Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 99-032026-00 | Concept One | U.H.V.ALUM FOIL 18 X 500FT | New OEM | Contact Us | |
| A01-168-01 | GaSonics | GUIDE,WAFER,REAR LEFT ARM | New OEM | Contact Us | |
| A01-169-01 | GaSonics | GUIDE,WAFER,FRONT ARM | New OEM | Contact Us | |
| A22-017-01 | GaSonics | VALVE,SOLENOID,3-WAY | New OEM | Contact Us | |
| A57-019-01 | GaSonics | CYLINDER,AIR | New OEM | Contact Us | |
| A78-040-01 | GaSonics | O-RING, 9-206, .484 ID X .139 W, CHEMRAZ | New OEM | Contact Us | |
| A78-041-01 | GaSonics | O-RING, 9-108, .237 ID X .103 W, CHEMRA | New OEM | Contact Us | |
| A95-090-01 | GaSonics | DOOR NEST ASSY, ETCHER | New OEM | Contact Us | |
| AC2106A1 | CMP | BELT,TIMING,14MM PITCH | New OEM | Contact Us | |
| AC2119A1 | CMP | NUT,LOCK,SHAFT,M35 | New OEM | Contact Us | |
| AC2475A1 | CMP | UNION,ROTATING,DUAL FLOW,1NPT | New OEM | Contact Us | |
| AC2785A1 | CMP | REGULATOR,PRECISION,.4-10PSI | New OEM | Contact Us | |
| AC3159A1 | CMP | CONNECTOR,PLUG,11-4PIN | New OEM | Contact Us | |
| AC3677 | CMP | SCRW,SHOULDER,3/8X3/8X5/16-18 | New OEM | Contact Us | |
| AD2319C1 | CMP | PADDLE,200MM WAFER,UNLOAD | New OEM | Contact Us | |
| AD2333A1 | CMP | SHIM,FLAT,.25THK | New OEM | Contact Us | |
| AD3201 | CMP | GUIDE,UPPER UNLOAD-200MM | New OEM | Contact Us | |
| AD3202 | CMP | PLATE,CYLINDER MOUNT-INDEX TBL | New OEM | Contact Us | |
| BF520011 | CMP | WSHR,LOCK SPLIT 5/16 SST | New OEM | Contact Us | |
| CESCMP51152A | CMP | KIT,ROBOT INSTALLATION,MV200 | New OEM | Contact Us | |
| CG020001 | CMP | BEARING,CUP/CONE | New OEM | Contact Us | |
| EM130022/RW | VERTICAL AUTUATOR-APP1000 | New OEM | Contact Us | ||
| HD080007 | CMP | REGULATOR,PRESSURE 0-30PSI W/KNOB | New OEM | Contact Us | |
| JE360337 | CMP | FTG,CONN MALE 1/8NPT X 1/4T SST | New OEM | Contact Us | |
| JH126010 | CMP | FTG,CONN ML 1/4SKTX1/8MT GRYPVC | New OEM | Contact Us | |
| R02-289533-00 | GaSonics | RFRB, ASSY,CLTC MODULE,TYPE K,200MM | New OEM | Contact Us | |
| R22-400471-00 | CMP | RFRB, ACTUATOR,SPARE ROTATION/GRIPPER AS | New OEM | Contact Us | |
| R27-274789-00 | GaSonics | RFRB, COMPUTER,IRIDIA CLUSTER AND PCM CO | New OEM | Contact Us | |
| R94-3255 | GaSonics | R94-3255 | New OEM | Contact Us | |
| R978607 | CMP | RFRB, ROBOT,R1 SNSR ASSY COMPATIBLE 200M | New OEM | Contact Us | |
| 23978959 | DNS SSEW | VACUUMLESS ARM 12 INCH | New OEM | Contact Us | |
| 23967645 | DNS SSEW | WAFER SUPPORT | New OEM | Contact Us | |
| 2J4F4047 | DNS SSEW | PIN GUIDE | New OEM | Contact Us | |
| 2J3F7762 | DNS SSEW | IHU WAFER GUIDES R*1 | New OEM | Contact Us | |
