Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15-309288-00 | Concept One | FORK,CERAMIC, C2SEQ | New OEM | Contact Us | |
| 15310-01 | GaSonics | SPACER,BOTTOM PLATE | New OEM | Contact Us | |
| 15312-01 | GaSonics | WELDMENT,CHAMBER-UPPER | New OEM | Contact Us | |
| 15-315788-00 | CMP | BASE,SINGLE BUTTON,SRD CHUCK,ANTI-SKID | New OEM | Contact Us | |
| 15-322960-00 | Concept One | BLOCK,HOIST LOCK ASSY,C1D | New OEM | Contact Us | |
| 15-323594-00 | GaSonics | CHAMBER,8 INCH,A2000,CENTERING-WAFER | New OEM | Contact Us | |
| 15-323599-00 | Gasonics | GUIDE,WAFER,8" PLATEN | New OEM | Contact Us | |
| 15-324541-00 | Concept One | Wafer Indexer, 200mm | New OEM | Contact Us | |
| 15-325759-00 | CMP | DIAPHRAGM,WEAR RING | New OEM | Contact Us | |
| 15-325760-00 | CMP | DIAPHRAGM,OVERLAY | New OEM | Contact Us | |
| 15-325835-00 | Concept One | FORK,BOTTOM PLATE | New OEM | Contact Us | |
| 15-325836-00 | Concept One | FORK,TOP PLATE | New OEM | Contact Us | |
| 15-325977-01 | Concept One | PIN,LOCATOR,MOER TYPE I | New OEM | Contact Us | |
| 15-326237-00 | Concept One | SCRW,HEX,10-32 X .31IN,NI,.81 LONG,FORK | New OEM | Contact Us | |
| 15331-01 | GaSonics | MOUNTING BLOCK,EOP | New OEM | Contact Us | |
| 15333-01 | GaSonics | DOOR,VACUUM | New OEM | Contact Us | |
| 15-333722-01 | Concept One | FORK TOP PLATE | New OEM | Contact Us | |
| 15-333722-02 | Concept One | FORK,TOP PLATE,C,ANTIDEFLECT,S | New OEM | Contact Us | |
| 15-333722-03 | Concept One | FORK TOP PLATE | New OEM | Contact Us | |
| 15336-01 | GaSonics | BRACKET CYLINDER | New OEM | Contact Us | |
| 15337-01 | GaSonics | INSULATOR,CYLINDER | New OEM | Contact Us | |
| 15344-01 | GaSonics | ELECTRODE,GROUND- 1.80 X 4.00 | New OEM | Contact Us | |
| 15-348967-00 | Concept One | WSHR,SHOULDER,C1 HOIST SPACER | New OEM | Contact Us | |
| 15-354355-00 | CMP | CLAMP,CAP,DRIVELINE COUPLING | New OEM | Contact Us | |
| 15355-01 | GaSonics | ADAPTER,TRANSDUCER-QTZ | New OEM | Contact Us | |
| 15-358770-00 | CMP | PLATE,INVERTER ADAPTER,S11,2HP | New OEM | Contact Us | |
| 15-358771-00 | CMP | PLATE,INVERTER ADPATER,S11,1/2HP | New OEM | Contact Us | |
| 15-359394-00 | Concept One | BUSHNG,FLNG,KEYED | New OEM | Contact Us | |
| 15-359395-00 | Concept One | CLAMP,FLAT,CERAMIC,FORK ASSY | New OEM | Contact Us | |
| 15-359396-00 | Concept One | CAP,FORK ASSY,C2SEQ-X | New OEM | Contact Us | |
| 15361-01 | GaSonics | RETAINER,SPOOL | New OEM | Contact Us | |
| 15-361383-00 | CMP | PLATEN,THRU BRUSH,CLARUS CLEANER | New OEM | Contact Us | |
| 15366-01 | GaSonics | RING,LIFT | New OEM | Contact Us | |
| 15367-01 | GaSonics | PIN,LIFT QUARTZ | New OEM | Contact Us | |
