Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0740-717634 | CMP | BEARING,KAYDON | New OEM | Contact Us | |
| 0740-718396 | CMP | BEARING, HOIST 206PPG | New OEM | Contact Us | |
| 0740-737577 | CMP | BEARING,20MM BORE 37MM OD 9MM WIDE | New OEM | Contact Us | |
| 0740-738211 | CMP | ROLLER,TENSIONER UPPER ARM | New OEM | Contact Us | |
| 0740-738319 | CMP | BEARING,BALL 3/8 DIA TORLON | New OEM | Contact Us | |
| 0740-739678 | CMP | BEARING,BALL 1"X2"X5"SEALED BOTH SD | New OEM | Contact Us | |
| 0740-739881 | CMP | BEARING,BALL 20MMX37MMX9MMSST 2SEAL | New OEM | Contact Us | |
| 0750-103649 | CMP | TABLE,ROTARY COMPACT AIR SAPC | New OEM | Contact Us | |
| 0750-105095 | CMP | REGULATOR,PRESSURE 0-75PSI SI | New OEM | Contact Us | |
| 0750-105103 | CMP | REGULATOR, PRESSURE 0-75PSI RPC2 | New OEM | Contact Us | |
| 0750-106983 | CMP | SMC Pneumatic Rodless Cylinder | New OEM | Contact Us | |
| 0750-111042 | CMP | CYLINDER,25MM BORE PAD CONDITIONER | New OEM | Contact Us | |
| 0750-111515 | CMP | CYLINDER,AIR 8BORE 6STRK NON-ROTA | New OEM | Contact Us | |
| 0750-111515/RW | CYLINDER,AIR 8"BORE 6"STRK NON-ROTA - ASSUMES RETURN OF CUSTOMER CORE. | New OEM | Contact Us | ||
| 0750-700175 | CMP | CYLINDER,AIR 20MMBS X 5MMSTROKE | New OEM | Contact Us | |
| 0750-700176 | CMP | CYLINDER,AIR 8" BORE 6" STROKE | New OEM | Contact Us | |
| 0750-700177 | CMP | CYLINDER, LIFT | New OEM | Contact Us | |
| 0750-700180 | CMP | CYLINDER,RODLESS | New OEM | Contact Us | |
| 0750-718407 | CMP | CYLINDER,BOOT HOIST 1 X 1-3/8 X 5 | New OEM | Contact Us | |
| 0750-738006 | CMP | CYLINDER,RODLESS 6.50 STROKE | New OEM | Contact Us | |
| 0750-738085 | CMP | CYLINDER,140MM STROKE W/SNSR | New OEM | Contact Us | |
| 0750-738086 | CMP | CYLINDER,220MM STROKE W/SNSR | New OEM | Contact Us | |
| 0750-738279 | CMP | CYLINDER,COMPACT DBL ACTING BUF MOD | New OEM | Contact Us | |
| 0750-738502 | CMP | REGULATOR, AIR PRESURE W/PRES G | New OEM | Contact Us | |
| 0750-738527 | CMP | CYLINDER, AIR COMP 1 1/16"DIAX3/8"ST | New OEM | Contact Us | |
| 0750-738985 | CMP | CYLINDER,AIR 1"STROKE | New OEM | Contact Us | |
| 0760-100621 | CMP | HOUSING,LOCATOR ROTATION CHUCK SRD | New OEM | Contact Us | |
| 0760-738590 | CMP | HOUSING, BRNG BRKT UPPR ARM BALL SPLN | New OEM | Contact Us | |
| 0760-739686 | CMP | HOUSING,SHAFT PAD COND SPECIAL | New OEM | Contact Us | |
| 0760-739777 | CMP | CASING,FILTER MODIFIED | New OEM | Contact Us | |
| 0760-770156 | CMP | HOUSING,DWO MTR CONDITIONING LONG | New OEM | Contact Us | |