| 2J3F7763 | DNS SSEW | IHU WAFER GUIDE *1 | New OEM | Contact Us | |
| 2F4F1561 | DNS SSEW | PIN(反轉)UNIT（黑色） | New OEM | Contact Us | |
| 2AEF0452 | DNS SSEW | CHUCK(反轉UNIT) | New OEM | Contact Us | |
| 23960449 | DNS SSEW | PORTABLE SERVICE PANEL | New OEM | Contact Us | |
| 23974472 | DNS SSEW | SHOCK ABSORBER | New OEM | Contact Us | |
| 23969965 | DNS SSEW | MASS FLOW CONTROLLER (HORIBA) | New OEM | Contact Us | |
| 23971527 | DNS SSEW | MHU NOTCH PLATE | New OEM | Contact Us | |
| 2AEF004901 | DNS SSEW | SSR PIN(可動PIN) | New OEM | Contact Us | |
| 2AEF0051 | DNS SSEW | SSR PIN2（PEEK PIN） | New OEM | Contact Us | |
| 2AEF0050 | DNS SSEW | SSR PIN | New OEM | Contact Us | |
| 23958498 | DNS SSEW | REVERSE CYLINDER | New OEM | Contact Us | |
| 23986538 | DNS SSEW | SLIDE NOZZLE CYLINDER | New OEM | Contact Us | |
| 23957787 | DNS SSEW | SC-1 FILTER | New OEM | Contact Us | |
| 23959469 | DNS SSEW | SPIN MOTOR | New OEM | Contact Us | |
| 0200-35018 | AMAT | EXHAUST INSERT 'APPLIED' 'GRANDWAY' PN:0 | As Is | Contact Us | |
| 2-J4-80098 | SCREEN | PTFE GASKET M5 | As Is | Contact Us | |
| 0242-36354 | AMAT | FLAPPER DISK APPLIED PN:0242-36354 FOR A | As Is | Contact Us | |
| 908078-015 | SVG | HEATER JACKET LOWER ELBO FOR SVG FURNACE | As Is | Contact Us | |
| 908078-012 | SVG | JACKET HEATER VACUUM LIN FOR SVG FURNACE | As Is | Contact Us | |
| 908078-022 | SVG | HEATER JACKET FOR SVG FURNACE | As Is | Contact Us | |
| 9700-2990-01 | MAXON MOTOR | POD LATCH ASSEMBLY ASYST PN:9700-2990-01 | As Is | Contact Us | |
| 9700-3149-01 | ZZ-OEM | HOME & LIMIT SENSOR ASSY V-MOVE LEFT RIG | As Is | Contact Us | |
| 6200-3021-01 | BANNER ENGINEERING CORP | LED IR EMITTER NARROW BEAM ASYST PN:6200 | As Is | Contact Us | |
| 3200-1023-01 | WILCO WIRE | PCB ASSY,MINI OPTICAL SWITCH GRIPPER OP/ | As Is | Contact Us | |
| 3201-0600-02 | ASYST | PCB ASSY DUAL OPTICAL SW W/963N51 ASYST | As Is | Contact Us | |
| 3200-1000-09 | ASYST | PCB ASSY ARM CONTROL ASYST PN:3200-1000- | As Is | Contact Us | |
| 4001-1979-02 | VEXTA | MODIFIED MOTOR LEADSCREW & GEARBOX ASYST | As Is | Contact Us | |
| 804-7008-49 | LAM | VCE SCREW SBHS M4X8MM SST VENTED FOR LAM | As Is | Contact Us | |
| 728-099501-001 | LAM | SCR SHLDR SST M10X16mm LAM 9100 | As Is | Contact Us | |
| 908078-017 | SVG | HEATER UPPER ELBOW FOR SVG FURNACE | As Is | Contact Us | |
| 15-00311-00 | NOVELLUS | CAP HEATER FEEDTHRU NOVELLUS CVD | As Is | Contact Us | |
| 31-00114-00 | NOVELLUS | RELAY SSR 90A HEATERBLOCK NOVELLUS CVD | As Is | Contact Us | |
