Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 71479-02 | GaSonics | OUTLET 3WIRE GRND 20A 250VOLTS | New OEM | Contact Us | |
| 71480-03 | GaSonics | FLANGED,INLET,MALE-LKNS,L5-2OP | New OEM | Contact Us | |
| 715-012523-002 | CMP | PULLEY TIMING BELT 12 GROOVE | New OEM | Contact Us | |
| 715-028229-002 | CMP | FTG, ADPTR, BANANA JACK | New OEM | Contact Us | |
| 715-213646-001 | CMP | BRKT,MTG PLATE, XDCR,PRESSURE | New OEM | Contact Us | |
| 716-021679-003 | CMP | PAD, WAFER HOLDER | New OEM | Contact Us | |
| 716-159969-001 | CMP | BLADDER,T1,200MM,TAPERED TAB,KIRKHILL | New OEM | Contact Us | |
| 716-161709-001 | CMP | DIAPHRAGM,SLURRY,0.074 THK EPDM | New OEM | Contact Us | |
| 71652-02 | GaSonics | I.C., INTERFACE, PRPHL, PROGRAMMABLE | New OEM | Contact Us | |
| 71662-08 | GaSonics | SCREW, SCH CAP, 4-40 X 1/2 L, SST, VEN | New OEM | Contact Us | |
| 71747-01 | GaSonics | DISC SPRING 283ID X .551OD | New OEM | Contact Us | |
| 71752-10 | GaSonics | WASHER,NYLON-FLT,.31 IDX.50D | New OEM | Contact Us | |
| 71755-13 | GaSonics | GROMMET, 3/8 ID, X 1/16 GR, RUBBER | New OEM | Contact Us | |
| 71805-01 | GaSonics | WINDOW QTZ 1.25 DIA S 1/8 IN | New OEM | Contact Us | |
| 71835-04 | GaSonics | SHAFT,PREC GND SST-.2497DX1.75 | New OEM | Contact Us | |
| 71835-16 | GaSonics | SHAFT,PREC GND SST-.2497DX4.75 | New OEM | Contact Us | |
| 71835-23 | GaSonics | SHAFT,PREC.GND SST1/4 IN DX7.75LG | New OEM | Contact Us | |
| 71858-05 | GaSonics | RETAINER,RING .023THKX.223ID | New OEM | Contact Us | |
| 71964-05 | GaSonics | CLAMP, HOSE GRIP RANGE 1 1/16 TO 2 INCH | New OEM | Contact Us | |
| 71965-03 | GaSonics | CLAMP,HOSE MINI SST-1/2-29/32IN | New OEM | Contact Us | |
| 71966-02 | GaSonics | CLAMP THOMAS 28/15 | New OEM | Contact Us | |
| 71966-06 | GaSonics | CLAMP THOMAS 35/25 | New OEM | Contact Us | |
| 72-00018-00 | Concept One | WRENCH, TORQUE-35 OPEN END, ISO17025 New tool preset | New OEM | Contact Us | |
| 72-00019-00 | Concept One | WRENCH, TORQUE-35HEX, ISO17025 New tool preset | New OEM | Contact Us | |
| 72-00021-00 | Concept One | DRILL FXT-4 .250-20 HOLES | New OEM | Contact Us | |
| 72-00026-00 | Concept One | TOOL, PADDLE ALIGN-ONE, ARM | New OEM | Contact Us | |
| 72-00028-00 | Concept One | BLOCK,ARM INSTALLATION | New OEM | Contact Us | |
| 72-00038-00 | Concept One | SCALE, INSTRUMENTS, 6 LBS | New OEM | Contact Us | |
| 72-00039-00 | Concept One | BASE,DIAL INDICATOR,W/FINE ADJ | New OEM | Contact Us | |
| 720-181211-001 | Concept One | SCR,HEX HD,#10-32,5/8 LG. | New OEM | Contact Us | |
| 720-209433-001 | Concept One | SCR,FLH,PH,0-80 X 1/8 | New OEM | Contact Us | |
| 72-028425-00 | Concept One | TOOL, REATAINING NUT | New OEM | Contact Us | |
