Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 16-00196-00 | Concept One | PANEL,TOP | New OEM | Contact Us | |
| 16018-01 | GaSonics | WAFER, PLASTIC-5 INCH | New OEM | Contact Us | |
| 16018-02 | GaSonics | WAFER,PLASTIC-6 IN | New OEM | Contact Us | |
| 16018-03 | GaSonics | WAFER,PLASTIC-8 IN | New OEM | Contact Us | |
| 16-024504-00 | Concept One | TUBE ASSY,4"LINE,13.25 | New OEM | Contact Us | |
| 16-024509-00 | Concept One | TUBE ASSY, EXHAUST LINE, 13.25 | New OEM | Contact Us | |
| 16-032558-00 | Concept One | PLATE,MTG,PED,D,STA#2-5 | New OEM | Contact Us | |
| 16-033931-00N/B | Concept One | SHOWER HD PINNED 200,WLDMNT | New OEM | Contact Us | |
| 16-033932-00 | Concept One | SHOWER HD PINNED 150,WLDMNT | New OEM | Contact Us | |
| 16-034139-00 | Concept One | TUBE,INJECTOR | New OEM | Contact Us | |
| 16065-01 | GaSonics | HARNESS ASSY,LIFT SENSOR | New OEM | Contact Us | |
| 16-08109-00 | Concept One | STUB SPOOL WIT 5 KF 25 PORTS | New OEM | Contact Us | |
| 16092-01 | GaSonics | PLATEN ASSY,MODIFIED W/CONNECTORS | New OEM | Contact Us | |
| 16-10070-00 | Concept One | MANF, BACKSIDE | New OEM | Contact Us | |
| 16-1037 | GaSonics | PLUNGER, SPRING,SHORT, M4 X 7 | New OEM | Contact Us | |
| 16-1071-16 | GaSonics | SCREW, SHLDR, SLTD HD, .187 DIA X 1.00 | New OEM | Contact Us | |
| 16183-01 | GaSonics | LOCATOR,10-32,75MM-150MM | New OEM | Contact Us | |
| 16205-01 | GaSonics | PLATE, BOTTOM | New OEM | Contact Us | |
| 16206-01 | GaSonics | LIFT, CHAMBER | New OEM | Contact Us | |
| 16207-01 | GaSonics | FLANGE,PLATEN FEEDTHRU | New OEM | Contact Us | |
| 16209-01 | GaSonics | INSULATOR,STUD | New OEM | Contact Us | |
| 16210-01 | GaSonics | WASHER,PLATEN STUD | New OEM | Contact Us | |
| 16211-01 | GaSonics | BRACKET,SENSOR | New OEM | Contact Us | |
| 16212-01 | GaSonics | BOARD,SENSOR MTG. | New OEM | Contact Us | |
| 16-2271-20 | GaSonics | SCREW, SHLDR, HEX HD,1/4 DIA X 5/8,10-32 | New OEM | Contact Us | |
| 16-259089-00 | Concept One | FEEDTHRU, PWR, C2SEQ-X, SHORT, CERAMIC ISOLA | New OEM | Contact Us | |
| 16-267179-00 | GaSonics | DIFFUSER,LOADLOCK,GAMMA 2100 | New OEM | Contact Us | |
| 16-273307-00 | CMP | DIFFUSER, LA, EWD, 7.7 ID, 200MM, NEXT | New OEM | Contact Us | |
| 16-282340-00 | GaSonics | GUIDE,WAVEGUIDE,FLEX 6 IN, RIGHT | New OEM | Contact Us | |
| 16321-01 | CMP | DISK DRIVE, FLOPPY 3.5 IN - ALT | New OEM | Contact Us | |
| 16335-01 | GaSonics | PLATE, GAST DIST 5MM 6 IN | New OEM | Contact Us | |
| 16336-01 | GaSonics | SHELF,PLASMA COLLAR | New OEM | Contact Us | |
| 16337-01 | GaSonics | COLLAR, QTZ, 1.25 IN HOLE | New OEM | Contact Us | |
| 16337-02 | GaSonics | COLLAR, QTZ, 1.00 IN HOLE | New OEM | Contact Us | |
| 16-348615-00 | Concept One | SHWRHD, 200MM, PINNED, AL 3003 | New OEM | Contact Us | |
| 16358-01 | GaSonics | SPOOL,QUARTZ | New OEM | Contact Us | |
| 16359-01 | GaSonics | CHAMBER,QUARTZ PLASMA | New OEM | Contact Us | |
| 16363-01 | GaSonics | PWB, INPUT/OUTPUT | New OEM | Contact Us | |
| 16-464842-00 | CMP | BRKT, APM, ROTATION SNSR, MP1, MP3 | New OEM | Contact Us | |
| 16498-01 | GaSonics | PWA, DISPLAY DRIVER | New OEM | Contact Us | |
| 16531-01 | GaSonics | ROD,DIFFUSER-QUARTZ LAMP | New OEM | Contact Us | |
| 16532-01 | GaSonics | PLATE,QUARTZ LAMP | New OEM | Contact Us | |
| 16535-01 | GaSonics | GUIDE, PIN | New OEM | Contact Us | |
| 16756-01 | GaSonics | I/O BOARD, PAL-I ADDR BASE 380 | New OEM | Contact Us | |
| 16757-01 | GaSonics | I/O BOARD,PAL-2,ADDR BASE 380 | New OEM | Contact Us | |
| 16772-01 | GaSonics | MICROWAVE ENCLOSURE,L3500 | New OEM | Contact Us | |
| 16783-01 | GaSonics | CHAMBER,PLASMA,QUARTZ | New OEM | Contact Us | |
| 16784-01 | GaSonics | SPOOL,QUARTZ | New OEM | Contact Us | |
| 16785-01 | GaSonics | BODY,FITTING,ULTRA-TORR | New OEM | Contact Us | |
