Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 18-0801-40 | GaSonics | SCREW, HEX SCH, 8-32 X 1-7/8, SST | New OEM | Contact Us | |
| 18-0805-01 | GaSonics | SCRW,HEX SCH BTNHD 8-32 X 1/4 L, SST | New OEM | Contact Us | |
| 18-0822-05 | GaSonics | SCRW,SLTD RNDHD,8-32 X 1/2 L, NYL | New OEM | Contact Us | |
| 18-0870-03 | Common | SCRW, PH PNHD, 8-32 X 3/8L, SST | New OEM | Contact Us | |
| 18-0870-05 | GaSonics | SCREW, PH PNHD, 8-32 X 1/2 L, SST | New OEM | Contact Us | |
| 18-0873-05 | CMP | SCRW,FLAT,HEX,8-32x.5,SS | New OEM | Contact Us | |
| 18-0879-01C | GaSonics | SCREW, SET, 8-32 UNC X 1/4 L, SST, CONE | New OEM | Contact Us | |
| 18-1001-03 | CMP | SCRW,SKT,HEX,10-32X.375,SS | New OEM | Contact Us | |
| 18-1012-01 | GaSonics | SCREW, PH PNHD 10-32 X 1/4L BRS | New OEM | Contact Us | |
| 18-1071-05 | GaSonics | SCRW,HEX SCH,10-32 X 1/2 L, SST | New OEM | Contact Us | |
| 18-1071-07 | GaSonics | SCRW,SKT,HEX,10-32X.625,SS | New OEM | Contact Us | |
| 18-1071-09 | GaSonics | SCRW,SKT,HEX,10-32x.75,SS | New OEM | Contact Us | |
| 18108-01 | GaSonics | ASSY,CLTC,AMPLIFIER MODULE | New OEM | Contact Us | |
| 18151-01 | GaSonics | KIT, 200MM WAFERS-L3500 SYSTEMS | New OEM | Contact Us | |
| 18170-01 | GaSonics | MANIFOLD ASSY, FILTER TO R/C | New OEM | Contact Us | |
| 18-182950-00 | CMP | BLADDER,01011,T4,300MM,TAPERED TAB | New OEM | Contact Us | |
| 18-2271-05 | GaSonics | SCRW,HEX SCH, 1/4-20 X 1/2 L, SST | New OEM | Contact Us | |
| 18-2271-09 | GaSonics | SCREW, HEX SCH,1/4-20 X 3/4 L, SST | New OEM | Contact Us | |
| 18-2271-13 | GaSonics | SCREW, HEX SCH,1/4-20 X 1 L, SST | New OEM | Contact Us | |
| 18-2271-29 | GaSonics | SCRW,HEX SCH, 1/4-20 X 2 L, SST | New OEM | Contact Us | |
| 18-2271-34 | GaSonics | SCRW,HEX SCH,1/4-20 X 3-1/4 L, SST | New OEM | Contact Us | |
| 18-2271-35 | GaSonics | SCREW, HEX SCH,1/4-20 X 4 L, SST | New OEM | Contact Us | |
| 18-2271-43 | GaSonics | SCREW, HEX SCH,1/4-20 X 1 1/8 L,SST | New OEM | Contact Us | |
| 18-2279-13 | GaSonics | SCREW, SET, HEX SCH,1/4-20 X 1 L, SST,CU | New OEM | Contact Us | |
| 18-2591 | GaSonics | SCREW, THUMB, 8-32 X 13/16 L, SST,KNURLE | New OEM | Contact Us | |
| 18-2741 | GaSonics | SCREW, FLTHD, SLOT 8-32 X 1in, AL | New OEM | Contact Us | |
| 18-2742 | GaSonics | SCREW, FLTHD, SLOT 8-32 X 3/8in, AL | New OEM | Contact Us | |
| 18-2800 | GaSonics | SCREW, PH FLHD,8-32 X 1 1/8 L, AL | New OEM | Contact Us | |
| 18-2801 | GaSonics | SCRW,4-40 X 3/8,FLHD, SLOT, AL | New OEM | Contact Us | |
| 18-2876 | GaSonics | SCREW,HEX SCH,1/4-20 X1/2 BRASS | New OEM | Contact Us | |
| 18-2928 | GaSonics | SCRW,SCHD, 4-40 X 3/8 L, 18-8 SST,VENTED | New OEM | Contact Us | |
| 18-351216-00 | CMP | BLADDER,DIAPHRAGM,SLURRY,.074THK,NO CUTO | New OEM | Contact Us | |
