Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 18-182211-00 | CMP | BLADDER,1011,T1,200MM,TAPERED TAB | New OEM | Contact Us | |
| 18-2663 | GaSonics | SCREW, HEX SCH CAP, 2-56UNC X .38 L,SST | New OEM | Contact Us | |
| 18-2822 | GaSonics | SCREW, HEX SCHD,5/16-18 X 1/2, SST | New OEM | Contact Us | |
| 18-2877 | GaSonics | SCREW,CAP,BUTTON HEAD,M4X10L,SST | New OEM | Contact Us | |
| 18-308067-00 | CMP | PIN,LIGHT,THREADED,PELLETHANE 2103-55,XC | New OEM | Contact Us | |
| 18-4054 | GaSonics | SCREW, HEX SCH,1/4-20 X 1 1/2 L,SST | New OEM | Contact Us | |
| 19-00120-01 | Concept One | CONDUIT,FLEX,6LG | New OEM | Contact Us | |
| 19-00120-02 | Concept One | CONDUIT,FLEX,5LG | New OEM | Contact Us | |
| 19-00155-01 | Concept One | HEATER,BB 150MM | New OEM | Contact Us | |
| 19-185289-00 | CMP | SEAL,WAFER HEAD,MOD | New OEM | Contact Us | |
| 19-4008 | GaSonics | NUT,1/4-20,RAIL MOUNTING | New OEM | Contact Us | |
| 19-4010 | GaSonics | WASHER,FLAT,5/16 ID X 3/4 OD X .08 THK,S | New OEM | Contact Us | |
| 20-00135-00 | Concept One | BELT, 130XL037 ROT | New OEM | Contact Us | |
| 2000-700277 | CMP | GAUGE,PRESSURE 0-30PSI | New OEM | Contact Us | |
| 20-1425 | GaSonics | GASKET, VCR, 1/2 IN,UNPLATED SS,W/RETAI | New OEM | Contact Us | |
| 20-316917-00 | GaSonics | BELT,TIMING,13.6,.25IN,170,TEETH,ROTATE | New OEM | Contact Us | |
| 20-8032 | GaSonics | ORIFICE TOP .9500DX .3121DX .04 THK | New OEM | Contact Us | |
| 2200-109787 | CMP | VALVE,FLOW CONTROL MTR HOIST | New OEM | Contact Us | |
| 22-0312-03 | GaSonics | VALVE, SOLENOID 3 WAY WITH O-RING | New OEM | Contact Us | |
| 2210-727037 | CMP | MANF,DI | New OEM | Contact Us | |
| 22-117964-00 | Concept One | MFC,5SLM,N2,AERA FC7800CU,CEDG | New OEM | Contact Us | |
| 22-117995-00 | Concept One | MFC,20SLM,N2,AERA FC7710CU,CED | New OEM | Contact Us | |
| 22-179215-00 | CMP | O-RING,2-016,BLACK VITON-50 DURO | New OEM | Contact Us | |
| 22-280133-00 | CMP | FTG,PIPE,PLUG,1/2NPT-M,PFA | New OEM | Contact Us | |
| 22-296240-00 | CMP | GAUGE,PRESS,2.5IN,0-1500PSI,1/4 MNPT,BAK | New OEM | Contact Us | |
| 22-324837-00 | GaSonics | O-RING,2-226,KALREZ 8085 | New OEM | Contact Us | |
| 22-380222-00 | CMP | RING,RETAIN,INT,1.9,304 SST,TUBELIGHT A | New OEM | Contact Us | |
| 22-399710-00 | CMP | RING,RETAIN,EXT,0.062 IN,E-STYLE,SST,PLA | New OEM | Contact Us | |
| 2250-700456 | CMP | PLUG,2C | New OEM | Contact Us | |
| 2315-110303 | CMP | ADPTR,DRIVE SHAFT EQUIP ACTIVE WAND MV | New OEM | Contact Us | |
| 27-00043-00 | Concept One | PWR SPLY,24VDC/1A | New OEM | Contact Us | |
| 27-00074-00 | Concept One | PCB, FAB HEATER FILTER | New OEM | Contact Us | |
| 27-00149-01 | MANOMETER, DIFFERENTIAL, 1 TORR | New OEM | Contact Us | ||