| 16797-01 | GaSonics | WELDMENT, GAS INPUT | New OEM | Contact Us | |
| 16875-01 | Gasonics | CABLE ASSY_XHST NTRLK SW, L3300 | New OEM | Contact Us | |
| 16889-01 | GaSonics | CABLE ASSY, DIST BD J1 - GEN | New OEM | Contact Us | |
| 16894-01 | GaSonics | BLOCK,LEVER | New OEM | Contact Us | |
| 16894-02 | GaSonics | BLOCK, LEVER | New OEM | Contact Us | |
| 16898-01 | GaSonics | LOCATOR,WAFER 8 IN | New OEM | Contact Us | |
| 16902-01 | GaSonics | HARNESS ASSY,KEYPAD-RECVR BD | New OEM | Contact Us | |
| 16968-01 | GaSonics | SWITCH ASSY,HALL EFFECT-DR OPN | New OEM | Contact Us | |
| 16969-01 | GaSonics | SWITCH ASSY,HALL EFFECT-DR CLS | New OEM | Contact Us | |
| 16970-01 | GaSonics | SENSOR ASSY,COOLING STATION | New OEM | Contact Us | |
| 17-00035-00 | Concept One | MTG BRKT VLV | New OEM | Contact Us | |
| 17-00059-00 | Concept One | BRKT,LATCH | New OEM | Contact Us | |
| 17-00084-00 | Concept One | FLAG,LIFT | New OEM | Contact Us | |
| 17-00085-00 | Concept One | BRKT,FLAG | New OEM | Contact Us | |
| 17-00094-00 | Concept One | STRAP, RF | New OEM | Contact Us | |
| 17-00094-01 | Concept One | STRAP, RF | New OEM | Contact Us | |
| 17-00097-00 | Concept One | BRKT,LIFT SNSR | New OEM | Contact Us | |
| 17-00115-00 | Concept One | BRKT,MTG,PURGE VALVES | New OEM | Contact Us | |
| 17-00138-00 | Concept One | FLAG EXTENSION | New OEM | Contact Us | |
| 17-00139-00 | Concept One | BRKT,EXT SNSR | New OEM | Contact Us | |
| 17-00148-00 | Concept One | FORK,SPRING | New OEM | Contact Us | |
| 17-00152-00 | Concept One | STRAP, CAPACITOR | New OEM | Contact Us | |
| 17-00153-00 | Concept One | BOX,RF SHUNT | New OEM | Contact Us | |
| 17-00170-00 | Concept One | FLAG,LIFT 200MM | New OEM | Contact Us | |
| 17-00170-01 | Concept One | FLAG,FORK | New OEM | Contact Us | |
| 17-00173-00 | Concept One | COVER,TC ASSY | New OEM | Contact Us | |
| 17-00176-00 | Concept One | DRUM, DIST., TUNER | New OEM | Contact Us | |
| 17-00227-00 | Concept One | PANEL,HALFQ | New OEM | Contact Us | |
| 17-00236-00 | Concept One | HOUSING, GAS VENT A/B | New OEM | Contact Us | |
| 17-00237-01 | Concept One | DUCT, STATIONARY | New OEM | Contact Us | |
| 17-00268-00 | Concept One | PLATE,PNEU,TMB/TMP | New OEM | Contact Us | |
| 17-00279-01 | Concept One | BEZEL, CRT/TOUCHSCREEN, 200MM | New OEM | Contact Us | |
| 17-00305-00 | Concept One | BRACKET, MOUNTING, PURGE | New OEM | Contact Us | |
| 17-00312-00 | Concept One | ENCL,VM-3000 | New OEM | Contact Us | |
| 17-00316-00 | Concept One | BRKT,CABLE | New OEM | Contact Us | |
| 17-00319-00 | Concept One | COVER, HEATER ISO FILTER | New OEM | Contact Us | |
| 17-00337-00 | Concept One | FLAG,OPTOSENSOR,PLATFORM | New OEM | Contact Us | |
| 17-0118-01 | GaSonics | RING,RETAINING | New OEM | Contact Us | |
| 17-021433-00 | Concept One | BASE I/F BOARD DC PWR SUPPL, SM | New OEM | Contact Us | |
| 17-021434-00 | Concept One | I/F BOARD COVER DC PWR SUP, SM | New OEM | Contact Us | |
| 17-024406-00 | Concept One | BRKT,SW PLATFORM | New OEM | Contact Us | |
| 17-024672-00 | Concept One | BRKT,3.5" DIS | New OEM | Contact Us | |
| 17-0248 | GaSonics | SPRING,COMPRESS.,SS,3/8 FREE LGTH..032WIRE | New OEM | Contact Us | |
| 17-0249 | GaSonics | SPACER, 1/4 OD,.166+.010 -.000ID,1 5/16LG,ALUM | New OEM | Contact Us | |
| 17-032013-00 | Concept One | BRKT, MTG, MFC, BROOKS | New OEM | Contact Us | |
| 17-032018-00 | Concept One | SCREEN RF SHIELD, ETCHED | New OEM | Contact Us | |
| 17-045060-00 | Concept One | BRKT,WATER FLOW SW | New OEM | Contact Us | |
| 17060-01 | GaSonics | PWR SPLY,HG LAMP,120 VAC | New OEM | Contact Us | |
| 17-101596-00 | Concept One | RTNR,FORK | New OEM | Contact Us | |
| 17-10392-00 | Concept One | FLAG,CARRIAGE | New OEM | Contact Us | |
| 17-103987-00 | Concept One | STRAP, RF | New OEM | Contact Us |