Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 2250-700247 | CMP | FTG,ADPTR 10-32 TO 1/8 | New OEM | Contact Us | |
| 2250-700385 | CMP | NOZZLE,SPRAY,1/8NPTX1,PVC | New OEM | Contact Us | |
| 2250-700454 | CMP | PLUG,1/8ID RUBBER CAP | New OEM | Contact Us | |
| 2250-700657 | CMP | FTG,TEE 1" SCH40 W SXSXS | New OEM | Contact Us | |
| 2250-700668 | CMP | FTG,TEE UNION 3/8 SPEEDFIT | New OEM | Contact Us | |
| 2250-700670 | CMP | FTG,TEE SWIVEL 10-32 1/8 SST | New OEM | Contact Us | |
| 2250-700672 | CMP | FTG,TEE UNION 1/2 X 1/2 X1/8 OD | New OEM | Contact Us | |
| 2250-700674 | CMP | FTG,TEE UNION 1/4 (3104-56-00) | New OEM | Contact Us | |
| 2250-700679 | CMP | FTG,TEE Y 3/8 2WAY DIVIDER | New OEM | Contact Us | |
| 2250-700744 | CMP | FTG,UNION 1' SCH 80 B W/O-RING | New OEM | Contact Us | |
| 2250-700750 | CMP | FTG,UNION ROTARY SST | New OEM | Contact Us | |
| 2250-700990 | CMP | COUPLING,CUSTOM FLOW CNTRL | New OEM | Contact Us | |
| 2250-700991 | CMP | FTG,JIC CUSTOM | New OEM | Contact Us | |
| 2250-717036 | CMP | FTG,BLKHD | New OEM | Contact Us | |
| 2250-717037 | CMP | FTG,BLKHD HI-FLOW | New OEM | Contact Us | |
| 2250-717945 | CMP | FTG,ELBOW ST 90DEG 1"PVC SPGXS | New OEM | Contact Us | |
| 2250-728068 | CMP | FTG,SLURRY DIAPHRAGM | New OEM | Contact Us | |
| 2250-737692 | CMP | FTG,MANF | New OEM | Contact Us | |
| 2250-737815 | CMP | FTG,ELBOW MALE 1/4MNPT X 1/2T | New OEM | Contact Us | |
| 2250-737941 | CMP | FTG,FERR BCK 1/4OD SST SWAGELOK | New OEM | Contact Us | |
| 2250-737981 | CMP | FTG,TEE 1/4TX1/4T X 1/8MNPT PFA | New OEM | Contact Us | |
| 2250-738109 | CMP | JOINT, FLOATING 5/16-24 | New OEM | Contact Us | |
| 2250-738350 | CMP | VALVE, IN-LINE FLOW CNTL 1/4T | New OEM | Contact Us | |
| 2250-738584 | CMP | FTG,ROTARY UNION BUFF MOD | New OEM | Contact Us | |
| 2250-738804 | CMP | FTG, 1/4"TUBE SST QCK DSCNCT BDY | New OEM | Contact Us | |
| 2250-738805 | CMP | FTG, 1/4"NPTM SST QUICK DSCNCT | New OEM | Contact Us | |
| 2250-739136 | CMP | FTG,ELBOW 3/8MNPT X3/8TB OD SST | New OEM | Contact Us | |
| 2250-739584 | CMP | FTG,CONNECTOR 10-32UNFX1/4T SST | New OEM | Contact Us | |
| 2250-770576 | CMP | FTG,ELBOW 3/32 BESWICK SST | New OEM | Contact Us | |
| 2250-770690 | CMP | FTG, ADPTR OXIDE CONDITIONER | New OEM | Contact Us | |
| 22-6000 | Gasonics | VALVE, SPEED CONTROLLER, SERIES AS ELBOE | New OEM | Contact Us | |
| 229851-1 | CMP | HOSE,PUMP,3,1X6,3(DIXDA),MASTERFLEX 6402 | New OEM | Contact Us | |
| 2300-110293 | CMP | TUBE,SUPPORT ACTIVE WAND 200MM MV | New OEM | Contact Us | |
