Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-138707-00 | Concept One | FILTER,1.5 MICRON,1/4 FLARE | New OEM | Contact Us | |
| 22-153909-00 | Concept One | O-RING,.139 XSECT X 17.69 ID | New OEM | Contact Us | |
| 22-154908-00 | GaSonics | O-RING,2-225,8575KALREZ | New OEM | Contact Us | |
| 22-170735-00 | GaSonics | PULLEY,TIMING BELT,20 GROOVES | New OEM | Contact Us | |
| 22-172315-00 | GaSonics | THERMOSTAT, LAMP TRAY, IRIDIA-DL | New OEM | Contact Us | |
| 22-174348-00 | GaSonics | O-RING, DOVE TAIL, SEAL,CHEMRAZ, 513 | New OEM | Contact Us | |
| 22-174886-00 | CMP | FTG,ELBOW,ADJUSTABLE,3/32T,316SST | New OEM | Contact Us | |
| 22-180918-00 | CMP | FTG,NUT,FLARE,3/8,PFA | New OEM | Contact Us | |
| 22-182416-00 | CMP | SEAL,MV POLISHER WINDOW FRAME GASKET | New OEM | Contact Us | |
| 22-182735-00 | CMP | O-RING,266.29IDX3.53W VTN | New OEM | Contact Us | |
| 22-182737-00 | CMP | O-RING,8.737IDX8.943OD VTN | New OEM | Contact Us | |
| 22-184779-00 | CMP | RING,WEAR,PAD COND BLOCK Y CLEAN EDGE | New OEM | Contact Us | |
| 22-185349-00 | CMP | VALVE,CHECK,3/8 FLARE,PFA | New OEM | Contact Us | |
| 22-2300 | GaSonics | MANIFOLD -10 POS TYPE A | New OEM | Contact Us | |
| 22-264611-00 | GaSonics | O-RING,-226,FLUOROSILICONE | New OEM | Contact Us | |
| 22-264779-00 | GaSonics | O-RING,-223,FLUOROSILICONE,1.609IDX.139W | New OEM | Contact Us | |
| 22-2666 | GaSonics | ELBOW, FITTING, 90 DEGREE, NW80 | New OEM | Contact Us | |
| 22-2667 | GaSonics | BELLOWS, NW50, 3.94L | New OEM | Contact Us | |
| 22-2682 | GaSonics | VALVE, BELLOWS SEALED 1/2 VCR FEMALE | New OEM | Contact Us | |
| 22-2683 | GaSonics | FITTING, DOUBLE MALE UNION 1/2 VCR | New OEM | Contact Us | |
| 22-2685 | GaSonics | VALVE, FLOW CONTROL | New OEM | Contact Us | |
| 22-2693 | GaSonics | REDUCER CONICAL, NW50-NW80, SS | New OEM | Contact Us | |
| 22-269441-00 | GaSonics | BEARING,BALL,FLANGE,.25IN,.625IN,.196IN | New OEM | Contact Us | |
| 22-2734 | GaSonics | VALVE, 4 WAY, SINGLE SOLENOID | New OEM | Contact Us | |
| 22-2735 | GaSonics | VALVE, 4 WAY, DOUBLE SOLENOID,W/O MANIFO | New OEM | Contact Us | |
| 22-2740 | GaSonics | VALVE, DIAPHRAM,1/4, FEM, VCR | New OEM | Contact Us | |
| 22-274918-00 | Concept One | O-RING,2-259,VITON V0747-75,PEND VALVE | New OEM | Contact Us | |
| 22-275478-00 | Concept One | 012 PERLAS O-RING | New OEM | Contact Us | |
| 22-275499-00 | Concept One | O-RING,-110,PERLAST G74P,.362" ID X.103 CS | New OEM | Contact Us | |
| 22-2756 | GaSonics | VALVE, DIAPHRAM,AIR-OP NORMALLY CLOSED, 1/4 MALE VCR | New OEM | Contact Us | |
| 22-278532-00 | CMP | SEAL,WAFER HEAD | New OEM | Contact Us | |
| 22-2786 | GaSonics | VALVE, SOLENOID | New OEM | Contact Us | |
| 22-2810 | GaSonics | VALVE, METERING | New OEM | Contact Us | |
| 22-281048-00 | CMP | O-RING,2-176,VITON,75 DUROMETER | New OEM | Contact Us | |
