Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 95-2951 | GaSonics | BLOWER ASSY | New OEM | Contact Us | |
| 95-2971 | GaSonics | SENSOR ASSY, PINS DOWN | New OEM | Contact Us | |
| 95-2972 | GaSonics | SENSOR ASSY, PINS UP | New OEM | Contact Us | |
| 95-3014 | GaSonics | WAVEGUIDE ASSY,2-PIECE ENHANCED | New OEM | Contact Us | |
| 95-3019 | GaSonics | END CAP ASSY, WATER COOLED | New OEM | Contact Us | |
| 95-3045 | GaSonics | SWITCH PANEL ASSY LEFT, HANDLER MODULE | New OEM | Contact Us | |
| 95-3082 | GaSonics | SENSOR ASSY, DOOR CLOSED | New OEM | Contact Us | |
| 95-3083 | GaSonics | SENSOR ASSY, DOOR OPEN | New OEM | Contact Us | |
| 95-3154 | GaSonics | MINI CONTROLLER ASSY, MICROWAVE GENERATO | New OEM | Contact Us | |
| 95-3155 | GaSonics | CLUSTER ASSY, MISC CONTROLLER | New OEM | Contact Us | |
| 95-3184 | GaSonics | LIFT TILT ASSY, CASSETTE PLATE | New OEM | Contact Us | |
| 95-3353 | GaSonics | Software, L3300/L35X0 GEM Enabler V. 7.XX | New OEM | Contact Us | |
| 95-3355 | GaSonics | ENCLOSURE ASSY,FILAMENT XFMR - 3600 | New OEM | Contact Us | |
| 95-3370 | Gasonics | CYLINDER-PNEUMATIC W/D-SUB MODIFIED | New OEM | Contact Us | |
| 95-3402 | GaSonics | APPLICATION SOFTWARE L3300/L35X0 V7.32 | New OEM | Contact Us | |
| 95-3458 | GaSonics | MINI CNTRLLR ASSY,GAS/RF MODULE | New OEM | Contact Us | |
| 95-3531 | GaSonics | 4 COM BOARD ASSY,RS-232 | New OEM | Contact Us | |
| 95-3532 | GaSonics | CHAMBER DOOR, ASSY, | New OEM | Contact Us | |
| 95-3543 | GaSonics | PLASMA SOURCE ASSY,IRIDIA-DL, LEFT | New OEM | Contact Us | |
| 95-3545 | GaSonics | KNOB ASSY, TORQUE PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us | |
| 95-3601 | GaSonics | FLANGE ASSY, CHAMBER BOTTOM | New OEM | Contact Us | |
| 95-3602 | GaSonics | ACTUATOR CLTC, ASSY | New OEM | Contact Us | |
| 95-3606 | GaSonics | CONTROLLER ASSY,LAMP, IRIDIA-DL | New OEM | Contact Us | |
| 95-3618 | GaSonics | LAMP TRAY ASSY,4 WINDOW, IRIDIA-DL | New OEM | Contact Us | |
| 95-3628 | GaSonics | EOP CONTROLLER ASSY,CLEAN-DL | New OEM | Contact Us | |
| 95-3644 | GaSonics | TC PROBE ASSY | New OEM | Contact Us | |
| 95-3646 | GaSonics | CLTC CAP ASSY,CLEAN-DL | New OEM | Contact Us | |
| 95-3648 | GaSonics | WAVEGUIDE ASSY,COMMON, LEFT IRIDIA-DL | New OEM | Contact Us | |
| 95-3677 | GaSonics | CONTROLLER ASSY,LAMP | New OEM | Contact Us | |
| 95-3759 | GaSonics | EOP DETECTOR ASSY | New OEM | Contact Us | |
| 95-3772 | GaSonics | CHAMBER ASSY,IRIDIA-DL | New OEM | Contact Us | |
| 95-3798 | GaSonics | MINI-CONTROLLER ASSY PROCESS MISC,IRIDIA | New OEM | Contact Us | |
| 95-3815 | GaSonics | APPLICATION SOFTWARE L3300/L35X0 V7.40 | New OEM | Contact Us | |
| 95-3819 | GaSonics | WATER HOSE ASSY, DUMMY LOAD INPUT | New OEM | Contact Us | |