| 34-10095-00 | NOVELLUS | RELAY SSR 240V 25A NOVELLUS CVD | As Is | Contact Us | |
| 802-4506-43 | BROOKS AUTOMATON | SCREW SBHS M2.5*.45*6mm lg SST EP LAM 94 | As Is | Contact Us | |
| 803-5005-03 | BROOKS AUTOMATON | SCREW SHCS M3*.50*5mm lg EP-CRK LAM 9400 | As Is | Contact Us | |
| 803-5016-03 | BROOKS AUTOMATON | SCREW SHCS M3*.50*16mm lg SST EP LAM 940 | As Is | Contact Us | |
| 808-1218-00 | BROOKS AUTOMATON | SCREW SHCS M8*1.25*18mm lg SST LAM 9400 | As Is | Contact Us | |
| 4001-7958-01 | ASYST | ROD,GRIPPER RIGHT,ASYST PN:4001-7958-01, | As Is | Contact Us | |
| 4001-7958-02 | ASYST | ROD,GRIPPER LEFT,ASYST PN:4001-7958-02, | As Is | Contact Us | |
| 9600-0696-01 | ASYST | LEAD-SCREW,GRIPPER DRIVER,ASYST PN:9600- | As Is | Contact Us | |
| 7500-0394-04 | ASYST | PIN,SS,.099*.38EA,ASYST PN:7500-0394-04 | As Is | Contact Us | |
| 4001-8109-01 | ASYST | MOUNT,GRIPPER,ASYST PN:4001-8109-01, FOR | As Is | Contact Us | |
| 4001-8025-01 | ASYST | SHAFT,GRIPPER,ASYST PN:4001-8025-01, FOR | As Is | Contact Us | |
| 7500-0370-01 | ASYST | BALL BEARING,ASYST PN:7500-0370-01, FOR | As Is | Contact Us | |
| 9600-0622-01 | ASYST | PULLEY,GRIPPER,ASYST PN:9600-0622-01,FOR | As Is | Contact Us | |
| PL1288 | SCH ELECTRONIC | WAFER GUIDE 200MM,DFA WAF,HISSAN PN:2J38 | As Is | Contact Us | |
| 15-10379-00 | ZZ-OEM | HIGH PURITY SLIT-VALVE | As Is | Contact Us | |
| 9700-3265-01 | ASYST | INDEXER SEATERHOME SENSOR | As Is | Contact Us | |
| 15-00341-00 | NOVELLUS | SCREW, STRAP, NICKEL | As Is | Contact Us | |
| VT-P8258602 | VAT | MECHANISM,(IN AMAT VALVE,P/N 3870-03069) | As Is | Contact Us | |
| 001-7550-03 | BROOKS AUTOMATON | SCREW,FIX SPRING IN PLATFORM | As Is | Contact Us | |
| 803-5012-09 | BROOKS AUTOMATON | SCREW,FIX INNER SPRING IN PLATFORM | As Is | Contact Us | |
| 849-0011-07 | BROOKS AUTOMATON | SCREW, FIX SHOULDER AXIS IN PLATFORM | As Is | Contact Us | |
| 0090-20303 | AMAT | SW ASSY WTR FLOW 1/4 NPT BRS 0.5 GPM | As Is | Contact Us | |
| 15-149996-00 | NOVELLUS | PLATE, GATE, L-TYPE GB, 46X 236, | As Is | Contact Us | |
| 15-107698-00 | NOVELLUS | CAP, CERAMIC , FEEDTHRU , NOVELLUS CVD | As Is | Contact Us | |
| 20-00209-00 | NOVELLUS | SCRW,SKT,HEX,CRS,BLK FOR NOVELLUS CVD | As Is | Contact Us | |
| 3MFV110AQ002 | HORIBA STEC | MFC,FOR HTF SIH2CL2 400 SCCM,TPC | As Is | Contact Us | |
| 9700-4091-01 | ASYST | I/O ASSY,MINI, GRIPPER CONTROL PCB FOR | As Is | Contact Us | |
| FC-7800CD-4V-C3F8-500SCCM | AERA JAPAN | MFC,AE,C3F8 500 SCCM, 4V | As Is | Contact Us | |
| 9700-2140-01 | ASYST | CONTROL SWITCH PANEL ASSY ASYST PN:9700- | As Is | Contact Us |