | Contact Us | |
| A02-083-01 | GaSonics | WAFER FRAME | New OEM | Contact Us | |
| A02-084-01 | GaSonics | BRACKET, REAR WAFER SUPPORT,6 IN | New OEM | Contact Us | |
| A02-084-02 | GaSonics | BRKT,REAR WAFER SUPPORT, 5 IN | New OEM | Contact Us | |
| A02-087-01 | GaSonics | SUPPORT,CHUCK,SEND | New OEM | Contact Us | |
| A02-088-01 | GaSonics | PLATE,LIFT | New OEM | Contact Us | |
| A02-157-01 | GaSonics | CLAMP,MAGNETRON | New OEM | Contact Us | |
| A02-167-02 | GaSonics | BRACKET, RF POWER INDICATOR AND STUD | New OEM | Contact Us | |
| A02-168-01 | GaSonics | COVER DEOWN STREAM | New OEM | Contact Us | |
| A02-201-01 | GaSonics | BOX-H.V. SHIELD | New OEM | Contact Us | |
| A02-312-01 | GaSonics | COVER- H.V. BOX | New OEM | Contact Us | |
| A02-374-01 | GaSonics | BRKT,HEATER | New OEM | Contact Us | |
| A04-001-01 | GaSonics | TUBE,PLASMA | New OEM | Contact Us | |
| A04-005-01 | GaSonics | DISC PLASM,ORIFICE,.375 | New OEM | Contact Us | |
| A04-007-01 | GaSonics | HEATER, PLATEN,200W, 120V | New OEM | Contact Us | |
| A04-010-01 | GaSonics | HEATER,CARTRIDGE,100W | New OEM | Contact Us | |
| A05-020-03 | GaSonics | ADAPTER,TUBE,MODIFICATION,LOAD LOCK | New OEM | Contact Us | |
| A05-038-01 | GaSonics | LAMP PLATE ,DIP BRAZED ASSY | New OEM | Contact Us | |
| A05-044-01 | GaSonics | SUPPORT,SHAFT ASSY | New OEM | Contact Us | |
| A06-001-01 | GaSonics | WINDOW,VENTED | New OEM | Contact Us | |
| A06-002-01 | GaSonics | WINDOW, QUARTZ BOTTOM | New OEM | Contact Us | |
| A06-005-01 | GaSonics | SHOWER HEAD,QUARTZ,5 INCH | New OEM | Contact Us | |
| A06-010-01 | Concept One | TUBE,PLASMA,QUARTZ | New OEM | Contact Us | |
| A06-012-01 | GaSonics | QUARTZ,DIFFUSION DISK | New OEM | Contact Us | |
| A06-012-02 | GaSonics | QUARTZ,DIFFUSION DISK,WTR COOLED CHAMBER | New OEM | Contact Us | |
| A06-014-01 | GaSonics | SHOWER HEAD,QUARTZ,8.5 IN | New OEM | Contact Us | |
| A06-300-01 | GaSonics | QUARTZ WINDOW,9 1/2 IN | New OEM | Contact Us | |
| A06-301-01 | GaSonics | QUARTZ WINDOW,10 IN | New OEM | Contact Us | |
| A09-001-01 | GaSonics | DISC,SAPPHIRE,1 | New OEM | Contact Us | |
| A09-002-01 | GaSonics | FILTER, BANDPASS, OPTICAL | New OEM | Contact Us | |
| A09-003-01 | GaSonics | REFLECTOR | New OEM | Contact Us | |
| A09-004-01 | GaSonics | REFLECTOR,PLATED,LAMP TRAY,8 IN | New OEM | Contact Us | |
| A17-004-01 | GaSonics | BRKT,CAPACITOR | New OEM | Contact Us | |
| A17-015-01 | GaSonics | SHOCK,ABSORBER,(DOOR) | New OEM | Contact Us | |
| A17-017-01 | GaSonics | SPRING, S.S. | New OEM | Contact Us | |
| A17-028-01 | GaSonics | SHOCK,ABSORBER,(ARMS) | New OEM | Contact Us | |
| A17-034-01 | GaSonics | BEARING,LINEAR,BALL-SLIDE | New OEM | Contact Us | |
| A17-051-01 | GaSonics | SPRING, COMP(.63 X .600 OD)SST | New OEM | Contact Us | |
| A17-051-02 | GaSonics | SPRING,COMP.(.60ODX.50LG) | New OEM | Contact Us | |
| A17-052-01 | GaSonics | SPRING, EXT.(075 L X 1/8 OD)SST | New OEM | Contact Us | |
| A17-055-01 | GaSonics | BEARING, BALL, FLANGED, SHIELDED | New OEM | Contact Us | |
| A17-057-01 | GaSonics | BEARING,LINEAR(.250ID) | New OEM | Contact Us | |
| A17-082-01 | GaSonics | SPRING, EXTENSION, 1/8 OD X .020 WIRE X 3/4 | New OEM | Contact Us | |
| A18-012-01 | GaSonics | SCREW, HEX SCH,4-40 X 1/4 L, SST VENTED | New OEM | Contact Us | |
