Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 27-00175-00 | Concept One | ELETRONOC,PNEU INTERFACE VLV | New OEM | Contact Us | |
| 27-00184-00 | Concept One | HEAD, PMT DETECTOR | New OEM | Contact Us | |
| 27-028379-00 | Concept One | AE PDX1400 1.4KW LF GEN. | New OEM | Contact Us | |
| 27-028379-00RW | Concept One | AE PDX1400 1.4KW LF GEN. | New OEM | Contact Us | |
| 27-029507-00 | Concept One | PCA,PMT H/V CONT,DUAL CH | New OEM | Contact Us | |
| 27-029508-00 | Concept One | COMPUTER,ENDPOINT, DUAL HEAD | New OEM | Contact Us | |
| 27-029570-00 | Concept One | DETECTOR, DUAL ENDPOINT | New OEM | Contact Us | |
| 27-029573-00 | Concept One | HEAD,FIBER OPTIC,30 DEG | New OEM | Contact Us | |
| 27-029575-00 | Concept One | HEAD,FIBER OPTIC, 45 DEG | New OEM | Contact Us | |
| 27-029889-00 | Concept One | PS,VDC MEGAPACK 7 OUTPUTS | New OEM | Contact Us | |
| 27-032653-00 | Concept One | TRAZAR MATCH 5KW W/ARC SENSOR | New OEM | Contact Us | |
| 27-034212-00 | Concept One | GEN,2.75KW 13.56MHZ,CE MARK | New OEM | Contact Us | |
| 27-048040-00 | Concept One | METER,PRESS SW,TMPR-PRF | New OEM | Contact Us | |
| 27-08382-00 | Concept One | TC, TYPE"E", 1/8DIA x 12 | New OEM | Contact Us | |
| 27-10343-00 | Concept One | CAP MANOMETER,HEATED 10 TOR | New OEM | Contact Us | |
| 27-103728-00 | Concept One | PWR SPLY,+5V,+24V,100W | New OEM | Contact Us | |
| 27-103729-00 | Concept One | PWR SPLY,+/-15V,50W | New OEM | Contact Us | |
| 27-115666-00 | Concept One | CNTRLR,LL PRESS,651CD2S1B | New OEM | Contact Us | |
| 27-119976-00 | Concept One | GAUGE, PHOTOHELIC, .5", TAMPERPRF | New OEM | Contact Us | |
| 27-121645-00 | Concept One | MATCH,TRAZAR,SEQ,IMP COOLING | New OEM | Contact Us | |
| 27-124735-00 | Concept One | PS/AC/DC, 5V, +/-15V, 65W | New OEM | Contact Us | |
| 27-126062-00 | Concept One | MANO,10 TORR,DSUB,1/2 VCR | New OEM | Contact Us | |
| 27-126669-00 | Concept One | VALVE,THROT,CNTRL,MKS | New OEM | Contact Us | |
| 27-149449-00 | Concept One | LFC,P2000I,5ML/MIN,TEOS | New OEM | Contact Us | |
| 27-149451-00 | Concept One | LFC,P2000I,0.02ML/MIN,TMP | New OEM | Contact Us | |
| 27-149452-00 | Concept One | LFC, P2000I, 0.5ML/MIN TMB | New OEM | Contact Us | |
| 27-150594-00 | Concept One | WATLOW CONTROLLER | New OEM | Contact Us | |
| 27-151731-00 | Concept One | PWR SPLY, PFC500 24V/20A | New OEM | Contact Us | |
| 27-152454-00 | Concept One | CARD,INTEL8086,SBX-351 OPT | New OEM | Contact Us | |
| 27-152739-00 | Concept One | CARD,INTEL8086,SBX-351,TEOS OP | New OEM | Contact Us | |
| 27-152740-00 | Concept One | CARD,INTEL8086,SBX-354,C1W | New OEM | Contact Us | |
| 27-153922-00 | Concept One | FILTER,RFI | New OEM | Contact Us | |
| 27-153945-01 | Concept One | DRIVE,EXT/ROT,C1 ROBOT,OEM750 | New OEM | Contact Us | |
| 27-153945-02 | Concept One | DRIVE,LIFT,C1 ROBOT,OEM750 | New OEM | Contact Us | |