| 72-033283-00 | Concept One | TORQUE HANDLE ADJUSTABLE | New OEM | Contact Us | |
| 72-033285-00 | Concept One | 3/8" SQAURE 5MM HEX BIT | New OEM | Contact Us | |
| 72-034412-00 | Concept One | REFERENCE TUBE,HASTINGS DB-20 | New OEM | Contact Us | |
| 72-034850-00 | Concept One | SEAL INSTALLATION TOOL | New OEM | Contact Us | |
| 72087-84 | GaSonics | SPRNG COMP, .240 OD X 3/8 LONG | New OEM | Contact Us | |
| 72098-01 | GaSonics | BRACKET MOUNTING FACE | New OEM | Contact Us | |
| 72108-01 | GaSonics | SWITCH KEY 3POS 2POLE 50V 1A | New OEM | Contact Us | |
| 72118-12 | GaSonics | FITTING SS EL 3/8TX1/4NPT/M | New OEM | Contact Us | |
| 72-166629-00 | Concept One | INSERT,SS ID1/4-20 OD7/16-14 | New OEM | Contact Us | |
| 72174-04 | GaSonics | FITTING SS ST 1/4T (SAME AS 20-0018-01) | New OEM | Contact Us | |
| 72-176556-00 | CMP | TOOL,LIGHT PIN PLUG INSTL TOP | New OEM | Contact Us | |
| 72-184223-00 | CMP | TOOL,TORQUE SCRW DRIVER,7-36 IN-LBS | New OEM | Contact Us | |
| 72188-02 | GaSonics | FTNG SS BHU 1/4TX1/8NPT/F | New OEM | Contact Us | |
| 72232-01 | GaSonics | FITTING, ADAPTOR 1/4T SWAGE X 7/16-20 MS | New OEM | Contact Us | |
| 72299-05 | GaSonics | ADAPTER,SS UT-3/8 OD X 1/2 D BT | New OEM | Contact Us | |
| 72496-05 | GaSonics | RING, CENTERING,NW50, 2-330 | New OEM | Contact Us | |
| 72496-06 | GaSonics | RING, CENTERING,NW40 VITON, 2-326 | New OEM | Contact Us | |
| 72546-02 | GaSonics | FITTING QUICK CONNECT 3/8 TUBE | New OEM | Contact Us | |
| 72581-02 | GaSonics | TUBING, POLY, YEL | New OEM | Contact Us | |
| 728-087677-010 | CMP | SCR,FLH,PH,M4 X 0.7 X 10MM LG,PEEK | New OEM | Contact Us | |
| 72911-01 | GaSonics | STUD,1/4 TURN FASTENER | New OEM | Contact Us | |
| 72912-01 | GaSonics | SPRING, 1/4 TURN FASTENER | New OEM | Contact Us | |
| 72913-01 | GaSonics | WSHR, 1/4 TURN FASTENER | New OEM | Contact Us | |
| 72914-01 | GaSonics | RETAINER,1/4 TURN FASTENER | New OEM | Contact Us | |
| 72928-01 | GaSonics | FITTING BARBED BR 1/8NPTX.078 | New OEM | Contact Us | |
| 72929-01 | GaSonics | CONNECTOR BARBED 10-32 X 1/8T | New OEM | Contact Us | |
| 72959-02 | GaSonics | SWITCH PB-1POLE SQ | New OEM | Contact Us | |
| 72959-05 | GaSonics | SWITCH POWER CONTROL | New OEM | Contact Us | |
| 72969-02 | GaSonics | CONTACTOR 3P,N.O.,SIZE 1 | New OEM | Contact Us | |
| 72980-03 | GaSonics | ADAPTOR, SST HOSE - 3/8ODT X 3/8 IDH | New OEM | Contact Us | |
| 73-00234-01 | Concept One | BOOK,C1-D,SIG6,OPER/MNT,REG | New OEM | Contact Us | |
| 73014-01 | GaSonics | FLOW CONTROLLER CYLINDER OUT | New OEM | Contact Us | |
| 73016-09 | CMP | FILTER UV-23,313NM+4NM | New OEM | Contact Us | |
| 73019-01 | GaSonics | XDUCER,DIFF,PRESS-15PS,15V,SILICON,1/8 N | New OEM | Contact Us | |
