Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 21-342891-00 | CMP | SCRW, HEX, HD, 7/16-20UNFX6, GRADE 8 | New OEM | Contact Us | |
| 21-399653-00 | CMP | SCRW,FLAT,HEX,0-80 X 1/8 LG,18-8 SST,PL | New OEM | Contact Us | |
| 21-709238-00 | CMP | SPRING,CPRSN,.240OD | New OEM | Contact Us | |
| 22-00006-00 | Concept One | FILTER,INLINE,WAFRGRD | New OEM | Contact Us | |
| 22-00010-00 | Concept One | FTG,BULKHEAD,1/4 VCR | New OEM | Contact Us | |
| 22-00021-01 | Concept One | O-RING,2-226,BUNA | New OEM | Contact Us | |
| 22-00040-00 | Concept One | SEAL,SHAFT WIPER/SEAL | New OEM | Contact Us | |
| 22-00042-00 | Concept One | O-RING,2-266,VITON | New OEM | Contact Us | |
| 22-00053-00 | Concept One | O-RING,2-017,VITON V75 | New OEM | Contact Us | |
| 22-00056-00 | Concept One | O-RING, 2-126, VITON | New OEM | Contact Us | |
| 22-00070-00 | Concept One | SEAL, 1.00 ID | New OEM | Contact Us | |
| 22-00072-01 | Concept One | BEARING,BALL,.625ODX.25ID,SHIE | New OEM | Contact Us | |
| 22-00076-00 | Concept One | O-RING, DOUBLE WIPER | New OEM | Contact Us | |
| 22-00082-00 | Concept One | BEARING,BALL,.875ODX.50ID | New OEM | Contact Us | |
| 22-00084-00 | Concept One | BEARING,BALL,.375ODX.1875ID | New OEM | Contact Us | |
| 22-00090-00 | Concept One | FILTER,LARGE,(12),1/4,VC | New OEM | Contact Us | |
| 22-0010-01 | GaSonics | VALVE, CHK, 100 PSI | New OEM | Contact Us | |
| 2200-101225 | CMP | VALVE,ANGLE BODY 1/4FNPT | New OEM | Contact Us | |
| 2200-101719 | CMP | VALVE,3WAY PNEUMATIC 1/4FPT TEFLON | New OEM | Contact Us | |
| 2200-101720 | CMP | VALVE,2 STATION MANF 2HOLE MT | New OEM | Contact Us | |
| 2200-110208 | CMP | VALVE,3WAY MANUAL ROLLER LEVER | New OEM | Contact Us | |
| 22-00118-00 | Concept One | O-RING,2-218,VITON | New OEM | Contact Us | |
| 22-00132-00 | Concept One | COLLAR, SET SCREW, 1/4 SHAFT | New OEM | Contact Us | |
| 22-00134-00 | Concept One | VIEWPORT "O" RING | New OEM | Contact Us | |
| 22-00136-00 | Concept One | O-RING,2-460,BUNA | New OEM | Contact Us | |
| 22-00137-00 | Concept One | O-RING,2-369,VITON V75 | New OEM | Contact Us | |
| 22-00147-00 | Concept One | VALVE,BLWS,1/4VCR | New OEM | Contact Us | |
| 22-00148-00 | Concept One | VALVE, BLWS, 1/4VC, 3PORT | New OEM | Contact Us | |
| 22-00150-00 | Concept One | FTG,TEE,1/4 VCR | New OEM | Contact Us | |
| 22-00152-00 | Concept One | O-RING,2-350,BUNA | New OEM | Contact Us | |
| 22-00171-00 | Concept One | FTG, 10X32X1/8 BARB CHROM | New OEM | Contact Us | |
| 22-00174-00 | Concept One | 2-259-V747-75 O-RING 6.234" X 0.139" VITON | New OEM | Contact Us | |
| 22-00176-00 | Concept One | O-RING,2-455,BUNA | New OEM | Contact Us | |