| 95-3828 | GaSonics | ACTUATOR ASSY, CLTC,LEFT | New OEM | Contact Us | |
| 95-3917 | ASSY, AURA, DISPLAY PANEL | New OEM | Contact Us | ||
| 95-3929 | GaSonics | LAMP TRAY ASSY, SAPPHIRER, IRIDIA-DL | New OEM | Contact Us | |
| 953936/RW | CMP | ASSY,TBI,16PT REFURBISHED | New OEM | Contact Us | |
| 95-4053 | GaSonics | REFLECTOR ASSY, LAMP TRAY WITH THERMOSTA | New OEM | Contact Us | |
| 95-4140 | GaSonics | ROBOT MANIPULATOR ASSY, ATM, 200MM, 25 W | New OEM | Contact Us | |
| 95-4321 | GaSonics | CLTC ASSY,IRIDIA-DL | New OEM | Contact Us | |
| 95-4323/RW | GaSonics | MINI CONTROLLER ASSY,8GAS/RF MODULE | New OEM | Contact Us | |
| 95-4327 | GaSonics | ASSY,PLASMA APPLICATOR,SHAPPHIRE IRIDIA | New OEM | Contact Us | |
| 95-4376 | GaSonics | ASSY, GAS BOX EXH. SENSOR, GAMMA 2100 | New OEM | Contact Us | |
| 95-4482 | GaSonics | TUBING, ASSY, RF ENCLOSURE | New OEM | Contact Us | |
| 95-4534 | GaSonics | ASSY, MAGNETIC SENSOR | New OEM | Contact Us | |
| 956287/RW | CMP | MODULE, INPUT, ANALOG CUR., 4 CH - REFURBISHED | New OEM | Contact Us | |
| 956641/RW | CMP | XFMR,ISOLATION,235KVA,3 | New OEM | Contact Us | |
| 96-0169 | Gasonics | CBL ASSY,LAMP TRAY AC MODULE,A3000 | New OEM | Contact Us | |
| 96-0233 | Gasonics | CABLE ASSY, HIGH VOLTAGE TO FILAMENT XFMR | New OEM | Contact Us | |
| 96-0234 | GaSonics | CABLE ASSY, HIGH VOLTAGE TO MAGNETRON | New OEM | Contact Us | |
| 96-0235 | GaSonics | CABLE ASSY,HIGH VOLTAGE TO MAGNETRON | New OEM | Contact Us | |
| 96-0242 | GaSonics | CBL ASSY,HIGH VOLTAGE TO FILAMENT XFMR | New OEM | Contact Us | |
| 96-0253 | GaSonics | ASSY,HARNESS,LIFT SENSOR | New OEM | Contact Us | |
| 96-0292 | GaSonics | CABLE ASSY,PLASMA SENSOR | New OEM | Contact Us | |
| 960537/RW | CMP | CONTROLLER, SECS, GEM, 8-AXIS, BAM | New OEM | Contact Us | |
| 962102/RW | CMP | ASSY,SPINDLE EPD | New OEM | Contact Us | |
| 96-2619 | GaSonics | CBL ASSY,PROCESS MISC. CONT. SENSORS | New OEM | Contact Us | |
| 96-2623 | GaSonics | CABLE ASSY, ROBOT/GAS/BARATRON CONTROL | New OEM | Contact Us | |
| 96-2650 | GaSonics | CBL ASSY,LIFT SENSOR EXTENSION-UP | New OEM | Contact Us | |
| 96-2661 | GaSonics | CABLE ASSY, J02 LG BD RIGHT PIN AND DOOR | New OEM | Contact Us | |
| 96-2678 | GaSonics | CABLE ASSY, J5 INTFC BD TO J5 UNIV DIGTL BD | New OEM | Contact Us | |
| 96-2694 | GaSonics | CABLE ASSY, UNIV DGTL BD J1 TO J2 | New OEM | Contact Us | |
| 96-2753 | GaSonics | CBL ASSY,EOP SIGNAL | New OEM | Contact Us | |
| 96-2776 | Gasonics | CABLE ASSY, PROCESS MISC TO ATM SENSOR | New OEM | Contact Us | |
| 96-2787 | GaSonics | CABLE ASSY, AC PWR PROCESS MISC CONTROLL | New OEM | Contact Us | |
| 96-2800 | GaSonics | CBL ASSY,RS232 PORT 5 PRESSURE CONT. LEFT | New OEM | Contact Us | |
