Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-01104-00 | Concept One | SCRW,10-32x.75,NICKEL | New OEM | Contact Us | |
| 15-01107-00 | Concept One | PANEL,LL SIDE,DCS | New OEM | Contact Us | |
| 15-01108-00 | Concept One | PLATE,COOLING,DUAL | New OEM | Contact Us | |
| 15-01109-01 | Concept One | PLATFORM, 200MM OPTICAL | New OEM | Contact Us | |
| 15-01111-00 | Concept One | PADDLE 150mm OPTICAL | New OEM | Contact Us | |
| 15-01112-00 | Concept One | BRACKET DUAL CLAMP | New OEM | Contact Us | |
| 15-01113-00 | Concept One | BRKT,DUAL CLAMP | New OEM | Contact Us | |
| 15-01116-00 | Concept One | BRKT,MULTIPLE CASS HOLDER | New OEM | Contact Us | |
| 15-01122-00 | Concept One | BRKT,200MM PADDLE | New OEM | Contact Us | |
| 15-01123-00 | Concept One | PADDLE, DIMPLE, OPTICAL 125MM | New OEM | Contact Us | |
| 15-01124-00 | Concept One | PADDLE, DIMPLE, OPTICAL 100MM | New OEM | Contact Us | |
| 15-01127-00 | Concept One | PADDLE, 200MM OPTICAL PIN SEAR | New OEM | Contact Us | |
| 15-01127-01 | Concept One | PADDLE,DIMPLE 200MM,SPEC | New OEM | Contact Us | |
| 15-01132-00 | Concept One | HOUSING, BEARING, PURGED | New OEM | Contact Us | |
| 15-01136-00 | Concept One | BRKT,ARM CASS DOOR | New OEM | Contact Us | |
| 15-01139-00 | Concept One | RING, WINDOW | New OEM | Contact Us | |
| 15-01140-00 | Concept One | BRKT,SUPPORT | New OEM | Contact Us | |
| 15-01141-00 | Concept One | STOP, WINDOW | New OEM | Contact Us | |
| 15-01142-00 | Concept One | WINDOW, ROUND | New OEM | Contact Us | |
| 15-01144-00 | Concept One | WINDOW, LEXAN | New OEM | Contact Us | |
| 15-01146-00 | Concept One | PANEL,SIDE,LL (No Cutout) | New OEM | Contact Us | |
| 15-01158-00 | Concept One | BRKT,PADDLE 100MM | New OEM | Contact Us | |
| 15-01160-00 | Concept One | BRKT, WOPS SENSOR | New OEM | Contact Us | |
| 15-01161-02 | Concept One | PLATE,WTM,"D",WOPS | New OEM | Contact Us | |
| 15-01175-00 | Concept One | BLADE, REAR CASSETTE HOLDER | New OEM | Contact Us | |
| 15-01176-00 | Concept One | BRKT,REAR,CASS HOLDER | New OEM | Contact Us | |
| 15-01177-00 | Concept One | PLATFORM, PLASTIC CASSETTE | New OEM | Contact Us | |
| 15-01194-00 | Concept One | BRKT,200MM PADDLE | New OEM | Contact Us | |
| 15-024109-00 | Concept One | TUBING,SHUTTLE DLCM | New OEM | Contact Us | |
| 15-024110-00 | Concept One | SUPPORT,PLATFORM SHUTTLE | New OEM | Contact Us | |
| 15-024111-00 | Concept One | BRKT,A/CYL-CARRIAGE | New OEM | Contact Us | |
| 15-024498-00 | Concept One | FLANGE,VALVE ADAPT. | New OEM | Contact Us | |
| 15-024555-00 | Concept One | PLATE,SHTL,STRK,SNSR,DLCM,HYU | New OEM | Contact Us | |
| 15-024587-00 | Concept One | SPACER, HTR W/PIN HOLE | New OEM | Contact Us | |
| 15-024759-00 | Concept One | SIDE, SHTL. CARRIAGE, UMC | New OEM | Contact Us | |
| 15-024881-00 | Concept One | FORK,END,CAP | New OEM | Contact Us | |
| 15-024924-01 | Concept One | BRKT,FRONT LH,200MM CASS | New OEM | Contact Us | |
| 15-024924-02 | Concept One | BRKT,FRONT RH, 200MM CASS | New OEM | Contact Us | |
| 15-024950-00 | Concept One | CAP, HEATER, SCR. COVER | New OEM | Contact Us | |
| 15-024985-00 | Concept One | BRKT,REAR,PLASTIC CASS,SIEMENS | New OEM | Contact Us | |
| 15-027004-00 | Concept One | PLUG,COVER,HEATER,SCREW | New OEM | Contact Us | |
| 15-027196-00 | Concept One | PLATE, ARM | New OEM | Contact Us | |
| 15-027199-00 | Concept One | ARM,FLAPPER | New OEM | Contact Us | |
| 15-027273-00 | Concept One | BRKT,LL DOOR SNSR | New OEM | Contact Us | |
| 15-028207-00 | Concept One | NUT,SEAL RETAINING | New OEM | Contact Us | |
| 15-028208-00 | Concept One | HOUSING, BEARING | New OEM | Contact Us | |
| 15-032014-01 | Concept One | WINDOW, ETCH RESISTANT, FUSED | New OEM | Contact Us | |
| 15-032016-00 | Concept One | PIN, CERAMIC VENTED FOR HTR BLK | New OEM | Contact Us | |
| 15-032107-00 | Concept One | BRKT,SHORT,SHELF SUPPORT,LH | New OEM | Contact Us | |
| 15-032108-00 | Concept One | BLOCK,SHFT SPRT | New OEM | Contact Us | |