| 22-00179-00 | Concept One | FTG, Q/S 90 DEG.ELBOW 3/8 | New OEM | Contact Us | |
| 22-00192-00 | Concept One | FTG,ADPTR,UNION,10-32UNF-M TO 1/8 FERR T | New OEM | Contact Us | |
| 22-00198-00 | Concept One | INSERT, MULTIPLE MTG | New OEM | Contact Us | |
| 22-00199-00 | Concept One | FTG,UNION,ELBOW,90DEG,3/8SW | New OEM | Contact Us | |
| 22-00202-00 | Concept One | FTG, 1/8 SWG-1/8 NPT | New OEM | Contact Us | |
| 22-00217-00 | Concept One | O-RING,2-206,VITON V747-75 | New OEM | Contact Us | |
| 22-00221-00 | Concept One | FTG, "T" 1/8" NPT TO 10-32 | New OEM | Contact Us | |
| 22-00222-00 | Concept One | FTG, "X" COUPLING 10-32 FEM | New OEM | Contact Us | |
| 22-00234-00 | Concept One | O-RING,2-264,VITON | New OEM | Contact Us | |
| 22-00236-00 | Concept One | O-RING,2-443,VITON | New OEM | Contact Us | |
| 22-00239-00 | Concept One | O-RING,2-258,VITON | New OEM | Contact Us | |
| 22-00244-00 | Concept One | FTG,ELB,MALE,1/8"NPT-1/8" TUBE | New OEM | Contact Us | |
| 22-00247-00 | Concept One | BEARING,FLANGE,.8750ODX.3750ID | New OEM | Contact Us | |
| 22-00248-00 | CMP | BEARING,.8750ODX.3750ID | New OEM | Contact Us | |
| 22-00252-00 | Concept One | FITING, ELBOW 1/4 SWAGE | New OEM | Contact Us | |
| 22-00256-00 | Concept One | O-RING,2-238,VITON V747-75 | New OEM | Contact Us | |
| 22-00262-00 | Concept One | SEAL, 1.00 FLANGEDNCH | New OEM | Contact Us | |
| 22-00270-00 | Concept One | FTG,TEE,MALE 1/8NPT-1/4SWG | New OEM | Contact Us | |
| 22-00274-00 | Concept One | FTG, 1/6 GLAND NUT EST. COST | New OEM | Contact Us | |
| 22-00275-00 | Concept One | FTG, 1/16" FERRULE EST. COST | New OEM | Contact Us | |
| 22-00287-00 | Concept One | VALVE, CHECK, INLET | New OEM | Contact Us | |
| 22-00288-00 | Concept One | T SEAL, 15/16IDX1 3/16OD | New OEM | Contact Us | |
| 22-00297-00 | Concept One | FERRULE,1/8,SS,SWAGELOCK | New OEM | Contact Us | |
| 22-00299-00 | Concept One | BEARING,BALL | New OEM | Contact Us | |
| 22-00300-00 | Concept One | CAP VCR 1/4 | New OEM | Contact Us | |
| 22-00302-00 | Concept One | COUPLING | New OEM | Contact Us | |
| 22-00303-00 | Concept One | BEARING,1.06OD | New OEM | Contact Us | |
| 22-00304-00 | Concept One | BEARING,1.50OD | New OEM | Contact Us | |
| 22-00311-00 | Concept One | O-RING,2-244,VITON | New OEM | Contact Us | |
| 22-00312-00 | Concept One | O-RING,2-116,VITON V0834-70 | New OEM | Contact Us | |
| 22-00313-00 | Concept One | O-RING,2-335,SILICONE S50 | New OEM | Contact Us | |
| 22-00314-00 | Concept One | FTG, 1/4 TUBE 1/8 PIPE | New OEM | Contact Us | |
| 22-00323-00 | Concept One | FTG,1/8" ONE TOUCH | New OEM | Contact Us | |
| 22-00324-00 | Concept One | SEAL, LIP "C" 1 1/16 IN. | New OEM | Contact Us | |