| 27-156754-00 | Concept One | GEN,RF,HIGH,AE,RFG5500,STPNTRK | New OEM | Contact Us | |
| 27-157149-00 | Concept One | PS, DC MEGAPAC, 6 OUT W/70VF, C1 | New OEM | Contact Us | |
| 27-169988-00 | GaSonics | GEN, MICROWAVE, 2 KW AIXCON, PEP PLUS | New OEM | Contact Us | |
| 27-181952-00 | CMP | OEM SPARE,LAMP (BULB),FOR FL2002 | New OEM | Contact Us | |
| 27-255873-00 | Concept One | RF MATCH,13.56MHZ,MERCURY 3013 | New OEM | Contact Us | |
| 27-260374-00 | Concept One | PWR SPLY,75V,4A,OEM300,PARKER | New OEM | Contact Us | |
| 27-264482-00 | GaSonics | RF MATCH,& CNTRLR,13.56MHZ,HI EFFICIENCY | New OEM | Contact Us | |
| 27-277312-00 | Concept One | CNTRLR,LIMIT CONTROL,OVERTEMP,J-TYPE | New OEM | Contact Us | |
| 27-277770-00 | GaSonics | KYBD,PORTABLE,INTEGRATED PS/2 TRACKBALL | New OEM | Contact Us | |
| 27-289169-00 | Concept One | PWR SPLY, 90-132, 185-264, 300W, 3U, ATX | New OEM | Contact Us | |
| 27-307499-00 | Concept One | PWR SPLY, 24V, 8A, 192W, C1D, C1W | New OEM | Contact Us | |
| 27-307500-00 | Concept One | PWR SPLY,90V,2.5A,225W,C1D,C1W | New OEM | Contact Us | |
| 27-307501-00 | Concept One | QUAD POWER SUPPLY, DIRECT REPLACEMENT FOR P/N 27-00029-00 | New OEM | Contact Us | |
| 27-311542-00 | CMP | PUMP,AIR DRIVEN,5:1,DOUBLE ENDED | New OEM | Contact Us | |
| 27-313089-00 | GaSonics | CNTRLR,TYPE 3504,TEMP CONT/PROGRAMMER | New OEM | Contact Us | |
| 27-313385-00 | Concept One | CNTRLR,LATCHING OUTPUT,OVERTEMP,E-TYPE | New OEM | Contact Us | |
| 27-314860-00/RW | CMP | COMPUTER,CLEANER,200MM,ORBITAL | New OEM | Contact Us | |
| 27-316926-00 | GaSonics | OEM SPARE,CONTROL CARD II,ZBOT,BROOKS | New OEM | Contact Us | |
| 27-316931-00 | GaSonics | OEM SPARE,VAC SWITCH,ZBOT,BROOKS,PCA | New OEM | Contact Us | |
| 27-317033-00 | Concept One | ELO Touch Flat Panel | New OEM | Contact Us | |
| 27-323535-00 | Concept One | LFC,TMP 0.2 ML/MIN,1/8" M VCR,D2000I,DIGITAL | New OEM | Contact Us | |
| 27-323538-00 | Concept One | LFC,TMB 0.5 ML/MIN,1/8" M VCR,D2000I,DIGITAL | New OEM | Contact Us | |
| 27-339409-00 | CMP | PUMP,VAC,PIAB X60F5-KNA | New OEM | Contact Us | |
| 27-345639-00 | CMP | GEN,FIBER OPTICS,FLASH LAMP ADJUSTABLE | New OEM | Contact Us | |
| 27-345767-00 | GaSonics | CONTROLLER, WVDS, TEMP, RTD 24V | New OEM | Contact Us | |
| 27-345769-00 | GaSonics | DISPLAY, LCD, OPTR INTERFACE, 2X16, 6F-KEY, 0 | New OEM | Contact Us | |
| 27-347289-00 | Concept One | CNTRLR,PM7 PENDULUM VAT,FOR C1,C2 ONLY | New OEM | Contact Us | |
| 27-358810-00/OBS | CMP | CNTRLR,VFD,MM37/2,230V,370W | New OEM | Contact Us | |
| 27-359300-00 | CMP | CNTRLR,INVERTER,VFS11,1/2HP,240V,0.4KW | New OEM | Contact Us | |
| 27-360889-00 | Concept One | OEM SPARE,ANALOG INPUT BOARD C1 MULTIBUS | New OEM | Contact Us | |
| 27-360890-00 | Concept One | OEM SPARE,RAM BOARD C1 MULTIBUS | New OEM | Contact Us | |
