Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 372-76114-1 | CMP | SILICONE TUBING,SPNDLE SHFT PLSH PL | New OEM | Contact Us | |
| 372-76135-1 | CMP | BUSHING,SEAL | New OEM | Contact Us | |
| 372-76525-1 | CMP | SPACER,UPPER POLISH PLATE | New OEM | Contact Us | |
| 372M-21111-1 | CMP | FINAL POLISH PLATEN,COOLED (ASSY) | New OEM | Contact Us | |
| 372M-27021-1 | CMP | MOD, WASH STATION BRUSH | New OEM | Contact Us | |
| 372M-29010-2 | CMP | ASSY,SLURRY FEED FINAL BELOW TABL | New OEM | Contact Us | |
| 372M-29011-1 | CMP | SLURRY TUBE FINAL | New OEM | Contact Us | |
| 372M-29020-2 | CMP | ASSY,SLURRY FEED PRIMARY BELOW TABL | New OEM | Contact Us | |
| 372M-29021-1 | CMP | SLURRY,TUBE PRIMARY | New OEM | Contact Us | |
| 372M-36297-1/RW | CMP | REWORKED BOARD,NOISE SUPPRESSION | New OEM | Contact Us | |
| 372M-36374-1 | CMP | ASSY,AUX CONTROL CONSOLE PWB | New OEM | Contact Us | |
| 372M-37074-1/R | CMP | ASSY,DISK EMULATOR 12 OR LESS EPROM | New OEM | Contact Us | |
| 372M-46030-3 | CMP | ASSY,DI1 WTR PRSS REG | New OEM | Contact Us | |
| 372M-46076-1 | CMP | ASSY,PANEL PNEUMATIC VALVES | New OEM | Contact Us | |
| 372M-46173-51 | CMP | BRKT,MTG PRESSURE REGULATR/GAUGE | New OEM | Contact Us | |
| 372M-67430-1 | CMP | CAP,GUARD WAFER LIFT GUIDE ROD SHLD | New OEM | Contact Us | |
| 372M-67431-1 | CMP | GUARD,WAFER LIFT GUIDE SHAFT | New OEM | Contact Us | |
| 372M-72019-1 | CMP | PLATE,LOAD CELL | New OEM | Contact Us | |
| 372M-76182-1 | CMP | SPACER,LOWER POLISH PLATE | New OEM | Contact Us | |
| 38-00031-00 | Concept One | CABLE,THROTTLE VALVE 0-2 V | New OEM | Contact Us | |
| 38-00033-00 | Concept One | CABLE,RG58 BNC/BNC COAX | New OEM | Contact Us | |
| 38-00047-00 | Concept One | CABLE,POWER 10A 125VAC | New OEM | Contact Us | |
| 38-0015-01 | CMP | SWITCH, MICRO, 3 AMP | New OEM | Contact Us | |
| 38-0052-01 | GaSonics | CIRCUIT BREAKER, 1A, 250V.1 POLE. FUSE HLDR | New OEM | Contact Us | |
| 38-0053-01 | GaSonics | CIRCUIT BREAKER,2A,250V,1 POLE,FUSE HLDR | New OEM | Contact Us | |
| 38-0099-01 | GaSonics | SWITCH, INTERLOCK SPDT,15AMP | New OEM | Contact Us | |
| 38-0120-01 | GaSonics | CIRCUIT BREAKER, 5A, 250V, 1 POLE, FUSE HLDR | New OEM | Contact Us | |
| 38-0120-02 | GaSonics | CIRCUIT BREAKER, 15 A, 250V, 1 POLE | New OEM | Contact Us | |
| 38-0152 | GaSonics | COIL,CONTACTOR,24VAC,50HZ | New OEM | Contact Us | |
| 38-0156 | GaSonics | THERMOSTAT, MAN-RESET, 250 VAC, 3A, W/T149 | New OEM | Contact Us | |
| 38-0164 | GaSonics | CIRCUIT BREAKER, 600V, 3 POLE, 80A | New OEM | Contact Us | |
| 38-0224 | GaSonics | CONTACTOR,2P,30A,600V,24V,COIL,60HZ | New OEM | Contact Us | |
| 38-0230 | GaSonics | SWITCH, THROTTLE VALVE | New OEM | Contact Us | |
