Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 96-3500 | GaSonics | CABLE ASSY, PIN UP/DOCBL ASSY,PIN | New OEM | Contact Us | |
| 96-3501 | CMP | CABLE ASSY, PIN AT LAMP SENSOR | New OEM | Contact Us | |
| 96-3507 | GaSonics | HARNESS ASSY,WAVEGUIDE CONDUIT | New OEM | Contact Us | |
| 96-3538 | GaSonics | CBL ASSY,DUAL EOP | New OEM | Contact Us | |
| 96-3583 | GaSonics | CABLE ASSY, LAMP SOCKET | New OEM | Contact Us | |
| 96-3622 | GaSonics | CABLE ASSY, UV STRICKER, ASTEX APPLICATO | New OEM | Contact Us | |
| 96-3624 | GaSonics | HARNESS ASSY, ALARM INTERFACE WVDS TO SYSTEM | New OEM | Contact Us | |
| 96-3626 | GaSonics | WIRELIST, AUX. PUMP/CHILLER POWER WALL BOX | New OEM | Contact Us | |
| 96-3661 | GaSonics | HARNESS ASSY, J1 FRONT DISPLAY PANEL | New OEM | Contact Us | |
| 96-3662 | GaSonics | HARNESS ASSY, J1A FRONT DISPLAY PANEL | New OEM | Contact Us | |
| 96-3663 | GaSonics | CABLE ASSY, J3 DISPLAY PANEL I/O | New OEM | Contact Us | |
| 96-3665 | GaSonics | CABLE ASSY, J1B DISPLAY PANEL 1/O | New OEM | Contact Us | |
| 96-3667 | GaSonics | CABLE ASSY, J4 VIDEO I/O INTCON | New OEM | Contact Us | |
| 96-3668 | GaSonics | CABLE ASSY, J2 FRONT DISPLAY PANEL | New OEM | Contact Us | |
| 96-3670 | GaSonics | CABLE ASSY, 5V DC FRONT DISPLAY PANEL | New OEM | Contact Us | |
| 96-3671 | GaSonics | CABLE ASSY, J8,REMOTE DISPLAY PANEL | New OEM | Contact Us | |
| 96-3715 | Gasonics | CBL ASSY,HEATER CARTRIDGE, #11, 41 IN | New OEM | Contact Us | |
| 96-3784 | GaSonics | CBL ASSY,EXT CPU RESET, L3510 | New OEM | Contact Us | |
| 96-3881 | GaSonics | CBL ASSY,WAFER CTR. CLAMP SENSOR TO JCT BD (JP3-8) | New OEM | Contact Us | |
| 96-3882 | GaSonics | CBL ASSY,CTRG UNCLAMP SENSOR TO CTRG I/O BD(JP3-8) | New OEM | Contact Us | |
| 96-3884 | GaSonics | CBL ASSY,WAFER ON BLADE(SENSOR) TO CTRG I/O BD(JP3-9) | New OEM | Contact Us | |
| 96-4045 | GaSonics | CBL ASSY,VIDEO CARD TO DISPLAY DRIVER | New OEM | Contact Us | |
| 96-4056 | GaSonics | CBL ASSY,WAFER MAPPING LASER TO LL CT | New OEM | Contact Us | |
| 96-4199 | GaSonics | CBL ASSY,RF COAX,RF GEN 1 TO RF MODULE 1 | New OEM | Contact Us | |
| 968428-1 | CMP | SHIM,0.003 FIBER OPTIC SOLID PLATEN MV | New OEM | Contact Us | |
| 968428-2 | CMP | SHIM,0.005 FIBER OPTIC SOLID PLATEN MV | New OEM | Contact Us | |
| 968428-3 | CMP | SHIM,0.010 FIBER OPTIC SOLID PLATEN MV | New OEM | Contact Us | |
| 968428-4 | CMP | SHIM,0.020 FIBER OPTIC SOLID PLATEN MV | New OEM | Contact Us | |
| 968428-5 | CMP | SHIM,0.031 FIBER OPTIC SOLID PLATEN MV | New OEM | Contact Us | |
| 969303-001 | CMP | CBL ASSY,PL211-PL22 PL23 6' | New OEM | Contact Us | |
| 970049/RW | CMP | ASSY,CPU W/P3-500 & 128MB RAM | New OEM | Contact Us | |
