Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0850-718370 | CMP | ARM, CYLINDER EXTENSION MAINT LIFT | New OEM | Contact Us | |
| 0860-700833 | CMP | LOADER,WAFER POST SPRAY BOX | New OEM | Contact Us | |
| 0860-700834 | CMP | BASE,WAFER HOLDER SPRAY BOX | New OEM | Contact Us | |
| 0860-700835 | CMP | HOLDER,WAFER FINGERS SPRAY BOX | New OEM | Contact Us | |
| 0860-738197 | CMP | HOLDER, WAFER 200MM | New OEM | Contact Us | |
| 0870-739107 | CMP | FINGER, GRIPPER TALL | New OEM | Contact Us | |
| 0880-737917 | CMP | WELDMENT,POLISH BELL SST | New OEM | Contact Us | |
| 0880-739155 | CMP | GENERATOR,VACUUM AV116 W/NPT | New OEM | Contact Us | |
| 0900-111548 | CMP | PLATEN,LOWER BUFF | New OEM | Contact Us | |
| 1_4491 | GaSonics | CAP, TOP, CLTC | New OEM | Contact Us | |
| 10-00031-01 | Concept One | TUBE ASSEMBLY, VACUUM MANIFOLD | New OEM | Contact Us | |
| 10-00032-02 | Concept One | MANF, "B", GAS SUPPLY | New OEM | Contact Us | |
| 10-00033-00 | Concept One | PLMB, M2 PURGE | New OEM | Contact Us | |
| 10-00035-01 | Concept One | PLMB, "B", GAS SUPPLY | New OEM | Contact Us | |
| 10-00036-00 | Concept One | PLMB, MANIFOLD EXTENTION | New OEM | Contact Us | |
| 10-00038-00 | Concept One | MANF, GAS PURGE | New OEM | Contact Us | |
| 10-00038-01 | Concept One | TUBE WELDMENT, PURGE MA | New OEM | Contact Us | |
| 10-00040-00 | Concept One | TUBING,POLYURETHANE 1/8ODX.066ID | New OEM | Contact Us | |
| 10-00045-00 | Concept One | PLUMB UPPER A VCR | New OEM | Contact Us | |
| 10-00049-00 | Concept One | TUBE, POLYPROPYLENE1/4"OD, CE! | New OEM | Contact Us | |
| 10-00072-00 | Concept One | TUBE,GAS DIST | New OEM | Contact Us | |
| 10-00073-00 | Concept One | TUBE ASSEMBLY, MANIFOLD A | New OEM | Contact Us | |
| 10-00074-00 | Concept One | TUBE ASSEMBLY, MANIFOLD A | New OEM | Contact Us | |
| 10-00092-00 | Concept One | TUBE WLDMT, GAS OUTLET"A"MAN | New OEM | Contact Us | |
| 10-00095-00 | Concept One | TUBE ASSY, GAS DIST "T" | New OEM | Contact Us | |
| 10-00096-00 | Concept One | TUBE ASSY, BGAS MANIFOLD | New OEM | Contact Us | |
| 10-00097-00 | Concept One | TUBE ASSY, "A" GAS LWR VCO 200 | New OEM | Contact Us | |
| 10-00100-00 | Concept One | TUBE ASSY, GAS DIST."T" | New OEM | Contact Us | |
| 1000-106890 | CMP | SCRW,SET HALF DOG 10-32 X 3/16 | New OEM | Contact Us | |
| 1000-108516 | CMP | SCRW,SHC 6-32 X 3/8 SELF LOCK SST | New OEM | Contact Us | |
| 10-00122-00 | Concept One | TUBE ASSY,MFC OUTB23 FILM A | New OEM | Contact Us | |
| 10-00123-00 | Concept One | TUBE ASSY,FILTER B23 FILM A | New OEM | Contact Us | |
| 10-00128-00 | Concept One | TUBE BGAS MAN 200MM LWR VCR | New OEM | Contact Us | |
