Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 17114-01 | GaSonics | SWITCH ASSY,CASSETTE | New OEM | Contact Us | |
| 17-115725-00 | Concept One | SNUBBER, WAFER | New OEM | Contact Us | |
| 17-120155-00 | Concept One | PLATE,INTFC,AE MATCH,SEQ-E | New OEM | Contact Us | |
| 17-146010-00 | Concept One | BRKT, MOUNT, LFC, P2000i | New OEM | Contact Us | |
| 17-159253-00 | Concept One | BRKT, CONN, CPC, C1 ROBOT | New OEM | Contact Us | |
| 17-2256 | GaSonics | SLIDE, CHASSIS, 14 IN L, BALL BEARING WITHOUT GREASE | New OEM | Contact Us | |
| 17-2566 | GaSonics | CLAMP, 3 IN OD PIPE, POLYPROPYLENE | New OEM | Contact Us | |
| 17-258841-00 | GaSonics | STRAP,AL1100-O,RF PWR | New OEM | Contact Us | |
| 17-2656 | GaSonics | CLAMP, DOUBLE CLAW,ISO-80, SS | New OEM | Contact Us | |
| 17-2684 | GaSonics | MOUNTING,FINGER-FLEX, SHOCK,BUSHING,LOWER, LG. | New OEM | Contact Us | |
| 17-2685 | GaSonics | MOUNTING,FINGER-FLEX,SHOCK,RING, UPPER | New OEM | Contact Us | |
| 17-2722 | GaSonics | BEARING BALL .875DIA | New OEM | Contact Us | |
| 17-2723 | GaSonics | RING, RETAINING,.875 DIA. | New OEM | Contact Us | |
| 17-2724 | GaSonics | RING, RETAINING .19 DIA. | New OEM | Contact Us | |
| 17-2725 | GaSonics | SPRING,.360 DIA X 2.00 LG X .055 THK,S | New OEM | Contact Us | |
| 17-2727 | GaSonics | PIN, DOWEL, 0.187 X .625 LG | New OEM | Contact Us | |
| 17-2730 | GaSonics | FLAT WIRE COMPRESSION SPRING | New OEM | Contact Us | |
| 17-2736 | Gasonics | BEARING, LINEAR | New OEM | Contact Us | |
| 17-2739 | GaSonics | SPRING, WIRE, SS, 1.22 X 1.25 LG X .112 | New OEM | Contact Us | |
| 17-274037-00 | GaSonics | FLAG,BLADE,BOTTOM,G2100 | New OEM | Contact Us | |
| 17-2747 | GaSonics | PIN, DOWEL, .125 DIA X .312 L, SST | New OEM | Contact Us | |
| 17280-01 | GaSonics | VALVE GATE-910X VER | New OEM | Contact Us | |
| 17-2846 | GaSonics | CLAMP, WAVEGUIDE, OVER CENTER, SST | New OEM | Contact Us | |
| 17289-01 | GaSonics | PIN,QUARTZ,LIFT,PLATEN,75MM WAFERS | New OEM | Contact Us | |
| 17291-01 | GaSonics | PIN,QTZ,COOL STAT,10-32 HOLE,.060 HEAD | New OEM | Contact Us | |
| 17291-02 | GaSonics | PIN,QTZ,COOL STAT,10-32 HOLE,.030 HEAD | New OEM | Contact Us | |
| 17299-01 | GaSonics | LAMP PLATE,DIP BRAZED A-3000 | New OEM | Contact Us | |
| 17-3020 | GaSonics | CLAMP, WAVEGUIDE,WR284, SST | New OEM | Contact Us | |
| 17302-01 | GaSonics | WELDMENT,TOP,SHOWERHEAD A3000 | New OEM | Contact Us | |
| 17303-01 | Gasonics | PLATE,MIDDLE,SHOWERHEAD A3000 | New OEM | Contact Us | |
| 17-3072 | GaSonics | SPRING, CLTC, LOCK,1.90 L, .188 O.D.,SST | New OEM | Contact Us | |
| 17-3073 | GaSonics | SPRING, COMPRESSION,.240 OD X .75 L X .016 WIRE DIA, SS | New OEM | Contact Us | |
