Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 20-456246-00 | CMP | PIN,SCREW GENMARK END EFFECTOR | New OEM | Contact Us | |
| 206-002 | Concept One | FTG,10-32x1/16 BARB | New OEM | Contact Us | |
| 20-8011-01 | GaSonics | 3/8 FILTER 7MICRON | New OEM | Contact Us | |
| 20-8014-01 | GaSonics | FILTER, 1/4, VCR | New OEM | Contact Us | |
| 20-9016 | GaSonics | CONN., 3/8 MNPT X 1/2 COMP, SS | New OEM | Contact Us | |
| 21-00041-01 | Concept One | SCRW,SET,4-40x.25,SS | New OEM | Contact Us | |
| 2100-109254 | CMP | FIXTURE,LOAD CELL BUFF | New OEM | Contact Us | |
| 21-00137-00 | Common | SCRW,10-32X.875,SS | New OEM | Contact Us | |
| 21-00243-00 | Concept One | SCREW, FLAT HD, 4-40, 1/4" SS | New OEM | Contact Us | |
| 21-00248-00 | Concept One | SCRW,FLAT,4-40x1,SS | New OEM | Contact Us | |
| 21-00332-00 | Concept One | SCRW, SET HEX, 10-32X.5, SS | New OEM | Contact Us | |
| 21-00351-00 | Concept One | WSHR,LOCK,INST-STAR,#8 SS | New OEM | Contact Us | |
| 21-00379-00 | Concept One | SCRW,SKT,HEX,10-24x.75,SS | New OEM | Contact Us | |
| 21-00415-00 | Concept One | WASHER,FENDER,1/4,.75OD x .06T | New OEM | Contact Us | |
| 21-00417-00 | Concept One | SHLD SCRW,#10-24 X .25 DIA X .75 LG, STE | New OEM | Contact Us | |
| 21-00421-00 | CMP | SCRW,SKT,HEX,8-32X.875 | New OEM | Contact Us | |
| 21-00455-00 | Concept One | STANDOFF,6-32 x .38,M-F,.25 HE | New OEM | Contact Us | |
| 21-024543-00 | Concept One | SCRW,5/16-18X2.75,BLK OXIDE | New OEM | Contact Us | |
| 21-029063-00 | Concept One | HELICOIL, 8-32 X .32L, SS | New OEM | Contact Us | |
| 21-032147-00 | Concept One | SHOULDER SCR,1/4-20X5/16X.75LG | New OEM | Contact Us | |
| 21-033536-00 | Concept One | SCRW,SKT,HEX,10-32x1.125,AG | New OEM | Contact Us | |
| 21-041264-06 | Concept One | SCRW,SKT,HEX,4-40x.375,SS | New OEM | Contact Us | |
| 21-041264-08 | Concept One | SCRW,SKT,HEX,4-40x.5,SS | New OEM | Contact Us | |
| 21-041264-12 | Concept One | SCRW,SKT,HEX,4-40x.75,SS | New OEM | Contact Us | |
| 21-041266-06 | Concept One | SCRW,SKT,HEX,6-32X.375,SS | New OEM | Contact Us | |
| 21-041266-10 | Concept One | SCRW,SKT,HEX,6-32x.625,SS | New OEM | Contact Us | |
| 21-041266-24 | Concept One | SCRW,SKT,HEX,6-32x1.5,SS | New OEM | Contact Us | |
| 21-041267-06 | Concept One | SCRW,SKT,HEX,8-32X.375,SS | New OEM | Contact Us | |
| 21-041267-08 | Concept One | SCREW, SKHD, 8-32 X 1/2", SS | New OEM | Contact Us | |
| 21-041267-10 | Concept One | SCRW,SKT,HEX,8-32x.625,SS | New OEM | Contact Us | |
| 21-041269-06 | Concept One | SCRW,SKT,HEX,10-32X.375,SS | New OEM | Contact Us | |
| 21-041269-08 | Concept One | SCRW,SKT,HEX,10-32X.5,SS | New OEM | Contact Us | |
| 21-041269-12 | CMP | SCRW,SKT,HEX,10-32x.75,SS | New OEM | Contact Us | |
