Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 61-2313 | GaSonics | POWER SUPPLY, 110 VAC-24 VDC, 4.6 AMPS | New OEM | Contact Us | |
| 61-2318-01 | GaSonics | PWR SPLY, 40W, 50/60 HZ, UNIV INPUT +5V, | New OEM | Contact Us | |
| 61-2318-02 | GaSonics | POWER SUPPLY, + 24V, 40 W,50/60HZ, UNIVERSAL IN | New OEM | Contact Us | |
| 61-2344 | GaSonics | BATTERY, ROBOT BR9401882-A | New OEM | Contact Us | |
| 61-2345 | GaSonics | BATTERY, CONTROLLER (ER6VC3) | New OEM | Contact Us | |
| 61-2348 | GaSonics | POWER SUPPLY,300W,5V,24,15,-15 | New OEM | Contact Us | |
| 61-2351 | GaSonics | DC Power Supply (DC5V 6A) | New OEM | Contact Us | |
| 61-2354 | GaSonics | POWER SUPPLY, UV LAMP | New OEM | Contact Us | |
| 61-2390 | GaSonics | POWER SUPPLY,COMPUTER, GAMMA 300MM | New OEM | Contact Us | |
| 61-293748-00 | Concept One | ORIFICE,5.E-3IN,MALE,1/4 VCR DOUBLE UNION, 1.55" L | New OEM | Contact Us | |
| 61-324167-00 | GaSonics | OEM SPARE, CPU BOARD WITH MEMORY | New OEM | Contact Us | |
| 61-344673-00 | GaSonics | OEM SPARE,BELT MXL 0.080" THETA B | New OEM | Contact Us | |
| 61-344674-00 | GaSonics | OEM SPARE,BELT MXL 0.080" ZBOT 2 THETA A | New OEM | Contact Us | |
| 61-346859-00 | GaSonics | OEM SPARE,BELT MXL 0.080 Z-AXIS | New OEM | Contact Us | |
| 61-355560-00 | Concept One | OEM SPARE,SENSE-RITE,C1D/C2-AL | New OEM | Contact Us | |
| 61-355855-00 | Concept One | OEM SPARE,SENSE-RITE RF INSTL,W/TRAZER MATCH | New OEM | Contact Us | |
| 61-356145-00 | GaSonics | OEM SPARE,BELT MXL 0.080,1/8 WIDTH,E/R | New OEM | Contact Us | |
| 61-357619-00 | CMP | BEARING,BALL,8.628 OD,LIMITED TILT | New OEM | Contact Us | |
| 61-362309-00 | Concept One | OEM SPARE, INTRF CBL, DB37(M) TO DB15(F), 2 | New OEM | Contact Us | |
| 61-400446-00 | CMP | END EFFECTOR,BODY ASSY SST GENMARK | New OEM | Contact Us | |
| 61-403152-00 | Concept One | RELAY,HBC-868,SSR FAN AND T-STAT,C1-D | New OEM | Contact Us | |
| 61-414424-00 | CMP | MOTOR,BRUSHLESS 144 OZ-IN 3/8 SHAFT | New OEM | Contact Us | |
| 61-442706-00 | CMP | MOTOR,BRUSHLESS 101 OZ-IN 3/8" SHAFT | New OEM | Contact Us | |
| 61-449836-00 | GaSonics | LEAD SCREW,ACME SCREW REPLACEMENT,XY TAB | New OEM | Contact Us | |
| 63-2128 | GaSonics | BRAID, EXPANDABLE,1.75 INCH DIA. | New OEM | Contact Us | |
| 63-268605-00 | GaSonics | KIT,BRACKET, AUTO SWITCH | New OEM | Contact Us | |
| 63-275132-00 | GaSonics | OEM SPARE,4-PORT CABLE/DSL ROUTER,PEP,NETGEAR,10/100 MBPS | New OEM | Contact Us | |
| 63-309399-00/OBS | Concept One | OEM SPARE,COMPUTER,SYSTEM ,ARISTA,C1 | New OEM | Contact Us | |
| 63-314675-00 | CMP | KIT, SEALS, ROTARY UNION | New OEM | Contact Us | |
| 63-314676-00 | CMP | KIT,SEALS AND BEARING,ROTARY UNION | New OEM | Contact Us | |
| 63-344575-00 | GaSonics | OEM SPARE,ROBOT,Z-BOT 2 PLUS,L3510/A3010 | New OEM | Contact Us | |