| 27-367678-00 | Concept One | LFC,5ML/MIN,TEOS,1/8MVCR,DIGITAL,D200I | New OEM | Contact Us | |
| 27-370743-00 | Concept One | MANOMETER,DIFF CAPACITANCE,1 TORR,226A,4VCR-F | New OEM | Contact Us | |
| 27-384575-00 | CMP | CNTRLR,EXTENDER,24VDC,25W,1A,LONGVIEW | New OEM | Contact Us | |
| 27-397596-00 | Concept One | 1247L 12-inch Open-Frame Touchmonitor | New OEM | Contact Us | |
| 27-414137-00 | CMP | COMPUTER,SYSCON DUAL CORE | New OEM | Contact Us | |
| 27-414138-00 | CMP | COMPUTER,CLARUS CLEANER DUAL CORE | New OEM | Contact Us | |
| 27-414139-00 | CMP | COMPUTER,WHS DUAL CORE | New OEM | Contact Us | |
| 27-414144-00 | CMP | COMPUTER,MP DUAL CORE | New OEM | Contact Us | |
| 27-425639-00 | GaSonics | PWR SPLY,MICROWAVE,208VAC,16A,1.8KW,SINGLE PHASE | New OEM | Contact Us | |
| 27-448663-00 | CMP | PWR SPLY,24V,21A,500W,84-264VAC,FULLY REGULATED O/P | New OEM | Contact Us | |
| 27-450285-00 | Concept One | DETECTOR,INFRARED GAS,SIF4,1M TORR,24VDC,2A,50M SECOND | New OEM | Contact Us | |
| 27-451916-00 | CMP | DISPLAY,LCD,19SXGA,TOUCHSCREEN,W/ RESIS | New OEM | Contact Us | |
| 27-999748-00 | CMP | CYL AIR 3/4 0X10' | New OEM | Contact Us | |
| 28-00084-00 | Concept One | RES POT,10K,1/2W,10%,TOP,ADJ | New OEM | Contact Us | |
| 2805-108452-001 | CMP | ASSY,PAD OSCILLATOR MP1 & MP3 | New OEM | Contact Us | |
| 2805-108452-002 | CMP | ASSY,PAD OSCILLATOR MP2 & MP4 | New OEM | Contact Us | |
| 2805-109621 | CMP | ASSY,MP1 & MP3 LOWER MTR HI SPEED | New OEM | Contact Us | |
| 2805-109622 | CMP | ASSY,MP2 & MP4 LOWER MTR HI SPEED | New OEM | Contact Us | |
| 2805-109927 | CMP | ASSY,BLADDERLESS PAD COND ARM | New OEM | Contact Us | |
| 2805-110158 | CMP | ASSY,R1 CENTER BAR CONTACT WAND | New OEM | Contact Us | |
| 2805-110883 | CMP | ASSY,ROLLER LARGE BUFF | New OEM | Contact Us | |
| 2805-111263 | CMP | ASSY, MTR W/CONN BUFFER HEAD &PLTN | New OEM | Contact Us | |
| 2805-111268 | CMP | ASSY,ROLLER SMALL BUFF | New OEM | Contact Us | |
| 2805-111572 | CMP | KIT ASSY,PLATEN BUFF | New OEM | Contact Us | |
| 2805-112593 | CMP | ASSY,MP2 & MP4 FLOW CONTROL WAFER CYL676 | New OEM | Contact Us | |
| 2805-700905 | CMP | ASSY,PAD ALIGNMENT FIXTURE | New OEM | Contact Us | |
| 2805-700919 | CMP | KIT,POLISH HEAD TUBING | New OEM | Contact Us | |
| 2805-701363 | CMP | ASSY,POLISH BELL | New OEM | Contact Us | |
| 2805-701374 | CMP | ASSY,WAND TAPE | New OEM | Contact Us | |
| 2805-717728 | CMP | ASSY,MP1 & MP3 FLOW CONTROL WAFER CYL676 | New OEM | Contact Us | |
| 2805-717749 | CMP | ASSY,PAD COND BRUSH W/INSERTS | New OEM | Contact Us | |
| 2805-718859 | CMP | ASSY,WAND CERAMIC 4 CHANNEL 90MIL | New OEM | Contact Us | |
| 2805-737524 | CMP | ASSY,BALL SPLINE | New OEM | Contact Us | |
| 2805-737567 | CMP | ASSY,676 200MM PARTS (CONVERSION KIT) | New OEM | Contact Us | |
| 2805-737801 | CMP | ASSY,CASSETTE MANF OPTION 6 | New OEM | Contact Us |