Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 20-00255-00 | Concept One | WASHER,WAVY,2.12ID X 2.50OD | New OEM | Contact Us | |
| 20-00256-00 | Concept One | WASHER,WAVY,1.093ID X 1.365OD | New OEM | Contact Us | |
| 20-00257-00 | Concept One | WASHER,WAVY,1.250ID X 1.453OD | New OEM | Contact Us | |
| 20-00258-00 | Concept One | WASHER,WAVY,.650ID x .790OD | New OEM | Contact Us | |
| 20-00259-00 | Concept One | WASHER,CRESENT SPRING | New OEM | Contact Us | |
| 20-00282-00 | Concept One | DIAL INDICATOR,TEST,0-15-0,MIT | New OEM | Contact Us | |
| 20-00287-00 | Concept One | PIN, DOWELL 1/8X3/4 D14-1 2 | New OEM | Contact Us | |
| 20-00288-00 | Concept One | BELT, TIMING | New OEM | Contact Us | |
| 20-00289-00 | Concept One | PULLY, MOTOR | New OEM | Contact Us | |
| 20-00290-00 | Concept One | 20XL025 5/16 6FA TIMING PULLEY | New OEM | Contact Us | |
| 20-00299-00 | Concept One | SCREWDRIVER,TORQUE, CALCERT-ISO | New OEM | Contact Us | |
| 20-00300-00 | Concept One | WASHER,WAVY,.390ID X .562OD | New OEM | Contact Us | |
| 20-00301-00 | Concept One | SPRING,EXT,.75LG | New OEM | Contact Us | |
| 20-00303-00 | Concept One | CLAMP,SPLIT,1/4ID | New OEM | Contact Us | |
| 20-00304-00 | Concept One | GEAR, SPUR .625 PD | New OEM | Contact Us | |
| 20-00332-00 | Concept One | RING, RETAINING, .250 DIA | New OEM | Contact Us | |
| 20-00339-00 | Concept One | SCREW, PANEL COVER | New OEM | Contact Us | |
| 20-00413-00 | Concept One | THERMOPLASTIC HOSE 3/8T 30" LONG | New OEM | Contact Us | |
| 20-00424-00 | Concept One | RING, RETAINING .312 EXT | New OEM | Contact Us | |
| 20-00426-00 | Concept One | SPRING,EXT | New OEM | Contact Us | |
| 20-00428-00 | Concept One | RING,RETAIN.,CRESENT 1/2"SHAFT | New OEM | Contact Us | |
| 20-00443-00 | Concept One | SHOCK ABSORBER, 2" STROKE | New OEM | Contact Us | |
| 20-00450-00 | Concept One | LATCH,SLIDE | New OEM | Contact Us | |
| 20-00452-00 | Concept One | E-RING, 1/2" | New OEM | Contact Us | |
| 20-00454-00 | Concept One | BEARING,BALL,1.00ODX.74ID | New OEM | Contact Us | |
| 20-00461-00 | Concept One | SPACER SHAFT 0.62 | New OEM | Contact Us | |
| 20-00465-00 | Concept One | WASHER,WAVY,.885ID x .980OD | New OEM | Contact Us | |
| 20-00482-00 | Concept One | SCRW,SHLDR,4-40X.125X.25 | New OEM | Contact Us | |
| 20-00483-00 | Concept One | KRYTOX, PFPE 143AD,1LB CONTAIN | New OEM | Contact Us | |
| 20-00484-00 | Concept One | SYRINGE, 3CC | New OEM | Contact Us | |
| 20-00489-00 | Concept One | SCRW,SHLDR,8-32X.188X.75 | New OEM | Contact Us | |
| 20-0067-01 | GaSonics | FTG, CONNECTOR,PORT, 1/4 | New OEM | Contact Us | |
| 2000-700275 | CMP | GAUGE,PRESSURE 0-100PSI | New OEM | Contact Us | |