| 15-367555-00 | CMP | SHIM,.025THK,200MM,WFR CAR,MYLAR | New OEM | Contact Us | |
| 15-367557-00 | CMP | SHIM,0.051MMTHK,200MM,WFR CAR | New OEM | Contact Us | |
| 15368-01 | GaSonics | HOLDER,PIN | New OEM | Contact Us | |
| 15372-01 | GaSonics | STANDOFF,COOLING STATION | New OEM | Contact Us | |
| 15375-01 | GaSonics | FLAG,LIFT | New OEM | Contact Us | |
| 15-375505-00 | CMP | BRKT,PNEUMATICS EXTENSION | New OEM | Contact Us | |
| 15-375892-00 | Concept One | PLATE,BOTTOM,CERAMIC,FORK,C2SEQ-X | New OEM | Contact Us | |
| 15-376399-00 | Concept One | SCRW,FLAT,8-32,C2SEQ-X | New OEM | Contact Us | |
| 15377-01 | GaSonics | BRACKET,DOOR RIGHT | New OEM | Contact Us | |
| 15377-02 | GaSonics | BRACKET,DOOR-LEFT | New OEM | Contact Us | |
| 15-377532-00 | Concept One | PLATE,TOP,FORK ASSY,C2SEQ-X | New OEM | Contact Us | |
| 15378-01 | GaSonics | BLOCK,PLATEN HOLD | New OEM | Contact Us | |
| 15-378125-00 | Concept One | CLAMP,APM SPEED GEAR | New OEM | Contact Us | |
| 15380-01 | GaSonics | INSULATOR,PLATEN | New OEM | Contact Us | |
| 15382-01 | GaSonics | FEEDTHRU,LINEAR,MODIFIED | New OEM | Contact Us | |
| 15-385212-00 | Concept One | PLATE,BOTTOM,CERAMIC,150MM,C1D | New OEM | Contact Us | |
| 15-385213-00 | Concept One | PLATE,TOP,FORK ASSY,150MM,C1D | New OEM | Contact Us | |
| 15-386933-00 | Concept One | SPRING,PLT,SEAL | New OEM | Contact Us | |
| 15-388546-00 | CMP | PLATEN,UPPER,THRU BR,CLARUS,PEEK,MV200 | New OEM | Contact Us | |
| 15-388547-00 | CMP | COLLAR,THRU BRUSH,CLARUS,PEEK | New OEM | Contact Us | |
| 15-388548-00 | CMP | CAP,CLARUS,PEEK,MV200 | New OEM | Contact Us | |
| 15-388549-00 | CMP | PLATEN,LOWER,CLARUS,PEEK,MV200 | New OEM | Contact Us | |
| 15-392367-00 | CMP | ROLLER,SENSOR,CLARUS CLEANER,MV200 | New OEM | Contact Us | |
| 15-395327-01 | Concept One | BRKT, FRONT LEFT, C1D | New OEM | Contact Us | |
| 15-395327-02 | Concept One | BRKT, FRONT RIGHT, C1D | New OEM | Contact Us | |
| 15-399921-00 | CMP | PLATE,CALIBRATION CLAMP,676/776 | New OEM | Contact Us | |
| 15-400304-00 | Concept One | CUP,SCREW COVER,CERAMIC FORK | New OEM | Contact Us | |
| 15-405248-00 | CMP | PLATE,ROLLER RING,PEEK,CLARUS,MV200 | New OEM | Contact Us | |
| 15429-01 | GaSonics | SHIELD PLATE, SPOOL COVER | New OEM | Contact Us | |
| 15-433332-00 | CMP | PLATE,BELL,POLISH SOLID PLATEN,BOLT-ON | New OEM | Contact Us | |
| 15-433333-00 | CMP | PLATEN,200MM,SOLID,LP CAPABLE,BOLT-ON,MV200 | New OEM | Contact Us | |
| 15-435871-00 | Concept One | CUP, SCREW COVER, CERAMIC FORK | New OEM | Contact Us | |
| 15451-01 | GaSonics | PWA,EOP/CONT PRESSURE | New OEM | Contact Us | |
