Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| CPS-04-10027 | GaSonics | KIT,15" MONITOR REPLACEMENT,FRONT,PEP | New OEM | Contact Us | |
| CPS-04-10028 | Concept One | RETROFIT, C1 486 TO PENTIUM COMPUTER UPGRADE/ NO DIGIBOARD | New OEM | Contact Us | |
| CPS-04-10032 | GaSonics | COMPUTER KIT,PEP,3510C | New OEM | Contact Us | |
| CPS-04-10033 | GaSonics | COMPUTER KIT,PEP,3510A AND PLUS | New OEM | Contact Us | |
| CPS-04-10034 | GaSonics | COMPUTER KIT,PEP,3010A | New OEM | Contact Us | |
| CPS-04-10035 | Concept One | TEOS, UNDOPED, C1-200 | New OEM | Contact Us | |
| CPS-04-10037 | Concept One | KIT, MFC, 5SLM, N2, AERA FC7800CU, CEDG | New OEM | Contact Us | |
| CPS-04-10039 | YASKAWA ROBOT CORE REBURBISHMENT BOM | New OEM | Contact Us | ||
| CPS-04-10044 | GaSonics | KIT, SINGLE COMPUTER,PEP, 3510A AND PLUS | New OEM | Contact Us | |
| CPS-04-10045 | GaSonics | KIT,14” MONITOR REPLACEMENT, AGV, SMIF | New OEM | Contact Us | |
| CPS-04-10046 | Concept One | KIT, FIXTURE, GAP, SHOWER HEAD | New OEM | Contact Us | |
| CPS-04-10047 | Concept One | KIT, REPLACE 27-029889-00, PS, MEGAPAC 2, 7 OUTLET, 90V | New OEM | Contact Us | |
| CPS-04-10049 | Concept One | KIT, SPINDLE MOTOR REPLACEMENT, 150MM | New OEM | Contact Us | |
| CPS-04-10050/B | Concept One | KIT, SPINDLE MOTOR REPLACEMENT, 200MM | New OEM | Contact Us | |
| CPS-04-10052 | Concept One | KIT, FIXTURE, GAP, SHOWER HEAD,150MM | New OEM | Contact Us | |
| CPS-04-10055 | CMP | KIT, NO BUFF, MV200 | New OEM | Contact Us | |
| CPS-04-10056 | Concept One | KIT, SPACER TOOL, QUARTERLY PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10057 | Concept One | KIT, NITRIDE TOOL, QUARTERLY PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10058 | Concept One | KIT, SPACER TOOL, SEMI ANNUAL, C1, INF | New OEM | Contact Us | |
| CPS-04-10059 | Concept One | KIT, NITRIDE TOOL, SEMI ANNUAL, C1, INF | New OEM | Contact Us | |
| CPS-04-10060 | Concept One | KIT, ANNUAL PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10061 | Concept One | KIT, 1 FILTER, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10062 | Concept One | KIT, 2 FILTER, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10063 | Concept One | KIT, HEATER GROUND, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10064 | Concept One | KIT, HEATER STRAP, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10065 | Concept One | KIT, RF STRAP, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10066 | Concept One | KIT, T-SEAL, PM, C1, INF | New OEM | Contact Us | |
| CPS-04-10068 | GaSonics | KIT, SINGLE COMPUTER, PEP IRIDIA AND 3600 | New OEM | Contact Us | |
| CPS-04-10071 | Concept One | KIT, VALVE STACK, C1, INF | New OEM | Contact Us | |
| CPS-05-110416-01 | Concept One | KIT,WINDOW,SAPPHIRE SINGLE EP | New OEM | Contact Us | |
| CPS-05-110416-02 | Concept One | KIT,WINDOW,SAPPHIRE DUAL EP | New OEM | Contact Us | |
| CPS-10-30011 | Concept One | TUBE ASSY, FILTER INLET, D2000i | New OEM | Contact Us | |
