Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 19-034573-01 | Concept One | SCREW LIFT IND | New OEM | Contact Us | |
| 19-034573-03 | Concept One | BEARING, BALL, .50 ID X .875 | New OEM | Contact Us | |
| 19-034573-04 | Concept One | BEARING, LINEAR/ROTARY 1 WTM | New OEM | Contact Us | |
| 19-034573-06 | Concept One | BEARING, NEEDLE 3PT CONT | New OEM | Contact Us | |
| 19-034573-07 | Concept One | BEARING, 1.06 OD | New OEM | Contact Us | |
| 19-034573-08 | Concept One | BEARING, 1.50 OD | New OEM | Contact Us | |
| 19-034573-09 | Concept One | BEARING, 2.62 OD | New OEM | Contact Us | |
| 19-034573-10 | Concept One | BEARING, 2.50 OD | New OEM | Contact Us | |
| 19-034573-11 | Concept One | BEARING, DUPLEX | New OEM | Contact Us | |
| 19-034573-13 | Concept One | BEARING,LINEAR SINGLE | New OEM | Contact Us | |
| 19-034573-14 | Concept One | BEARING, LINEAR DOUBLE | New OEM | Contact Us | |
| 19-034573-15 | Concept One | BEARING, RADIAL7/8 ODX 5/8 ID | New OEM | Contact Us | |
| 19-034974-00 | Concept One | LEAD SCRW,INDEXER ROBOT | New OEM | Contact Us | |
| 19-0431-40 | GaSonics | NUT, KEP, 4-40, SS. | New OEM | Contact Us | |
| 19-0476-00 | GaSonics | WASHER, FLAT, #4,.125 ID X .312 X OD | New OEM | Contact Us | |
| 19-0486-00 | GaSonics | WSHR,FLAT,#4,FIBER | New OEM | Contact Us | |
| 19-0626-00 | Concept One | WSHR,FLAT,#6,NYLON | New OEM | Contact Us | |
| 19-0631-32 | GaSonics | NUT, HEX 6-32, KEP 5/16 | New OEM | Contact Us | |
| 19-0637-00 | GaSonics | WASHER, #6, SPLIT LOCK, SST | New OEM | Contact Us | |
| 19-0819-00 | GaSonics | WSHR,LOCK,EXT-STAR,8,SST | New OEM | Contact Us | |
| 19-0830-32 | GaSonics | NUT, HEX 8-32, SS | New OEM | Contact Us | |
| 19-0836-00 | GaSonics | WSHR,FLAT,#8,SS | New OEM | Contact Us | |
| 19-0837-00 | GaSonics | WSHR, LOCK, SPLIT, #8, SST | New OEM | Contact Us | |
| 19-1030-32 | CMP | NUT, HEX, 10-32, SS | New OEM | Contact Us | |
| 19-1036-00 | GaSonics | WASHER, #10, FLAT,.062 THK, SST | New OEM | Contact Us | |
| 19-1038-00 | GaSonics | WASHER, #10 EXT STAR SST | New OEM | Contact Us | |
| 19-1099-00 | GaSonics | WSHR, LOCK, EXT-STAR, #10, BRONZE | New OEM | Contact Us | |
| 19-110004-00 | Concept One | WSHR,SPRING,MOD,NP | New OEM | Contact Us | |
| 19-116251-00 | Concept One | GASKET,1/4"VCR,UNPLTD NI,.045D | New OEM | Contact Us | |
| 19-117915-00 | Concept One | SPLINE,SHFT,SPNDL LIFT EXC OD | New OEM | Contact Us | |
| 19-140178-00 | Concept One | KIT,TOUCHSCREEN SYS | New OEM | Contact Us | |
| 19-163074-00 | Concept One | MOD,1/4 VCR GSKT,ORIFICE,.037 | New OEM | Contact Us | |
| 19-163075-00 | Concept One | MOD,1/4 VCR GSKT,ORIFICE,.103 | New OEM | Contact Us | |
