Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 10-045275-00 | Concept One | TUBE ASSY, 3/8 SWL-AN, 53" LG | New OEM | Contact Us | |
| 10-10319-00 | Concept One | TUBE ASSY, 3/8 IN/OUT 49" | New OEM | Contact Us | |
| 10-10322-00 | Concept One | TUBE ASSY,VCR TO INSULATOR | New OEM | Contact Us | |
| 10-10395-00 | Concept One | FTG,3 PORT,LH | New OEM | Contact Us | |
| 10-117186-00 | Concept One | TUBE ASSY, TEOS DIVRT, 200MM, VCR | New OEM | Contact Us | |
| 10-126181-00 | Concept One | TUBE ASSY,ISO TO THRTL VLV,SPD | New OEM | Contact Us | |
| 10-155435-00 | CMP | TUBE ASSY,LFCOUT,P2000I,S6,TMP | New OEM | Contact Us | |
| 10-155436-00 | CMP | TUBE ASSY, ILDS, LFCIN, P200I, SG | New OEM | Contact Us | |
| 10-345539-00 | Concept One | Tube Assembly, LOTO Manifold B inlet 150mm | New OEM | Contact Us | |
| 10-345540-00 | Concept One | Tube Assembly, LOTO Manifold A inlet 150mm | New OEM | Contact Us | |
| 10-416961-00 | Concept One | TUBE ASSY,INJECTOR S6 VCR,LOW FLOW,C2SEQ | New OEM | Contact Us | |
| 10-430544-00 | Concept One | ASSY, S6 INJECTOR TUBE PAIR | New OEM | Contact Us | |
| 10-464285-00 | Concept One | TUBE ASSY,INJECTOR S6 VCR,C2SEQ | New OEM | Contact Us | |
| 10-464288-00 | Concept One | TUBE ASSY,INJECTOR S6 VCR,LOW FLOW,C2SEQ | New OEM | Contact Us | |
| 10-464289-00 | Concept One | TUBE ASSY,INJECTOR,S6 | New OEM | Contact Us | |
| 10-464290-00 | Concept One | TUBE ASSY,INJECTOR PAIR,S6,C2SEQ | New OEM | Contact Us | |
| 10-464292-00 | Concept One | TUBE ASSY,PAIR,INJECTOR,V3 | New OEM | Contact Us | |
| 12-8800-095 | CMP | ASSY, OPEN BRUSH BOX, CMC | New OEM | Contact Us | |
| 12-8882-064 | Ontrak | ASSY, CABLE, DC MOTOR, CE | New OEM | Contact Us | |
| 12-8882-067 | CMP | ASSY,CBL,SPINDLE DC MTR,CE | New OEM | Contact Us | |
| 12-8882-120 | Ontrak | ASSY, MOTOR, TRANSPORT | New OEM | Contact Us | |
| 12-8892-026 | Ontrak | ASSY, CBL, TRNSPRT MOTOR, CE | New OEM | Contact Us | |
| 1300-770630 | CMP | WSHR,#4,NYLON | New OEM | Contact Us | |
| 13-8000-008 | GaSonics | COUPLING,BR.MTR. | New OEM | Contact Us | |
| 13-8800-266 | PVD | GEAR, SPUR | New OEM | Contact Us | |
| 13-8800-273 | Ontrak | COVER.1"SHAFT | New OEM | Contact Us | |
| 13-8800-277 | PVD | BUSHING, INSIDE 1" SHAFT | New OEM | Contact Us | |
| 13-8800-297 | PVD | BUSHING, OUTSIDE, 1"SHAFT | New OEM | Contact Us | |
| 13-8800-357 | PVD | CAP | New OEM | Contact Us | |
| 13-8800-358 | PVD | SHAFT, DRIVE, CORE | New OEM | Contact Us | |
| 13-8800-428 | Ontrak | PULLEY, CONVEYOR, LONG | New OEM | Contact Us | |
| 13-8800-431 | Ontrak | COVER PLATE DRIVE NUT | New OEM | Contact Us | |
| 13-8800-432 | Ontrak | PULLEY, CONVEYOR, SHORT | New OEM | Contact Us | |
| 13-8800-433 | PVD | NUT, DRIVE, ROLLER TRUCK | New OEM | Contact Us | |
| 13-8800-569 | Ontrak | PULLEY, DRIVE, TRANSPORT CONVER | New OEM | Contact Us | |
| 13-8800-708 | PVD | HUB, GEAR, SMALL | New OEM | Contact Us | |
| 13-8882-221 | CMP | FINGER,BUMPER | New OEM | Contact Us | |
| 13-8882-418 | CMP | WAFER STOP,8" | New OEM | Contact Us | |
| 13-8885-072 | Ontrak | LAMP, WINDOW | New OEM | Contact Us | |
| 13-8892-200 | Ontrak | PULLEY, FRONT, SMALL | New OEM | Contact Us | |
| 1410-105102 | CMP | PIN,SLOTTED SPRING .062X.25 SST | New OEM | Contact Us | |
| 1410-112128 | CMP | PIN,PAD CONDITIONER LATCH | New OEM | Contact Us | |
| 1410-701171 | CMP | PIN,DOWEL 3/16" DIA X 3/4 LONG SST | New OEM | Contact Us | |
| 1410-738893 | CMP | PIN,PIVOT PAD COND BLADDERLESS | New OEM | Contact Us | |
| 1410-739065 | CMP | PIN,ROLL 1/8" X 2" STEEL | New OEM | Contact Us | |
| 14138-01 | GaSonics | FITTING,SHOWERHEAD | New OEM | Contact Us | |
| 1420-700609 | CMP | SNAP RING,SST | New OEM | Contact Us | |
| 1420-717007 | CMP | RING,WAFER PLATE RETAINING | New OEM | Contact Us | |
| 1420-717019 | CMP | RING,INSIDE BEARING CLAMP | New OEM | Contact Us | |