| 2000-700276 | CMP | GAUGE, PRESSURE 0-160 | New OEM | Contact Us | |
| 2000-700278 | CMP | GAUGE,PRESSURE 0-60 | New OEM | Contact Us | |
| 2000-700279 | CMP | GAUGE,PRESSURE 0-60PSI | New OEM | Contact Us | |
| 20-0079 | GaSonics | FITTING KIT, DI WATER PUMP | New OEM | Contact Us | |
| 20-0122 | CMP | Fitting, Elbow | New OEM | Contact Us | |
| 20-0137 | GaSonics | FITTING, ELBOW, 1/8 NPT | New OEM | Contact Us | |
| 20-0219-01 | GaSonics | GASKET, VCR, 1/2 IN, SST | New OEM | Contact Us | |
| 20-0243-01 | Concept One | FTG, 1/2 TEE UNION | New OEM | Contact Us | |
| 20-024512-00 | Concept One | NUT,THUMB,1/4-20 | New OEM | Contact Us | |
| 20-027202-00 | Concept One | SPACER,.500 SHAFT,.125 THK | New OEM | Contact Us | |
| 20-0285-01 | GaSonics | FTG,ADAPTER,#10-32 TO 1/8 NPT | New OEM | Contact Us | |
| 20-0352 | GaSonics | FTG,NIPPLE,LONG,HEX | New OEM | Contact Us | |
| 20-0353 | GaSonics | FTG,COUPLING-HEX | New OEM | Contact Us | |
| 2005086-00 | CMP | CYLINDER ISO CD85N20-60C-A | New OEM | Contact Us | |
| 200540-065 | CMP | REGULATOR,ELECTRO PNEUMATIC 14PSI | New OEM | Contact Us | |
| 20-09045-00 | Concept One | BALL, CERAMIC, .1875 DIA | New OEM | Contact Us | |
| 20-10129-00 | Concept One | BEARING,LINEAR | New OEM | Contact Us | |
| 20-10130-00 | Concept One | SEAL, BEARING | New OEM | Contact Us | |
| 20-10133-00 | Concept One | WORM | New OEM | Contact Us | |
| 20-10150-00 | Concept One | New OEM | Contact Us | ||
| 20-1112 | Concept One | FITTING SLEEVE CLAMP, 1/4 IN DERLIN | New OEM | Contact Us | |
| 20-1136 | GaSonics | FTG, ADAPTER, 1/4 HOSE X 1/4 TUBE | New OEM | Contact Us | |
| 20-1198 | GaSonics | FITTING | New OEM | Contact Us | |
| 20-1222 | GaSonics | BACK FERRULE, .12 NOMINAL | New OEM | Contact Us | |
| 20-1242 | GaSonics | FITTING, FEMALE ELBOW, 4 MM TUBE,PUSH X M5 FPT | New OEM | Contact Us | |
| 20-1283 | GaSonics | Fitting, adaptor, 1/4 Hose x 1/8 NPT | New OEM | Contact Us | |
| 20-1290 | GaSonics | FILTER ELEMENT,(I-34S-A) | New OEM | Contact Us | |
| 20-1312 | GaSonics | FITTING, 1/4IN POSITIONABLE MALE ELBOW | New OEM | Contact Us | |
| 20-1317 | GaSonics | FLANGE, SIDE MOUNTED RT ANGLE VCR | New OEM | Contact Us | |
| 20-1341 | GaSonics | MEMBRANE, TEFLON,142MM | New OEM | Contact Us | |
| 20-134720-00 | Concept One | STRIP,MTG,GASKET,REAR PANEL | New OEM | Contact Us | |
| 20-134722-00 | Concept One | BELT, TIMING, 1/5"P,75T,3/8W | New OEM | Contact Us | |
| 20-143972-00 | Concept One | J PLATE, PANEL MOUNT, ADAPTER | New OEM | Contact Us | |
| 20-170614-00 | GaSonics | BELT,POLYURETAN TIMING,BLADE | New OEM | Contact Us | |
| 20-179876-00 | CMP | STRIP,PVC FOAM SEALANT ADHESIVE | New OEM | Contact Us | |
| 20-180582-00 | CMP | SPRING,JACKING TOWER,RED DIE | New OEM | Contact Us | |
