Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 57-2017 | GaSonics | CYLINDER, PNEUMATIC,W/AUTOSWITCH | New OEM | Contact Us | |
| 57-2041 | Gasonics | MOTOR,R/THETA-AXIS,- (SGMPH-A8B1A21),GEAR/REPLACED CONN. | New OEM | Contact Us | |
| 57-2043 | GaSonics | MOTOR,Z-AXIS,(SGMAH- A8B1AYB11),W/PULLEY | New OEM | Contact Us | |
| 57-2047 | GaSonics | DRIVER, STEP MOTOR, MICROSTEP, 5 PHASE | New OEM | Contact Us | |
| 57-2052 | GaSonics | ENCODER, MOTOR, 200 CYCLES/REV,1/4SHAFT | New OEM | Contact Us | |
| 57-2053 | GaSonics | MOTOR, STEPPING,2PH, 3A/PH | New OEM | Contact Us | |
| 57-2054 | GaSonics | CONTROLLER,STEPPER MOTOR, 2 PHASE | New OEM | Contact Us | |
| 57-2055 | GaSonics | ENCODER, 500 CYCLES/REV SHAFT DIA 6MM, 5 PH | New OEM | Contact Us | |
| 57-2057 | GaSonics | MOTOR, ENCODER,400CYCLES/REV,3/16 SHAFT-2PH | New OEM | Contact Us | |
| 57-2058 | GaSonics | FAN, AC 220/230 VAC | New OEM | Contact Us | |
| 57-2454 | GaSonics | MOTOR ASSY, Z AXIS,Z-BOT 2 | New OEM | Contact Us | |
| 57-2456 | GaSonics | CYLINDER, PANCAKE,1-1/8 IN BORE, 1IN STR | New OEM | Contact Us | |
| 57-2457 | GaSonics | CYLINDER, AIR,3/4 BORE X 2.75 STROKE | New OEM | Contact Us | |
| 57-2462 | GaSonics | CYLINDER, DOUBLE ACTING, 1/4 IN BORE, 1/ | New OEM | Contact Us | |
| 58-0013-01 | GaSonics | RELAY, DPDT, 10AMP, 24 VDC COIL | New OEM | Contact Us | |
| 58-2005 | GaSonics | SOCKET, RELAY, 8 BLADE | New OEM | Contact Us | |
| 58-2006 | GaSonics | RELAY, DPDT, 120 V COIL, 10A CONTACT | New OEM | Contact Us | |
| 58-2016 | GaSonics | RELAY, 10 A, 24 VAC,3PDT | New OEM | Contact Us | |
| 60-00002-00 | Concept One | VALVE,HIVAC,2" | New OEM | Contact Us | |
| 60-00003-00 | Concept One | VALVE,HIVAC,MAIN 4",24V | New OEM | Contact Us | |
| 60-00005-00 | Concept One | GAUGE,VAC,TUBE,TC | New OEM | Contact Us | |
| 60-00006-00 | Concept One | VALVE,3WAY,PNEU | New OEM | Contact Us | |
| 60-00011-00 | Concept One | FTG, PNEU 1/8PUSHON-1/8NPT | New OEM | Contact Us | |
| 60-00012-00 | Concept One | CYL, AIR/HYDRO COAXIAL | New OEM | Contact Us | |
| 60-00013-00 | Concept One | CYL, AIR 4.5" STROKE | New OEM | Contact Us | |
| 60-00018-00 | Concept One | CLAMP,KF25,ALUM | New OEM | Contact Us | |
| 60-00019-00 | Concept One | SEAL RING ASSY,KF25,VITON | New OEM | Contact Us | |
| 60-00020-00 | Concept One | BLANK-OFF KF25 ALUMINUM | New OEM | Contact Us | |
| 60-00022-00 | Concept One | MANF, 4-WAY PNEU VALVE (4) | New OEM | Contact Us | |
| 60-00023-00 | Concept One | VALVE,4WAY,PNEU | New OEM | Contact Us | |
| 60-00026-00 | Concept One | RING,CENTERING (ISO 100) | New OEM | Contact Us | |
| 60-00029-02 | Concept One | CLAMP,DELRIN,1/8,AIR LINE | New OEM | Contact Us | |
| 60-00033-00 | Concept One | FILTER,BACKFILL | New OEM | Contact Us | |