| 27-00198-00 | Concept One | CNTRLR,SIGMA,6 | New OEM | Contact Us | |
| 27-307952-00 | Concept One | PWR SPLY,24V,6.5A,150W | New OEM | Contact Us | |
| 27-381438-00 | CMP | ROBOT,GB4SB 7,2L14.5,MV200 | New OEM | Contact Us | |
| 2805-737738 | CMP | ASSY,PAD BACKING RIVETED | New OEM | Contact Us | |
| 2807-112464 | CMP | ASSY,MP1 W/3.0R-858 676 | New OEM | Contact Us | |
| 2810-109818 | CMP | CBL ASSY,SYSCON/HUNTAIR ALARM INTERFACE | New OEM | Contact Us | |
| 30-00003-00 | Concept One | INDUCTOR,2.2UH,435MA | New OEM | Contact Us | |
| 33-00002-01 | Concept One | MOTOR, 115V 60HZ MAG BRK(SPIN) | New OEM | Contact Us | |
| 33-183141-00 | CMP | MTR,STEPPING,24VDC,ROBOT,WRIST | New OEM | Contact Us | |
| 34-028026-30 | Concept One | CB,30A,1P,RNG LUG | New OEM | Contact Us | |
| 34-179382-00 | CMP | SNSR,THRU BEAM,LT-ON,NPN,FRONT SENSING | New OEM | Contact Us | |
| 34-316418-00 | GaSonics | OEM SPARE,PASSIVE BACKPLANE,L3510,ARISTA | New OEM | Contact Us | |
| 35-2516 | GaSonics | PHOTODIODE ASSY,AX7610 | New OEM | Contact Us | |
| 38-2688 | GaSonics | LENS, ROUND EXTENDED, GREEN | New OEM | Contact Us | |
| 38-2691 | GaSonics | ILLUM., PUSHBUTTON OPER, EXT HEAD W/FULL | New OEM | Contact Us | |
| 38-405915-00 | GaSonics | CABLE,POWER,18AWG 3SJT,4.57M,10A,250V,IE | New OEM | Contact Us | |
| 3910-103771 | CMP | FILTER,RPLMNT 30U(FOR ASSY HG640045 | New OEM | Contact Us | |
| 39-183909-00 | CMP | CONN,AC PWR MODULE GFIC | New OEM | Contact Us | |
| 57-2031 | GaSonics | AIR CYLINDER,SPECIAL, DOUBLE ACTING,1IN | New OEM | Contact Us | |
| 57-2036 | GaSonics | AIR CYLINDER, 40MM BORE, 12MM STROKE,CLT | New OEM | Contact Us | |
| 60-00001-00 | Concept One | VALVE,THROT,VAC | New OEM | Contact Us | |
| 60-1013 | GaSonics | XFMR,PWR,-115,24V@1.25A | New OEM | Contact Us | |
| 60-10317-00 | Concept One | VALVE,THROT,HEATED | New OEM | Contact Us | |
| 60-178323-00 | CMP | FILTER,REGULATOR | New OEM | Contact Us | |
| 60-311256-00 | CMP | FTG,BARB,PLUG,3/32ID TUBE X 10-32 M | New OEM | Contact Us | |
| 61-182446-00 | CMP | CNTRLR,END POINT,200MM ORBITAL | New OEM | Contact Us | |
| 61-377967-00 | GaSonics | OEM SPARE,CPU BOARD W/ MEMORY,SLIDER,L35 | New OEM | Contact Us | |
| 71209-02 | GaSonics | SOCKET RELAY 11 PIN 3 POLE | New OEM | Contact Us | |
| 71252-02 | GaSonics | FILTER,LINE-5A,5KV7 | New OEM | Contact Us | |
| 71-429075-00 | CMP | FIXTURE,GRIP FORCE,GENMARK ROBOT,MV200 | New OEM | Contact Us | |
| 71964-11 | GaSonics | CLAMP, HOSE GRIP RANGE 2 9/16 TO 3 1/2 I | New OEM | Contact Us | |
| 72-00051-00 | Concept One | WRENCH,TORQUE-ALLEN 15 IN-LB | New OEM | Contact Us | |
| 72587-37 | TUBING MAYON 1-1/2 IN IDX.25WL | New OEM | Contact Us | ||