| 20-182467-00 | CMP | TUBING,STA-PURE PTFE/TEFLON | New OEM | Contact Us | |
| 20-185354-00 | CMP | PAD,SUPPORT,PASSIVE EE | New OEM | Contact Us | |
| 20-188619-00 | CMP | TUBING,5/32OD BLACK POLYPNEUMATICS | New OEM | Contact Us | |
| 202-019 | Ontrak | O-RING, .362 IDx.103W, CLR.POLT | New OEM | Contact Us | |
| 202-023 | Ontrak | O-RING, .103WX6-23/32(2.036I.D) | New OEM | Contact Us | |
| 20-2303 | GaSonics | RING, CENTERING,O-RING AND SPACER, | New OEM | Contact Us | |
| 20-2325 | GaSonics | TEE, BARBED, 3/16 IN | New OEM | Contact Us | |
| 20-2331 | CMP | FILTER,GAS,TEFLON,1/4 IN, VCR, MALE (SAME AS 73313-03) | New OEM | Contact Us | |
| 20-2333 | GaSonics | UNION, VCR, FEM 1/2 IN, SS | New OEM | Contact Us | |
| 20-2349 | GaSonics | FITTING, 3/8 IN. QUICK DISCONN/STEM, BULK | New OEM | Contact Us | |
| 20-2366 | GaSonics | FILTER,AIR,18.0X36.0X2.75 TO 3.062 HIGH | New OEM | Contact Us | |
| 20-315664-00 | CMP | PIN,COTTER,.1875IN,.9375IN,18-8 SS | New OEM | Contact Us | |
| 20-316914-00 | GaSonics | BELT,TIMING,9.2,.25IN,115,TEETH,LIFT | New OEM | Contact Us | |
| 20-316918-00 | GaSonics | TIMIMG BELT-150 TEETH (ROTATE) | New OEM | Contact Us | |
| 20-345390-00 | Concept One | RACK, MOUNTING KIT | New OEM | Contact Us | |
| 20-347143-00 | GaSonics | DUCT, WELDMENT, PROCESS VAPOR, RIGHT, WVDS | New OEM | Contact Us | |
| 20-347144-00 | GaSonics | DUCT, WELDMENT, PROCESS VAPOR, MAIN, WVDS | New OEM | Contact Us | |
| 20-384282-00 | CMP | STOP,WAFER ARRESTOR | New OEM | Contact Us | |
| 20-384329-00 | CMP | SPRING,TORSION,RH,0.160OD,0.017WIRE,5C | New OEM | Contact Us | |
| 20-398448-00 | CMP | SUPPORT,WAFER FRONT MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398449-00 | CMP | SUPPORT,WAFER REAR MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398451-00 | CMP | STOP,WAFER GRIP FINGER MV200 EGEE GENMAR | New OEM | Contact Us | |
| 20-398453-00 | CMP | PIN,WAFER GRIP FINGER MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398459-00 | CMP | STOP,WAFER REAR MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398464-00 | CMP | PIN,WAFER GRIP FINGER ROD MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398531-00 | CMP | PIN,WAFER ARRESTOR MV200 EGEE GENMARK | New OEM | Contact Us | |
| 20-398543-00 | CMP | STOP,SPACER GRIP FINGER MV200 EGEE GENMA | New OEM | Contact Us | |
| 20-399655-00 | CMP | PIN,DOWEL,3/32DIA,1/4LG,316SST,PLAIN | New OEM | Contact Us | |
| 20-417596-00 | CMP | TUBING,3/4OD,PFA,18CORRUGATION,4.5CUF | New OEM | Contact Us | |
| 20-421289-00 | CMP | TUBING,3/4OD,PFA,18CORRUGATION,4.5CUF | New OEM | Contact Us | |
| 20-442979-00 | CMP | SPRING,COMP,0.36OD,0.62L,SST,12.41 LBS | New OEM | Contact Us |