Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-00657-00 | Concept One | O-RING,2-369,KALREZ K4079 | New OEM | Contact Us | |
| 22-00658-00 | Concept One | O-RING,2-443,KALREZ 4079 | New OEM | Contact Us | |
| 22-00660-00 | Concept One | MFC, 5 ML TEOS KALREZ | New OEM | Contact Us | |
| 22-00681-00 | Concept One | PRESS REG, 1-25 PSI | New OEM | Contact Us | |
| 22-00683-00 | GaSonics | TSEAL, 15/16 ID CHEMTEMP | New OEM | Contact Us | |
| 2200-700109 | CMP | VALVE,CHECK PILOT | New OEM | Contact Us | |
| 2200-700110 | CMP | VALVE,CHECK PILOT | New OEM | Contact Us | |
| 2200-700752 | CMP | VALVE,2WAY | New OEM | Contact Us | |
| 2200-700754 | CMP | VALVE,AIR 3WAY W/BASE | New OEM | Contact Us | |
| 2200-700755 | CMP | VALVE,AIR MODIFIED | New OEM | Contact Us | |
| 2200-700756 | CMP | VALVE,AIR W/CONN AND LEADS | New OEM | Contact Us | |
| 2200-700758 | CMP | VALVE,MAIN AIR MODIFIED | New OEM | Contact Us | |
| 22-00702-00 | Concept One | VALVE,3PORT,AIR PILOT,NO | New OEM | Contact Us | |
| 22-00706-00 | Concept One | VALVE, PIEZO, 2USLM | New OEM | Contact Us | |
| 22-00713-00 | Concept One | SEAL, LIP , 50x75 | New OEM | Contact Us | |
| 22-00715-00 | Concept One | PLUG,SSI 1/16 | New OEM | Contact Us | |
| 22-00716-00 | Concept One | O-RING,2-231,KALREZ 4079 | New OEM | Contact Us | |
| 2200-717178 | CMP | VALVE,4WAY AIR | New OEM | Contact Us | |
| 22-00718-00 | Concept One | O-RING,2-222,KALREZ 4079 | New OEM | Contact Us | |
| 2200-718676 | CMP | VALVE,PNEUMATIC 2WAY FLUIDS | New OEM | Contact Us | |
| 2200-719287 | CMP | VALVE,3WAY PILOT SS | New OEM | Contact Us | |
| 22-00725-00 | Concept One | O-RING,2-041,VITON | New OEM | Contact Us | |
| 22-00737-00 | Concept One | O-RING,SP,.040 X .070 ID,KALRE | New OEM | Contact Us | |
| 2200-737414 | CMP | VALVE,CHECK 3/8 FLARE | New OEM | Contact Us | |
| 2200-737823 | CMP | VALVE,2WAY NC 1/4NPT 4.5MM SST ORFC | New OEM | Contact Us | |
| 2200-739150 | CMP | VALVE,SOLENOID 3/8PORT 24VDC N/C | New OEM | Contact Us | |
| 2200-739151 | CMP | VALVE, AIR MAIN 3WAY 24VDC 1/2IN/OUT | New OEM | Contact Us | |
| 2200-739257 | CMP | VALVE,2WAY HPV W/TOP STRAIGHT FLOW | New OEM | Contact Us | |
| 2200-739501 | CMP | VALVE,CHECK LARGE 3/8 FLARE | New OEM | Contact Us | |
| 22-00744-00 | Concept One | VALVE,DIA,1/8"VCR,LIQUID | New OEM | Contact Us | |
| 22-00745-00 | Concept One | FILTER 1/8" VCR 0.5 MICRON | New OEM | Contact Us | |
| 22-00756-00 | Concept One | GLAND, 1/8 VCR | New OEM | Contact Us | |
| 22-00768-00 | Concept One | O-RING,2-010,VITON V747-75 | New OEM | Contact Us | |
| 2200-770167 | CMP | VALVE,DWO NVX 4 VALVE MANF | New OEM | Contact Us | |