| 10-00129-00 | Concept One | TUBE,A GAS MAN 200MM UPR VCR | New OEM | Contact Us | |
| 10-00130-00 | Concept One | TUBE,B GAS MAN 200MM UPR VCR | New OEM | Contact Us | |
| 10-00131-00 | Concept One | TUBE AGAS MAN 200MM LWR VCR | New OEM | Contact Us | |
| 10-00153-00 | Concept One | TUBE ASSY, GAS INLET, FILTER | New OEM | Contact Us | |
| 10-00172-00 | Concept One | TUBING,PFA TEFLON | New OEM | Contact Us | |
| 10-00174-00 | Concept One | MANF,CAP MANOMETER | New OEM | Contact Us | |
| 10-00186-00 | Concept One | N2 NEEDLE VALVE FOR CHAMBER PURGE | New OEM | Contact Us | |
| 10-00245-00 | Concept One | TUBE ASSY, INLET/PURGE "A" | New OEM | Contact Us | |
| 10-00246-00 | Concept One | TUBE ASSY, INLET "B" | New OEM | Contact Us | |
| 10-00247-00 | Concept One | TUBE ASSY GAS INLET "A" MAN | New OEM | Contact Us | |
| 10-00248-00 | Concept One | TUBE ASSY GAS INLET"A"MAN | New OEM | Contact Us | |
| 10-00249-00 | Concept One | TUBE ASSY, FEMALE COUPLING | New OEM | Contact Us | |
| 10-00264-00 | Concept One | MANIF, LL SENSOR 1$10 TORR | New OEM | Contact Us | |
| 10-00274-00 | Concept One | TUBE ASSY,TEOS DIVERT UPR | New OEM | Contact Us | |
| 10-00285-02 | Concept One | TUBE ASSY, SH COOLING, LONG | New OEM | Contact Us | |
| 10-00314-00 | Concept One | TUBE ASSY, PURGE MANIFOLD | New OEM | Contact Us | |
| 10-00319-00 | Concept One | TUBE ASSY,DIVERT FRAME "U" | New OEM | Contact Us | |
| 10-00320-00 | Concept One | TUBE ASSY,LWR DIVERT | New OEM | Contact Us | |
| 10-00321-00 | Concept One | TUBE ASSY,DIVERT TO FACIL 150M | New OEM | Contact Us | |
| 10-00325-00 | Concept One | TUBE ASSY,3/8 IN/OUT | New OEM | Contact Us | |
| 10-00328-00 | Concept One | TUBE ASSY,TEOS | New OEM | Contact Us | |
| 10-00337-03 | Concept One | TUBE ASSY, 1/8 MALE VCR25' | New OEM | Contact Us | |
| 10-00337-04 | Concept One | TUBE ASSY,1/8 MALE/MALE VCR | New OEM | Contact Us | |
| 10-00337-05 | Concept One | TUBE ASSY,1/8MALE,MALE VCR 50 | New OEM | Contact Us | |
| 10-00340-00 | Concept One | TUBE ASM, DEGAS TO TEOS OUTLET | New OEM | Contact Us | |
| 10-00351-00 | Concept One | TUBING, TEFLON .059ID X .006 WA | New OEM | Contact Us | |
| 10-00358-00 | Concept One | TUBE ASSY, N2 INLET | New OEM | Contact Us | |
| 10-00366-00 | Concept One | TUBE UPPER OUTLET | New OEM | Contact Us | |
| 10-00371-00 | Concept One | TUBE ASSY,1/8 DOPED | New OEM | Contact Us | |
| 10-00372-00 | Concept One | TUBE ASSY,1/8" UNDOPED | New OEM | Contact Us | |
| 10-00376-00 | Concept One | TUBE ASSY,LFC ADAPTER | New OEM | Contact Us | |
| 10-00378-00 | Concept One | TUBE ASSY,FILTER INLET | New OEM | Contact Us | |
| 10-00385-00 | Concept One | TUBE ASSY VAC MANIFOLD | New OEM | Contact Us | |