| CPS-10-30012 | Concept One | TUBE ASSY, OUT, DOPED, D2000i, STRAIGHT | New OEM | Contact Us | |
| CPS-10-30013 | Concept One | TUBE ASSY, D2000i, OUTLET, UNDOPED | New OEM | Contact Us | |
| CPS-10-30014 | Concept One | TUBE ASSY, OUTLET, D2000i, DOPED | New OEM | Contact Us | |
| CPS-15-00007 | CMP | REV. A 12.612"OD X .030 "THK Longwood B5N2X-030 WITH 108 HOLES .192" - .201"DIA AND 2 hOLES .140"DIA | New OEM | Contact Us | |
| CPS-15-00010 | CMP | ROLLER,BAND 86D | New OEM | Contact Us | |
| CPS-15-00021 | CMP | ROLLER, BAND, NATURAL, 90-92 DUROMETER | New OEM | Contact Us | |
| CPS-15-00050 | Concept One | PADDLE, DIMPLE, CERAMIC, 150MM | New OEM | Contact Us | |
| CPS-15-00053 | Concept One | FORK, CERAMIC, C1 | New OEM | Contact Us | |
| CPS-15-00069 | Concept One | TOOL, SHOWERHEAD FEEDTHRU, C1 & C2 | New OEM | Contact Us | |
| CPS-15-00071 | CMP | TAPE,R1 WAND, SPECIAL | New OEM | Contact Us | |
| CPS-15-00072 | GaSonics | PIN, LIFT, SAPPHIRE, 3.16L, IRIDIA-DL | New OEM | Contact Us | |
| CPS-17-20017 | Concept One | BRKT, MTG, D2000i LFC, RETRO | New OEM | Contact Us | |
| CPS-19-00155-00/A | Concept One | HTR BLK, NO SLOT, CONTINUOUS WELD | New OEM | Contact Us | |
| CPS-19-00155-01 | Concept One | HTR BLK, SLOTTED, CONTINUOUS WELD | New OEM | Contact Us | |
| CPS-20048 | Concept One | BONDED GAE INSERT W/ KALRAZ 9100 FOR PEND GATE VALVE | New OEM | Contact Us | |
| CPS-20049 | Concept One | KIT, SEALS PEND GATE VALVE W/ 9100 BONDED INSERT | New OEM | Contact Us | |
| CPS-20076 | Concept One | GAUGE,475 CONTROLLER, RoHS | New OEM | Contact Us | |
| CPS-20104 | Concept One | MFC,20SLM,N2,FC-R7710CD,ROHS with Cardedge Adaptor. | New OEM | Contact Us | |
| CPS-20105 | GaSonics | ASSY., CLTC, IRIDIA, NO GIMBAL | New OEM | Contact Us | |
| CPS-20106 | CMP | ENCODER,R-AXIS,676 HINE ROBOT | New OEM | Contact Us | |
| CPS-20107 | CMP | MOTOR,R-AXIS,676 HINE ROBOT | New OEM | Contact Us | |
| CPS-20108 | CMP | KIT,UPPER BRUSH ARM,CLARUS CLEANER (2 ARMS) | New OEM | Contact Us | |
| CPS-20109 | GaSonics | LAMP HALOGEN,1000W,120VAC - Ushio | New OEM | Contact Us | |
| CPS-20118 | CMP | ASSY, ENCODER/MOTOR, R-AXIS, MODEL, 4.3 (676) | New OEM | Contact Us | |
| CPS-20119 | CMP | ASSY, ENCODER/MOTOR, T-AXIS, MODEL, 4.3 (676) | New OEM | Contact Us | |
| CPS-20120 | GaSonics | HARD DRIVE,PEP GEN 5 REPLACEMENT W OS2 INSTALLED | New OEM | Contact Us | |
| CPS-20121 | GaSonics | BATTERY LITHIUM 3V COIN 23MM | New OEM | Contact Us | |
| CPS-20123 | CMP | CYLINDER,ACTUATOR, ROTARY SMIF POD LATCH | New OEM | Contact Us | |
| CPS-20124 | CMP | CYLINDER, AIR 3/4 BORE W/AUTO-SW, SMIF POD UP/DOWN | New OEM | Contact Us | |
| CPS-20125 | CMP | CYLINDER, ACTUATOR, ROTARY, SMIF POD LOCK | New OEM | Contact Us | |
| CPS-20127 | CMP | CPS-20127 CABLE,INTERNAL,SMIF MODULE | New OEM | Contact Us | |
| CPS-20128 | GaSonics | COMPUTER,UI,GAMMA 2100 | New OEM | Contact Us | |
| CPS-20129 | CMP | COMPUTER,QNX,GAMMA 2100 | New OEM | Contact Us | |
| CPS-20139 | Concept One | 26 SLOT METAL CASSETTES 200MM | New OEM | Contact Us | |