| 15-460582-00 | GaSonics | HOUSING,4-WINDOWS,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us | |
| 15-460584-00 | GaSonics | MOUNT,BOTTOM PLATE,LAMP HOLDER,IRIDIA-DL | New OEM | Contact Us | |
| 15-460585-00 | GaSonics | MOUNT,TOP PLATE,LAMP HODLER,IRIDIA-DL | New OEM | Contact Us | |
| 15-460620-00 | CMP | FTG,SLURRY DIAPHRAGM,316SST | New OEM | Contact Us | |
| 15-460622-00 | CMP | SCRW,FLAT HD,SLOTTED,MOD,316SST | New OEM | Contact Us | |
| 15-464665-00 | GaSonics | RTNR,WINDOW,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us | |
| 15467-01 | GaSonics | WLDMNT,VCR-SOL-ELBOW-GAS MOD | New OEM | Contact Us | |
| 15468-01 | GaSonics | WELDMENT, ELBOW-SOL-VCR GAS ASSEMBLY | New OEM | Contact Us | |
| 15645-01 | GaSonics | CABLE ASSY, BULKHEAD TO EOP | New OEM | Contact Us | |
| 15683-01 | GaSonics | COOLING STATION-RPLCD 15199 | New OEM | Contact Us | |
| 15684-01 | GaSonics | BRKT, SENSOR-COOLING STATION | New OEM | Contact Us | |
| 15719-01 | GaSonics | SUPPORT,ISOLATOR-RF COVER | New OEM | Contact Us | |
| 15753-01 | GaSonics | CHAMBER, LOWER | New OEM | Contact Us | |
| 15784-01 | GaSonics | ASSY,RF FILTER | New OEM | Contact Us | |
| 15869-01 | GaSonics | DETECTOR, EOP ASSY - L3300 | New OEM | Contact Us | |
| 15884-02 | GaSonics | PWA EOP DETECTOR | New OEM | Contact Us | |
| 15932-02 | GaSonics | CABLE ASSY, CONT-TEMP, BIS | New OEM | Contact Us | |
| 15999-01 | GaSonics | EOP BOX MODIFICATION | New OEM | Contact Us | |
| 16-00018-01 | Concept One | DOOR, LOAD LOCK | New OEM | Contact Us | |
| 16-00025-00 | Concept One | VIEWPORT, LOAD LOCK SIDE | New OEM | Contact Us | |
| 16-00030-00 | Concept One | PANEL, SIDE, 9 MODULE | New OEM | Contact Us | |
| 16-00030-01 | Concept One | PANEL, SIDE, 3 (FRAME) | New OEM | Contact Us | |
| 16-00047-00 | Concept One | VIEWPORT, TOP PLATE LL | New OEM | Contact Us | |
| 16-00088-00 | Concept One | BOX,EXHAUST,WCVD | New OEM | Contact Us | |
| 16-00090-00 | Concept One | PLATE,GAS DIST,BTM | New OEM | Contact Us | |
| 16-00092-00 | Concept One | STRAP, HEATER FEEDTHROUGH | New OEM | Contact Us | |
| 16-00097-00 | Concept One | COVER,PNEUMATIC BOX | New OEM | Contact Us | |
| 16-00098-00 | Concept One | STRAP HEATER INSULATED | New OEM | Contact Us | |
| 16-00123-00 | Concept One | BELLOWS,WLDMT | New OEM | Contact Us | |
| 16-00124-00 | Concept One | STAGE, PARALLEL | New OEM | Contact Us | |
| 16-00158-00 | Concept One | ARM, ACTUATOR, EXCL OPTION | New OEM | Contact Us | |
| 16-00163-00 | Concept One | GUIDE, CAM FOLLOWER | New OEM | Contact Us | |
| 16-00190-00 | Concept One | BRKT,VALVE MTG,SIGMA6 | New OEM | Contact Us |