Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 92-2684 | GaSonics | PIN, LIFT,CHAMBER,PEP PLUS | New OEM | Contact Us | |
| 93-0021-000 | Ontrak | PLATE, STRIKE | New OEM | Contact Us | |
| 93-0079 | GaSonics | MODIFICATION,FEEDTHRU,LINEAR | New OEM | Contact Us | |
| 93-0130 | GaSonics | TAPESWITCH, I/O DOOR ALTERED ITEM | New OEM | Contact Us | |
| 931001-14 | CMP | SCRW,FHC-M4X16,A2-SST,DIN 7991 | New OEM | Contact Us | |
| 931005-122 | CMP | SCRW,SHC,M4X18,A2-SST | New OEM | Contact Us | |
| 931005-28 | CMP | SCRW,SHC,M4X12,A2-SST | New OEM | Contact Us | |
| 931005-33 | CMP | SCRW,SHC,M4X20,A2-SST | New OEM | Contact Us | |
| 931005-37 | CMP | SCRW,SHC,M4X40,A2-SST | New OEM | Contact Us | |
| 931005-43 | CMP | SCRW,SHC,M5X12,A2-SST | New OEM | Contact Us | |
| 931005-9 | CMP | SCRW, SHC, M2.5X12, A2-SST | New OEM | Contact Us | |
| 931006-107 | CMP | SCRW, SHC, 10-24UNCX1/2, SST | New OEM | Contact Us | |
| 931006-11 | CMP | SCRW,SHC,8-32UNCX1/2,A2-SST | New OEM | Contact Us | |
| 931006-110 | CMP | SCRW,SHC,10-24UNCX7/8,SST | New OEM | Contact Us | |
| 931006-114 | CMP | SCRW,SHC,10-24UNCX2-1/2,SST | New OEM | Contact Us | |
| 931006-116 | CMP | SCRW,SHC,10-32UNFX1/4,SST | New OEM | Contact Us | |
| 931006-128 | CMP | SCRW,SHC,10-32UNFX2,SST | New OEM | Contact Us | |
| 931006-13 | CMP | SCRW,SHC,8-32UNCX1,A2-SST | New OEM | Contact Us | |
| 931006-137 | CMP | SCRW, SHC, 1/4-20UNCX7/16, SST | New OEM | Contact Us | |
| 931006-138 | CMP | SCRW, SHC, 1/4-20UNCX1/2, SST | New OEM | Contact Us | |
| 931006-16 | CMP | SCRW,SHC,10-24UNCX3/4,A2-SST | New OEM | Contact Us | |
| 931006-173 | CMP | SCRW, SHC, 5/16-18UNCX1-1/4, SST | New OEM | Contact Us | |
| 931006-178 | CMP | SCRW,SHC,5/16-24UNFX5/8,SST | New OEM | Contact Us | |
| 931006-182 | CMP | SCRW,SHC,5/16-24UNFX1-1/2,SST | New OEM | Contact Us | |
| 931006-20 | CMP | SCRW,SHC,10-32UNFX5/16,A2-SST | New OEM | Contact Us | |
| 931006-207 | CMP | SCRW,SHC,5/16-18UNCX1-3/8,SST | New OEM | Contact Us | |
| 931006-22 | CMP | SCRW,SHC,10-32UNFX1/2,A2-SST | New OEM | Contact Us | |
| 931006-224 | CMP | SCRW,SHC,4-40UNCX1/4,316 SST | New OEM | Contact Us | |
| 931006-225 | CMP | SCRW,SHC,4-40UNCX1/2,316 SST | New OEM | Contact Us | |
| 931006-226 | CMP | SCRW,SHC,6-32UNCX1/4,316 SST | New OEM | Contact Us | |
| 931006-227 | CMP | SCRW,SHC,6-32UNCX1/2,316 SST | New OEM | Contact Us | |
| 931006-228 | CMP | SCRW,SHC,8-32UNCX3/8,316 SST | New OEM | Contact Us | |
| 931006-229 | CMP | SCRW,SHC,8-23UNCX1/2,316 SST | New OEM | Contact Us | |