| 18-4017 | GaSonics | SCREW, SCH, 10-32 X 2 L, SST | New OEM | Contact Us | |
| 18-4073 | GaSonics | SCREW, SET, 4-40 X 1/4 L, SS | New OEM | Contact Us | |
| 18-4119 | GaSonics | SCREW, PH FLHD,10-32 X 1/4 L, SST | New OEM | Contact Us | |
| 18-453766-00 | CMP | BLADDER,1011,T1,200MM,TAPER TAB,VERSION2 | New OEM | Contact Us | |
| 18-456163-00 | CMP | BLADDER,DIAPHRAGM,WFR HD,FAIRPRENE,LONGW | New OEM | Contact Us | |
| 19-00007-00 | Concept One | ASSY,LEAD SCRW,MOD | New OEM | Contact Us | |
| 19-00020-02 | Concept One | SHAFT, LL DOOR-RH | New OEM | Contact Us | |
| 19-00020-03 | Concept One | SHAFT, LL DOOR-LH | New OEM | Contact Us | |
| 19-00056-00 | Concept One | FEEDTHRU,HI VOLT,ALTER DETAIL | New OEM | Contact Us | |
| 19-00064-00 | Concept One | BRG, 3/8-7/8 (SL-39) | New OEM | Contact Us | |
| 19-00066-00 | Concept One | BRG, 8/22MM DUP(SL-39)MOD | New OEM | Contact Us | |
| 19-00068-00 | Concept One | BRG, DICRONITE COATED | New OEM | Contact Us | |
| 19-00071-00 | Concept One | TUBE,FTG INS,FEMALE 1/16 | New OEM | Contact Us | |
| 19-00072-00 | Concept One | TUBE FITTING INSERT MALE 1/16 | New OEM | Contact Us | |
| 19-00079-00 | Concept One | SPLINE, SHAFT, SPINDLE LIFT | New OEM | Contact Us | |
| 19-00108-00 | Concept One | CABLE ASSY,ARM,BALL | New OEM | Contact Us | |
| 19-00109-00 | Concept One | CABLE ASSY,FOREARM,BALL | New OEM | Contact Us | |
| 19-00111-00 | Concept One | ACTUATOR, BALL SCR LIFT | New OEM | Contact Us | |
| 19-00117-00 | Concept One | ASSY,BELLOWS,WELDED | New OEM | Contact Us | |
| 19-00123-00 | Concept One | PCB, INDEXER EXT W/JUMP | New OEM | Contact Us | |
| 19-00124-00 | Concept One | PCB, INDEXER ROT W/JUMP | New OEM | Contact Us | |
| 19-00125-00 | Concept One | PCB, INDEXER LIFT W/JUMP | New OEM | Contact Us | |
| 19-00127-00 | Concept One | PCB, ANALOG OUT W/JUMPER | New OEM | Contact Us | |
| 19-00130-00 | Concept One | PCB, SERIAL I/O SBX351 | New OEM | Contact Us | |
| 19-00136-00 | Concept One | ASSY,PCB,ANA.OUT W/JUMP | New OEM | Contact Us | |
| 19-00144-00 | Concept One | GEAR, MOTOR-ROTATION | New OEM | Contact Us | |
| 19-00145-00 | Concept One | GEAR, MOTOR-EXT. | New OEM | Contact Us | |
| 19-00146-00 | Concept One | GEAR, ROTATION | New OEM | Contact Us | |
| 19-00147-00 | Concept One | GEAR, EXT. | New OEM | Contact Us | |
| 19-00148-00 | Concept One | GEAR, ANTI-BACKLASH-PRIM. | New OEM | Contact Us | |
| 19-00149-00 | Concept One | GEAR, ANTI-BACKLASH-SEC. | New OEM | Contact Us | |
| 19-00154-00 | Concept One | HEATER BLK,2KW AND 2KW 8" | New OEM | Contact Us | |
| 19-00154-01 | Concept One | HTR BLK,SLOTTED,C1,NO PINS,NO SCRIBE,MOD | New OEM | Contact Us | |
| 19-00154-02 | Concept One | HTR BLK,NO SLOT,SEQUEL,ALL STA PINS | New OEM | Contact Us | |