| 2200-770245 | CMP | VALVE,CHECK 1/4 TUBE SST | New OEM | Contact Us | |
| 22-00778-00 | Concept One | VALVE,TGL,BN SERIES | New OEM | Contact Us | |
| 22-00780-00 | Concept One | O-RING,2-018,VITON V75 | New OEM | Contact Us | |
| 22-00783-00 | Concept One | LFC, D2000I, .5ML/MIN TMB | New OEM | Contact Us | |
| 22-00788-00 | Concept One | O-RING,2-014,KALREZ 4079 | New OEM | Contact Us | |
| 22-00792-00 | Concept One | GASKET,VCR,1/8,UNPLATED NICKEL | New OEM | Contact Us | |
| 22-00795-00 | Concept One | PRESSURE REGULATOR | New OEM | Contact Us | |
| 22-0125-02 | GaSonics | VALVE,BELLOWS,HB,1/4 SWL,2 WAY | New OEM | Contact Us | |
| 22-0138 | GaSonics | VALVE,VACUUM,NW50,W/O SOLENOID | New OEM | Contact Us | |
| 22-0145 | GaSonics | VALVE,VAC INLINE,1 1/2, SST | New OEM | Contact Us | |
| 22-0146 | GaSonics | VALVE, VACUUM,NW50, W/O SOLENOID | New OEM | Contact Us | |
| 22-0156 | GaSonics | CYLINDER, W/CLEVIS,AIR | New OEM | Contact Us | |
| 22-0201-02 | GaSonics | VALVE,THROTTLE,35MM,2-WAY | New OEM | Contact Us | |
| 22-026085-00 | Concept One | VALVE,3PORT,PNEU,2 ACTUATOR | New OEM | Contact Us | |
| 22-026373-00 | Concept One | FILTER,IN:ML,OUT:FML | New OEM | Contact Us | |
| 22-028206-00 | Concept One | SCRW,SKT,HEX,10-32x.5,NICKE | New OEM | Contact Us | |
| 22-028382-00 | Concept One | SEAL, FLANGE | New OEM | Contact Us | |
| 22-0324 | CMP | VALVE, DIAFRAM-VCR NC AP-TECH, M-F | New OEM | Contact Us | |
| 22-033312-00 | Concept One | O-RING,2-220,KALREZ 4079 | New OEM | Contact Us | |
| 22-033425-00 | Concept One | O-RING, 2-226, KALREZ 4079 | New OEM | Contact Us | |
| 22-033574-00 | Concept One | O-RING,2-351,VITON V75 | New OEM | Contact Us | |
| 22-034148-00 | Concept One | O-RING,2-143,KALREZ 4079 | New OEM | Contact Us | |
| 22-034149-00 | Concept One | O-RING,2-242,KALREZ 4079 | New OEM | Contact Us | |
| 22-041961-00 | Concept One | BELT,TIMING,.08 X 184 TEETH | New OEM | Contact Us | |
| 22-042340-00 | Concept One | SEAL, FLANGED | New OEM | Contact Us | |
| 22-045296-00 | Concept One | PIN,FASTEX,STD BALL | New OEM | Contact Us | |
| 22-046263-00 | Concept One | COUPLING,1/4",BERG CC10-14-4 | New OEM | Contact Us | |
| 22-046264-00 | Concept One | CLAMP,SPLIT,3/8DIA,PIC,CGI-31 | New OEM | Contact Us | |
| 22-048917-00 | Concept One | VALVE,DUAL,NC/NO,6LV-D1V222PAB | New OEM | Contact Us | |
| 22-050359-00 | CMP | GEAR HEAD | New OEM | Contact Us | |
| 22-053609-00 | CMP | O-RING,2-276,VITON | New OEM | Contact Us | |
| 22-10018-00 | Concept One | O-RING,2-385,VITON | New OEM | Contact Us | |
