Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-00657-00 | Concept One | SPACER,GEAR-EXT | New OEM | Contact Us | |
| 15-00661-00 | Concept One | SPACER,GEAR-ROT | New OEM | Contact Us | |
| 15-00662-00 | Concept One | BSHG, PRE-LOAD | New OEM | Contact Us | |
| 15-00663-00 | Concept One | BSHG, BRG-EXT. | New OEM | Contact Us | |
| 15-00664-00 | Concept One | SPACER,BEARING,2.125 | New OEM | Contact Us | |
| 15-00665-00 | Concept One | SHAFT, ROT.-REDUCTION | New OEM | Contact Us | |
| 15-00666-00 | Concept One | BSHG, ROTATION | New OEM | Contact Us | |
| 15-00680-00 | Concept One | SLEEVE, CERAMIC | New OEM | Contact Us | |
| 15-00684-00 | Concept One | CERAMIC CONTROL TC | New OEM | Contact Us | |
| 15-00685-00 | Concept One | FEEDTHRU,INNER | New OEM | Contact Us | |
| 15-00686-00 | Concept One | WASHER,FT | New OEM | Contact Us | |
| 15-00692-00 | Concept One | VIEWPORT, WOPS | New OEM | Contact Us | |
| 15-00696-00 | Concept One | BRKT,ADAPTER,SNSR | New OEM | Contact Us | |
| 15-00698-00 | Concept One | SCRW,FORK | New OEM | Contact Us | |
| 15-00699-01 | Concept One | FORK, FINGER 7.5" | New OEM | Contact Us | |
| 15-00699-02 | Concept One | FORK, FINGER 8" | New OEM | Contact Us | |
| 15-00709-00 | Concept One | EXTENDER, SHAFT | New OEM | Contact Us | |
| 15-00714-00 | Concept One | BLOCK,SW MTG | New OEM | Contact Us | |
| 15-00721-00 | Concept One | WSHR,#8,NICKEL | New OEM | Contact Us | |
| 15-00729-00 | Concept One | CLAMP,FLAT | New OEM | Contact Us | |
| 15-00731-00 | Concept One | BUSHING, KEYED | New OEM | Contact Us | |
| 15-00732-00 | Concept One | BRKT,INTLK SE,(2 HAND) | New OEM | Contact Us | |
| 15-00734-00 | Concept One | BRKT,SWIVEL | New OEM | Contact Us | |
| 15-00735-00 | Concept One | SWIVEL, SPLIT-REAR | New OEM | Contact Us | |
| 15-00736-00 | Concept One | SWIVEL, SPLIT FRONT | New OEM | Contact Us | |
| 15-00737-00 | Concept One | BUSHING, ADJUST 200MM | New OEM | Contact Us | |
| 15-00737-01 | Concept One | BUSHING, ADJUST | New OEM | Contact Us | |
| 15-00742-00 | Concept One | TUBE,CENTER | New OEM | Contact Us | |
| 15-00743-00 | Concept One | RETAINER WASHER | New OEM | Contact Us | |
| 15-00745-00 | Concept One | FTG,PORT | New OEM | Contact Us | |
| 15-00774-00 | Concept One | BRKT,ADAPTER,LEMO | New OEM | Contact Us | |
| 15-00803-00 | Concept One | SHAFT, SWING ARM WCVD | New OEM | Contact Us | |
| 15-00806-00 | Concept One | LINK, CYLINDER WCVD | New OEM | Contact Us | |
| 15-00818-00 | Concept One | DRIVER,GENEVA,WCVD | New OEM | Contact Us | |
| 15-00824-00 | Concept One | PLATE,SHIELD,CVD-W | New OEM | Contact Us | |
| 15-00826-00 | Concept One | SCRW,10-24x.75L,NICKEL,WCVD | New OEM | Contact Us | |
| 15-00830-00 | Concept One | FTG,90 DEGREE 3/8 TUBE | New OEM | Contact Us | |
| 15-00832-00 | Concept One | FLAG,GENEVA WCVD | New OEM | Contact Us | |
| 15-00834-00 | Concept One | PIN, LIFT WCVD | New OEM | Contact Us | |
| 15-00835-00 | Concept One | PLATFORM,LIFT PIN WCVD | New OEM | Contact Us | |
| 15-00839-00 | Concept One | SCRW,1/4-20x.9L,NICKEL | New OEM | Contact Us | |
| 15-00866-00 | Concept One | SPRING,PED,CER,WCVD | New OEM | Contact Us | |
| 15-00870-01 | Concept One | ARM, TRANSFER, F.RIGHT | New OEM | Contact Us | |
| 15-00870-02 | Concept One | ARM, TRANSFER, R.RIGHT | New OEM | Contact Us | |
| 15-00870-03 | Concept One | ARM, TRANSFER R. LEFT | New OEM | Contact Us | |
| 15-00870-04 | Concept One | ARM, TRANSFER, R.LEFT | New OEM | Contact Us | |
| 15-00882-00 | Concept One | HARD STOP, OUT | New OEM | Contact Us | |
| 15-00883-00 | Concept One | HARD STOP, IN | New OEM | Contact Us | |
| 15-00888-01 | Concept One | SPACER,SPRING-01 | New OEM | Contact Us | |
| 15-00888-02 | Concept One | SPACER,SPRING,8-02 | New OEM | Contact Us | |