| 21-041269-16 | Concept One | SCRW,SKT,HEX,10-32x1,SS | New OEM | Contact Us | |
| 21-041269-24 | Concept One | SCRW, SKT, HEX 10-32 X 1 1/2" | New OEM | Contact Us | |
| 21-041270-10 | Concept One | SCRW,SKT,HEX,1/4-20x.625,SS | New OEM | Contact Us | |
| 21-041270-12 | Concept One | SCRW,SKT,HEX,1/4-20X.75,SS | New OEM | Contact Us | |
| 21-041272-12 | Concept One | SCRW,SKT,HEX,5/16-18x.75,SS | New OEM | Contact Us | |
| 21-041273-12 | Concept One | SCRW,SKT,HEX,5/16-24X.75,SS | New OEM | Contact Us | |
| 21-041298-04 | Concept One | SCRW,FLAT,HEX,4-40X.25,SS | New OEM | Contact Us | |
| 21-041298-06 | Concept One | SCRW,FLAT,HEX,4-40x.375,SS | New OEM | Contact Us | |
| 21-041300-06 | CMP | SCRW,FLAT,HEX,6-32x.375,SS | New OEM | Contact Us | |
| 21-041301-06 | Concept One | SCRW,FLAT,HEX,8-32x.375,SS | New OEM | Contact Us | |
| 21-041301-08 | Concept One | SCRW,FLAT,HEX,8-32x.5,SS | New OEM | Contact Us | |
| 21-041303-06 | Concept One | 10-32 X 3/8 SK FL HD CS 18-8SS | New OEM | Contact Us | |
| 21-041303-08 | Concept One | SCRW,FLAT,HEX,10-32x.5,SS | New OEM | Contact Us | |
| 21-041342-08 | Concept One | SCRW,PAN,PHIL,4-40X.5,SS | New OEM | Contact Us | |
| 21-041345-06 | Concept One | SCRW,PAN,PHIL,6-32X.375,SS | New OEM | Contact Us | |
| 21-041346-04 | Concept One | SCRW,PAN,PHIL,8-32x.25,SS | New OEM | Contact Us | |
| 21-041346-12 | Concept One | SCRW,PH PNHD, 8-32 X 3/4 L, SST18-8 | New OEM | Contact Us | |
| 21-041348-06 | Concept One | SCRW,PAN,PHIL,10-32X.375,SS | New OEM | Contact Us | |
| 21-041902-04 | Concept One | SCRW,BUT,HEX,4-40x.25,SS | New OEM | Contact Us | |
| 21-041903-06 | Concept One | 6-32 X 3/8 SK BT HD CS 18-8SS | New OEM | Contact Us | |
| 21-041906-06 | Concept One | SCRW,BUT,HEX,10-32x.375,SS | New OEM | Contact Us | |
| 21-041907-12 | Concept One | SCRW,BUT,HEX,1/4-20x.75,SS | New OEM | Contact Us | |
| 21-041953-07 | Concept One | NUT,HEX,4-40,SS | New OEM | Contact Us | |
| 21-041953-11 | Concept One | NUT,HEX,8-32,SS | New OEM | Contact Us | |
| 21-041953-13 | Concept One | NUT,HEX,10-32,SS | New OEM | Contact Us | |
| 21-041953-14 | Concept One | NUT, HEX, 1/4-20, SS | New OEM | Contact Us | |
| 21-042023-04 | Concept One | WASHER,FLAT,#4,SS | New OEM | Contact Us | |
| 21-042023-06 | Concept One | WSHR,FLAT,#6,SS | New OEM | Contact Us | |
| 21-042023-07 | Concept One | WSHR,FLAT,#8,SS | New OEM | Contact Us | |
| 21-042023-08 | Concept One | WASHER,FLAT,#10,SS | New OEM | Contact Us | |
| 21-042023-09 | Concept One | WASHER, FLAT, 1/4" SS | New OEM | Contact Us | |
| 21-042023-10 | Concept One | WASHER,FLAT,5/16,SS | New OEM | Contact Us | |
| 21-042023-13 | Concept One | WASHER, FLAT, 1/2, SS | CE! | New OEM | Contact Us | |
| 21-042024-03 | Concept One | WASHER,LOCK,#4,SS | New OEM | Contact Us | |