| 38-027422-00 | Concept One | PENVALVE 80-CDLD 15ft. CABLE | New OEM | Contact Us | |
| 38-029576-00 | Concept One | CABLE,FIBER OPTIC, 39 IN | New OEM | Contact Us | |
| 38-052776-00 | CMP | CABLE,TRACK AND KEYBOARD EXT. | New OEM | Contact Us | |
| 38-106443-00 | Concept One | CABLE VALVE TO PM7 | New OEM | Contact Us | |
| 38-112711-00 | Concept One | CBL ASSY,FBR OPT,W/LENS,6FT | New OEM | Contact Us | |
| 38-124025-15 | CMP | CABLE,DATA EXTN,AGV,DB25M-F | New OEM | Contact Us | |
| 38-125748-00 | Concept One | CABLE,MKS,TV | New OEM | Contact Us | |
| 38-127756-00 | Concept One | MANOMETER ADAPTER | New OEM | Contact Us | |
| 38-129819-00 | Concept One | RS-232 ADAPTER | New OEM | Contact Us | |
| 38-180804-00 | CMP | CABLE,R3 FLEX SIGNAL 4FT | New OEM | Contact Us | |
| 38-180805-00 | CMP | CABLE,R3 FLEX PWR 4FT | New OEM | Contact Us | |
| 38-2674 | GaSonics | SWITCH,PB,ILLUM,2 NO.,EXT W/FULL SHRD,GR | New OEM | Contact Us | |
| 38-2675 | GaSonics | CIRCUIT, BREAKER, 4A, 250V, 1POLE, FUSE HOLDE | New OEM | Contact Us | |
| 38-2684 | Gasonics | HALL EFFECT SENSOR,E10 | New OEM | Contact Us | |
| 38-2694 | GaSonics | GUARD METAL BUTTON | New OEM | Contact Us | |
| 38-2711 | GaSonics | SHROUD, DEEP SWITCH,PUSHBUTTON | New OEM | Contact Us | |
| 38-2726 | GaSonics | SWITCH, AUXILIARY, 600 V, 10 AMPS TYPE LS | New OEM | Contact Us | |
| 38-2727 | GaSonics | SWITCH, AUXILIARY, 600 V, 10 AMP, TYPE LS | New OEM | Contact Us | |
| 38-2729 | GaSonics | CONTACTOR, 4 POLE, 45 AMP, 120 VAC | New OEM | Contact Us | |
| 38-2732 | GaSonics | CONTACTOR, 3 POLE, 30 AMP, 24 VAC | New OEM | Contact Us | |
| 38-2755-03 | CMP | CIRCUIT BREAKER, 2 POLE, 20 AMP, 208 VAC | New OEM | Contact Us | |
| 38-2779 | GaSonics | SWITCH, TACTILE DOME | New OEM | Contact Us | |
| 38-2782 | GaSonics | CONTACTOR, 3 POLE, 50 AMP, 24 VAC COIL | New OEM | Contact Us | |
| 38-2803 | GaSonics | CONTACTOR, 2 POLE,60 A, 120V, 60Hz | New OEM | Contact Us | |
| 38-2832 | GaSonics | OPTO SWITCH, CLOSE- | New OEM | Contact Us | |
| 38-2838 | GaSonics | SWITCH, OPTO,T-SHAPED, 5 TO 24VDC,5MM S | New OEM | Contact Us | |
| 38-288472-00 | CMP | CABLE,ETHERNET,CRSVR,EPD | New OEM | Contact Us | |
| 38-381971-00 | CMP | CABLE,POWER/SIGNAL,200VDC,74L,90PIN,56 | New OEM | Contact Us | |
| 39-0003-01 | GaSonics | LAMP, GREEN, 24V | New OEM | Contact Us | |
| 39-00067-00 | Concept One | CONN,MALE,3 POS | New OEM | Contact Us | |
| 39-00078-02 | Concept One | CONN, 3 POS RECEPTICAL | New OEM | Contact Us | |
| 39-00087-00 | Concept One | ADPTR, PANEL MOUNT 10 AIR | New OEM | Contact Us | |
| 39-00099-00 | Concept One | CONN, 7 POS. PLUG | New OEM | Contact Us | |