| 22-2814 | GaSonics | CONTROLLER, SPEED #10-32 X 5/32 | New OEM | Contact Us | |
| 22-2825 | Gasonics | VALVE, BELLOWS,NW40 W/O SOLENOID | New OEM | Contact Us | |
| 22-2826 | Gasonics | VALVE, BELLOWS NW63 W/O SOLENOID | New OEM | Contact Us | |
| 22-2829 | GaSonics | VALVE, THROTTLE,SIZE 2-1/2 | New OEM | Contact Us | |
| 22-2848 | GaSonics | VALVE, DIAPHRAGM, PNEUMATIC, 1/4 VCR FE | New OEM | Contact Us | |
| 22-284913-00 | GaSonics | O-RING,2-121,1.049 ID X 0.103 W,CHEMRAZ | New OEM | Contact Us | |
| 22-292844-00 | CMP | SEAL, SHIELD,ARM XDF, HP | New OEM | Contact Us | |
| 22-299658-00 | GaSonics | RING, RETAIN, EXT, .187IN, E-TYPE | New OEM | Contact Us | |
| 22-301288-00 | Concept One | O-RING,-206,PERLAST G74P,.484ID x .139CS | New OEM | Contact Us | |
| 22-310733-00 | Concept One | O-RING, 2-155, KALREZ | New OEM | Contact Us | |
| 22-311222-00 | CMP | O-RING,3-901,EPDM,70 DURO | New OEM | Contact Us | |
| 22-311584-00 | CMP | O-RING,2-007,BUNA,70D | New OEM | Contact Us | |
| 22-314321-00 | CMP | O-RING,.197 ID X .039 W,VITON,A75, METRI | New OEM | Contact Us | |
| 22-315669-00 | GaSonics | O-RING,2-114,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-315671-00 | GaSonics | O-RING,2-121,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315796-00 | GaSonics | O-RING,3-916,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315799-00 | GaSonics | O-RING,2-261,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315800-00 | GaSonics | O-RING,2-330,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315801-00 | GaSonics | O-RING,2-378,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315802-00 | GaSonics | O-RING,2-276,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315803-00 | GaSonics | O-RING,2-376,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-315804-00 | GaSonics | O-RING,2-120,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315805-00 | GaSonics | O-RING,2-260,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315806-00 | GaSonics | O-RING,2-024,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315807-00 | GaSonics | O-RING,2-012,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315808-00 | GaSonics | O-RING,2-340,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315809-00 | GaSonics | O-RING,2-226,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-315810-00 | GaSonics | O-RING,2-233,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-315811-00 | GaSonics | O-RING,2-326,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us | |
| 22-317213-00 | GaSonics | O-RING,2-116,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-317215-00 | GaSonics | O-RING,2-216,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-324234-00 | CMP | SEAL,WAFER HEAD,RESTRAINED | New OEM | Contact Us | |
| 22-324784-00 | GaSonics | O-RING,2-214,PERLAST G74P | New OEM | Contact Us | |
