Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| CPS-20245 | Concept One | BATTERY, LITHIUM, 3.6V | New OEM | Contact Us | |
| CPS-20247-01 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 1SLPM | New OEM | Contact Us | |
| CPS-20247-02 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 2SLPM | New OEM | Contact Us | |
| CPS-20247-03 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 5SLPM | New OEM | Contact Us | |
| CPS-20247-04 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 10SLPM | New OEM | Contact Us | |
| CPS-20247-05 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, N2, 20SLPM | New OEM | Contact Us | |
| CPS-20247-06 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, NH3, 5SLPM | New OEM | Contact Us | |
| CPS-20247-07 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, NH3, 200SCCM | New OEM | Contact Us | |
| CPS-20247-08 | Concept One | MFC, BROOKS INSTRUMENT GF125 UHP, HE, 5SLPM | New OEM | Contact Us | |
| CPS-20251 | Concept One | VALVE, 3 WAY | New OEM | Contact Us | |
| CPS-20252 | Concept One | VALVE 4 WAY | New OEM | Contact Us | |
| CPS-20253 | Concept One | MANIFOLD, 4 STATION | New OEM | Contact Us | |
| CPS-20254 | Concept One | MANIFOLD, 5 STATION | New OEM | Contact Us | |
| CPS-20255 | Concept One | MANIFOLD, 10 STATION | New OEM | Contact Us | |
| CPS-20256 | CMP | END EFFECTOR, DUAL, GENMARK ROBOT, PEP | New OEM | Contact Us | |
| CPS-20261 | GaSonics | PCB, CONTROLLER BOARD ASSY | New OEM | Contact Us | |
| CPS-20265 | GaSonics | HARD DRIVE, PEP, PRELOADED, GEN 5 | New OEM | Contact Us | |
| CPS-20267 | CMP | PAD, IC1000, A2, DH2, 22.5”OD, K-GROOVE, STACKED | New OEM | Contact Us | |
| CPS-20268 | CMP | PAD, POLITEX, EMBOSSED, 21” OD | New OEM | Contact Us | |
| CPS-20269 | CMP | FILM, R601, 200MM | New OEM | Contact Us | |
| CPS-20270 | CMP | FILM, DF200, 200MM | New OEM | Contact Us | |
| CPS-20275 | CMP | ASSY, CNTRLR, END POINT, 200MM ORBITAL | New OEM | Contact Us | |
| CPS-20299 | Concept One | CASSETTE, OPEN, 4 INCH | New OEM | Contact Us | |
| CPS-27-00168-01 | Concept One | TEOS LFC MODULE, DIGITAL, C1, DOPED | New OEM | Contact Us | |
| CPS-27-00169-01 | Concept One | TEOS LFC MODULE, DIGITAL, C1, UNDOPED | New OEM | Contact Us | |
| CPS-61-100001 | Concept One | SPINDLE ASSEMBLY, FERROTECH WITH CORE EXCHANGE | New OEM | Contact Us | |
| CPS-TEOS10007 | Concept One | CONTROLLER, FLOW FOR TEOS, PLC | New OEM | Contact Us | |
| CPS-TEOS10008 | Concept One | TEOS CONTROLLER 5ul/Min TEOS, 0.5 TMP, 0.5 TMB | New OEM | Contact Us | |
| CR090315 | CMP | ROLLER,CAM 7/16-20 .750 D .500 W | New OEM | Contact Us | |