| 15-032137-00 | Concept One | BRKT,SHELF SUPPORT,LH | New OEM | Contact Us | |
| 15-032138-00 | Concept One | BRKT,SHORT,SHELF SUPPORT,RH | New OEM | Contact Us | |
| 15-032185-00 | Concept One | PIN,CENTERING | New OEM | Contact Us | |
| 15-032204-00 | Concept One | SUPPORT,VALVE | New OEM | Contact Us | |
| 15-032218-00 | Concept One | BLADE,26 WAFER | New OEM | Contact Us | |
| 15-032263-00 | Concept One | HANGER,PIPE SUPPORT | New OEM | Contact Us | |
| 15-032268-00 | Concept One | INSERT,100,125,150&200MM METL | New OEM | Contact Us | |
| 15-032626-00 | Concept One | TRAZAR-STRAP HOLE COVER | New OEM | Contact Us | |
| 15-032631-00 | Concept One | FLANGE,SPINDLE | New OEM | Contact Us | |
| 15-032939-00 | Concept One | EXCL RING,200MM,2.25MM OH,SEMI | New OEM | Contact Us | |
| 15-033087-00 | Concept One | SPACER,PLATE SENSOR | New OEM | Contact Us | |
| 15-033874-00 | Concept One | PLUG,INJECTOR MANF | New OEM | Contact Us | |
| 15-034333-00 | Concept One | TUBE PROCESS 4.13" | New OEM | Contact Us | |
| 15-034847-00 | Concept One | HUB UPPER INDEXER | New OEM | Contact Us | |
| 15-034848-00 | Concept One | HUB,LOWER,INDEXER | New OEM | Contact Us | |
| 15-034849-00 | Concept One | RTNR,SEAL | New OEM | Contact Us | |
| 15-034851-00 | Concept One | BUSHING,SPLIT | New OEM | Contact Us | |
| 15-046056-00 | Concept One | BOLT,1/4-20 X 1.0,N1 | New OEM | Contact Us | |
| 15-051711-25 | Concept One | TUBE,INJECTOR,2.500" | New OEM | Contact Us | |
| 15-051711-41 | Concept One | TUBE, INJECTOR 4.13" LONG | New OEM | Contact Us | |
| 15-052619-00 | Concept One | TONG,RING LIFT 200MM | New OEM | Contact Us | |
| 15-052620-00 | Concept One | RTNR,TONG,R-LIFT | New OEM | Contact Us | |
| 15-052621-00 | Concept One | HUB,TONG, R-LIFT SST | New OEM | Contact Us | |
| 15-053271-03 | Concept One | TUBE,CLEAN INJ,SWIRL,SPD-S | New OEM | Contact Us | |
| 15-053394-01 | Concept One | MINIMUM AREA CONTACT FORK,6 | New OEM | Contact Us | |
| 15-053394-02 | Concept One | MINIMUM AREA CONTACT FORK,8" | New OEM | Contact Us | |
| 15-053394-03 | Concept One | MINIMUM AREA CONTACT FORK,HDEP | New OEM | Contact Us | |
| 15-055720-00 | Concept One | SPACER,BUSHING | New OEM | Contact Us | |
| 15-055721-00 | Concept One | BUSHING,SPLIT | New OEM | Contact Us | |
| 15-09455-00 | Concept One | BLADE,EXTENDED-26 SLOTS (200) | New OEM | Contact Us | |
| 15-09499-00 | Concept One | BRKT,MULTI CASS HOLDER 26 SLOT | New OEM | Contact Us | |
| 15-100263-00 | Concept One | PADDLE, CERAMIC 8" NOVEL | New OEM | Contact Us | |
| 15-101482-00 | Concept One | FORK,TOPLATE,A,ANTIDEFLECT | New OEM | Contact Us | |
| 15-10324-00 | Concept One | BUTTON,PIN-CERAMIC | New OEM | Contact Us | |
| 15-103651-00 | Concept One | RING,GUARD,HI PURITY,200MM | New OEM | Contact Us | |
| 15-103913-01 | Concept One | FEEDTHRU,COPPER | New OEM | Contact Us | |
| 15-103913-02 | Concept One | CLAMP,STRAP,FEEDTHRU | New OEM | Contact Us | |
| 15-10489-00 | Concept One | CLAMP,CHMBR VWPRT | New OEM | Contact Us | |
| 15-10571-00 | Concept One | BRKT,DIST NUPRO | New OEM | Contact Us | |
| 15-10676-00 | Concept One | BLANK-OFF, MESA FLANGE | New OEM | Contact Us | |
| 15-107698-00 | Concept One | CAP,CERAMIC,FEEDTHRU | New OEM | Contact Us | |
| 15-108174-00 | Concept One | CUP, SCREW COVER | New OEM | Contact Us | |
| 15-108307-00 | Concept One | CLAMP, RF STRAP | New OEM | Contact Us | |
| 15-108330-00 | Concept One | SPRING,PED,CER,D 3,WCVD | New OEM | Contact Us | |
| 15-109794-00 | Concept One | CAGE,SEAL,DP SPNDL,CVDW | New OEM | Contact Us | |
| 15-11031-00 | Concept One | FEEDTHRU,TOP PLATE,CVD | New OEM | Contact Us | |
| 15-110411-00 | Concept One | Sapphire Window | New OEM | Contact Us | |
| 15-112560-00 | Concept One | FLANGE,VERITY ENDPOINT | New OEM | Contact Us | |
| 15-112561-00 | Concept One | FLANGE,VERITY ENDPOINT DUAL | New OEM | Contact Us | |
| 15-112882-00 | Concept One | MOUNTING-SENSOR | New OEM | Contact Us |