| 0760-770958 | CMP | SPACER,LOWER DRIVE 776 | New OEM | Contact Us | |
| 0770-100801 | CMP | SHAFT,SPIN DRY SST | New OEM | Contact Us | |
| 0770-109994 | CMP | SHAFT,ROLLER PRE-CLEAN | New OEM | Contact Us | |
| 0770-110198 | CMP | SPINDLE,DRIVE SST BUFF | New OEM | Contact Us | |
| 0770-110206 | CMP | SHAFT,MOTOR APM | New OEM | Contact Us | |
| 0770-700183 | CMP | DRIVE,LINE POLISH HEAD | New OEM | Contact Us | |
| 0770-700887 | CMP | CLIP,ANTI ROTATION | New OEM | Contact Us | |
| 0770-717054 | CMP | SHAFT,DRIVE WAFER HEAD | New OEM | Contact Us | |
| 0770-717055 | CMP | COLLAR,DRIVE WAFER HEAD | New OEM | Contact Us | |
| 0770-717056 | CMP | COLLAR,SNSR WAFER HEAD | New OEM | Contact Us | |
| 0770-718387 | CMP | SHAFT, EXTENSION ARM MOUNT | New OEM | Contact Us | |
| 0770-727425 | CMP | CLIP,ANTI ROTATION FORK | New OEM | Contact Us | |
| 0770-730006 | CMP | SHAFT,PIVOT NOSE BLOCK PAD COND | New OEM | Contact Us | |
| 0770-738680 | CMP | SPINDLE,RETAINING BEARING BUFF | New OEM | Contact Us | |
| 0770-739253 | CMP | SPLINE,BALL 80L | New OEM | Contact Us | |
| 0770-739687 | CMP | SHAFT,EXTENSION PAD COND SPECIAL | New OEM | Contact Us | |
| 0780-107659 | CMP | GEARHEAD,RIGHT ANGLE 10:1 W/SEAL | New OEM | Contact Us | |
| 0780-107866 | CMP | GEARHEAD,RIGHT ANGLE 10:1 W/SL1/8HL | New OEM | Contact Us | |
| 0780-109166 | CMP | GEARHEAD,MULTIDRIVE BAYSIDE | New OEM | Contact Us | |
| 0780-717404 | CMP | GEARBOX,PAD CONDITIONER | New OEM | Contact Us | |
| 0790-109924 | CMP | BASE,PAD CONDITIONER 1.90 X .482 776 | New OEM | Contact Us | |
| 0790-738890 | CMP | BASE,SPRAY PAD COND BLADDERLESS | New OEM | Contact Us | |
| 0800-109377 | CMP | BLOCK,PAD COND NOSE | New OEM | Contact Us | |
| 0800-110269 | CMP | HEAD,ACTIVE WAND MV | New OEM | Contact Us | |
| 0800-738583 | CMP | BLOCK,TENSIONER UPPER ARM | New OEM | Contact Us | |
| 0800-740221 | CMP | BLOCK,CLAMP SPLINED SHAFT 4.22 | New OEM | Contact Us | |
| 0810-104477 | CMP | WELDMENT,TRAY SHUTTLE 200MM STD | New OEM | Contact Us | |
| 0810-110733 | CMP | PLATE,LOWER PAD | New OEM | Contact Us | |
| 0810-110736 | CMP | PLATE, LARGE GIMBAL | New OEM | Contact Us | |
| 0810-717011 | CMP | PLATE,WAFER CARRIER | New OEM | Contact Us | |
| 0810-717415 | CMP | PLATE,WAFER BACKING .125 HOLES | New OEM | Contact Us | |
| 0810-730020 | CMP | PLATE,ADPTR PAD CONDITIONER | New OEM | Contact Us | |
| 0810-737438 | CMP | PLATE,BRUSH UPPER 200MM | New OEM | Contact Us | |
| 0810-738534 | CMP | PLATE,WFR BACKING 200MM.04DIA HOLES | New OEM | Contact Us | |