| 19-170769-00 | Gasonics | MOD PULLEY ROTATION | New OEM | Contact Us | |
| 19-173869-00 | GaSonics | MOD,CLAMP, MOTOR SHAFT, ELEVATOR | New OEM | Contact Us | |
| 19-177242-00 | GaSonics | FTG,TUBE,UNION AL CONNECTOR, ULTRA TORR | New OEM | Contact Us | |
| 1920-100975 | CMP | RING,RETAINING INT 37.7MM OD 1.27TH,SS,MS16627-1137 | New OEM | Contact Us | |
| 1920-737509 | CMP | RING,RETAINING SPIRAL 52MM | New OEM | Contact Us | |
| 1920-737521 | CMP | RING,RETAINING 25MM | New OEM | Contact Us | |
| 19-2231-20 | GaSonics | NUT, 1/4-20, KEP SS | New OEM | Contact Us | |
| 19-2236-00 | GaSonics | WSHR,1/4 FLAT,.265 ID X .500 OD X .063 THK,SST | New OEM | Contact Us | |
| 19-2236-00-02 | GaSonics | WASHER, 1/4 I.D. X 11/16 O.D. FLAT, SST | CE! | New OEM | Contact Us | |
| 19-2237-00 | GaSonics | WASHER, SPLIT LOCK 1/4 ID X 1/2 OD, SST | New OEM | Contact Us | |
| 19-2239-20 | CMP | NUT,1/4-20,SELF LOCKING,SST,(NYLOK) | New OEM | Contact Us | |
| 19-2665 | CMP | WSHR,THRUST,.375 ID X .812 OD X .062 THK,SST | New OEM | Contact Us | |
| 19-2677 | CMP | WSHR,FLAT,FNDR,17/64 ID X 1 OD X 3/64 THK,SST | New OEM | Contact Us | |
| 19-2680 | GaSonics | NUT, HEX, 5/16-18 UNC, TITANIUM | New OEM | Contact Us | |
| 19-2698 | GaSonics | NUT, 3/8-24, JAM | New OEM | Contact Us | |
| 19-273862-00 | GaSonics | TUBE,.394IN,.200IN,SAPPHIRE,MOD | New OEM | Contact Us | |
| 19-379884-00 | Concept One | WSHR,FLAT,SIZE .990 X .125X.050,C2SEQ-X,MOD | New OEM | Contact Us | |
| 19-380481-00 | Concept One | WSHR,BELLEVILLE,#8,0.168"ID,0.344"OD,NICKEL,MOD | New OEM | Contact Us | |
| 19-380482-00 | Concept One | NUT,STD,HEX,8-32,11/32"W,1/8"L,NICKEL 200,MOD | New OEM | Contact Us | |
| 19-4000 | GaSonics | WSHR,LOCK,EXT-STAR,#8,SS | New OEM | Contact Us | |
| 19-4043 | GaSonics | NO.8 FLAT WASHER BRASS | New OEM | Contact Us | |
| 20-00020-01 | Concept One | BLOCK,PILLOW,1.5 BUSHING | New OEM | Contact Us | |
| 20-00064-00 | Concept One | SPRING,CPRSN,.360OD | New OEM | Contact Us | |
| 20-00066-00 | Concept One | RING, RETAINER 1/4 EXT. | New OEM | Contact Us | |
| 20-00067-00 | GaSonics | ROD CLEVIS 2.5" BORE STD | New OEM | Contact Us | |
| 20-00070-00 | Concept One | RING, RETAINING EXT. 1/2" | New OEM | Contact Us | |
| 20-00072-00 | Concept One | CLEVIS, PISTON ROD 4" STROKE | New OEM | Contact Us | |
| 20-00073-00 | Concept One | SCRW,SHLDR,10-32/1.5 LG | New OEM | Contact Us | |
| 20-00074-00 | Concept One | RING RETAINING 3/16" | New OEM | Contact Us | |
| 20-00081-00 | Concept One | BGR, OIL-LESS .502/.627 | New OEM | Contact Us | |
| 20-00081-02 | Concept One | BEARING,.531ODX.437ID | New OEM | Contact Us | |
| 20-00098-00 | Concept One | RECEPTACLE #81 | New OEM | Contact Us | |
| 20-00109-00 | Concept One | TORR LUBE | New OEM | Contact Us | |