| 1420-717021 | CMP | RING,LOWER BEARING CLAMP | New OEM | Contact Us | |
| 1420-717038 | CMP | RING,WEAR | New OEM | Contact Us | |
| 1420-717052 | CMP | RING,TOP CLAMP | New OEM | Contact Us | |
| 1420-717053 | CMP | RING,TOP CLAMP | New OEM | Contact Us | |
| 1420-718644 | CMP | RING,WAFER HEAD WEAR 150MM | New OEM | Contact Us | |
| 1420-727371 | CMP | RING,TOP CLAMP MODIFIED | New OEM | Contact Us | |
| 1420-737596 | CMP | RING, RETAINING .562OD X .39W | New OEM | Contact Us | |
| 1420-737623 | CMP | RING,RETAINING SPIRAL | New OEM | Contact Us | |
| 1420-738690 | CMP | RING, RETAINING EXT.75 SHAFT DIA SST | New OEM | Contact Us | |
| 14738-01 | GaSonics | BUBBLER, QUARTZ | New OEM | Contact Us | |
| 14-918954-00 | CMP | WASHER,WAVY SPRING | New OEM | Contact Us | |
| 15-00004-01 | Concept One | SUPPORT, BAR, LIFT | New OEM | Contact Us | |
| 15-00004-02 | Concept One | SUPPORT, BAR, LIFT | New OEM | Contact Us | |
| 15-00011-02 | Concept One | SUPPORT, LEVELING, ADJ. | New OEM | Contact Us | |
| 15-00012-01 | Concept One | SUPPORT, HTR (SHIPPING) | New OEM | Contact Us | |
| 15-00019-02 | Concept One | BLANK OFF,ALUMINUM | New OEM | Contact Us | |
| 15-00027-02 | Concept One | GUIDE, NOZZLE ADJUSTER | New OEM | Contact Us | |
| 15-00043-02 | Concept One | ADJUSTER,CERAMIC,GAS PLT | New OEM | Contact Us | |
| 15-00068-01 | Concept One | PADDLE, (150MM) WAFER MOL | New OEM | Contact Us | |
| 15-00074-01 | Concept One | BRKT,CYL ADAPTER | New OEM | Contact Us | |
| 15-00075-00 | Concept One | BRKT,LOAD LOCK SUPPORT | New OEM | Contact Us | |
| 15-00076-00 | Concept One | SWING ARM | New OEM | Contact Us | |
| 15-00077-00 | Concept One | LINK, CYLINDER | New OEM | Contact Us | |
| 15-00089-00 | Concept One | PIVOT, STAND | New OEM | Contact Us | |
| 15-00094-00 | Concept One | HSG, L.L. DOOR BEARING | New OEM | Contact Us | |
| 15-00126-00 | Concept One | STRAP, HEATER GND | New OEM | Contact Us | |
| 15-00138-00 | Concept One | FLAG, LL .505 DIA | New OEM | Contact Us | |
| 15-00180-00 | Concept One | COVER, FRONT W/O PERF | New OEM | Contact Us | |
| 15-00190-00 | Concept One | BAR, LL SIDE/BAFFLE | New OEM | Contact Us | |
| 15-00216-01 | Concept One | HOLDER, FILTER LL BACKFILL | New OEM | Contact Us | |
| 15-00229-00 | Concept One | NUT,FEEDTHROUGH,1/2-20 | New OEM | Contact Us | |
| 15-00270-00 | Concept One | SUPPORT, PLATFORM 4" | New OEM | Contact Us | |
| 15-00293-01 | Concept One | BRKT,RT HOOK (PLATFORM) | New OEM | Contact Us | |
| 15-00293-02 | Concept One | BRKT,LEFT HOOK (PLATFORM) | New OEM | Contact Us | |
| 15-00308-00 | Concept One | BRKT,LL DOOR SNSR | New OEM | Contact Us | |
| 15-00309-00 | Concept One | HANGER, NOZZLE | New OEM | Contact Us | |
| 15-00309-01 | Concept One | HANGER,NOZZLE | New OEM | Contact Us | |
| 15-00311-00 | Concept One | NUT CAP 1/4 - 20 NICKEL | New OEM | Contact Us | |
| 15-00313-01 | Concept One | BLADE, WAFER PLACEMENT | New OEM | Contact Us | |
| 15-00314-01 | Concept One | ROD, WAFER ALIGNER | New OEM | Contact Us | |
| 15-00320-00 | Concept One | BRKT,SW,AL .005 | New OEM | Contact Us | |
| 15-00341-00 | Concept One | SCRW,1/4-20X.25,NICKEL | New OEM | Contact Us | |
| 15-00343-00 | Concept One | GUARD, SWITCH | New OEM | Contact Us | |
| 15-00352-00 | Concept One | BRKT,ADJUST MT. | New OEM | Contact Us | |
| 15-00357-00 | Concept One | CLAMP,SHAFT | New OEM | Contact Us | |
| 15-00358-00 | Concept One | BSHG, ADJUST. | New OEM | Contact Us | |
| 15-00359-00 | Concept One | FLANGE,SPLINE | New OEM | Contact Us | |
| 15-00361-00 | Concept One | SCRW,ADJUST | New OEM | Contact Us | |
| 15-00362-00 | Concept One | FLANGE,SPLINE | New OEM | Contact Us | |
| 15-00368-00 | Concept One | SHAFT, GENEVA | New OEM | Contact Us | |
| 15-00371-00 | Concept One | New OEM | Contact Us |