| 17-3104 | GaSonics | SPRING, COMPRESSION,.875 OD X 1.00 L,URE | New OEM | Contact Us | |
| 17-3147 | GaSonics | RING, RETAINER,.38 DIA | New OEM | Contact Us | |
| 17-3149 | GaSonics | RING, RETAINER,.50 DIA. | New OEM | Contact Us | |
| 17-3158 | GaSonics | SPRING, EXTENSION | New OEM | Contact Us | |
| 17-3169 | GaSonics | DISC, SPRING | New OEM | Contact Us | |
| 17317-01 | GaSonics | AC POWER MODULE,AURA 3000 | New OEM | Contact Us | |
| 17-3171 | GaSonics | CLAMP, SPLIT, HUB | New OEM | Contact Us | |
| 17-3179 | Gasonics | CAM, FOLLOWER 5/8 DIA, HEX SKT,SEALED | New OEM | Contact Us | |
| 17-3181 | GaSonics | RETAINER, RING,7/8DIA | New OEM | Contact Us | |
| 17-3182 | GaSonics | RING, RETAINER 3/8 DIA, E STYLE | New OEM | Contact Us | |
| 17-3190 | GaSonics | SLIDE, BLADE | New OEM | Contact Us | |
| 17-3197 | Gasonics | RING, RETAINER, .25 DIA | New OEM | Contact Us | |
| 17-3206 | GaSonics | SPACER, SHAFT, 1/4 | New OEM | Contact Us | |
| 17-3213 | Gasonics | CLAMP, SPLIT HUB | New OEM | Contact Us | |
| 17-3215 | GaSonics | RING, RETAINER, .50 DIA | New OEM | Contact Us | |
| 17-3219 | CMP | BOLT, CARBON STEEL | New OEM | Contact Us | |
| 17327-01 | GaSonics | LAMP TRAY ASSY,WATER COOLED, 8 INCH | New OEM | Contact Us | |
| 17329-01 | GaSonics | DOOR ASSY, CHAMBER | New OEM | Contact Us | |
| 17-3382 | GaSonics | SPRING, COMPRESSION,.140 O.D.,.31 FREE | New OEM | Contact Us | |
| 17345-01 | GaSonics | TOGGLE, DOOR | New OEM | Contact Us | |
| 17346-01 | GaSonics | BRKT, PIVOT CYL | New OEM | Contact Us | |
| 17346-02 | GaSonics | BRKT,PIVOT,CYL,LEFT | New OEM | Contact Us | |
| 17347-01 | GaSonics | TRUNNION BLOCK DOOR TOGGLE | New OEM | Contact Us | |
| 17348-01 | GaSonics | SHAFT, PIVOT, DOOR | New OEM | Contact Us | |
| 17349-01 | GaSonics | SHAFT, BEARING,DOOR | New OEM | Contact Us | |
| 17352-01 | GaSonics | ROD CLOVIS - DOOR | New OEM | Contact Us | |
| 17353-01 | GaSonics | SHIM, DOOR | New OEM | Contact Us | |
| 17356-01 | GaSonics | ALIGNER,WAFER 200MM | New OEM | Contact Us | |
| 17363-01 | GaSonics | CLAMP, FASTENER | New OEM | Contact Us | |
| 17364-01 | GaSonics | CLAMP, SHOWERHEAD | New OEM | Contact Us | |
| 17-365850-00 | CMP | PLATE,INNER PNL,R2 EMO,GENMARK | New OEM | Contact Us | |
| 17373-01 | GaSonics | WELDMENT, WATER COOL, UPPER,CHANNEL | New OEM | Contact Us | |
| 17377-01 | GaSonics | Weldment, water cool, lower channel | New OEM | Contact Us | |
| 17383-01 | GaSonics | COVER, 3 POSITION | New OEM | Contact Us | |
| 17390-01 | GaSonics | BLOCK, INSUL, 3 POSITION | New OEM | Contact Us | |
| 17-4021-01 | GaSonics | SPACER,3/8 ID x 9/16 OD x .06 THK,SST | New OEM | Contact Us | |