| 2300-110297 | CMP | TUBE,DYNAMIC ACTIVE WAND 200MM MV | New OEM | Contact Us | |
| 23-0028-01 | GaSonics | SWITCH, FLUID FLOW | New OEM | Contact Us | |
| 2300-700713 | CMP | TUBING,1/8ID X 1/4OD CLR POLYURE | New OEM | Contact Us | |
| 2300-700721 | CMP | TUBING,3/8ID X 1/2 BLK POLY | New OEM | Contact Us | |
| 2300-700723 | CMP | TUBING,3/8OD X .250ID 95 DUR RED | New OEM | Contact Us | |
| 2300-700726 | CMP | TUBING,5/32 GRAY | New OEM | Contact Us | |
| 2300-700734 | CMP | TUBING,RED TRANS 1/4 X 1/8 90 DUR | New OEM | Contact Us | |
| 2300-700740 | CMP | TUBING,TYGON 1/8ID X 1/4OD CLR | New OEM | Contact Us | |
| 2300-700742 | CMP | TUBING,WHITE 1/4 X 1/8 90 DUR | New OEM | Contact Us | |
| 2300-717469 | CMP | TUBING,GRAY 5/32 | New OEM | Contact Us | |
| 2300-727245 | CMP | TUBE,SPRAY TOP | New OEM | Contact Us | |
| 2300-727246 | CMP | TUBE,SPRAY BOTTOM | New OEM | Contact Us | |
| 2300-737748 | CMP | TUBING,SMC 1/4IN OD RED TRANSLUCENT | New OEM | Contact Us | |
| 2300-737749 | CMP | TUBING,SMC 6MM OD CLR | New OEM | Contact Us | |
| 2300-737822 | CMP | TUBING,1/2 OD POLYURETHANE WHT | New OEM | Contact Us | |
| 23-0089 | GaSonics | TRANSDUCER,PRESSURE-ABSOLUTE (500 PSI) | New OEM | Contact Us | |
| 2315-700009 | CMP | ADPTR,FTG 10-32 TO 1/8 | New OEM | Contact Us | |
| 2315-770044 | CMP | ADPTR,FLANGE 776 WAFER HEAD | New OEM | Contact Us | |
| 23-2545 | GaSonics | ROTAMETER, 0-60GPH,1/4 IN NPT | New OEM | Contact Us | |
| 23-2637 | GaSonics | ROTAMETER W/VALVE 6.5GPH, 1/4 - FNPT | New OEM | Contact Us | |
| 23-2644 | GaSonics | XDUCER, PRESSURE 11T NW8 VCR,F,+13TO+32 | New OEM | Contact Us | |
| 23-2810/RW | GaSonics | Refurbished: MFC, VAPOR, 500 SCCM, H2O, NO | New OEM | Contact Us | |
| 23-2846 | GaSonics | SWITCH 12T GAS BOX, IRIDIA | New OEM | Contact Us | |
| 23-2918 | GaSonics | TRANSDUCER, PRESSURE TYPE 722A | New OEM | Contact Us | |
| 23-2919 | GaSonics | TRANSDUCER, PRESSURE TYPE 622A | New OEM | Contact Us | |
| 23-2931 | GaSonics | TRANSDUCER, VACUUM,.001 TO 100 TORR,NW16 | New OEM | Contact Us | |
| 23-2932 | CMP | SWITCH, OPTO,L-SHAPE | New OEM | Contact Us | |
| 2350-718404 | CMP | HOSE,HOIST HYDRAULIC | New OEM | Contact Us | |
| 24-0012 | GaSonics | GAUGE, VACUUM, 0-30 INCH HG | New OEM | Contact Us | |
| 24-0226 | GaSonics | GUAGE, VAC. THERMOCOUPLE GUAGE TUBE | New OEM | Contact Us | |
| 2425-111815 | CMP | GUN,SPRAY DI RECIRULATING | New OEM | Contact Us | |
| 2425-112504 | CMP | NOZZLE,.008 MIST SST | New OEM | Contact Us | |
| 2425-700291 | CMP | GUN,SPRAY,W/3/6NPT PORT CONNECTION | New OEM | Contact Us | |