| 22-1003 | GaSonics | VALVE, BELLOWS SEALED MANUAL 1/2 VCR, NU | New OEM | Contact Us | |
| 22-1004 | GaSonics | VALVE, CHECK, 1/8 NPTF, 1 PSI, CRACKING P | New OEM | Contact Us | |
| 22-10062-00 | Concept One | O-RING,2-374,VITON | New OEM | Contact Us | |
| 22-10064-00 | Concept One | BEARING,BALL,1.125ODX.5ID | New OEM | Contact Us | |
| 22-10068-00 | Concept One | O-RING,2-383,VITON | New OEM | Contact Us | |
| 22-101053-00 | Concept One | UPPER SEAL | New OEM | Contact Us | |
| 22-101315-00 | Concept One | SPACER,SPLIT BUSHING,SPINDLE | New OEM | Contact Us | |
| 22-10149-00 | Concept One | SEAL, LIP | New OEM | Contact Us | |
| 22-10172-00 | Concept One | BEARING,XRLR,WAFER LIFT | New OEM | Contact Us | |
| 22-10185-00 | Concept One | O-RING, 2-112, VITON, CE! | New OEM | Contact Us | |
| 22-10235-00 | Concept One | FTG,CONN,MALE 1/8" KQH | New OEM | Contact Us | |
| 22-102755-00 | Concept One | CONN, MALE, 1/8 NPT X 1/4 | New OEM | Contact Us | |
| 22-10291-00 | Concept One | SEAL DOOR | New OEM | Contact Us | |
| 22-10292-00 | Concept One | SEAL DOOR | New OEM | Contact Us | |
| 22-10299-00 | Concept One | O-RING,2-222,VITON | New OEM | Contact Us | |
| 22-10323-00 | Concept One | New OEM | Contact Us | ||
| 22-10326-00 | GaSonics | O-RING,2-226,VITON | New OEM | Contact Us | |
| 22-10329-00 | Concept One | FLOW, CTL 10-32 | New OEM | Contact Us | |
| 22-10369-00 | Concept One | AIR CYL,1-1/8Bx2-1/2 STROKE | New OEM | Contact Us | |
| 22-104149-00 | CMP | FTG,TEE,STREET,1/4 NPTF | New OEM | Contact Us | |
| 22-10528-00 | Concept One | VALVE,NC/NC,MNOBLK,VCR | New OEM | Contact Us | |
| 22-10536-00 | Concept One | O-RING,2-119,VITON | New OEM | Contact Us | |
| 2210-700351 | CMP | MANF, 4 STATION | New OEM | Contact Us | |
| 2210-717581 | CMP | MANF,DI DUAL CASSETTE | New OEM | Contact Us | |
| 22-108210-00 | CMP | ELBOW, MALE, 1/4"NPTX3/8 PFA | New OEM | Contact Us | |
| 22-114447-00 | Concept One | O-RING, 2-110, KALREZ 4079 | New OEM | Contact Us | |
| 22-118218-00 | Concept One | BEARING,BALL,DEEP GRV | New OEM | Contact Us | |
| 22-123217-00 | Concept One | O-RING,2-261,KALREZ 4079 | New OEM | Contact Us | |
| 22-123219-00 | Concept One | GASKET,L-TYPE ACT SHAFT,SMC | New OEM | Contact Us | |
| 22-128529-00 | Concept One | O-RING,2-006,CHEMREZ,E38 | New OEM | Contact Us | |
| 22-130114-00 | Concept One | PNEU SOL ASSY,3X14,ILDS | New OEM | Contact Us | |
| 22-132450-00 | Concept One | O-RING,2-128,SC1106 | New OEM | Contact Us | |
| 22-138548-00 | CMP | O-RING,2-275,VITON 747-75 | New OEM | Contact Us | |
| 22-138704-00 | CMP | ADPTR, .25 NPT x .38 FLARETEK | CE! | New OEM | Contact Us |