| 96-2809 | GaSonics | CABLE ASSY, RS232 PORT 2 GAS FLOW CONTRO | New OEM | Contact Us | |
| 96-2872 | GaSonics | CABLE ASSY, PWR CHAMBER PLATEN HEATER | New OEM | Contact Us | |
| 96-2873 | GaSonics | CBL ASSY,UV LIGHT PWR | New OEM | Contact Us | |
| 96-2896 | GaSonics | HARNESS ASSY, PWR CNTL, PNL, P1 | New OEM | Contact Us | |
| 96-2898 | GaSonics | CABLE ASSY,EUROTHERM TO PLATEN RTD SENSO | New OEM | Contact Us | |
| 96-2914 | GaSonics | CBL ASSY,LIFT SENSOR EXTENSION DOWN | New OEM | Contact Us | |
| 96-2918 | GaSonics | CBL ASSY,ETHERNET, MINIHUB - FRONT PNL | New OEM | Contact Us | |
| 96-2974 | GaSonics | CABLE ASSY, EXHAUST SENSOR | New OEM | Contact Us | |
| 96-3027 | GaSonics | CABLE ASSY, RS232 PORT1 PROCESS LAMP CON | New OEM | Contact Us | |
| 96-3028 | GaSonics | CABLE ASSY, EOP SIGNAL | New OEM | Contact Us | |
| 96-3030 | GaSonics | CBL ASSY,LAMP CONTROLLER J5 TO LAMP TRAY J1 | New OEM | Contact Us | |
| 96-3086 | GaSonics | CABLE ASSY, AC POWER LAMP, XFMR, PANEL L | New OEM | Contact Us | |
| 96-3088 | GaSonics | CBL ASSY,AC POWER LAMP CONT 270 VAC | New OEM | Contact Us | |
| 96-3199 | GaSonics | CABLE ASSY, PLASMA SENSOR | New OEM | Contact Us | |
| 96-3200 | GaSonics | CBL ASSY,UPS BYPASS | New OEM | Contact Us | |
| 96-3203 | GaSonics | CABLE ASSY, HV 4P | New OEM | Contact Us | |
| 96-3230 | GaSonics | CBL ASSY,MWPS TO FILAMENT TRANSFORMER | New OEM | Contact Us | |
| 96-3251 | GaSonics | CABLE ASSY, UP AND DOWN SENSORS | New OEM | Contact Us | |
| 96-3252 | GaSonics | CABLE ASSY,EXTENSION Y-AXIS,MOTOR PWR, P | New OEM | Contact Us | |
| 96-3253 | GaSonics | CABLE ASSY, Y-AXIS EXTENSION | New OEM | Contact Us | |
| 96-3255 | GaSonics | CBL ASSY,T1 LV TO J4, FILAMENT XFMR | New OEM | Contact Us | |
| 96-3256 | GaSonics | CBL ASSY,HIGH VOLTAGE TO MAGNETRON | New OEM | Contact Us | |
| 96-3259 | GaSonics | CABLE ASSY, MWPS TO TRANSFORMER BOX, PE | New OEM | Contact Us | |
| 96-3266 | GaSonics | CBL ASSY,DDC,CONTROL UNIT | New OEM | Contact Us | |
| 96-3275 | GaSonics | CABLE, JUMPER INTERLOCK | New OEM | Contact Us | |
| 96-3303 | Gasonics | CABLE ASSY, MWAVE GEN CONTROL, & MW INT | New OEM | Contact Us | |
| 96-3416 | GaSonics | CBL ASSY,GAS BOX DIGITAL | New OEM | Contact Us | |
| 96-3424 | GaSonics | CBL ASSY,MICROWAVE GEN CONTROL | New OEM | Contact Us | |
| 96-3426 | GaSonics | CBL ASSY,WATER/ EXH SENSORS | New OEM | Contact Us | |
| 96-3427 | GaSonics | CBL ASSY,PMSC DOOR SENSORS & PINS | New OEM | Contact Us | |
| 96-3428 | GaSonics | CBL ASSY,MINI GAS FLOW CONT J6 TO RF GENJ1, PWR MTCBOX J1 | New OEM | Contact Us | |
| 96-3476 | GaSonics | CBL ASSY,485 CONVERTER TO CHILLER | New OEM | Contact Us | |
| 96-3477 | GaSonics | CBL ASSY,PLASMA SENSOR | New OEM | Contact Us |