Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-113064-00 | Concept One | NOZZLE,INJECTOR | New OEM | Contact Us | |
| 15-113646-00 | Concept One | SPACER,EXCL RING LOCATOR | New OEM | Contact Us | |
| 15114-01 | GaSonics | CABLE ASSY,BUS EXPANSION | New OEM | Contact Us | |
| 15-114331-00 | Concept One | SCRW,SKT,HEX,1/4-20X.5,NI T | New OEM | Contact Us | |
| 15115-01 | GaSonics | CBL ASSY,RS232-ZBOT | New OEM | Contact Us | |
| 15-11507-00 | Concept One | EXCL RING,200MM,1.5MM OH,SEMI | New OEM | Contact Us | |
| 15-116023-00 | Concept One | PIN,2 PC WFR LIFT ASSY,WCVD | New OEM | Contact Us | |
| 15-11606-00 | Concept One | INSULATOR,GAS DIST | New OEM | Contact Us | |
| 15-11683-00 | Concept One | VIEWPORT,VAT BLANK | New OEM | Contact Us | |
| 15-11690-00 | Concept One | VIEWPORT CASSETTE CHAMBER | New OEM | Contact Us | |
| 15-117849-00 | Concept One | BRKT,MAIN,150MM,VER 2 | New OEM | Contact Us | |
| 15-117850-00 | Concept One | BRKT,MAIN,200MM,VER 2 | New OEM | Contact Us | |
| 15-117851-00 | Concept One | WHEEL,GENEVA,200MM,VER 2 | New OEM | Contact Us | |
| 15-117852-00 | Concept One | WHEEL,GENEVA,150MM, VER 2 | New OEM | Contact Us | |
| 15-118451-00 | Concept One | Bracket, mfc, AERA | New OEM | Contact Us | |
| 15-119059-00 | Concept One | SCRW,SKT,HEX,1/4-20X.25,NI | New OEM | Contact Us | |
| 15-120150-04 | Concept One | TUBE,INJECTOR,1.00,HI PUR | New OEM | Contact Us | |
| 15-126576-00 | Concept One | SCRW,SPINDLE HSG CAP,ALT-S | New OEM | Contact Us | |
| 15-128755-00 | Concept One | CLAMP,SEAL PLATE | New OEM | Contact Us | |
| 15-152384-00 | Concept One | FORK,TOPLATE,A,ANTIDEFLECT,SEQ | New OEM | Contact Us | |
| 15-152384-01 | Concept One | FORK,TOPLATE,B,ANTIDEFLECT,SEQ | New OEM | Contact Us | |
| 15158-01 | GaSonics | MEMBRANE KEYBOARD,PANEL-FRONT | New OEM | Contact Us | |
| 15-158185-00 | Concept One | INJECTOR TUBE CLN HI-PUR TOGGLE CLN | New OEM | Contact Us | |
| 15-161435-00 | GaSonics | PLATE,ALUMINUM PEDESTAL (0.500 Lift pin ) | New OEM | Contact Us | |
| 15-161439-00 | GaSonics | PLATE,QUARTZ MODIFIED ISOLATIO | New OEM | Contact Us | |
| 15-161585-00 | Concept One | NOZZLE,INJECTOR,SPLIT,SPD-S | New OEM | Contact Us | |
| 15-161823-00 | GaSonics | PULLEY,BOTTOM, BLADE | New OEM | Contact Us | |
| 15-166886-00 | GaSonics | ROD,IDLER, BOTTOM,BLADE | New OEM | Contact Us | |
| 15-170847-00 | Concept One | RING,CENTER, 200MM,AL2O3 | New OEM | Contact Us | |
| 15-171785-00 | GaSonics | INSULATOR, SLEEVE,TEFLON | New OEM | Contact Us | |
| 15-174936-00 | CMP | DIAPHRAGM,OVERLAY,T3 WEAR RING,RWR | New OEM | Contact Us | |
| 15-175377-00 | CMP | PIN,LIGHT,EPD,MOLDED | New OEM | Contact Us | |