| 60-00055-00 | Concept One | GAUGE,VAC,TUBE | New OEM | Contact Us | |
| 60-00091-00 | Concept One | CYLINDER, PNEUMATIC, SPINDLE LIFT | New OEM | Contact Us | |
| 60-00093-00 | Concept One | O-RING,METRIC,3MM X 10MM,VITON | New OEM | Contact Us | |
| 60-00096-00 | Concept One | CAPSCREW, M6X20 | New OEM | Contact Us | |
| 60-00101-00 | Concept One | SWITCH, PRESSURE 35-80PSI | New OEM | Contact Us | |
| 60-00130-00 | Concept One | MANF, 3-WAY 5-STATION | New OEM | Contact Us | |
| 60-00131-00 | Concept One | SWITCH, PRESSURE 24V 6A | New OEM | Contact Us | |
| 60-00140-00 | Concept One | VALVE,SOFT START,KF50 | New OEM | Contact Us | |
| 60-00140-01 | Concept One | VALVE,SOFT START,KF40 | New OEM | Contact Us | |
| 60-00146-00 | Concept One | VALVE,QUICK EXHAUST | New OEM | Contact Us | |
| 60-00148-00 | Concept One | SILENCER, 1/4 NPT | New OEM | Contact Us | |
| 60-00155-01 | Concept One | HOSE,FLEXIBLE,VCR | New OEM | Contact Us | |
| 60-00161-00 | Concept One | CYL AIR,1-1/8 BORE,1 1/4 STROK | New OEM | Contact Us | |
| 60-00162-00 | Concept One | FLOW CNTRL,1/8 NPT TO 1/4 O.D. | New OEM | Contact Us | |
| 60-00163-00 | Concept One | VALVE,GATE,HIVAC,3",PNUE ACT | New OEM | Contact Us | |
| 60-00170-00 | Concept One | GAUGE,TUBE,ANALOG,OUTPUT | New OEM | Contact Us | |
| 60-00171-00 | Concept One | FLOW CNTL,1/4"OD TUBE 1/4"NPT | New OEM | Contact Us | |
| 60-00176-00 | Concept One | AIR CYL, 2.0"BORE, 5"STRK, DBL-AC | New OEM | Contact Us | |
| 60-00180-00 | Concept One | VACUUM TRANSDUCER,25KF FLANGE | New OEM | Contact Us | |
| 60-00183-00 | Concept One | FLOW CONTROL, ELBOW 1/4 OD OUT | New OEM | Contact Us | |
| 60-00187-00 | Concept One | ACTUATOR,RTRY VANE,PNUE W/ADJU | New OEM | Contact Us | |
| 60-00194-00 | Concept One | VACUUM, SWITCH, 20 TORR | New OEM | Contact Us | |
| 60-00195-00 | Concept One | VACUUM, SWITCH, 100 TORR | New OEM | Contact Us | |
| 60-00196-01 | Concept One | FTG,TEE,KF25,SHORT | New OEM | Contact Us | |
| 60-00208-00 | Concept One | VALVE,DIA,1/4"MVCR | New OEM | Contact Us | |
| 60-029344-00 | Concept One | MANOMETER, 10 TORR, 11S06, EMC | New OEM | Contact Us | |
| 60-034022-00 | Concept One | VAC SWITCH, 600 TORR | New OEM | Contact Us | |
| 60-034082-00 | Concept One | VALVE,RTANG,O-SEAL,1/2XNW16 | New OEM | Contact Us | |
| 60-10006-00 | Concept One | GUAGE, CONVECT, DO, W/VCR4 | New OEM | Contact Us | |
| 60-10124-00 | Concept One | SHOCK ABSORBER | New OEM | Contact Us | |
| 60-10125-00 | Concept One | ACTUATOR,494 ROTARY | New OEM | Contact Us | |
| 60-10126-00 | Concept One | ACTUATOR, LINEAR 12" | New OEM | Contact Us | |
| 60-1016 | GaSonics | FILAMENT XFMER | New OEM | Contact Us | |
| 60-10316-00 | Concept One | VALVE, RTANG, KF40, MNL | New OEM | Contact Us | |