| 2425-770537 | CMP | NOZZLE,SPRAY 1/8 SF-CE2 | New OEM | Contact Us | |
| 2450-700475 | CMP | PUMP,MTR SLURRY | New OEM | Contact Us | |
| 2450-701227 | CMP | PUMP,HEAD | New OEM | Contact Us | |
| 2475-109687 | CMP | REGULATOR,AIR 1/8NPT W/BRKT | New OEM | Contact Us | |
| 2475-112173 | CMP | REGULATOR,0-15PSI 10VDC 1/4PORT | New OEM | Contact Us | |
| 2475-700257 | CMP | FLOW CONTROL,1/4NPT TO 1/4NPT | New OEM | Contact Us | |
| 2475-700374 | CMP | MUFFLER,CLIPPARD | New OEM | Contact Us | |
| 2475-700490 | CMP | REGULATOR,AIR | New OEM | Contact Us | |
| 2475-701382 | CMP | REGULATOR,G4 | New OEM | Contact Us | |
| 2475-737527 | CMP | REGULATOR,ELECTRO PUE 0-100 PSIG | New OEM | Contact Us | |
| 2475-738023 | CMP | REGULATOR, 150PSI | New OEM | Contact Us | |
| 2475-770752 | CMP | REGULATOR,1/2" W/INTEGRAL FILTER | New OEM | Contact Us | |
| 2480-737598 | CMP | FLOWMETER,ROTARY .1 TO 1 L/MIN | New OEM | Contact Us | |
| 25-2009 | GaSonics | ACTUATOR, ROTARY | New OEM | Contact Us | |
| 2600-739733 | CMP | ADHESIVE,ULTRA BLUE RTV SILICONE | New OEM | Contact Us | |
| 27-00002-00 | Concept One | CAP, MANOMETER, 10 | New OEM | Contact Us | |
| 27-00010-01 | Concept One | TC,TYPE"J",RIGID,1/8 DIA x 12L | New OEM | Contact Us | |
| 27-00035-00 | Concept One | PCB, I/O MODULE | New OEM | Contact Us | |
| 27-00059-00 | Concept One | VACUUM SWITCH | New OEM | Contact Us | |
| 27-00062-00 | Concept One | New OEM | Contact Us | ||
| 27-00072-00 | Concept One | XFMR,120/24VAC | New OEM | Contact Us | |
| 27-00079-00 | Concept One | TC,TYPEJ,1/16DIA | New OEM | Contact Us | |
| 27-00081-00 | Concept One | POWER SUPPLY 90V/12V | New OEM | Contact Us | |
| 27-00082-00 | Concept One | Mtr. Driver for 2-arm Robot | New OEM | Contact Us | |
| 27-00101-00 | Concept One | ACTUATOR, ACME THD | New OEM | Contact Us | |
| 27-00123-00 | Concept One | PCB, TC FILTER | New OEM | Contact Us | |
| 27-00127-00 | Concept One | TC,TYPE"E" LG,GRND | New OEM | Contact Us | |
| 27-00147-00 | Concept One | CARD CAGE,12 SLOTS W/DOORS,EAR | New OEM | Contact Us | |
| 27-00148-00 | Concept One | VALVE,THROT,2,MKS | New OEM | Contact Us | |
| 27-00148-01 | Concept One | VALVE,THROT,NON-SEAL,KF50 | New OEM | Contact Us | |
| 27-00160-00 | Concept One | CNTL, MFC RAMP STEC | New OEM | Contact Us | |
| 27-00163-00 | Concept One | KYBD,COMPACT 16 PC | New OEM | Contact Us | |
| 27-00164-00 | Concept One | XFMR,120V/24V,100VA | New OEM | Contact Us | |
| 27-00167-01 | Concept One | MODULE,TRAZAR RF-RAMP | New OEM | Contact Us |