| 97-0411 | GaSonics | KIT,RETROFIT,A1000,HV CAP | New OEM | Contact Us | |
| 97-2432 | GaSonics | COOLING PIN UPGRADE KIT | New OEM | Contact Us | |
| 97-2676 | GaSonics | KIT, RETROFIT, UV LAMP & HOLDER | New OEM | Contact Us | |
| 97-2718 | GaSonics | QUARTZ KIT A3010 | New OEM | Contact Us | |
| 97-2814 | GaSonics | KIT, WAVEGUIDE ASSY,ASTEX,RIGH | New OEM | Contact Us | |
| 97-2953 | GaSonics | KIT, PSIV BACK PLANE, SERIAL PORTS | New OEM | Contact Us | |
| 97-2990 | Gasonics | KIT, ORING, KALREZ, PEP3510A | New OEM | Contact Us | |
| 97-3077 | GaSonics | KIT, VALVE, CHAMBER VENT, 3510A | New OEM | Contact Us | |
| 97-3156 | GaSonics | KIT, WAFER, ALIGNMENT, 8 IN | New OEM | Contact Us | |
| 97-3192 | GaSonics | KIT, WAFER ALIGNMENT 6 IN | New OEM | Contact Us | |
| 97-3216 | GaSonics | KIT,SPARES,QUARTZ,200 MM-PEP 3510A | New OEM | Contact Us | |
| 97-3267 | GaSonics | KIT, O-RING, KALREZ,KAL/VITON INSTALLAT | New OEM | Contact Us | |
| 97-3268 | GaSonics | KIT, O-RING, KALREZ,ALL-KAL INSTALLATION | New OEM | Contact Us | |
| 97-3302 | GaSonics | KIT, SPARES, QUARTZ,125/150MM, 3510A/A | New OEM | Contact Us | |
| 97-3577 | GaSonics | KIT, SPOOL HOUSING UPGRADE, L3510 | New OEM | Contact Us | |
| 97-3651 | GaSonics | KIT, HOUSE UPS STEP DOWN XFMR, 200-240 T | New OEM | Contact Us | |
| 97-3665 | GaSonics | KIT, OPTICAL PROBE,SEKIDENKO | New OEM | Contact Us | |
| 97-3762 | GaSonics | KIT, RETROFIT,SECONDARY PLASMA SUPPRESSI | New OEM | Contact Us | |
| 97-3864 | GaSonics | KIT, CONTACTOR REPLACEMENT | New OEM | Contact Us | |
| 97-4038 | GaSonics | KIT, RETROFIT, VIDEO CARD AND DISPLAY,L3 | New OEM | Contact Us | |
| 97-4158 | GaSonics | KIT, GAS CAP, IRIDIA | New OEM | Contact Us | |
| 97-4199 | GaSonics | KIT, RETROFIT,POWER SUPPLIES 1 AND 2 | New OEM | Contact Us | |
| 97-4251 | GaSonics | KIT, VALVE,CHAMBER VENT, DL | New OEM | Contact Us | |
| 97-4442 | GaSonics | KIT, ASTEX SAPPHIRE TUBE REPLACEMENT | New OEM | Contact Us | |
| 97-4493 | GaSonics | KIT, RETROFIT, V-PORT, TOP TRANSFER CHM | New OEM | Contact Us | |
| 978742-PEEK | CMP | Assy, Egee Mv200 W/Sensors - PEEK | New OEM | Contact Us | |
| 99-056030-00 | Concept One | GREASE, PUMP, 80G, BELLOWS TUBE | New OEM | Contact Us | |
| A01-003-01 | GaSonics | RING,EMI SHIELD | New OEM | Contact Us | |
| A01-007-01 | GaSonics | COVER, TOP, PROCESS CHAMBER | New OEM | Contact Us | |
| A01-008-03 | GaSonics | CAP-GAS INLET-FLOATING | New OEM | Contact Us | |
| A01-012-01 | GaSonics | COVER, BOTTOM, PROCESS CHAMBER | New OEM | Contact Us | |
| A01-017-01 | GaSonics | MANIFOLD- MFC | New OEM | Contact Us | |
| A01-020-01 | GaSonics | PLATE,DOOR SUPPORT | New OEM | Contact Us | |