| 15-176387-00 | CMP | PLATEN,200MM,SOLID,LP CAPABLE | New OEM | Contact Us | |
| 15-176396-00 | CMP | PLUG,RETAINER TOP LIGHT PIN | New OEM | Contact Us | |
| 15-176989-00 | GaSonics | CHAMBER, PLASMA,UNIFIED TUBE, QUARTZ | New OEM | Contact Us | |
| 15-177233-00 | GaSonics | CHAMBER,SPOOL,UNIFIED TUBE, QUARTZ | New OEM | Contact Us | |
| 15-177241-00 | GaSonics | SHIELD,SLEEVE, ULTRA TORR, QUARTZ | New OEM | Contact Us | |
| 15-177364-00 | CMP | PLUG,PLATEN W/O ENDPOINT | New OEM | Contact Us | |
| 15-177385-00 | GaSonics | ROD,ASTEX MW TUBE CLEANING | New OEM | Contact Us | |
| 15-177659-00 | CMP | MANF,PLATEN PDM LP CAPABLE SST 200MM | New OEM | Contact Us | |
| 15-177748-00 | CMP | RING,WEAR REAR LATCHED PET-P TX 300MM | New OEM | Contact Us | |
| 15-180868-00 | CMP | PLUG,RETAINER,EPD LIGHT PIN,316SS | New OEM | Contact Us | |
| 15-181651-00 | CMP | KEY,WAFER HEAD DRIVE SHAFT,3 INCH | New OEM | Contact Us | |
| 15-182606-00 | CMP | LATCH,COMPRESSION,SST FOR MP WINDOW | New OEM | Contact Us | |
| 15-182719-00 | CMP | END EFFECTOR,COATED,R3 200MM | New OEM | Contact Us | |
| 15-183889-00 | CMP | O-RING,SPLICED,10.625OD X .103W,BUNA | New OEM | Contact Us | |
| 15-184819-00 | CMP | CLAMP,1/8 PIPE CLAMP,FLUID SPRAY,XDF | New OEM | Contact Us | |
| 15-185198-00 | CMP | ADPTR,LIFTING,EXTENDED SPRAY RING | New OEM | Contact Us | |
| 15-185199-00 | CMP | CLIP, ANTI-ROTATION, EXTENDED SPRAY RING | New OEM | Contact Us | |
| 15-185202-00 | CMP | BLOCK,SPRAY SHIELD ALIGNMENT | New OEM | Contact Us | |
| 15-185277-00 | CMP | BLOCK,LIFT & ROTATE | New OEM | Contact Us | |
| 15-185310-00 | CMP | PULLEY,W/SHAFT,UPPER BRUSH | New OEM | Contact Us | |
| 15198-01 | GaSonics | CABLE ASSY, BULK-ZBOT | New OEM | Contact Us | |
| 15198-02 | GaSonics | CABLE ASSY, BULK-ZBOT | New OEM | Contact Us | |
| 15-258837-00 | Concept One | CLAMP,RF STRAP,3.5IN,ALUM,SEQUEL | New OEM | Contact Us | |
| 15-259094-00 | Concept One | RF FEEDTHRU CLAMP | New OEM | Contact Us | |
| 15-263337-00 | GaSonics | SHWRHD,150MM,HEMISPHERICAL | New OEM | Contact Us | |
| 15-2676 | GaSonics | BEARING, BALL, .125 ID X .315 OD, SST | New OEM | Contact Us | |
| 15-270513-00 | Concept One | INSULATOR,FRONT,AC PWR,HTR HOT LEAD,SEQX | New OEM | Contact Us | |
| 15-270514-00 | Concept One | INSULATOR,BACK,AC PWR,HTR HOT LEAD,SEQX | New OEM | Contact Us | |
| 15-2722 | GaSonics | BELT, TENSIONER | New OEM | Contact Us | |
| 15-2725 | CMP | BELT, TIMING | New OEM | Contact Us | |
| 15-2726 | GaSonics | BEARING, CAM | New OEM | Contact Us | |
| 15-2727 | GaSonics | PULLEY, TIMING BELT W/DOUBLE FLANGE | New OEM | Contact Us | |
| 15-2730 | CMP | BELT, TIMING | New OEM | Contact Us | |
| 15-2731 | GaSonics | BELT, TIMING | New OEM | Contact Us | |
