Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 34-370762-00 | Concept One | ADPTR,9PIN D-SUB TO TERMINAL BLOCK,ROHS | New OEM | Contact Us | |
| 34-372120-00 | Concept One | ADPTR,16PIN D-SUB,MODULE ASSEMBLY,TERMIN | New OEM | Contact Us | |
| 34-372694-00 | Concept One | LAMP,LED BULB,120V,1.3W,A19,WHITE,270 DEG | New OEM | Contact Us | |
| 34-380215-00 | CMP | LENS,DOME,TUBE LIGHT,3.5,BOROSILICATE G | New OEM | Contact Us | |
| 34-388679-00 | Concept One | POWER BRICK | New OEM | Contact Us | |
| 34-433638-00 | BATTERY, UPS, 48 VDC, REFURISHED | New OEM | Contact Us | ||
| 34-5124 | GaSonics | CONN. BOX, 8 PORT RS232 | New OEM | Contact Us | |
| 35-0005-004 | Ontrak | SENSOR, MINI-FLO | New OEM | Contact Us | |
| 35-00069-00 | Concept One | WIRE,BUS,BAR,12AWG | New OEM | Contact Us | |
| 35-00075-00 | Concept One | WIRE,TC TYPE E,20AWG,SHIELDED | New OEM | Contact Us | |
| 35-2020 | GaSonics | SENSOR, PISTON POSITION | New OEM | Contact Us | |
| 35-2446 | GaSonics | PAD, THERMAL INTERFACE, SCR | New OEM | Contact Us | |
| 35-2447 | GaSonics | PAD, THERMAL INTERFACE, SSR | New OEM | Contact Us | |
| 35-2491 | GaSonics | DIODE, MICROWAVE DETECTOR, | New OEM | Contact Us | |
| 36-00007-00 | Concept One | FUSE,0.5A,250V,AGC | New OEM | Contact Us | |
| 36-00008-00 | Concept One | FUSE,10A,32V,AGC | New OEM | Contact Us | |
| 36-00011-00 | Concept One | FUSE,30A,32V,AGC | New OEM | Contact Us | |
| 36-00012-00 | Concept One | FUSE,40A,250V,FWX | New OEM | Contact Us | |
| 36-00015-00 | Concept One | FUSE,6A,250V,AGC | New OEM | Contact Us | |
| 36-00022-00 | Concept One | FUSE,10A,250V,FNM | New OEM | Contact Us | |
| 36-00024-00 | Concept One | FUSE,10A,250V,GMA | New OEM | Contact Us | |
| 36-00025-00 | Concept One | FUSE, 5A, 125V, TYPE 251 | New OEM | Contact Us | |
| 36-00026-00 | Concept One | FUSE,8A,250V,AGC | New OEM | Contact Us | |
| 36-00027-00 | Concept One | FUSE, 1A, 250V, GDB | New OEM | Contact Us | |
| 36-00031-00 | Concept One | FUSE,1.5A,250V,TYPE 313 | New OEM | Contact Us | |
| 36-00035-00 | Concept One | FUSE,2A,250V,AGC | New OEM | Contact Us | |
| 36-2017 | GaSonics | CAPACITOR, H V,1.1UF, 2500VAC, W/INTERN | New OEM | Contact Us | |
| 36-2019 | GaSonics | CAPACITOR,HV,1.0UF 2500 VAC,W/INTL RE | New OEM | Contact Us | |
| 36-326977-00 | Concept One | FUSE,SLO-BLO,3.5A,250V,FNM | New OEM | Contact Us | |
| 37-2003 | GaSonics | RESISTOR, WIREWOUND, 25 W, 5 OHMS | New OEM | Contact Us | |
| 372-15160-1 | CMP | ASSY,ACTUATOR MOUNT APP1000 | New OEM | Contact Us | |