| 931006-233 | CMP | SCRW,SHC,4-40UNCX1/4,316 SST | New OEM | Contact Us | |
| 931006-240 | CMP | SCRW,SHC,10-32UNFX3/4,316SST | New OEM | Contact Us | |
| 931006-244 | CMP | SCRW,SHC,2-56UNCX5/16,316SST | New OEM | Contact Us | |
| 931006-245 | CMP | SCRW,SHC,6-32UNCX7/8,316SST | New OEM | Contact Us | |
| 931006-25 | CMP | SCRW,SHC,1/4-20UNCX3/8,A2-SST | New OEM | Contact Us | |
| 931006-27 | CMP | SCRW, SHC, 1/4-20UNCX3/4, A2-SST | New OEM | Contact Us | |
| 931006-3 | CMP | SCRW,SHC,4-40UNCX3/8,A2-SST | New OEM | Contact Us | |
| 931006-40 | CMP | SCRW,SHC,8-32UNCX5/8,A2-SST | New OEM | Contact Us | |
| 931006-41 | CMP | SCRW,SHC,10-32UNFX1,A2-SST | New OEM | Contact Us | |
| 931006-46 | CMP | SCRW,SHC,6-32UNCX1/2,SST | New OEM | Contact Us | |
| 931006-52 | CMP | SCRW,SHC,6-32UNCX5/8,SST | New OEM | Contact Us | |
| 931006-53 | CMP | SCRW,SHC,2-56UNCX5/16,SST | New OEM | Contact Us | |
| 931006-56 | CMP | SCRW,SHC,10-32UNFX1-1/4,SST | New OEM | Contact Us | |
| 931006-6 | CMP | SCRW,SHC,6-32UNCX3/8,A2-SST | New OEM | Contact Us | |
| 931006-65 | CMP | SCRW,SHC,4-40UNCX3/16,SST | New OEM | Contact Us | |
| 931006-79 | CMP | SCRW,SHC,6-32UNCX1/4,SST | New OEM | Contact Us | |
| 931006-81 | CMP | SCRW, SHC, 6-32UNCX1/2, NYL | New OEM | Contact Us | |
| 931006-89 | CMP | SCRW,SHC,6-32UNCX1-3/4,SST | New OEM | Contact Us | |
| 931006-95 | CMP | SCRW,SHC,8-32UNCX9/16,SST | New OEM | Contact Us | |
| 931009-26 | CMP | SCRW,BHC,6-32UNCX5/8,SST | New OEM | Contact Us | |
| 931009-36 | CMP | SCRW,BHC,8-32UNCX1/2,SST | New OEM | Contact Us | |
| 931012-11 | CMP | SCRW,HEX HD,3/8-24UNFX6,17-4 SST | New OEM | Contact Us | |
| 931012-5 | CMP | SCRW,HEX HD,9/16-12UNCX6,A2-SST | New OEM | Contact Us | |
| 931012-9 | CMP | SCRW,HEX HD,3/8-24UNFX1,SST | New OEM | Contact Us | |
| 931015-2 | CMP | SCRW,PNH,REC,M4X12,NYL | New OEM | Contact Us | |
| 931039-1 | CMP | O-RING,4.47IDX1.78W,BUN | New OEM | Contact Us | |
| 931039-108 | CMP | O-RING,221.92IDX2.62W,VTN | New OEM | Contact Us | |
| 931039-117 | CMP | O-RING,60.05IDX1.78W,AFLAS | New OEM | Contact Us | |
| 931039-120 | CMP | O-RING,1.78IDX1.78W,VTN | New OEM | Contact Us | |
| 931039-121 | CMP | O-RING,228.27IDX2.62W,VTN | New OEM | Contact Us | |
| 931039-123 | CMP | O-RING,266.29IDX3.53W,VTN | New OEM | Contact Us | |
| 931039-125 | CMP | O-RING, 9.25IDX1.78W, BUN | New OEM | Contact Us | |
| 931039-142 | CMP | O-RING,39.34IDX2.62W,BUN | New OEM | Contact Us | |
| 931039-143 | CMP | O-RING,183.82IDX2.62W BUN | New OEM | Contact Us | |