| 10-00386-00 | Concept One | TUBE ASSY,"B" GAS MANF-VCO | New OEM | Contact Us | |
| 10-00387-00 | Concept One | TUBE ASSY "A" INLET/PURGE LINE | New OEM | Contact Us | |
| 10-00388-00 | Concept One | TUBE ASSY, MAN "B" GAS SUPPLY | New OEM | Contact Us | |
| 10-00389-00 | Concept One | TUBE ASSY, MAN "A" GAS SUPPLY | New OEM | Contact Us | |
| 10-00393-00 | Concept One | ADPTR, KF TO SWAGELOK | New OEM | Contact Us | |
| 10-00395-02 | Concept One | TUBE ASSY,"A" GAS MANF-VCR | New OEM | Contact Us | |
| 10-00396-02/E | Concept One | TUBE ASSY,"B"GAS MANF-VCR | New OEM | Contact Us | |
| 10-00409-00 | Concept One | TUBE ASSY,LFC OUTLET | New OEM | Contact Us | |
| 10-00414-00 | Concept One | PORT,VCR,LEAK CHECK | New OEM | Contact Us | |
| 10-00415-00 | Concept One | TUBE ASSY, DUMP MAIFOLD | New OEM | Contact Us | |
| 10-00421-00 | Concept One | TUBE,PURGE LINE | New OEM | Contact Us | |
| 10-00432-00 | Concept One | TUBE ASSY,PC SIGNAL | New OEM | Contact Us | |
| 10-00433-00 | Concept One | TUBE ASSY,DIFF PRESS | New OEM | Contact Us | |
| 1000-700508 | CMP | SCRW,BHC 10-32 X 1-5/8 SST | New OEM | Contact Us | |
| 1000-700516 | CMP | SCRW,BHC 4-40 X 1/2 SST | New OEM | Contact Us | |
| 1000-700540 | CMP | SCRW,FHC 8-32 X 1/2 SST | New OEM | Contact Us | |
| 1000-700541 | CMP | SCRW,FHC 8-32 X 5/8 SST | New OEM | Contact Us | |
| 1000-717717 | CMP | SCRW,FHSL 5/16-18 X 3/8 MOD NYLON | New OEM | Contact Us | |
| 1000-718017 | CMP | SCRW,SET 4-40 X 1/4 SST | New OEM | Contact Us | |
| 1000-718612 | CMP | SCRW,SET 6-32 X 1/4 SST | New OEM | Contact Us | |
| 1000-737619 | CMP | SCRW,FLUID LINES 1/4-20UNC | New OEM | Contact Us | |
| 1000-737695 | CMP | SCRW,10-32 X 1 O-RING | New OEM | Contact Us | |
| 1000-738018 | CMP | SCRW,SHC 5/16-24 X 3/8 O-RING | New OEM | Contact Us | |
| 10-023000-00 | Concept One | TUBE ASSY, INLET LEFT HAND | New OEM | Contact Us | |
| 10-024501-00 | Concept One | TUBE, DIVERT, UPPER, 200mm, SYST | New OEM | Contact Us | |
| 10-024502-00 | Concept One | TUBE,DIVERT,LOWER,200MM,SYST. | New OEM | Contact Us | |
| 10-024503-00 | Concept One | TUBE, TEOS DIVERT | New OEM | Contact Us | |
| 10-029376-00 | Concept One | TUBE ASSY D MAN/ CRYO BRK | New OEM | Contact Us | |
| 10-034540-00 | Concept One | TUBE ASSY, GASBOX / TEOS VAC | New OEM | Contact Us | |
| 10-034812-00 | Concept One | VALVE, MANF, LL | New OEM | Contact Us | |
| 10-042677-00 | Concept One | TUBE ASSY,TEOS DIVERT UPPR VCR | New OEM | Contact Us | |
| 10-042679-00 | Concept One | MANF,INJECT. HTD DUAL 20W | New OEM | Contact Us | |
| 10-045018-00 | Concept One | FLEX SPOOL,5 GAL INLET | New OEM | Contact Us | |
| 10-045019-00 | Concept One | FLEX SPOOL,5 GAL OUTLET | New OEM | Contact Us |