Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 956212 | CMP | FOLLOWER,CAM | New OEM | Contact Us | |
| 956476 | CMP | ARM,GRIPPER,RIGHT,200MM | New OEM | Contact Us | |
| 956925 | CMP | FINGER,GRIPPER,200MM | New OEM | Contact Us | |
| 956926 | CMP | FINGER,GRIPPER,200MM | New OEM | Contact Us | |
| 960276 | CMP | ROLLER,ONE PART | New OEM | Contact Us | |
| 960405 | CMP | SPRING,COMPRESSION,LOAD CUP | New OEM | Contact Us | |
| 960956 | CMP | VALVE,PNEUMATIC,1 IN,NW25 FLANGE | New OEM | Contact Us | |
| 961015 | CMP | KIT,MOTOMAN,T-AXIS CABLE | New OEM | Contact Us | |
| 961242 | CMP | PADDLE,DRY,CERAMIC COATED | New OEM | Contact Us | |
| 962750 | CMP | GEARBOX,5:1 PLANETARY NEMA23 3/8IN | New OEM | Contact Us | |
| 964253 | CMP | MANIFOLD,4 VALVES 1/4FNPT PORTS | New OEM | Contact Us | |
| 964995 | CMP | TUBING,PUR 5/32 ORANGE TRANSLUCENT | New OEM | Contact Us | |
| 964997 | CMP | TUBING,PUR 5/32 CLEAR | New OEM | Contact Us | |
| 966146 | CMP | MOTOR,SERVO,W/PULLEY | New OEM | Contact Us | |
| 966651 | CMP | CABLE,SENSOR,SINGLE,OPEN | New OEM | Contact Us | |
| 966652 | CMP | CABLE,SENSOR,DOUBLE,COMB. | New OEM | Contact Us | |
| 966715 | CMP | SENSOR,ASSY,WAFER MISSING | New OEM | Contact Us | |
| 967879 | CMP | RING,CLAMP UPPER #4 WFR MODL MACH PLSTC | New OEM | Contact Us | |
| 967903 | CMP | RING,CLAMP UPPER #3 WFR MODL MACH PLSTC | New OEM | Contact Us | |
| 968882 | CMP | ASSY,PAD BACKER RIVITED 15 HOLES 6/776 | New OEM | Contact Us | |
| 969103 | CMP | CABLE,FIBER OPTIC LIGHT SOURCE SET | New OEM | Contact Us | |
| 969975 | CMP | COUPLING,STAINLESS | New OEM | Contact Us | |
| 969991 | CMP | O-RING,G85 | New OEM | Contact Us | |
| 972483 | CMP | BAND,ROLLER 86 DUROMETER | New OEM | Contact Us | |
| 972727 | CMP | BRUSH,MICROCLEAN PVA | New OEM | Contact Us | |
| 972730 | CMP | O-RING,SQUARE CUT 2.02OD SHAFT 1.623OD | New OEM | Contact Us | |
| 973162 | CMP | PIK,COUPLING LWR DRIVE LINE POLISH HEAD | New OEM | Contact Us | |
| 973425 | CMP | CYLINDER,63MM BORE SINGLE ROD DBL ACTING | New OEM | Contact Us | |
| 975461 | CMP | SWITCH,30V 145PSI NPN OUT PRESS DIGITAL | New OEM | Contact Us | |
| 977406 | CMP | RETAINER,SENSOR EDGE GRIP WAND | New OEM | Contact Us | |
| 978591 | CMP | FTG,CAP,1/4FNPT,316SST | New OEM | Contact Us | |
| 978871 | CMP | ASSY,SHAFT WAFER SENSOR EGEE 200MM | New OEM | Contact Us | |
| 0100-700361 | CMP | MODULE,OUT PLC | New OEM | Contact Us | |
| 01-0435 | GaSonics | PLATE,SPACER,CLAMP,2 IN OD TUBE | New OEM | Contact Us | |
| 0125-106305 | CMP | MODULE,I/O DIGITAL INPUT 10-32V QUAD | New OEM | Contact Us | |
