Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-00372-00 | Concept One | WASHER,HEATER STRAP | New OEM | Contact Us | |
| 15-00373-00 | Concept One | FLAG,GENEVA MECHANISM` | New OEM | Contact Us | |
| 15-00376-00 | Concept One | PIN, GUIDE | New OEM | Contact Us | |
| 15-00378-00 | Concept One | CLAMP NOZZLE TO RF CAP | New OEM | Contact Us | |
| 15-00385-00 | Concept One | NUT, HEX 10-32 NICKEL | New OEM | Contact Us | |
| 15-00386-00 | Concept One | WSHR,#10, NICKEL | New OEM | Contact Us | |
| 15-00391-00 | Concept One | BSHG, CERAMIC UPPER | New OEM | Contact Us | |
| 15-00396-00 | Concept One | FLANGE,SHAFT | New OEM | Contact Us | |
| 15-00399-01 | Concept One | SCRW,HEX,8-32X.8,NI | New OEM | Contact Us | |
| 15-00399-02 | Concept One | SCRW, HEX, 8-32 X .96, NI | New OEM | Contact Us | |
| 15-00399-03 | Concept One | SCRW,HEX,8-32X.55,NI | New OEM | Contact Us | |
| 15-00399-04 | Concept One | SCRW,HEX,8-32X1.02,NI | New OEM | Contact Us | |
| 15-00399-05 | Concept One | SCRW,HEX,8-32X1.12,NI | New OEM | Contact Us | |
| 15-00399-06 | Concept One | SCRW,HEX,8-32X1.23,NI | New OEM | Contact Us | |
| 15-00401-00 | Concept One | SHAFT, SPINDLE | New OEM | Contact Us | |
| 15-00409-00 | Concept One | WINDOW, PYREX | New OEM | Contact Us | |
| 15-00410-00 | Concept One | WINDOW LEXAN | New OEM | Contact Us | |
| 15-00412-00 | Concept One | FLANGE,BEARING | New OEM | Contact Us | |
| 15-00413-00 | Concept One | WASHER,THRUST | New OEM | Contact Us | |
| 15-00414-00 | Concept One | CLAMP,BRG | New OEM | Contact Us | |
| 15-00418-00 | Concept One | SPACER,BEARING | New OEM | Contact Us | |
| 15-00437-00 | Concept One | BLOCK,PILLOW,RH | New OEM | Contact Us | |
| 15-00438-00 | Concept One | BLOCK,PILLOW,LH | New OEM | Contact Us | |
| 15-00440-00 | Concept One | SHAFT, LEFT | New OEM | Contact Us | |
| 15-00442-00 | Concept One | COVER,PILLOW BLOCK | New OEM | Contact Us | |
| 15-00443-00 | Concept One | COVER,UPPER BEARING-L.S. | New OEM | Contact Us | |
| 15-00444-00 | Concept One | COVER,UPPER BEARING | New OEM | Contact Us | |
| 15-00445-00 | Concept One | PLATE,STOP,BRKT | New OEM | Contact Us | |
| 15-00457-00 | Concept One | SCRW,HEATER STRAP | New OEM | Contact Us | |
| 15-00474-00 | Concept One | HSG, SPRING | New OEM | Contact Us | |
| 15-00475-00 | Concept One | FEEDTHRU,TOP PLATE | New OEM | Contact Us | |
| 15-00477-00 | Concept One | PLATE,BTM,1.25" | New OEM | Contact Us | |
| 15-00479-00 | Concept One | GENEVA WHEEL | New OEM | Contact Us | |
| 15-00480-00 | Concept One | DRIVER,GENEVA | New OEM | Contact Us | |
| 15-00483-00 | Concept One | RING, CERAMIC | New OEM | Contact Us | |
| 15-00484-00 | Concept One | BSHG, CERAMIC | New OEM | Contact Us | |
| 15-00485-00 | Concept One | BRACKET 150mm | New OEM | Contact Us | |
| 15-00488-00 | Concept One | ARM, ONE ARM ROBOT | New OEM | Contact Us | |
| 15-00489-00 | Concept One | SEAL, HOUSING | New OEM | Contact Us | |
| 15-00492-00 | Concept One | FOREARM, ONE-ARM ROBOT | New OEM | Contact Us | |
| 15-00501-00 | Concept One | NUT,HOUSING | New OEM | Contact Us | |
| 15-00503-00 | Concept One | BRKT,ONE-ARM ROBOT | New OEM | Contact Us | |
| 15-00507-00 | Concept One | SPACER,EXT. SEAL | New OEM | Contact Us | |
| 15-00510-00 | Concept One | SPACER,ARM BEARING | New OEM | Contact Us | |
| 15-00511-00 | Concept One | SPACER,ROTATION SHAFT | New OEM | Contact Us | |
| 15-00512-00 | Concept One | SPACER,EXT COUPLING | New OEM | Contact Us | |
| 15-00514-00 | Concept One | BSHG, ROT BREARING | New OEM | Contact Us | |
| 15-00515-00 | Concept One | BSHG, BEARING | New OEM | Contact Us | |
| 15-00516-00 | Concept One | BSHG, BRAKE | New OEM | Contact Us | |