| 372-15421-1 | CMP | BUTTON,CARRIER CTR CONTACT PPS | New OEM | Contact Us | |
| 372-35297-51 | CMP | AIR FILTER ELEMENT,MAIN ELEC CAB | New OEM | Contact Us | |
| 372-36316-1 | CMP | ASSY,SERVO AMP MC4 | New OEM | Contact Us | |
| 372-45019-1 | CMP | RING,FLOATING DRIVE 150MM CARRIER | New OEM | Contact Us | |
| 372-45053-1 | CMP | BUTTON,CARRIER CTR CONTACT DELRIN | New OEM | Contact Us | |
| 372-45080-1 | CMP | SPACER,CARRIER .003THK 150MM | New OEM | Contact Us | |
| 372-45081-1 | CMP | SPACER,CARRIER .009/.011 150MM | New OEM | Contact Us | |
| 372-45083-1 | CMP | SPACER,CARRIER .002THK 150MM | New OEM | Contact Us | |
| 372-45084-1 | CMP | SPACER,CARRIER .004THK 150MM | New OEM | Contact Us | |
| 372-45090-1 | CMP | SPACER,CARRIER .003THK 200MM | New OEM | Contact Us | |
| 372-45091-1 | CMP | SPACER,CARRIER .009/.011THK 200MM | New OEM | Contact Us | |
| 372-45093-1 | CMP | SPACER,CARRIER .002THK 200MM | New OEM | Contact Us | |
| 372-45094-1 | CMP | SPACER,CARRIER .004THK 200MM | New OEM | Contact Us | |
| 372-45096-1 | CMP | SPACER,CARRIER .0125/.0155 200MM | New OEM | Contact Us | |
| 372-45104-1 | CMP | SPACER,CARRIER .125/.0155THK 150MM | New OEM | Contact Us | |
| 372-45120-1 | CMP | RING,RETAIN 150M CARRIER N/LIP DELR | New OEM | Contact Us | |
| 372-45130-1 | CMP | RING,RETAIN 200MM CARRIER N/LIP DEL | New OEM | Contact Us | |
| 372-45140-1 | CMP | PIVOT RING,CARRIER EDGE CNTCT 200MM | New OEM | Contact Us | |
| 372-45157-1 | CMP | CBASE,150/FLAT | New OEM | Contact Us | |
| 372-45163-1 | CMP | CBASE,200/16FLAT | New OEM | Contact Us | |
| 372-45179-1 | CMP | PIN,DRIVE RING 200MM | New OEM | Contact Us | |
| 372-45235-1 | CMP | ASSY,CARRIER BASE 150M CNTR CONTACT | New OEM | Contact Us | |
| 372-45524-1 | CMP | HOUSING,CARRIER 200MM | New OEM | Contact Us | |
| 372-46024-1 | CMP | CLAMP,BASE GAUGE GUARD | New OEM | Contact Us | |
| 372-46028-1 | CMP | CLAMP,BASE DI REGULATOR | New OEM | Contact Us | |
| 372-67092-1 | CMP | PIN,CAM ROLLER | New OEM | Contact Us | |
| 372-67093-1 | CMP | CAM,ROLLER SHUTTLE PIVOT | New OEM | Contact Us | |
| 372-67094-1 | CMP | TORSION SPRING SPACER | New OEM | Contact Us | |
| 372-67095-1 | CMP | SPRING,TORSION WAFER TRANSPORT | New OEM | Contact Us | |
| 372-67234-1 | CMP | RETAINER,BUSHING | New OEM | Contact Us | |
| 372-67312-1 | CMP | CE,RAIL SHUTTLE HORIZONTAL | New OEM | Contact Us | |
| 372-67364-1 | CMP | COVER,GUIDE ROD REAR SHUTTLE | New OEM | Contact Us | |
| 372-67397-1 | CMP | GUIDE,WAFER LIFT 200MM | New OEM | Contact Us | |
| 372-68389-1 | CMP | BELLOW,BOOT CASCADE TUB RINSE | New OEM | Contact Us | |