| 01-2854 | GaSonics | FLANGE, PISTON MOUNTING | New OEM | Contact Us | |
| 01-2855 | GaSonics | NUT, DOOR ADJUSTING | New OEM | Contact Us | |
| 01-4328 | GaSonics | PLATE, SUPPORT, CLTC COMPATIBLE | New OEM | Contact Us | |
| 0150-111674 | CMP | DRIVER,STEPPER 5PH 24VDC W/O GEARHEAD | New OEM | Contact Us | |
| 0150-717406 | CMP | PWR SUPPLY,QWS 2412 | New OEM | Contact Us | |
| 0150-738515 | CMP | GENERATOR,VACUUM W/NPT THREADS | New OEM | Contact Us | |
| 02-00081-00 | Concept One | ASSY,HTR RETURN ENC. | New OEM | Contact Us | |
| 02-00081-01 | Concept One | ASSY,HTR RETURN ENC. | New OEM | Contact Us | |
| 02-00081-02 | Concept One | ASSY,HTR RETURN ENC | New OEM | Contact Us | |
| 02-00081-03 | Concept One | ASSY,HTR FT ENCLOSURE | New OEM | Contact Us | |
| 02-182182-00 | CMP | ASSY,PADBACKER RIVET 16 HOLE CENTER PLUG | New OEM | Contact Us | |
| 0225-771163 | CMP | LIGHT TOWER,AC/DC 24V 11W | New OEM | Contact Us | |
| 02-283482-00 | GaSonics | ASSY,HARD DISK WITH OS/2,PEP | New OEM | Contact Us | |
| 02-3695 | GaSonics | COVER, RF, ENCLOSURE | New OEM | Contact Us | |
| 02-386926-00 | CMP | ASSY,PAD BACKING RIVETED,25 HOLES,776 PO | New OEM | Contact Us | |
| 03-00018-00 | Concept One | ASSY,PWR BOARD | New OEM | Contact Us | |
| 03-00028-00 | Concept One | CABLE ASSY,CA29 | New OEM | Contact Us | |
| 03-00238-00 | Concept One | CBL ASSY,SW FLOW,PROTEUS CA8 | New OEM | Contact Us | |
| 0325-109981 | CMP | CABLE,14AWG 5COND 600V OLFLEX 190 | New OEM | Contact Us | |
| 03-378214-00 | CMP | CBL ASSY,FLOW SWITCH,776 POLISHER | New OEM | Contact Us | |
| 03-450037-00 | GaSonics | CBL ASSY,TEMP CNTRLR TO LAMP CNTRLR | New OEM | Contact Us | |
| 04-281177-00 | KIT,COMPUTER WITH CD-ROM DRIVE | New OEM | Contact Us | ||
| 04-285224-00 | Concept One | PM KIT,C1D,WET CLEAN #1,FAIRCHILD,C1D | New OEM | Contact Us | |
| 04-285234-00 | Concept One | PM KIT,C1D,NEW HEATER KIT,FAIRCHILD,C1D | New OEM | Contact Us | |
| 04-313049-00 | GaSonics | KIT,S/W,PEP,V4.70 | New OEM | Contact Us | |
| 04-321963-00 | GaSonics | KIT,MAJOR SPARES IRIDIA DL | New OEM | Contact Us | |
| 04-321974-00 | GaSonics | KIT,MAJOR SPARES PEP3510 | New OEM | Contact Us | |
| 04-324422-00 | Concept One | KIT,POWER SUPPLY REPLACE 27-10054-00 | New OEM | Contact Us | |
| 04-356546-00 | CMP | KIT,ONSERT,CUSTOMER REFURB,KEVLAR BLADDE | New OEM | Contact Us | |
| 04-356619-00 | CMP | KIT,ONSERT,CUSTOMER REFURB,XCEDA STD CAR | New OEM | Contact Us | |
| 04-357920-00 | CMP | KIT,ONSERT,CUSTOMER REFURB,T7 BLADDER | New OEM | Contact Us | |
| 04-411014-00 | GaSonics | KIT,LAMP CURRENT MONITOR,PEP | New OEM | Contact Us | |