| 20-00109-01 | Concept One | TORR LUBE, 100CC | New OEM | Contact Us | |
| 2000-110048 | CMP | GAUGE,GUARD W/0-30PSI PNL MT GAUGE | New OEM | Contact Us | |
| 2000-110065 | CMP | GAUGE,GUARD 0-30PSI MOD PNL MT 1/8F | New OEM | Contact Us | |
| 2000-110066 | CMP | GAUGE,GUARD 1-100PSI MOD PNL MT 1/8 | New OEM | Contact Us | |
| 2000-111517 | CMP | METER,DIGITAL STRAIN GAGE 4 DIGIT | New OEM | Contact Us | |
| 20-00114-00 | Concept One | RTNR | New OEM | Contact Us | |
| 20-0014-01 | GaSonics | FTG,CONNECTOR,MALE,1/8 X 1/8 | New OEM | Contact Us | |
| 20-00144-00 | Concept One | BELT, TIMING | New OEM | Contact Us | |
| 20-00145-00 | Concept One | PULLEY, TIMIMG | New OEM | Contact Us | |
| 20-00146-00 | Concept One | GASKET,NYLON #10 | New OEM | Contact Us | |
| 20-00150-00 | Concept One | WASHER,WAVY,.390ID x .495OD | New OEM | Contact Us | |
| 20-00153-00 | Concept One | BALL,CERAMIC,2.000 DIA | New OEM | Contact Us | |
| 20-00155-00 | Concept One | WASHER,WAVY | New OEM | Contact Us | |
| 20-00157-00 | Concept One | WSHR,LOCK,INT-STAR,#6,BRASS | New OEM | Contact Us | |
| 20-00168-00 | Concept One | RING, RET., CAPTIVE SCREW | New OEM | Contact Us | |
| 20-00174-00 | Concept One | BALL, SST, .750 DIA | New OEM | Contact Us | |
| 20-00177-00 | Concept One | STUD, THREADED 1/4-20 1.2 | New OEM | Contact Us | |
| 20-00181-00 | Concept One | NUT,SELF LOCK,5/16-24 | New OEM | Contact Us | |
| 20-00187-00 | Concept One | SCRW,SKT,HEX,4-40X.375,SS,VEN | New OEM | Contact Us | |
| 20-00199-00 | Concept One | LATCH,PINLATCH | New OEM | Contact Us | |
| 20-00200-00 | Concept One | RCPT,FLOATING | New OEM | Contact Us | |
| 20-00208-00 | Concept One | WASHER,FLAT,M8,SS | New OEM | Contact Us | |
| 20-00209-00 | Concept One | SCRW,SKT,HEX,CRS,BLK Ox | New OEM | Contact Us | |
| 20-00212-00 | Concept One | NUT, HANGER NOZZLE | New OEM | Contact Us | |
| 20-00213-00 | Concept One | SCRW,10-32,FRONT PANEL | New OEM | Contact Us | |
| 20-00214-00 | Concept One | SCRW,SET,HEX,1/4-2,CUP PT | New OEM | Contact Us | |
| 20-00220-00 | Concept One | STANDOFF, 4-40FEMALE3/16H X | New OEM | Contact Us | |
| 20-00221-00 | Concept One | WASHER,FLAT,#8,ALUM | New OEM | Contact Us | |
| 20-00222-00 | Concept One | WASHER, FLAT 1/4" ALUM. | New OEM | Contact Us | |
| 20-0023-01 | GaSonics | FITTING, ELBOW, UNION, 1/4 IN | New OEM | Contact Us | |
| 20-00244-00 | Concept One | NUT,HEX,1/4-20,BRASS,NP | New OEM | Contact Us | |
| 20-00247-00 | Concept One | SPRING,CPRSN,1.25OD,2.0LG,.63I | New OEM | Contact Us | |
| 20-00248-00 | Concept One | WASHER,1.28ID x .245OD | New OEM | Contact Us | |
| 20-00249-00 | Concept One | SCRW,SHLDR,4-40 UNC | New OEM | Contact Us |