| 372-69057-1 | CMP | LOCATOR, CASSETTE ALL LOW 3IN | New OEM | Contact Us | |
| 372-69058-1 | GaSonics | LOCATOR,CASSETTE HIGH | New OEM | Contact Us | |
| 372-72001-1 | CMP | COUPLING,SHAFT | New OEM | Contact Us | |
| 372-72065-1 | CMP | PIN, DOWEL EYE BLOCK | New OEM | Contact Us | |
| 372-72094 | CMP | CENTER,LOCATE-PIVOT ARM | New OEM | Contact Us | |
| 372-72129-1 | CMP | DEUBLIN FLEX COUPLNG ANTIROTATE ARM | New OEM | Contact Us | |
| 372-72183-1 | CMP | KEY,LOWER ARM DRIVE | New OEM | Contact Us | |
| 372-72184-1 | CMP | KEY, POLISH ARM DRUM SHAFT | New OEM | Contact Us | |
| 372-72241-1 | CMP | SHAFT,CARRIER ROTATE MTR | New OEM | Contact Us | |
| 372-72260-1 | CMP | SPLINE,ROLLER BRG. | New OEM | Contact Us | |
| 372-72264-1 | CMP | DRIVER, RDCR SPINDLE | New OEM | Contact Us | |
| 372-72266-1 | CMP | CLAMP,TUBE SPINDLE | New OEM | Contact Us | |
| 372-72269-1 | CMP | NUT, HEX | New OEM | Contact Us | |
| 372-72274-1 | CMP | SPACER,HEIGHT ADJ .062THK | New OEM | Contact Us | |
| 372-72275-1 | CMP | SPACER,HEIGHT ADJ .090THK | New OEM | Contact Us | |
| 372-72276-1 | CMP | SPACER,HEIGHT ADJ .032THK | New OEM | Contact Us | |
| 372-72278-1 | CMP | SPACER,HEIGHT ADJ .010THK | New OEM | Contact Us | |
| 372-72316-1 | CMP | WSHR,FLUID COUPLING | New OEM | Contact Us | |
| 372-72361-1 | CMP | SHAFT,CARRIER DRIVE | New OEM | Contact Us | |
| 372-72503-1 | CMP | LOCKNUT, CENTER LOCATOR PIVOT ARM | New OEM | Contact Us | |
| 372-72564-2 | CMP | BLOCK,V-NOTCH POLISH ARM | New OEM | Contact Us | |
| 372-72587-1 | CMP | ARM,DRIVE ENCODER WIRE | New OEM | Contact Us | |
| 372-72588-1 | CMP | ASSY,ARM DRIVE 1 WIRE/SPRINGS | New OEM | Contact Us | |
| 372-72589-1 | CMP | ARM,DRIVE 2 WIRES/SPRING | New OEM | Contact Us | |
| 372-72595-1 | CMP | SHAFT,INPUT ARM DRIVE | New OEM | Contact Us | |
| 372-73918-1 | CMP | BLOCK,ROLLER LIFT/C RPC2 | New OEM | Contact Us | |
| 372-73924-1 | CMP | RING, SNSR RETAINING RPC2 | New OEM | Contact Us | |
| 372-73927-1 | CMP | SPACER, BLOCK SWIVEL RPC2 | New OEM | Contact Us | |
| 372-73937-1 | CMP | MOD-AIR STROKE ACTUATOR-RPC II | New OEM | Contact Us | |
| 372-74004-1 | CMP | COVER,AIR ACTUATOR RPC2 POLISHER | New OEM | Contact Us | |
| 372-76065-1 | CMP | LOCATOR, PLATEN CLAMP | New OEM | Contact Us | |
| 372-76066-1 | CMP | STUD,PLATEN CLAMP | New OEM | Contact Us | |
| 372-76067-1 | CMP | NUT,PLATEN CLAMP | New OEM | Contact Us | |
| 372-76068-1 | CMP | WSHR,SPACER PLATEN CLAMP | New OEM | Contact Us | |
| 372-76113-1 | CMP | SILICONE TUBING,SPINDLE SHAFT | New OEM | Contact Us |