| 73029-02 | GaSonics | XDUCER,VAC-10 TORR 1/2T,W/VCR-DISC,REPL BY 23-2644(23-2852) | New OEM | Contact Us | |
| 73043-11 | GaSonics | O-RING,3-916 VITON | New OEM | Contact Us | |
| 73075-01 | GaSonics | XFMR,PWR-115/230,28V @ 3.6A | New OEM | Contact Us | |
| 73141-01 | GaSonics | SWITCH GUARD,SQUARE,AML | New OEM | Contact Us | |
| 73143-02 | GaSonics | SHIELDING,STRIP,RT ANGLE,97-505(UOM=1IN | New OEM | Contact Us | |
| 73180-02 | GaSonics | SWITCH,OPT-.01 X .06 W/WIRE | New OEM | Contact Us | |
| 73185-14 | GaSonics | CIRCUIT BREAKER,1POLE,10A,AC | New OEM | Contact Us | |
| 73185-22 | GaSonics | CIRCUIT BREAKER 1POLE,25AMP,AC | New OEM | Contact Us | |
| 73185-39 | GaSonics | CIRCUIT BREAKER,2POLE,1A,AC | New OEM | Contact Us | |
| 73211-01 | GaSonics | BALL 1/2 DIA | New OEM | Contact Us | |
| 73230-02 | GaSonics | O-RING, 5-120, 1.00 ID X .093 W, KALREZ | New OEM | Contact Us | |
| 73-2317 | GaSonics | JIG, STANDARD POSITION SETTING | New OEM | Contact Us | |
| 73-2349 | GaSonics | PIN, GUAGE, PLATEN ALIGN | New OEM | Contact Us | |
| 73245-01 | Gasonics | QUICK DISCONNECT,DELRI-PLN MT,1/16 IN | New OEM | Contact Us | |
| 73246-01 | GaSonics | QUICK DISCONNECT INSERT-DELRIN,1/16 IN | New OEM | Contact Us | |
| 73248-01 | GaSonics | VALVE, SOLENOID-4 PORT 1000MM LEADS | New OEM | Contact Us | |
| 73254-02 | GaSonics | RECEPTICAL,FISO-SCREW MOUNT | New OEM | Contact Us | |
| 73256-01 | GaSonics | CORD,JUMPER | New OEM | Contact Us | |
| 73259-03 | GaSonics | SPACER,PCB-,156 DIA,.50 IN | New OEM | Contact Us | |
| 73277-02 | GaSonics | VALVE,BELLOWS-AIR,4FVCR-NC | New OEM | Contact Us | |
| 73277-04 | CMP | VLV,BELLOWS-AIR(F-M)VCR,NC | New OEM | Contact Us | |
| 73287-01 | GaSonics | IC-8279, KEYBOARD DECODE | New OEM | Contact Us | |
| 73289-01 | GaSonics | IC,SN74276-QUAD JK FLIP-FLOP | New OEM | Contact Us | |
| 73293-01 | GaSonics | IC-UDN2879W-HIGH CURRENT SW | New OEM | Contact Us | |
| 73297-01 | GaSonics | IC-AD2701, -10V REFERENCE | New OEM | Contact Us | |
| 73316-04 | GaSonics | MANIFOLD,SOLENOID-5SP | New OEM | Contact Us | |
| 73317-06 | GaSonics | STUD,1/4-20 X 1.500 IN | New OEM | Contact Us | |
| 73325-02 | GaSonics | LAMP,HALOGEN-120V,1000W | New OEM | Contact Us | |
| 73326-01 | GaSonics | SOCKET,LAMP HALOGEN,TP-220 | New OEM | Contact Us | |
| 73333-05 | GaSonics | CYLINDER,AIR-DBLACT,2 IN STX1 IN B | New OEM | Contact Us | |
| 73336-01 | GaSonics | SENSOR,LAMP SOURCE | New OEM | Contact Us | |
| 73336-02 | GaSonics | SENSOR,PHOTO DETECTOR | New OEM | Contact Us | |
| 73337-01 | GaSonics | GASKET,FLANGE-VITON | New OEM | Contact Us | |
| 73338-07 | GaSonics | COLLARS,SETSCREW-.25 SHAFT | New OEM | Contact Us |