| 15-00517-00 | Concept One | BUSHING, EXT. BEARING | New OEM | Contact Us | |
| 15-00518-00 | Concept One | BSHG, ROTATION SEAL` | New OEM | Contact Us | |
| 15-00520-00 | Concept One | BSHG, SEAL GUIDE | New OEM | Contact Us | |
| 15-00521-00 | Concept One | CLAMP,ARM PULLEY | New OEM | Contact Us | |
| 15-00522-00 | Concept One | COUPLING, EXT.SHAFT | New OEM | Contact Us | |
| 15-00523-00 | Concept One | PULLY, FOREARM DRIVE | New OEM | Contact Us | |
| 15-00525-00 | Concept One | PULLEY, ARM DRIVE | New OEM | Contact Us | |
| 15-00526-00 | Concept One | PULLEY, ARM DRIVE | New OEM | Contact Us | |
| 15-00527-00 | Concept One | PULLEY, FOREARM DRIVE | New OEM | Contact Us | |
| 15-00532-00 | Concept One | WASHER,BRAKE | New OEM | Contact Us | |
| 15-00534-00 | Concept One | FLANGE,BRAKE | New OEM | Contact Us | |
| 15-00539-00 | Concept One | COVER,SEAL | New OEM | Contact Us | |
| 15-00543-00 | Concept One | COVER,PULLEY | New OEM | Contact Us | |
| 15-00547-00 | Concept One | SHAFT, ARM | New OEM | Contact Us | |
| 15-00549-00 | Concept One | SHAFT, FOREARM | New OEM | Contact Us | |
| 15-00551-00 | Concept One | SHAFT, ROTATION | New OEM | Contact Us | |
| 15-00552-00 | Concept One | SHAFT, EXTENSION | New OEM | Contact Us | |
| 15-00553-05 | Concept One | SHIM, HEATER.005 | New OEM | Contact Us | |
| 15-00553-10 | Concept One | SHIM, HEATER .010 | New OEM | Contact Us | |
| 15-00553-18 | Concept One | SHIM, HEATER .018 | New OEM | Contact Us | |
| 15-00553-25 | Concept One | SHIM,HEATER .025 | New OEM | Contact Us | |
| 15-00553-31 | Concept One | SHIM,HEATER .031 | New OEM | Contact Us | |
| 15-00554-05 | Concept One | SHIM, V .005 | New OEM | Contact Us | |
| 15-00554-10 | Concept One | SHIM, V .10 | New OEM | Contact Us | |
| 15-00554-18 | Concept One | SHIM, V .018 | New OEM | Contact Us | |
| 15-00554-25 | Concept One | SHIM, V .025 | New OEM | Contact Us | |
| 15-00554-31 | Concept One | SHIM, V .031 | New OEM | Contact Us | |
| 15-00558-01 | Concept One | SHIELD,HTR STRAP,2.00 LG | New OEM | Contact Us | |
| 15-00558-02 | Concept One | SHIELD,HTR STRAP,2.75 LG | New OEM | Contact Us | |
| 15-00565-00 | Concept One | STOP, BELLOWS | New OEM | Contact Us | |
| 15-00567-00 | Concept One | CERAMIC, TC | New OEM | Contact Us | |
| 15-00569-00 | Concept One | BRKT,MTG,SUPPORT | New OEM | Contact Us | |
| 15-00570-00 | Concept One | BRKT, MTG, SLIDE | New OEM | Contact Us | |
| 15-00578-00 | Concept One | CAP,CER FEEDTHRU | New OEM | Contact Us | |
| 15-00581-00 | Concept One | PLATE,MTG,VLV | New OEM | Contact Us | |
| 15-00597-00 | Concept One | GASKET,METAL | New OEM | Contact Us | |
| 15-00601-00 | GaSonics | PLATE,TOP,8",WFR | New OEM | Contact Us | |
| 15-00607-00 | Concept One | SUPPORT, LEFT | New OEM | Contact Us | |
| 15-00608-00 | Concept One | SUPPORT, RIGHT | New OEM | Contact Us | |
| 15-00609-00 | Concept One | BRKT,LEFT HOOK | New OEM | Contact Us | |
| 15-00610-00 | Concept One | BRKT,RIGHT HOOK | New OEM | Contact Us | |
| 15-00613-00 | Concept One | BRKT,BLADE HOLDER | New OEM | Contact Us | |
| 15-00617-00 | Concept One | DRIVER,GENEVA,8"WFR | New OEM | Contact Us | |
| 15-00631-00 | Concept One | BRACKET | New OEM | Contact Us | |
| 15-00632-00 | Concept One | FLAG,GENEVA MECH | New OEM | Contact Us | |
| 15-00633-00 | Concept One | MOTOR MOUNT | New OEM | Contact Us | |
| 15-00634-00 | Concept One | BRKT,DISTRIBUTION TUNER | New OEM | Contact Us | |
| 15-00653-00 | Concept One | CLAMP,HSG | New OEM | Contact Us | |
| 15-00654-00 | Concept One | WASHER,FLANGE | New OEM | Contact Us | |
| 15-00655-00 | Concept One | SPINDLE ALIGN BLOCK | New OEM | Contact Us | |
| 15-00656-00 | Concept One | SHAFT, EXT.-REDUCTION | New OEM | Contact Us |