| 22-339004-00 | GaSonics | O-RING,2-122,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us | |
| 22-343175-00 | Concept One | O-RING,2-012,KALREZ 4079 | New OEM | Contact Us | |
| 22-346441-00 | Concept One | O-RING,2-019,0.801IDX.070,KALREZ 9100 UP | New OEM | Contact Us | |
| 22-350753-00 | Concept One | O-RING, MLD, 30.120 X .275 V75, 75 DUROMETE | New OEM | Contact Us | |
| 22-353632-00 | Concept One | VALVE,DIAPH,3PORT,NO,3.13" | New OEM | Contact Us | |
| 22-358255-00 | CMP | FTG,ADPTR,REDUCER,SPACESA | New OEM | Contact Us | |
| 22-359229-00 | GaSonics | O-RING,K-123,1.174 ID X .103W,KALREZ 857 | New OEM | Contact Us | |
| 22-380216-00 | CMP | GASKET,LENS,1-21/32 X 1-1/4 SIZE,SILIC | New OEM | Contact Us | |
| 22-391348-00 | Concept One | MFC,2SLM,N2,1/4"VCR,9PIN D-SUB,GF125 | New OEM | Contact Us | |
| 22-393191-00 | Concept One | MFC,5SLM,N2,1/4"VCR,9PIN D-SUB,GF125 | New OEM | Contact Us | |
| 22-399654-00 | CMP | RING,RETAIN,EXT,3/32"DIA,E-STYLE,SST,PLAIN | New OEM | Contact Us | |
| 22-400471-00 | CMP | ACTUATOR,SPARE ROTATION/GRIPPER ASSEMBLY | New OEM | Contact Us | |
| 22-400575-00 | CMP | SEAL,ROD,0.125ID X 0.25OD X 0.083W,UH | New OEM | Contact Us | |
| 22-405816-00 | Concept One | O-RING, AS568-242, KALREZ 9100, 68, AMBER | New OEM | Contact Us | |
| 22-425049-00 | Concept One | MFC,10SLM,N2,1/4"VCR,9PIN DSUB,GF125C | New OEM | Contact Us | |
| 22-437794-00 | Concept One | MFC,25SLM,H2,1/4"VCR,9PIN DSUB,GF125C | New OEM | Contact Us | |
| 22-453096-00 | Concept One | O-RING, AS568-110, KALREZ 9100, 68, AMBER TR | New OEM | Contact Us | |
| 22-454102-00 | Concept One | O-RING, AS568-143, KALREZ 9100, 68, AMBER TR | New OEM | Contact Us | |
| 22-462726-00 | Concept One | O-RING,K-223,KALREZ 9100 | New OEM | Contact Us | |
| 22-462728-00 | Concept One | O-RING,K-209,KALREZ 9100 | New OEM | Contact Us | |
| 22-462730-00 | Concept One | O-RING,K-142,KALREZ 9100 | New OEM | Contact Us | |
| 2250-109423 | CMP | FTG,CPLG 1/4ID QDISC GRAY POLY | New OEM | Contact Us | |
| 2250-109424 | CMP | FTG,ELBOW HS BRB 1/4QDISC POLY | New OEM | Contact Us | |
| 2250-111604 | CMP | FTG,ELBOW UN 3/8OD X1/4OD KYNAR | New OEM | Contact Us | |
| 2250-700190 | CMP | FTG,ELBOW 1/4 | New OEM | Contact Us | |
| 2250-700193 | CMP | FTG,ELBOW 3/8 | New OEM | Contact Us | |
| 2250-700194 | CMP | FTG,ELBOW 3/8 1/4 90 SPDFT | New OEM | Contact Us | |
| 2250-700203 | CMP | FTG,ELBOW BARBED 90' X 1" | New OEM | Contact Us | |
| 2250-700206 | CMP | FTG,ELBOW ML 3/8OD X 1/8NPT | New OEM | Contact Us | |
| 2250-700210 | CMP | FTG,ELBOW RIGID 3/8 X 1/4NPT | New OEM | Contact Us | |
| 2250-700211 | CMP | FTG,ELBOW SWIVEL | New OEM | Contact Us | |
| 2250-700214 | CMP | FTG,ELBOW SWIVEL 3/8TUBE 1/4NPT | New OEM | Contact Us | |
| 2250-700215 | CMP | FTG,ELBOW SWIVEL 5/32OD 1/8MNPT | New OEM | Contact Us |