| 22-00325-00 | Concept One | SEAL, LIP, BUY - NVLS | New OEM | Contact Us | |
| 22-00326-00 | Concept One | O-RING,SP,.275 x 86.25 LG,BUNA | New OEM | Contact Us | |
| 22-00342-00 | Concept One | NUT, ULTRA-TORR 3/8 TUBE | New OEM | Contact Us | |
| 22-00343-00 | Concept One | SLEEVE, ULTRA TORR 3/8 TB | New OEM | Contact Us | |
| 22-00344-00 | Concept One | O-RING,2-012,VITON | New OEM | Contact Us | |
| 22-00345-00 | Concept One | O-RING VITON .562 X .362 | New OEM | Contact Us | |
| 22-00346-00 | Concept One | NUT, QUICK CNNCT 3/8OD TB | New OEM | Contact Us | |
| 22-00347-00 | Concept One | WASHER, 3/8OD TUBE | New OEM | Contact Us | |
| 22-00355-00 | Concept One | FTG,TEE,MALERUN 1/8NPT X 1/4 | New OEM | Contact Us | |
| 22-00358-00 | Concept One | O-RING,2-010,VITON V75 | New OEM | Contact Us | |
| 22-00359-00 | Concept One | FTG, "T" 10-32 | New OEM | Contact Us | |
| 22-00373-00 | Concept One | FERRULE,BACK 1/16,SWAGELOK | New OEM | Contact Us | |
| 22-00374-00 | Concept One | FERRULE,FRONT,1/16,SWAGELOK | New OEM | Contact Us | |
| 22-00375-00 | Concept One | NUT, SWAGELOK 1/16" | New OEM | Contact Us | |
| 22-00379-00 | Concept One | BEARING,RADIAL,.875ODX.625ID | New OEM | Contact Us | |
| 22-00391-00 | Concept One | O-RING,2-020,VITON V747-75 | New OEM | Contact Us | |
| 22-00417-00 | Concept One | GASKET,VCR NICKEL RET 1/4" | New OEM | Contact Us | |
| 22-00425-00 | Concept One | NUT, 1/8" SWAGELOCK | New OEM | Contact Us | |
| 22-00426-00 | Concept One | FERRULE,REAR,1/8,SWAGELOK | New OEM | Contact Us | |
| 22-00427-00 | Concept One | NUT, 1/4 TUBE, ULTRA-TORR | New OEM | Contact Us | |
| 22-00429-00 | Concept One | SLEEVE, 1/4 TUBE,ULTRA-TORR | New OEM | Contact Us | |
| 22-00434-00 | Concept One | O-RING,2-010,BUNA,N741-70 | New OEM | Contact Us | |
| 22-00435-00 | Concept One | GSKT BUNA-N ID OD .125 OD .295 | New OEM | Contact Us | |
| 22-00558-00 | Concept One | BUSHING, ISODAMP RIBBED | New OEM | Contact Us | |
| 22-00559-00 | Concept One | RING, ISODAMP RIBBED | New OEM | Contact Us | |
| 22-00612-00 | Concept One | VALVE,DIA,NC,1/4VCR-F,AIR OPR | New OEM | Contact Us | |
| 22-00630-00 | Concept One | O-RING, KIT, GATE VALVE | New OEM | Contact Us | |
| 22-00631-00 | Concept One | SEAL, SHAFT THROTTLE VALVE | New OEM | Contact Us | |
| 22-00638-00 | Concept One | BEARING,FLANGE,.500OD | New OEM | Contact Us | |
| 22-00648-00 | Concept One | TC O-RING | New OEM | Contact Us | |
| 22-00653-00 | Concept One | FTG,ADPTR,KF40 TOKF50 | New OEM | Contact Us | |
| 22-00655-00 | Concept One | VALVE,NO,DIAPH,FVCR | New OEM | Contact Us | |
| 22-00656-00 | Concept One | O-RING,2-264,KALREZ 4079 | New OEM | Contact Us |