| 15-00915-01 | Concept One | PLATE,INSULATION,TEOS,RH | New OEM | Contact Us | |
| 15-00915-02 | Concept One | PLATE,INSULATION,TEOS,LH | New OEM | Contact Us | |
| 15-00916-00 | Concept One | PLATE,MTG,TEOS | New OEM | Contact Us | |
| 15-00924-00 | Concept One | CLAMP,BAR,HUB,EXCL OPTION | New OEM | Contact Us | |
| 15-00932-00 | Concept One | SCREW NICKEL | New OEM | Contact Us | |
| 15-00935-00 | Concept One | SCRW,10-32x.5,NICKEL | New OEM | Contact Us | |
| 15-00948-00 | Concept One | SCRW,PED HEATER | New OEM | Contact Us | |
| 15-00949-00 | Concept One | BLOCK, GUIDE | New OEM | Contact Us | |
| 15-00950-00 | Concept One | PIVOT BLK, SHK ABS. WCVD EXCL | New OEM | Contact Us | |
| 15-00951-00 | Concept One | CUP,SCREW COVER | New OEM | Contact Us | |
| 15-00982-00 | Concept One | SHAFT,SPDL, WCVD RING LIFT VER | New OEM | Contact Us | |
| 15-00983-00 | Concept One | CLAMP,SHAFT | New OEM | Contact Us | |
| 15-00986-00 | Concept One | CLAMP,THREADED | New OEM | Contact Us | |
| 15-00987-00 | Concept One | FLAG,SPINDLE | New OEM | Contact Us | |
| 15-00988-00 | Concept One | WHEEL, GENEVA | New OEM | Contact Us | |
| 15-00990-00 | Concept One | FLANGE,BEARING | New OEM | Contact Us | |
| 15-00991-00 | Concept One | FLANGE,SPINDLE FLAG | New OEM | Contact Us | |
| 15-00992-00 | Concept One | WSHR,THRUST | New OEM | Contact Us | |
| 15-00993-00 | Concept One | PLATE,BRG,RETAINING | New OEM | Contact Us | |
| 15-00994-00 | Concept One | NUT,HEX,3/4-16 | New OEM | Contact Us | |
| 15-00995-00 | Concept One | FLANGE,SPLINE | New OEM | Contact Us | |
| 15-00996-00 | Concept One | BUSHING, LOWER LIFT SHAFT | New OEM | Contact Us | |
| 15-00997-00 | Concept One | SUPPORT, CAM FOLLOWER | New OEM | Contact Us | |
| 15-00998-00 | Concept One | ARM, CAM FOLLOWER | New OEM | Contact Us | |
| 15-00999-00 | Concept One | FLANGE,BEARING,LOWER | New OEM | Contact Us | |
| 15-01001-00 | Concept One | CLAMP, SHAFT SUPPORT ARM | New OEM | Contact Us | |
| 15-01012-00 | Concept One | BLADE, EXTENDED (200MM) | New OEM | Contact Us | |
| 15-01022-00 | Concept One | PLATE,COPPER | New OEM | Contact Us | |
| 15-01023-00 | Concept One | PLATE,COPPER,200mm,SYS | New OEM | Contact Us | |
| 15-01025-00 | Concept One | RING,CAPMAN | New OEM | Contact Us | |
| 15-01026-00 | Concept One | SPACER,PIEZO MTG | New OEM | Contact Us | |
| 15-01032-00 | Concept One | CLAMP,PIPE 2.00DIA | New OEM | Contact Us | |
| 15-01033-00 | Concept One | CLAMP,SHAFT 1.50DIA | New OEM | Contact Us | |
| 15-01041-00 | Concept One | CLAMP,CABLE-DBL | New OEM | Contact Us | |
| 15-01044-00 | Concept One | TOWER, SUPPORT LIGHT | New OEM | Contact Us | |
| 15-01048-00 | Concept One | PADDLE, DIMPLE 125 MM | New OEM | Contact Us | |
| 15-01049-00 | Concept One | PADDLE, DIMPLE 150mm | New OEM | Contact Us | |
| 15-01050-01 | Concept One | SHIM,PADDLE,.001 THK | New OEM | Contact Us | |
| 15-01050-02 | Concept One | SHIM,PADDLE,.002 THK | New OEM | Contact Us | |
| 15-01050-03 | Concept One | SHIM,PADDLE,.003 THK | New OEM | Contact Us | |
| 15-01052-00 | Concept One | PADDLE, DIMPLE 200mm | New OEM | Contact Us | |
| 15-01058-01 | Concept One | BRKT,FRONT RH (PLASTIC CASS.) | New OEM | Contact Us | |
| 15-01058-02 | Concept One | BRKT,FRONT LH (PLASTIC CASS.) | New OEM | Contact Us | |
| 15-01059-00 | Concept One | BRKT REAR PLASTIC CASS | New OEM | Contact Us | |
| 15-01060-00 | Concept One | ROLLER, CASSETTE, 200mm | New OEM | Contact Us | |
| 15-01063-00 | Concept One | BRKT,PADDLE 200 MM | New OEM | Contact Us | |
| 15-01081-01 | Concept One | CLAMP,TUBE | New OEM | Contact Us | |
| 15-01101-00 | Concept One | HUB, INDEXER | New OEM | Contact Us | |
| 15-01102-00 | Concept One | HUB,EXCLUSION RING | New OEM | Contact Us | |
| 15-01103-00 | Concept One | SHAFT,RING LIFT | New OEM | Contact Us |