| A01-044-01 | GaSonics | FLANGE | New OEM | Contact Us | |
| A01-045-01 | GaSonics | HOUSING | New OEM | Contact Us | |
| A01-051-02 | GaSonics | SUPPORT,CYLINDER | New OEM | Contact Us | |
| A01-052-01 | GaSonics | BRKT,STOP/CYL,LOWER | New OEM | Contact Us | |
| A01-071-01 | GaSonics | PIN,WAFER SUPPORT | New OEM | Contact Us | |
| A01-071-02 | GaSonics | PIN,WAFER SUPPORT,SHORT | New OEM | Contact Us | |
| A01-073-01 | GaSonics | CHAMBER, PROCESS | New OEM | Contact Us | |
| A01-074-01 | GaSonics | BRACKET, WAFER BASKET | New OEM | Contact Us | |
| A01-076-01 | GaSonics | DOOR, CHAMBER | New OEM | Contact Us | |
| A01-080-01 | GaSonics | STOP,CYLINDER | New OEM | Contact Us | |
| A01-098-01 | GaSonics | HOUSING, SHOWER HEAD | New OEM | Contact Us | |
| A01-102-01 | GaSonics | CHUCK,VACUUM | New OEM | Contact Us | |
| A01-127-01 | GaSonics | HOUSING, DOWN STREAM, EOP | CE! | New OEM | Contact Us | |
| A01-132-01 | GaSonics | CHAMBER, WATER COOLED | New OEM | Contact Us | |
| A01-141-01 | GaSonics | SUPPORT,BEARING HOUSING | New OEM | Contact Us | |
| A01-142-01 | GaSonics | SUPPORT,CYLINDER,RING LIFT | New OEM | Contact Us | |
| A01-146-01 | GaSonics | HOUSING,HEATER BELLOWS | New OEM | Contact Us | |
| A01-147-01 | GaSonics | PIN,LIFTER,LONG | New OEM | Contact Us | |
| A01-148-01 | GaSonics | PLUG,PLATEN FIXED | New OEM | Contact Us | |
| A01-150-01 | GaSonics | WSHR,HEATER CLAMP | New OEM | Contact Us | |
| A01-157-02 | GaSonics | CLAMP,THERMOCOUPLE | New OEM | Contact Us | |
| A01-168-02 | GaSonics | GUIDE,WAFER,REAR RIGHT ARM | New OEM | Contact Us | |
| A01-170-01 | GaSonics | BLOCK BEARING DOOR | New OEM | Contact Us | |
| A01-171-01 | GaSonics | SHAFT, BEARING DOOR | New OEM | Contact Us | |
| A01-176-01 | GaSonics | ARM,DOOR CLOSER(REPL 2 W SET 01-5568/L & 01-5569\R W/PIN | New OEM | Contact Us | |
| A01-177-01 | GaSonics | SUPPORT BEARING | New OEM | Contact Us | |
| A01-178-01 | GaSonics | BAR INTERCONNECT | New OEM | Contact Us | |
| A01-178-02 | GaSonics | BAR,INTERCONNECT,LOAD LOCK | New OEM | Contact Us | |
| A01-179-01 | GaSonics | WSHR,SPRING RETAINING | New OEM | Contact Us | |
| A01-191-06 | GaSonics | GUIDE,WAFER,6 IN | New OEM | Contact Us | |
| A01-197-01 | GaSonics | HOUSING, CONNECTOR | New OEM | Contact Us | |
| A01-198-01 | GaSonics | HSG, SHOWER HD | New OEM | Contact Us | |
| A01-332-01 | GaSonics | STRAP, WINDOW MOUNTING | New OEM | Contact Us | |
| A01-394-01 | GaSonics | SHOWER HD,ALUM,4 IN,5 IN & 6 IN WAFER | New OEM | Contact Us | |
| A01-399-01 | GaSonics | SUPPORT,BEARING(3/4 IN CYL) | New OEM | Contact Us | |
| A01-399-02 | GaSonics | SUPPORT,BEARING(2 1/2 IN CYL) | New OEM | Contact Us |