| 39-00110-00 | Concept One | CONN, HW BULKHEAD R.F. COAX | New OEM | Contact Us | |
| 39-00133-00 | Concept One | COUPLING, 10 AIR FEM BODY CONN | New OEM | Contact Us | |
| 39-00134-00 | Concept One | COUPLING, 10 AIR MALE BODY | New OEM | Contact Us | |
| 39-00143-00 | Concept One | SCRW,LOCK,FEMALE,FOR D-SUB | New OEM | Contact Us | |
| 39-00149-00 | Concept One | CONN, 125 VAC, 30A | New OEM | Contact Us | |
| 39-00150-00 | Concept One | CONN, 3PHASE, 250V, 30A | New OEM | Contact Us | |
| 39-00248-00 | Concept One | CONN,3PRONG PNL JACK (F) | New OEM | Contact Us | |
| 3900-738168 | CMP | BRUSH,5.00 LH SPOKES BOTTOM | New OEM | Contact Us | |
| 3900-738170 | CMP | BRUSH,5.00 RH SPOKES TOP | New OEM | Contact Us | |
| 39-041912-00 | Concept One | TENTUBE COMPLETE COUPLING | New OEM | Contact Us | |
| 39-10021-00 | Concept One | CONN,9 PIN D MALE CRIMP | New OEM | Contact Us | |
| 39-10031-00 | Concept One | CONTACT,PIN,24-20AWG,D-SUB | New OEM | Contact Us | |
| 3910-700046 | CMP | BULB,24V T-4 1/2 | New OEM | Contact Us | |
| 3910-700238 | CMP | FILTER,SLURRY | New OEM | Contact Us | |
| 3910-719277 | CMP | FILTER,NYLON SELF DRAIN 1/8 NPTF | New OEM | Contact Us | |
| 3910-739149 | CMP | FILTER,AIR 3/4NPT PORT COPPER FREE | New OEM | Contact Us | |
| 39-175842-00 | GaSonics | CONN,HAN C-MODULE 3-CONTACT,40 A FEMALE INSERT | New OEM | Contact Us | |
| 39-175843-00 | GaSonics | CONN,HAN E-MODULE 6-CONTACT,16 A,MALE IN | New OEM | Contact Us | |
| 39-175844-00 | GaSonics | CONN,HAN E-MODULE 6-CONTACT,16A,FEMALE INSERT | New OEM | Contact Us | |
| 39-2013 | CMP | LAMP HALOGEN,1000W,120VAC GE | New OEM | Contact Us | |
| 39-2018 | GaSonics | LAMP, ULTRAVIOLET | New OEM | Contact Us | |
| 39-3002 | GaSonics | PILOT LIGHT, ROUND FLUSH, GREEN, 24V | New OEM | Contact Us | |
| 39-3004 | GaSonics | LAMP, INCAND, 24V | New OEM | Contact Us | |
| 3940-108158 | CMP | TAPE,R3 WAND | New OEM | Contact Us | |
| 3940-109917 | CMP | TAPE,3 WIDE VINYL WHITE CLEAN ROOM | New OEM | Contact Us | |
| 3940-770457 | CMP | TAPE,R1 WAND | New OEM | Contact Us | |
| 3940-770458 | CMP | TAPE,R2 WAND | New OEM | Contact Us | |
| 40-0059 | GaSonics | FUSE, 5 AMP,SLOW BLO, 3AG, 250VAC | New OEM | Contact Us | |
| 40-2006-09 | Ontrak | FUSE, 250V, 4A, DUAL ELEMENT | New OEM | Contact Us | |
| 40-323705-00 | CMP | CABLE,FIBER OPTIC,CURVED PROBE,100UM,200 | New OEM | Contact Us | |
| 42-0010-004 | CMP | CNTRLR,SEMIX MICROCOMPUTE | New OEM | Contact Us | |
| 472-17286-150 | CMP | RING,RETAIN CARRIER 150M N/LIP PPS | New OEM | Contact Us | |
| 472-17384 | CMP | CBL ASSY,ARM POSITION PL19-PL355 AND EN1 | New OEM | Contact Us | |
| 472-17613 | CMP | TUBE,SLURRY DISTRIBUTION | New OEM | Contact Us |