| 60-10321-00 | Concept One | PNEUMATIC INTERLOCK, R-301 | New OEM | Contact Us | |
| 60-10336-00 | Concept One | VALVE,GATE,4",HEATED,B3 | New OEM | Contact Us | |
| 60-125751-00 | Concept One | VALVE,MKS,TV,KF40 | New OEM | Contact Us | |
| 60-125752-00 | Concept One | VALVE,THROT,ISO100,MKS | New OEM | Contact Us | |
| 60-133208-00 | Concept One | KIT, SEALS HVA 4" GATE VALVE HVA | New OEM | Contact Us | |
| 60-136938-00 | Concept One | SEAL RING ASSY,KF40,CHEMRAZ 51 | New OEM | Contact Us | |
| 60-174048-00 | Concept One | VLV, ISOLATION, NW100 | New OEM | Contact Us | |
| 60-174661-00 | GaSonics | FTG, SPLIT NUT, MALE 1/4 | New OEM | Contact Us | |
| 60-183985-00 | CMP | FTG,TUBE,5/32 1-TCH,10-32,NKL | New OEM | Contact Us | |
| 60-188590-00 | CMP | KIT,FILTER,REPAIR,1MICRON ELEMENT | New OEM | Contact Us | |
| 60-2011 | GaSonics | MAGNETRON NL-10254- 16 | New OEM | Contact Us | |
| 60-2022 | GaSonics | DUAL-LOOP COUPLER,MICROWAVE WR340,CONTACT FLANGE | New OEM | Contact Us | |
| 60-2025 | GaSonics | MAGNETRON, 1.9 KW,WATER COOLED | New OEM | Contact Us | |
| 60-2027 | GaSonics | ISOLATOR, MICROWAVE, WR340, 200 | New OEM | Contact Us | |
| 60-2028 | GaSonics | TUNER, 3 STUB,MICROMETER, WR 340 CONTACT | New OEM | Contact Us | |
| 60-2032 | GaSonics | DUMMY LOAD W/COUPLER WR284 | New OEM | Contact Us | |
| 60-2033 | GaSonics | WAVEGUIDE CIRCULATOR | New OEM | Contact Us | |
| 60-2043 | GaSonics | MAGNATRON, 2KW WATERCOOLED | New OEM | Contact Us | |
| 60-268593-00 | GaSonics | CYL,ROTARY,40 BORE,30MM | New OEM | Contact Us | |
| 60-268956-00 | GaSonics | CYL,.75 BORE X,2.75,10-32,SQR,AIR | New OEM | Contact Us | |
| 60-275442-00 | CMP | RING,CNTRNG,NW16,AL,ID,PERLAST,G74P | New OEM | Contact Us | |
| 60-307931-00 | CMP | CYL,63MM BORE,SINGLE ROD,DBL ACTING | New OEM | Contact Us | |
| 60-308465-00 | CMP | REGULATOR,E/P,1/8",A-T DISABLED LOWER FL | New OEM | Contact Us | |
| 60-317688-00 | CMP | REGULATOR,E/P,1/8,A-T DISABLED LOWER FL | New OEM | Contact Us | |
| 60-338008-00 | CMP | REGULATOR,E/P,1/8",A-T DISABLED LOWER FL | New OEM | Contact Us | |
| 60-342062-00 | GaSonics | RING,CNTRNG,NW40,KALREZ 8575,2-326 | New OEM | Contact Us | |
| 60-392244-00 | CMP | CYL,COMPACT,1.5"BORE X 1"STROKE,DBL ACTI | New OEM | Contact Us | |
| 60-405807-00 | Concept One | RING, CNTRNG, NW16, KALREZ 9100 O-RING, SST | New OEM | Contact Us | |
| 60-410840-00 | GaSonics | CYL,1.06DIA,AIR-DBLACT,2 IN STX1 IN B,S | New OEM | Contact Us | |
| 60-446242-00 | CMP | CYL,COMPACT,40MM BORE,15MM STROKE,DOUBLE | New OEM | Contact Us | |
| 61-0022 | GaSonics | POWER SUPPLY,SWITCHING | New OEM | Contact Us | |
| 61-2307 | GaSonics | POWER SUPPLY, 115VAC-24VDC | New OEM | Contact Us | |
| 61-2308 | GaSonics | POWER SUPPLY, 115VAC-, +5, -15, +15VDC | New OEM | Contact Us |