| 15-2732 | GaSonics | BEARING, 3/8 W/BRAYCOTE | New OEM | Contact Us | |
| 15-2736 | GaSonics | BELT, TIMING | New OEM | Contact Us | |
| 15-2737 | GaSonics | BELT, TIMING | New OEM | Contact Us | |
| 15-2739 | GaSonics | BEARING, 1GU3 | New OEM | Contact Us | |
| 15-2741 | GaSonics | MOD,PULLEY,40DP,.520PD | New OEM | Contact Us | |
| 15-2744 | GaSonics | BELT, TIMING, RO | New OEM | Contact Us | |
| 15-2748 | GaSonics | BELT, TIMING | New OEM | Contact Us | |
| 15-2750 | GaSonics | TRAN, TORQUE ID 0.25 | New OEM | Contact Us | |
| 15-2752 | GaSonics | BELT, TIMING, RO | New OEM | Contact Us | |
| 15-2754 | GaSonics | BEARING, W/MICROCOTE | New OEM | Contact Us | |
| 15-2755 | GaSonics | BEARING, .25 ID X .625 OD | New OEM | Contact Us | |
| 15-2756 | GaSonics | BEARING, BALL 3/8 | New OEM | Contact Us | |
| 15-2761 | Gasonics | BRG, .5# OD X .25# DIA SHAFT,50000 RPM | New OEM | Contact Us | |
| 15-2762 | CMP | ROLLER, CARBON STEEL | New OEM | Contact Us | |
| 15-2764 | GaSonics | BEARING, BALL, .500 ID X 1.125 OD X .312 W | New OEM | Contact Us | |
| 15-276860-00 | CMP | FLANGE,NIPPLE,NUCLEAR TUBE LIGHT,MV200 | New OEM | Contact Us | |
| 15-277459-00 | Concept One | CAP,FORK ASSY, C2SEQ-X | New OEM | Contact Us | |
| 15-277460-00 | Concept One | FORK,CERAMIC | New OEM | Contact Us | |
| 15-277463-00 | Concept One | PLATE,BOTTOM,CERAMIC,FORK ASSY | New OEM | Contact Us | |
| 15-277464-00 | Concept One | PLATE,TOP,FORK ASSY,C2SEQ-X | New OEM | Contact Us | |
| 15-281894-00 | Concept One | PLATE,MOUNT,BLK BDY SR72,HDP 200MM | New OEM | Contact Us | |
| 15-289403-00 | GaSonics | PIN,INNER,6061-T6 AL,RT,ROTATION | New OEM | Contact Us | |
| 15-289404-00 | GaSonics | PIN,INNER,6061-T6 AL,LT ROTATION | New OEM | Contact Us | |
| 15-290624-00 | Concept One | INSERT,SPLIT,INNER,C2 | New OEM | Contact Us | |
| 15-291593-00 | CMP | INSERT, STACKED, 7.60"NC, 7.57"FLAT, .200"SP | New OEM | Contact Us | |
| 15-297368-00 | GaSonics | SHAFT,TOP CAP,CLTC | New OEM | Contact Us | |
| 15-297369-00 | GaSonics | CAP, TOP CLTC | New OEM | Contact Us | |
| 15-301878-00 | Concept One | BASE, CONTAINER, 200MM CATIONIC MEMBRANE | New OEM | Contact Us | |
| 15-305056-00 | Concept One | FORK,CERAMIC,C1-150MM | New OEM | Contact Us | |
| 15-305097-00 | Concept One | PLATE,BOTTOM,CERAMIC,C1-150 | New OEM | Contact Us | |
| 15-305098-00 | Concept One | PLATE,TOP,FORK ASSY,C1-150MM | New OEM | Contact Us | |
| 15-307812-00 | Concept One | BOTTOM PLATE, FORK, 200mm | New OEM | Contact Us | |
| 15-307813-00 | Concept One | FORK,TOP PLATE 200MM WAFER | New OEM | Contact Us | |
| 15-308813-00 | Concept One | BEZEL,C1,LOADLOCK, LCD/TOUCHSCREEN | New OEM | Contact Us |