| 0810-739736 | CMP | PLATE,MTR MTG ADJUSTABLE LWR MP | New OEM | Contact Us | |
| 0815-111773 | CMP | SHROUD,EMERGENCY OFF | New OEM | Contact Us | |
| 0815-700885 | CMP | COVER,TOP LIFT JACK ASSY | New OEM | Contact Us | |
| 0815-700886 | CMP | COVER,LEFT FRONT LIFTING JACK | New OEM | Contact Us | |
| 0815-700888 | CMP | COVER,RIGHT FRONT LIFTING JACK | New OEM | Contact Us | |
| 0815-717775 | CMP | TURRET,PAD CONDITIONER | New OEM | Contact Us | |
| 0815-727102 | CMP | COVER,BLADE 25 SNSR ARRAY | New OEM | Contact Us | |
| 0815-727166 | CMP | COVER,BACK LIFTING JACK | New OEM | Contact Us | |
| 0815-727370 | CMP | SKIRT,POLISH BELL | New OEM | Contact Us | |
| 0815-727395 | CMP | SHIELD,SLURRY MOD16 | New OEM | Contact Us | |
| 0815-738270 | CMP | DOOR,ACCESS RODLESS CYLINDER | New OEM | Contact Us | |
| 0815-738987 | CMP | COVER,SNSR | New OEM | Contact Us | |
| 0815-739264 | CMP | HOOD,SHROUD 150/200MM SRD | New OEM | Contact Us | |
| 0815-770157 | CMP | END CAP,776 MTR HOUSE PAD COND LNG | New OEM | Contact Us | |
| 0820-110280 | CMP | GUIDE,ACTIVE WAND MV | New OEM | Contact Us | |
| 0820-112231 | CMP | GUIDE,SPRAY BOX SHORT 200MM 776 | New OEM | Contact Us | |
| 0820-727171 | CMP | ADJUSTER,JACKING SCRW | New OEM | Contact Us | |
| 0820-739378 | CMP | POST,776 HARD STOP PAD COND | New OEM | Contact Us | |
| 0820-739512 | CMP | KIT,ALIGNMENT TOOL PAD | New OEM | Contact Us | |
| 0820-770480 | CMP | SUPPORT,CERAMIC WAND TAIL | New OEM | Contact Us | |
| 0830-110214 | CMP | MANF,SPINDLE BUFF | New OEM | Contact Us | |
| 0830-112641 | CMP | MANF,2 VALVE N/C 1/4 FLOW OUTLET | New OEM | Contact Us | |
| 0830-112642 | CMP | MANF,3 VALVE N/C 1/4 FLOW OUTLET | New OEM | Contact Us | |
| 0830-112643 | CMP | MANF,10 VALVE N/C | New OEM | Contact Us | |
| 0830-739210 | CMP | MANF,W/12 VALVE PNEUMATIC | New OEM | Contact Us | |
| 0830-739447 | CMP | MANF, 3 VLV FURON HPV RIGHT DWO | New OEM | Contact Us | |
| 0845-109072 | CMP | WAND, CENTER CONTACT R1 | New OEM | Contact Us | |
| 0845-109073 | CMP | WAND,CENTER CONTACT R2 | New OEM | Contact Us | |
| 0845-717702 | CMP | ADPTR,CERAMIC WAND | New OEM | Contact Us | |
| 0845-717703 | CMP | LOAD DISTRIBUTE PLATE,CERAMIC WAND | New OEM | Contact Us | |
| 0845-718858 | CMP | WAND,CERAMIC 3 PIECE 90MIL | New OEM | Contact Us | |
| 0845-770455 | CMP | WAND,R2 | New OEM | Contact Us | |
| 0845-770580 | CMP | WAND,776 R3 200MM | New OEM | Contact Us | |
| 0850-718035 | CMP | ARM,DUAL CASS LIFT RIGHT A192-81M | New OEM | Contact Us | |
| 0850-718036 | CMP | ARM,DUAL CASS LIFT LEFT A192-81M | New OEM | Contact Us |