| 04-421127-00 | CMP | KIT,RELAY,INTERLOCK,MV200 | New OEM | Contact Us | |
| 04-421494-00 | Concept One | KIT,CONTACTOR,AUX-CONTACT,24VDC,4-N/O | New OEM | Contact Us | |
| 04-450106-00 | KIT,15" MONITOR REPLACEMENT,FRONT,PEP | New OEM | Contact Us | ||
| 05-110416-01 | Concept One | KIT,WINDOW,SAPPHIRE SINGLE EP | New OEM | Contact Us | |
| 05-3216 | GaSonics | WELDMENT, OUTLET- PROCESS, GAS BOX,IRIDI | New OEM | Contact Us | |
| 06-2473 | GaSonics | WINDOW, SAPPHIRE,.999/1.001 OD X .124/.1 | New OEM | Contact Us | |
| 0710-740008 | CMP | COUPLING,JOINT FLOATING 30MM MOD | New OEM | Contact Us | |
| 0710-770838 | CMP | TUBE,TRAP | New OEM | Contact Us | |
| 0720-727065 | CMP | ARM,LIFT DUAL CASS 2 | New OEM | Contact Us | |
| 0720-727339 | CMP | MOUNT,LIFT ARM CASSETTE 1 | New OEM | Contact Us | |
| 0800-727197 | CMP | BLOCK,LOCK LEFT WINDOW INTERLOCK | New OEM | Contact Us | |
| 0800-727198 | CMP | BLOCK,LOCK RIGHT WINDOW INTERLOCK | New OEM | Contact Us | |
| 0810-110291 | CMP | TRAY,WAFER SUPPORT ACTIVE WAND 200MM MV | New OEM | Contact Us | |
| 0820-722151 | CMP | TOWER,ADJUSTER MICRO PLANARIZER | New OEM | Contact Us | |
| 0820-727162 | CMP | ROD,PUSH LIFT JACK ASSY | New OEM | Contact Us | |
| 0830-110901 | CMP | MANF,PAD CONDITIONER WET | New OEM | Contact Us | |
| 0830-739275 | CMP | MANF,SOLENOID 16SNGL M1 PLUGGED | New OEM | Contact Us | |
| 0845-718766 | CMP | WAND,CERAMIC 4 PORT 70MIL | New OEM | Contact Us | |
| 0880-110703 | CMP | GENERATOR,ULTRA SONIC W/XDCR | New OEM | Contact Us | |
| 10-00424-00 | Concept One | TUBE ASSY,INJECTOR,S6 | New OEM | Contact Us | |
| 1000-717869 | CMP | SCRW,SET 6-32 X 1/8 SST | New OEM | Contact Us | |
| 15-00645-00 | Concept One | BLOCK,KYBD | New OEM | Contact Us | |
| 15-175668-00 | GaSonics | INSERT, END EFFECTOR 300MM, SIERRA | New OEM | Contact Us | |
| 15-182746-00 | CMP | RING,CLAMP,UPPER#3,CHAMF,200MM,SST | New OEM | Contact Us | |
| 15307-01 | GaSonics | REFLECTOR,PARABOLIC-9.5 | New OEM | Contact Us | |
| 15322-01 | GaSonics | BASE PLATE,REFLECTOR | New OEM | Contact Us | |
| 15-348474-00 | CMP | COUPLING,PNEU,7-CHAN,CARRIER,FIXED | New OEM | Contact Us | |
| 15-348475-00 | CMP | COUPLING,PNEU,7-CHAN,CARRIER,FLOATING | New OEM | Contact Us | |
| 15-417194-00 | CMP | ROLLER,BAND 86D,7700 CLEANER | New OEM | Contact Us | |
| 16-367462-00 | GaSonics | HOLDER,SOCKET,STEAM-OUT,HASTEALLOY,REAR | New OEM | Contact Us | |
| 16619-01 | GaSonics | PLATE,BACKING-DRIVER BD | New OEM | Contact Us | |
| 16893-01 | GaSonics | LEVER,DOOR | New OEM | Contact Us | |
| 17069-01 | GaSonics | PANEL,DISTR BOARD-L3300/2 | New OEM | Contact Us |