| 21-042024-05 | CMP | WSHR, LOCK,6,SS | New OEM | Contact Us | |
| 21-042024-07 | Concept One | WASHER,LOCK,#10,SS | New OEM | Contact Us | |
| 21-042024-08 | Concept One | WASHER, LOCK, 1/4" SS | New OEM | Contact Us | |
| 21-042024-09 | Concept One | WASHER,LOCK,5/16,SS | New OEM | Contact Us | |
| 21-043547-00 | Concept One | SCRW,PAN,PHIL,M4X6,SS | New OEM | Contact Us | |
| 21-055168-06 | Concept One | SCRW,SKT,HEX,8-32X.375,BRAS | New OEM | Contact Us | |
| 21-055336-06 | Concept One | SCRW,SET,HEX,10-32X.375,SS, | New OEM | Contact Us | |
| 21-10074-00 | Concept One | SCRW,SKT,HEX,8-32x.375,SS,VENTED | New OEM | Contact Us | |
| 21-100993-16 | Concept One | SCRW,THUMB,1/4-20x1,PVDF | New OEM | Contact Us | |
| 21-10114-00 | Concept One | SHLDR SCREW 1/4D X 1/4W | New OEM | Contact Us | |
| 21-103203-00 | Concept One | WASHER,LOCK,M8,SS | New OEM | Contact Us | |
| 21-114035-00 | Concept One | NUT,HEX,8-32,BRASS | New OEM | Contact Us | |
| 21-119323-00 | Concept One | SCRW,FLAT,PHIL,10-32X.375,1 | New OEM | Contact Us | |
| 21-120456-00 | Concept One | SCRW,FLAT,PHIL,6-32X.375,UN | New OEM | Contact Us | |
| 21-121324-18 | Concept One | SCRW,SKT,HEX,8-32x1-1/8,SST,WS2 | New OEM | Contact Us | |
| 21-174969-01 | CMP | SCRW,FHC,8-32UNC,1/2,316SST | New OEM | Contact Us | |
| 21-176891-00 | GaSonics | WSHR,FL,#10,LARGE OD,SST | New OEM | Contact Us | |
| 21-179883-00 | CMP | SCRW,SKT,4-40 X 1/2,316 SST | New OEM | Contact Us | |
| 21-179972-00 | CMP | SCRW,SKT,HEX,6-32X.375,316SST | New OEM | Contact Us | |
| 21-180577-00 | CMP | SCRW,SKT,INT SEAL,10-32 X 1/4 316 SST | New OEM | Contact Us | |
| 21-180578-00 | CMP | SCRW,SKT,INT SEAL,6-32 X 3/4 316 SST | New OEM | Contact Us | |
| 21-181191-00 | CMP | SCRW,SKT,INT SEAL,1/4-20 X 1.375,VTN,SST | New OEM | Contact Us | |
| 21-184002-00 | CMP | SCRW,BTN,HEX,INT SEAL,10-32X.25,VTN,316 | New OEM | Contact Us | |
| 21-184837-00 | CMP | SCRW,FLAT,HEX,6-32 X .75,316SST | New OEM | Contact Us | |
| 21-2383 | CMP | REGULATOR, MINI PRES 14.5-101.5 PSIG, 4MM T X M5 | New OEM | Contact Us | |
| 21-2408 | GaSonics | SENSOR, RTD, 3/16 OD X 1 IN | New OEM | Contact Us | |
| 21-2410 | GaSonics | CONTROLLER, FLOW,1/4 X 5/32 | New OEM | Contact Us | |
| 21-2412 | GaSonics | SENSOR, MAGNETIC | New OEM | Contact Us | |
| 21-250078-00 | Concept One | WSHR,FLAT,FNDR,#10 ID,.50IN OD,SST,13/64ID | New OEM | Contact Us | |
| 21-261356-00 | GaSonics | SCRW,SHLDR,.25 x 1IN,10-32,ALLOY STEEL,S | New OEM | Contact Us | |
| 21-261359-00 | GaSonics | SCRW,SHLDR,.25 x 1.25IN,10-32,ALLOY STEE | New OEM | Contact Us | |
| 21-282771-00 | Concept One | SCRW,SKT,HEX,8x32 x.38" NI VENTED | New OEM | Contact Us | |
| 21-311179-00 | CMP | SCRW,FLAT,HEX,8-32 X .5,316SST,WEAR RING | New OEM | Contact Us |