| A18-028-01 | GaSonics | SCRW,FLHD, 6-32 X 1/2 L, SST, VENTED | New OEM | Contact Us | |
| A20-020-02 | GaSonics | CLAMP, BULKHEAD (NW40) | New OEM | Contact Us | |
| A20-034-01 | GaSonics | FTG,ADJUSTABLE | New OEM | Contact Us | |
| A20-040-01 | GaSonics | FTG,ELBOW,ADJUSTABLE,10-32 TO 1/6 TUBE | New OEM | Contact Us | |
| A20-073-01 | GaSonics | FTG,ADAPTER,BNC,FEMALE TO TYPE N MALE | New OEM | Contact Us | |
| A20-097-01 | GaSonics | FTG,COUPLING,1/4 X 3.22LG,QUICK DISCONNE | New OEM | Contact Us | |
| A20-098-01 | GaSonics | STEM,QUICK DISCONNECT,1/4 IN | New OEM | Contact Us | |
| A22-005-01 | GaSonics | SOLENOID,4-WAY DOUBLE MINATURE | New OEM | Contact Us | |
| A22-006-01 | GaSonics | SOLENOID,3-WAY MINIATURE | New OEM | Contact Us | |
| A22-010-03 | GaSonics | VALVE,SOLENOID,3 WAY | New OEM | Contact Us | |
| A22-024-01 | GaSonics | VALVE, VACUUM, NW16 WITH CHEMRAZ 515 O-R | New OEM | Contact Us | |
| A22-025-01 | GaSonics | VALVE, VACUUM, NW40,CHEMRAZ 515 O-RING | New OEM | Contact Us | |
| A23-002-03 | GaSonics | SWITCH, VACUUM, (NEW P/N SV129-31W2A/6010, CE! | New OEM | Contact Us | |
| A23-013-01 | GaSonics | SWITCH,FLOW,FLUID | New OEM | Contact Us | |
| A24-001-02 | GaSonics | GAUGE, VACUUM TUBE,1/4 F VCR | New OEM | Contact Us | |
| A34-065-01 | GaSonics | SOCKET,HALOGEN LAMP | New OEM | Contact Us | |
| A35-002-01 | GaSonics | DIODE,MICROWAVE | New OEM | Contact Us | |
| A35-302-01 | GaSonics | SCR, Dual Power Block Module, 90A 1200-1600V | New OEM | Contact Us | |
| A35-440-01 | GaSonics | I.C.,64K,NONVOLATILE SRAM | New OEM | Contact Us | |
| A35-457-01 | GaSonics | DETECTOR,PHOTODARLINGTON | New OEM | Contact Us | |
| A38-008-01 | GaSonics | CIRCUIT BREAKER,MAGNETIC | New OEM | Contact Us | |
| A38-010-01 | GaSonics | CIRCUIT BREAKER, 20, AMP, 50VDC/250VAC, 1POL | New OEM | Contact Us | |
| A38-014-01 | GaSonics | THERMOSTAT,185 F (WARNING) | New OEM | Contact Us | |
| A38-015-01 | GaSonics | SWITCH,VACUUM | New OEM | Contact Us | |
| A38-044-01 | GaSonics | CIRCUIT BREAKER, 30A 250 VAC, 2 POLE, 50/ | New OEM | Contact Us | |
| A38-045-01 | GaSonics | CONTACTOR,18A,600V,50/60HZ | New OEM | Contact Us | |
| A39-001-01 | GaSonics | LAMP,1000W,120VAC,FLOODLIGHT,TUBULAR ENV | New OEM | Contact Us | |
| A39-002-01 | GaSonics | LAMPHOLDER,TUNGSTEN HALOGEN | New OEM | Contact Us | |
| A39-004-01 | GaSonics | LAMPHOLDER,TUNGSTEN W/ 12 IN LEADS | New OEM | Contact Us | |
| A39-005-01 | GaSonics | LAMP,24V | New OEM | Contact Us | |
| A39-006-01 | Gasonics | LAMP,1000W,225VAC FLOODLIGHT TUBULAR ENV | New OEM | Contact Us | |
| A54-001-01 | GaSonics | DISPLAY, LIQUID CRYSTAL | New OEM | Contact Us | |
| A57-006-01 | GaSonics | CYL,AIR,DBL ACT,9.5 IN STR. | New OEM | Contact Us | |
| A57-008-01 | GaSonics | CYL,AIR,3/4 BOREX 12 IN STROKE | New OEM | Contact Us | |
| A57-010-01 | GaSonics | BRKT,PIVOT | New OEM | Contact Us | |
| A57-011-01 | GaSonics | CYLINDER, DOUBLE ACTING, 1 1/4 IN X 2 IN | New OEM | Contact Us | |
| A57-014-01 | GaSonics | BLOWER,235CFM,115V,50/60HZ | New OEM | Contact Us | |
| A57-021-01 | GaSonics | BRKT,PIVOT | New OEM | Contact Us | |
| A58-001-01 | GaSonics | RELAY,SOLID,STATE,120 VAC,25A | New OEM | Contact Us | |
| A58-001-02 | GaSonics | RELAY,SOLID STATE,MAGNETRON,50A | New OEM | Contact Us | |
| A58-002-01 | GaSonics | RELAY,SPDT,24V,DC,20 AMP | New OEM | Contact Us |