| 19-00154-03 | Concept One | HTR BLK,SLOTTED,C1,ALL STA PINS | New OEM | Contact Us | |
| 19-00154-04 | Concept One | HTR BLK,NO SLOT,SEQUEL,STA 1 PINS | New OEM | Contact Us | |
| 19-00154-09 | Concept One | HTR BLK,SLOTTED,C1,SCRIBED,STA 1 PINS | New OEM | Contact Us | |
| 19-00154-11 | Concept One | HTR BLK, SLOTTED, C1, SCRIBED, ALL STA PINS | New OEM | Contact Us | |
| 19-00155-00 | Concept One | HEATER,3KW AND 2KW 6 | New OEM | Contact Us | |
| 19-00155-04 | Concept One | HTR BLK,SLOTTED,PINS ALL STA,MOD | New OEM | Contact Us | |
| 19-00156-00 | Concept One | PCB, DIGITAL I/O 519A #1 | New OEM | Contact Us | |
| 19-00157-00 | Concept One | PCB, DIGITAL I/O 519A #2 | New OEM | Contact Us | |
| 19-00188-00 | Concept One | SPLINE, SHAFT WCVD | New OEM | Contact Us | |
| 19-00206-02 | Concept One | FLOW RESTRICT .043 VCR GSK | New OEM | Contact Us | |
| 19-00224-01 | Concept One | SPRING,TORSION,RT | New OEM | Contact Us | |
| 19-00224-02 | Concept One | SPRING,TORSION,LFT | New OEM | Contact Us | |
| 19-00248-00 | Concept One | CLAMP,L/L DOOR MOD | New OEM | Contact Us | |
| 19-00249-00 | Concept One | VALVE,ANGLE,LIMIT SW & CBL | New OEM | Contact Us | |
| 19-00260-10 | Concept One | MANF, 3WAY 10 STAT. MOD | New OEM | Contact Us | |
| 19-00262-00 | Concept One | ELBOW,KF50 MODIF | New OEM | Contact Us | |
| 19-00266-01 | Concept One | MOTOR, CONCEPT ONE ROBOT, "C" TYPE, EXTENSION FOR 90 V ROBOT | New OEM | Contact Us | |
| 19-00267-01 | Concept One | MOTOR, CONCEPT ONE ROBOT, "C" TYPE, ROTATION FOR 90 V ROBOT | New OEM | Contact Us | |
| 19-00268-01 | Concept One | 90V LIFT MOTOR | New OEM | Contact Us | |
| 19-00273-00 | Concept One | WASHER,SPRING MOD | New OEM | Contact Us | |
| 19-00291-00 | Concept One | TUBING,TEFLON 1/16 CLEANED SOF | New OEM | Contact Us | |
| 19-00299-00 | Concept One | Manifold.Dual Injecton. Heated | New OEM | Contact Us | |
| 19-00301-00 | Concept One | TUBE,MODIF,DEGAS NIPPLE | New OEM | Contact Us | |
| 19-00306-00 | Concept One | RELAY,24V DELAY ON MAKE 60 SEC | New OEM | Contact Us | |
| 19-00308-00 | Concept One | TERM BLK,W/RES & DIODE | New OEM | Contact Us | |
| 19-00309-00/RW | Concept One | PCB, RS422 SERIAL | New OEM | Contact Us | |
| 19-00313-01 | Concept One | LFC 5 ML (SSI) | New OEM | Contact Us | |
| 19-00313-02 | Concept One | LFC, 5 ML (VCR) | New OEM | Contact Us | |
| 19-00323-00 | Concept One | GEAR, SPUR-MODIF., .625PD | New OEM | Contact Us | |
| 19-00331-00 | Concept One | PCB, DIGI SERIAL | New OEM | Contact Us | |
| 19-00336-00 | Concept One | LFC,.5ML,VCR | New OEM | Contact Us | |
| 19-00357-00 | Concept One | CONN,EXT PLATFORM BREAK-OUT | New OEM | Contact Us | |
| 19-032015-01 | Concept One | HEATER BLK,150MM 6"OD PINNED | New OEM | Contact Us | |
| 19-033267-00 | Concept One | BELLOWS,LIFT PIN | New OEM | Contact Us |