| 931039-144 | CMP | O-RING,164.77X2.62W,BUN | New OEM | Contact Us | |
| 931039-145 | CMP | O-RING,145.72X2.62W,BUN | New OEM | Contact Us | |
| 931039-146 | CMP | O-RING,88.57X2.62W,BUN | New OEM | Contact Us | |
| 931039-22 | CMP | O-RING,21.89IDX2.62W,BUN | New OEM | Contact Us | |
| 931039-35 | CMP | O-RING,56.82IDX2.62W,BUN | New OEM | Contact Us | |
| 931039-4 | CMP | O-RING,6.02IDX2.62W,BUN | New OEM | Contact Us | |
| 931039-48 | CMP | O-RING,113.97IDX2.62W,BUN | New OEM | Contact Us | |
| 931039-5 | CMP | O-RING,6.07IDX1.78W,BUN | New OEM | Contact Us | |
| 931039-6 | CMP | O-RING,6.07IDX1.78W,VTN | New OEM | Contact Us | |
| 931039-60 | CMP | O-RING,202.87IDX2.62,BUN | New OEM | Contact Us | |
| 931039-84 | CMP | O-RING,94.97IDX1.78W,VTN | New OEM | Contact Us | |
| 931039-86 | CMP | O-RING,3.68IDX1.78W,VTN | New OEM | Contact Us | |
| 931039-93 | CMP | O-RING,266.29IDX3.53W,BUN | New OEM | Contact Us | |
| 931039-94 | CMP | O-RING,228.19IDX3.53W,BUN | New OEM | Contact Us | |
| 931039-96 | CMP | O-RING,7.65IDX1.78W,BUN | New OEM | Contact Us | |
| 931055-4 | CMP | CLAMP, CABLE, 7/16IDX1/2W, POLY | New OEM | Contact Us | |
| 931060-5 | CMP | WSHR,FLAT,DIA 4,A2-SST | New OEM | Contact Us | |
| 931061-10 | CMP | WSHR,FLAT,TYPE A,5/16W,A2-SST | New OEM | Contact Us | |
| 931061-14 | CMP | WSHR,FLAT,TYPE A,#10,A2-SST | New OEM | Contact Us | |
| 931061-3 | CMP | WSHR,FLAT,TYPE A,#6,A2-SST | New OEM | Contact Us | |
| 931064-4 | CMP | WSHR,LOCK,DIA 4,A2-SST | New OEM | Contact Us | |
| 931065-17 | CMP | WSHR,LOCK,HELICAL SPRING,#4,316SST | New OEM | Contact Us | |
| 931065-2 | CMP | WSHR,LOCK,HELICAL SPRING,#4,A2-SST | New OEM | Contact Us | |
| 931065-3 | CMP | WSHR,LOCK,HELICAL SPRING,#6,A2-SST | New OEM | Contact Us | |
| 931065-4 | CMP | WSHR,LOCK,HELICAL SPRING,#8,A2-SST | New OEM | Contact Us | |
| 931065-5 | CMP | WSHR,LOCK,HELICAL SPRING,#10,A2-SST | New OEM | Contact Us | |
| 931065-7 | CMP | WSHR,LOCK,HELICAL SPRING,5/16,A2-SST | New OEM | Contact Us | |
| 931067-2 | CMP | WSHR,LOCK,HI-CLR,#10,A2-SST | New OEM | Contact Us | |
| 931075-1 | CMP | WSHR,SEALING,BND,#8,A2-SST W/NPRN | New OEM | Contact Us | |
| 931077-11 | CMP | FTG,RDC BUSHING,SPXF,1X1/2,PVC-40 | New OEM | Contact Us | |
| 931078-1 | CMP | FTG,ELBOW,PUSH-CONN,1/4TX1/8MNPT,PVDF | New OEM | Contact Us | |
| 931086-10 | CMP | SCRW, HSS, CUP PT, 6-32UNCX1/8, SST | New OEM | Contact Us | |
| 931086-11 | CMP | SCRW,HSS,CUP PT,6-32UNCX1/4,SST | New OEM | Contact Us |