| CZ140045 | CMP | PLGR | New OEM | Contact Us | |
| DM050903 | CMP | SPG,CPRSN 1-1/8 L .360 OD .026 WIRE | New OEM | Contact Us | |
| DM051283 | CMP | SPG,CPRSN 1.000 L .480 OD .038 WIRE | New OEM | Contact Us | |
| DM051708 | CMP | SPG,CPRSN 2-1/4 L .660 OD .055 WIRE | New OEM | Contact Us | |
| DU011020 | CMP | SHOCK ABSORBER | New OEM | Contact Us | |
| DU130046 | CMP | DAMPER | New OEM | Contact Us | |
| DU130047 | CMP | SHOCK ABSORBER, | New OEM | Contact Us | |
| EA110095 | CMP | GEARBOX,MORSE STAINLESS | New OEM | Contact Us | |
| ED090167 | CMP | UNION,ROTATING 3/4-16UNF RH THREAD | New OEM | Contact Us | |
| ED190020 | CMP | UNION,ROTARY 5/16-18 ROTOR | New OEM | Contact Us | |
| EH010158 | CMP | BELT,TIMING 1/2 W X 187 PITCH LG | New OEM | Contact Us | |
| EH020125 | CMP | BELT,TIMING 3/8W X 1/5PITCH | New OEM | Contact Us | |
| EH030031 | CMP | BELT,TIMING 72 PITCH LG | New OEM | Contact Us | |
| EJ010505 | CMP | BELT,V GRIPNOTCH 33.5 O/LG 3/8 WIDE | New OEM | Contact Us | |
| EJ010513 | CMP | BELT,V GRIPNOTCH 53.0 O/LG 3/8 WIDE | New OEM | Contact Us | |
| EY030023 | CMP | CHAIN,158 PITCH 15.500 LENGTH | New OEM | Contact Us | |
| EY030025 | CMP | CHAIN,189 PITCH 18.555 LENGTH | New OEM | Contact Us | |
| FA500008 | CMP | O-RING,BUNA-N 70D 3/16ID 1/16T | New OEM | Contact Us | |
| FA500015 | CMP | O-RING,BUNA-N 70D 9/16ID 1/16T | New OEM | Contact Us | |
| FA500022 | CMP | O-RING,BUNA-N 70D 1.00ID 1/16T | New OEM | Contact Us | |
| FA500028 | CMP | O-RING,BUNA-N 70D 1-3/8ID 1/16T | New OEM | Contact Us | |
| FA500030 | CMP | O-RING,BUNA-N 70D 1-5/8ID 1/16T | New OEM | Contact Us | |
| FA500037 | CMP | O-RING, BUNA-N 70D 2-1/2ID 1/16T | New OEM | Contact Us | |
| FA500042 | CMP | O-RING,BUNA-N 70D 3-1/4ID 1/16T | New OEM | Contact Us | |
| FA500140 | CMP | O-RING,BUNA-N 70D 2-1/4ID 3/32T | New OEM | Contact Us | |
| FA500170 | CMP | O-RING,BUNA-N 70D 7-3/4 ID 3/32 T | New OEM | Contact Us | |
| FA500172 | CMP | O-RING,BUNA-N 70D 8-1/4 ID 3/32 T | New OEM | Contact Us | |
| FA500216 | CMP | O-RING,BUNA-N 70D 1-1/8 ID 1/8 T | New OEM | Contact Us | |
| FA500226 | CMP | O-RING, BUNA-N 70D 2.000 ID 1/8 T | New OEM | Contact Us | |
| FA500231 | CMP | O-RING,BUNA-N 70D 2-5/8 ID 1/8 T | New OEM | Contact Us | |
| FA500240 | CMP | O-RING,BUNA-N 70D 3-3/4 ID 1/8 T | New OEM | Contact Us | |
| FA500250 | CMP | O-RING,BUNA-N 70D 5.0ID 1/8T | New OEM | Contact Us | |
| FA500252 | CMP | O-RING,BUNA-N 70D 5-1/4 ID 1/8 T | New OEM | Contact Us | |
| FB100011 | CMP | O-RING,VITON 75D 5/16ID 1/16 T | New OEM | Contact Us | |
| FG080159 | CMP | SEAL,STUD | New OEM | Contact Us | |