| CPS-20161 | Concept One | ASSY, PS, MEGAPAC 2, 90V, 7 OUT | New OEM | Contact Us | |
| CPS-20162 | Concept One | MODULE,PS, 5V/20AT | New OEM | Contact Us | |
| CPS-20163 | Concept One | MODULE,PS, 5V/30AT | New OEM | Contact Us | |
| CPS-20167 | Concept One | MODULE,PS, 90V/2.1AT2 | New OEM | Contact Us | |
| CPS-20174 | CMP | .080" (MXL) Pitch, 175 Teeth, 1/4" Wide Single Sided Urethane Belt with Kevlar Cords | New OEM | Contact Us | |
| CPS-20177 | GaSonics | ASSY, PREFIRE | New OEM | Contact Us | |
| CPS-20178 | GaSonics | PREFIRE ASSY, VCR GAS LINE, NEXUS 3 | New OEM | Contact Us | |
| CPS-20179 | GaSonics | ASSY, PREFIRE-AURA | New OEM | Contact Us | |
| CPS-20180 | GaSonics | ASSY, PREFIRE, STRIPPER MODULE | New OEM | Contact Us | |
| CPS-20181 | GaSonics | PREFIRE ASSY, VCR GAS LINE APPLICATION,CE! | New OEM | Contact Us | |
| CPS-20182 | GaSonics | ASSY,AURA,PREFIRE W/ELECTRODE | New OEM | Contact Us | |
| CPS-20183 | GaSonics | PREFIRE ASSY | New OEM | Contact Us | |
| CPS-20187 | GaSonics | ASSY,PREFIRE,STRIPPER MODULE | New OEM | Contact Us | |
| CPS-20188 | CMP | Drive Tape, 4.3 Robot Bottom tub,.313 Wd. 15.785 Lg | New OEM | Contact Us | |
| CPS-20189 | CMP | Drive Tape, 4.3 Robot Bottom tub,.313 Wd. 15.430 Lg | New OEM | Contact Us | |
| CPS-20190 | CMP | FAB: 4.3 RB, 2 Band Drive Tape, 1/4" Wd, 11.997/12.014 Lg, 2X.003 Thk | New OEM | Contact Us | |
| CPS-20192 | CMP | KIT,UPPER BRUSH ARM,1 ARM,CLARUS CLEANER | New OEM | Contact Us | |
| CPS-20193 | CMP | ASSY, IDLER ROLLER, 7700J CLEANER | New OEM | Contact Us | |
| CPS-20194 | CMP | ASSY, SENSOR ROLLER, 7700J CLEANER | New OEM | Contact Us | |
| CPS-20198 | CMP | ASSY, POLISH ARM #3, WITH LOAD CELL, PARTIAL, AURIGA | New OEM | Contact Us | |
| CPS-20199 | CMP | ASSY, POLISH ARM #3, WITHOUT LOAD CELL, PARTIAL, AURIGA | New OEM | Contact Us | |
| CPS-20202 | GaSonics | ASSY, BATTERY, ROBOT, REPLACED 61-2344 | New OEM | Contact Us | |
| CPS-20207 | CMP | ASSY, VALVE, 2WAY NC 02 SERV DIO 12, REPLACED HE430107 | New OEM | Contact Us | |
| CPS-20222 | CMP | ASSY, MANIFOLD, PNEUMATIC, 5 STATION, AURIGA MULTIHEAD | New OEM | Contact Us | |
| CPS-20223 | CMP | ASSY, MANIFOLD, PNEUMATIC, 6 STATION, AURIGA PNEU CABINET | New OEM | Contact Us | |
| CPS-20226 | CMP | PNEUMATIC VALVE, 3 POSITION, 4 WAY | New OEM | Contact Us | |
| CPS-20228 | GaSonics | ASSY, SHIPPING HANDLES, YASAKAWA ROBOT | New OEM | Contact Us | |
| CPS-20230 | Concept One | ASSY, ROBOT, C1, 70V WITH ARM, REWORKED | New OEM | Contact Us | |
| CPS-20231 | Concept One | ASSY, ROBOT, C1, 70V NO ARM, REWORKED | New OEM | Contact Us | |
| CPS-20232 | Concept One | ASSY, ROBOT, C1, 90V WITH ARM, REWORKED | New OEM | Contact Us | |
| CPS-20233 | Concept One | ASSY, ROBOT, C1, 90V NO ARM, REWORKED | New OEM | Contact Us | |
| CPS-20235 | CMP | PIN, FRICTION ROLLER, HINE ROBOT | New OEM | Contact Us | |
| CPS-20243 | CMP | MANIFOLD VALVE, CDV, REPLACEMENT | New OEM | Contact Us | |
| CPS-20244 | Concept One | STOP, WAFER CASSETTE, REPLACEMENT | New OEM | Contact Us |