| 73018-99 | GaSonics | O-RING KIT FOR 73018-05 | New OEM | Contact Us | |
| 73-2331 | GaSonics | CRIMPING TOOL WITH LOCATOR | New OEM | Contact Us | |
| 73679-01 | GaSonics | CONN,BULKHEAD-BNC,FEM/FEM | New OEM | Contact Us | |
| 73749-01 | GaSonics | CLAMP,SWITCH-HALL EFFECT | New OEM | Contact Us | |
| 73962-01 | GaSonics | CONN. DIN RAIL, 50 PIN FLAT CABLE-DISCRE | New OEM | Contact Us | |
| 73965-01 | GaSonics | I/O, 16-CHANNEL MOUNTING RACK | New OEM | Contact Us | |
| 778-162117-001 | GaSonics | CNTRLR,TEMP,MNTR,0.02A,24VDC,MULTI CH,OR | New OEM | Contact Us | |
| 78-0064-03 | GaSonics | O-RING, 2-468, 19.5 ID X .25W, DURO 70 | New OEM | Contact Us | |
| 78-2549 | GaSonics | STRIP,RF SHIELDING | New OEM | Contact Us | |
| 78-2682 | GaSonics | O-RING, 9-SPL, .960 ID X .139 W, CHEMRAZ | New OEM | Contact Us | |
| 78-2748 | GaSonics | RING, CENTERING, NW63, VITON, (2-336) | New OEM | Contact Us | |
| 931002-9 | CMP | SCRW,FHC,8-32UNCX3/8,A2-SST | New OEM | Contact Us | |
| 931006-121 | CMP | SCRW,SHC,10-32UNFX3/4,STL | New OEM | Contact Us | |
| 931012-7 | CMP | SCRW,HEX HD,3/8-24UNFX4,STL-GRD5 ZNC | New OEM | Contact Us | |
| 931040-22 | CMP | GROMMET,1/4IDX5/8ODX3/16T,BUN | New OEM | Contact Us | |
| 931040-8 | CMP | GROMMET,3/8IDX7/8ODX3/8T,BUN | New OEM | Contact Us | |
| 931118-6 | CMP | PIN,DOWEL,1/16X1/8,303-SST | New OEM | Contact Us | |
| 931166-3 | CMP | WSHR,FLAT,USS,#10,SST | New OEM | Contact Us | |
| 931180-2 | CMP | CAP,FLARE,3/8,PFA | New OEM | Contact Us | |
| 931192-1 | CMP | RING,RETAINING,EXT,DIA .188,COPPER | New OEM | Contact Us | |
| 931218-2 | CMP | FTG,BLKHD UNION,PUSH-CONN,3/8OD,ACETA | New OEM | Contact Us | |
| 931351-1 | CMP | FTG,FEM UNION,1-TCH,1/4TX1/8FNPT | New OEM | Contact Us | |
| 931429-2 | CMP | VALVE,MINI CHECK,1/4T,PTFE | New OEM | Contact Us | |
| 931506-1 | CMP | SCRW,SHC,INT SEAL,4-40UNCX1/2,SST | New OEM | Contact Us | |
| 931508-1 | CMP | SEAL,ROD&PISTON,.812IDX.937ODX.062,PTFE | New OEM | Contact Us | |
| 94-1128 | GaSonics | MOTOR ASSY (THETA AXIS) | New OEM | Contact Us | |
| 94-2809 | GaSonics | PCA, SEND INDEXER, 38A | New OEM | Contact Us | |
| 94-3244 | GaSonics | HARD DRIVE,PRELOADED, 7585-P01 | New OEM | Contact Us | |
| 94-3373 | GaSonics | VIDEO CARD, 16 BIT SVGA, FLAT PANEL DISP | New OEM | Contact Us | |
| 95-3142 | GaSonics | PREFIRE ASSY | New OEM | Contact Us | |
| 96-0121 | GaSonics | ASSY, CABLE, A3000,SEC II BULKHEAD | New OEM | Contact Us | |
| 96-2653 | GaSonics | CABLE ASSY,RS 232 PORT 5 - PRESSURE CONT | New OEM | Contact Us | |
| 97-2358 | GaSonics | KIT, HARD DRIVE,SPARES USE, WITH SET-UP | New OEM | Contact Us | |
| 97-2828 | GaSonics | KIT, RETROFIT,MOTHERBOARD REPLACEMENT, | New OEM | Contact Us |