| FJ032589 | CMP | SEAL,2.375 SHAFT 3.005 OD .375 W | New OEM | Contact Us | |
| FJ033782 | CMP | SEAL,5.000 SHAFT 6.007 OD .500 W | New OEM | Contact Us | |
| FM010012 | CMP | GASKET,BUNA-N | New OEM | Contact Us | |
| G64-0000008 | CMP | PHOTO SENSOR | New OEM | Contact Us | |
| HA010079 | CMP | NOZZLE,SPRAY 1/8 NPT 90 DEG PVC | New OEM | Contact Us | |
| HC510185 | CMP | GAUGE,0-30 HG 0-15PSI 2-1/2 CMPD | New OEM | Contact Us | |
| HC630001 | CMP | GAUGE,0-60PSI 1/4NPT 2.0 DIA SST | New OEM | Contact Us | |
| HD170024 | CMP | REGULATOR,PRESS 5-50PSI 1/4FPT PVDF | New OEM | Contact Us | |
| HD460125 | CMP | REGULATOR, PRESS 5-50 PSI PVC | New OEM | Contact Us | |
| HE130020 | CMP | VALVE,2WAY 24VDC N/C 3/8NPT | New OEM | Contact Us | |
| HE170153 | CMP | VALVE,AIR N/C 1 PVC | New OEM | Contact Us | |
| HE170163 | CMP | VALVE,AIR N/C 1" POLYPRO | New OEM | Contact Us | |
| HE170171 | CMP | VALVE,AIR N/C 1/2 PVDF | New OEM | Contact Us | |
| HE170211 | CMP | VALVE, AIR N/O 1/2 PVDF | New OEM | Contact Us | |
| HE170212 | CMP | VALVE, AIR N/O 3/4 PVDF | New OEM | Contact Us | |
| HE430070 | CMP | VALVE,SOL 24VDC NEUM M | New OEM | Contact Us | |
| HE430090 | CMP | VALVE,3WAY 24VDC 1.5W | New OEM | Contact Us | |
| HE540145 | CMP | VALVE,SOL 24VDC W/PIN ARM | New OEM | Contact Us | |
| HE640013 | CMP | VALVE,FLOW CONTROL 10-32 PORTS | New OEM | Contact Us | |
| HE640130 | CMP | Air Operated, 3/8” NPT ports, Normally Closed, with Bracket | New OEM | Contact Us | |
| HE820030 | CMP | VALVE,2WAY 1/2FNPT PFA | New OEM | Contact Us | |
| HE820045 | CMP | VALVE,2WAY 2MALE 1/2PORT AIR OP | New OEM | Contact Us | |
| HE940053 | CMP | VALVE,SOL 2WAY NC 24VDC W/VRS 80PSI | New OEM | Contact Us | |
| HF260080 | CMP | CYLINDER, AIR WAFER TRANSPORT | New OEM | Contact Us | |
| HF280380 | CMP | CYLINDER,AIR 1-1/8B 1-1/4 + 1-1/2ST | New OEM | Contact Us | |
| HF970045 | CMP | CYLINDER,RODLESS | New OEM | Contact Us | |
| HF970045/RW | CMP | REFURBISHED CYLINDER, ROBLESS | New OEM | Contact Us | |
| HG090018 | CMP | FILTER,ASSY (W/HG090019 40U ELMNT) | New OEM | Contact Us | |
| HG140030 | CMP | FILTER,ASSY (W/HG140029 140U ELMNT | New OEM | Contact Us | |
| HG640045 | CMP | FILTER,ASSY (3910-103771 30U ELMNT) | New OEM | Contact Us | |
| HG960046 | CMP | VACUUM GENERATOR | New OEM | Contact Us | |
| HJ640009 | CMP | FILTER,REG ASSY (W/HG090014 5U ELMT | New OEM | Contact Us | |
| HL170059 | CMP | GAUGE,GUARD 0-60 PSI PVC | New OEM | Contact Us | |
| HL170092 | CMP | GAUGE,GUARD 0-60PSI PVDF | New OEM | Contact Us | |
| HP100072 | CMP | PUMPHEAD,PLATEN FLUID | New OEM | Contact Us | |
| HP160005 | CMP | PUMP,W/MTR 115VAC 50/60HZ | New OEM | Contact Us |