| 17-434017-00 | Concept One | PANEL,FRONT,TEMP/PRESS CNTRL | New OEM | Contact Us | |
| 17447-01 | GaSonics | ASSY,A3000,LAMP CONTROLLER | New OEM | Contact Us | |
| 17-460579-00 | GaSonics | MOUNT,RELECTOR W/THERMOSTAT MOUNT,IRIDIA | New OEM | Contact Us | |
| 17-460581-00 | GaSonics | MOUNT,REFLECTOR,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us | |
| 17524-01 | GaSonics | HOLDER,SENSOR,A3000 | New OEM | Contact Us | |
| 17553-01 | GaSonics | ELECTRODE ASSEMBLY,PREFIRE | New OEM | Contact Us | |
| 17558-01 | GaSonics | HARNESS, WIRING/CON - WAVEGUIDE | New OEM | Contact Us | |
| 17559-01 | GaSonics | HARNESS, WIRING - WAVEGUIDE | New OEM | Contact Us | |
| 17613-01 | GaSonics | HARNESS,HEATER CARTRIDGE | New OEM | Contact Us | |
| 17621-01 | GaSonics | PLATE, GAS DIST,6 IN (150MM), L3500 | New OEM | Contact Us | |
| 17622-01 | GaSonics | PLATE,DIFFUSER-QUARTZ LAMP,4.0 IN | New OEM | Contact Us | |
| 17657-01 | GaSonics | AC POWER MODULE-L3X00 | New OEM | Contact Us | |
| 17688-01 | GaSonics | PLATE,GAS DIST,200MM,L3500 | New OEM | Contact Us | |
| 17692-01 | GaSonics | OFFSET WAVEGUIDE | New OEM | Contact Us | |
| 17697-01 | GaSonics | DISTRIBUTION-L3X00/A3000 | New OEM | Contact Us | |
| 17760-01 | GaSonics | WAVEGUIDE, WR284,STRAIGHT, 16 IN | New OEM | Contact Us | |
| 17818-02 | GaSonics | REFLECTOR, LAMP TRAY, (GOLD PLATED) | New OEM | Contact Us | |
| 18-0271-01 | Concept One | SCRW,HEX SCH 2-56 X 1/4 L, SST | New OEM | Contact Us | |
| 18-0271-42 | GaSonics | SCRW,HEX SCH, 2-56 X 3/16 L, SST | New OEM | Contact Us | |
| 18-0273-42 | GaSonics | SCREW, PH FLHD,2-56 X 3/16 L, SST 100 DE | New OEM | Contact Us | |
| 18-0470-04 | GaSonics | SCRW,PAN, PHIL 4-40 X .438, SS | New OEM | Contact Us | |
| 18-0471-01 | GaSonics | SCRW,HEX SCH, 4-40 X 1/4, SST | New OEM | Contact Us | |
| 18-0471-02 | GaSonics | SCREW, HEX SCH, 4-40 X 5/16, SST | New OEM | Contact Us | |
| 18-0471-03 | GaSonics | SCREW, HEX SCH, 4-40 X 3/8 L, SST | New OEM | Contact Us | |
| 18-0471-99 | GaSonics | SCRW,SET, SLTD,4-40 X 3/32, CUP PT SST | New OEM | Contact Us | |
| 18-0473-48 | GaSonics | 4-40 x 7/32 SK FL CS 18-8SS | New OEM | Contact Us | |
| 18-0600-03 | CMP | SCRW,PH PNHD, 6-32 X 3/8 L, CPS | New OEM | Contact Us | |
| 18-0601-02 | GaSonics | SCRW,HEX SCH, 6-32 X 5/16 L, CPS | New OEM | Contact Us | |
| 18-0671-01 | GaSonics | SCRW,HEX SCH, 6-32 X 1/4 L, SST | New OEM | Contact Us | |
| 18-0671-10 | GaSonics | SCRW,HEX SCH, 6-32 X 7/8 L, SST | New OEM | Contact Us | |
| 18-0673-03 | GaSonics | SCRW, PH FLHD, 6-32 X 3/8L, SS | New OEM | Contact Us | |
| 18-0675-02 | GaSonics | SCREW, HEX SCH BTNHD 6-32 X 5/16 L, SST, CE! | New OEM | Contact Us |