| 63-344575-00/RW | GaSonics | OEM SPARE,ROBOT,Z-BOT 2 PLUS,L3510/A3010 | New OEM | Contact Us | |
| 63-358938-00 | GaSonics | OEM SPARE,SLIDE,3 SECTION,100-125 LBS | New OEM | Contact Us | |
| 63-380232-00 | CMP | OEM SPARE,PROTECTOR ASSY,LEXAN POLYCARBO | New OEM | Contact Us | |
| 63-441958-00 | CMP | OEM SPARE,COMPUTER,EC2,QNX4,PLATFORM,E-NET | New OEM | Contact Us | |
| 63-8014-03 | GaSonics | OUTLET, AC, DUPLEX (WAS 71483-03) | New OEM | Contact Us | |
| 63-8041 | GaSonics | ADAPTER,D9(FEMALE) TO D25(MALE) SERIAL | New OEM | Contact Us | |
| 679-205332-001 | CMP | SNSR,CYL,SOLID STATE,5-28 VDC,NPN | New OEM | Contact Us | |
| 68-2264 | GaSonics | PWA, ANALOG OUTPUT | New OEM | Contact Us | |
| 68-2279 | GaSonics | CONTROLLER, TEMPERATURE,100-240VAC, 50/ | New OEM | Contact Us | |
| 683-210239-001 | CMP | CA,ASSY, SNSR BRD, DB25M/F -DB9M | New OEM | Contact Us | |
| 683-210239-002 | CMP | CA,ASSY,SNSR BRD,DB25M/F - DB9F | New OEM | Contact Us | |
| 683-210241-001 | CMP | CA,ASSY,ADPTR,DB9M/F-DB50M | New OEM | Contact Us | |
| 685-158382-001 | GaSonics | MDL,ELEC,COMP,IRIDIA CLSTR & PCM CONT | New OEM | Contact Us | |
| 685-238920-105 | Concept One | I/O CONTROLLER,HS | New OEM | Contact Us | |
| 70-00053-00 | Concept One | 6" METAL CASSETTES | New OEM | Contact Us | |
| 70-00054-00 | Concept One | CASS,125MM,H-SQUARE,MC-5HC,SOL | New OEM | Contact Us | |
| 70-00055-00 | Concept One | CASS,100MM,H-SQUARE,MC1-4HC | New OEM | Contact Us | |
| 70-00058-00 | Concept One | CASS,200MM,H-SQUARE,MC-8HC,SOL | New OEM | Contact Us | |
| 70-00078-00 | Concept One | CASS,200MM,POLY,FLUOROWARE,PA1 | New OEM | Contact Us | |
| 70058-02 | GaSonics | CAP TUBULAR 50PF 7.5KVDC | New OEM | Contact Us | |
| 70-09192-00 | Concept One | CASS,150MM,METAL,H-SQUARE,SQ21 | New OEM | Contact Us | |
| 70109-03 | GaSonics | DIODE MR510 MOTOROLA | New OEM | Contact Us | |
| 70-132406-00 | Concept One | GREASE, KRYTOX LVP, 2 OZ TUBE | New OEM | Contact Us | |
| 70-2008 | GaSonics | THERMOCOUPLE PROBE,304SS TYPE K,.020DIA | New OEM | Contact Us | |
| 70-2015 | GaSonics | THERMOCOUPLE, TYPE K 15 FT TEFLON LEADS | New OEM | Contact Us | |
| 70-2020 | GaSonics | WAFER, THERMOCOUPLE,200MM, 3 LOCATIONS | New OEM | Contact Us | |
| 70-2028 | GaSonics | THERMOCOUPLE, K-TYPE | New OEM | Contact Us | |
| 70-8000-002 | Ontrak | CLAMP, 1/2" PIPE | New OEM | Contact Us | |
| 70953-02 | GaSonics | RELAY,S/S PWR-5VDC-25A/240 VAC | New OEM | Contact Us | |
| 70963-04 | GaSonics | RELAY DPDT 12VAC | New OEM | Contact Us | |
| 70963-06 | GaSonics | RELAY 24VDC 3PDT P&B | New OEM | Contact Us | |
| 70963-07 | Gasonics | RELAY,GP-DPDT,24VAC,10AMPS | New OEM | Contact Us | |
| 70964-03 | GaSonics | RELAY, GP-DPDT,24VDC, 10AMP | New OEM | Contact Us | |
| 70980-01 | GaSonics | CIRCUIT BRKR,30A-2P,120/240V | New OEM | Contact Us | |
| 70989-20 | Gasonics | SPACER ALUM #6-32X.375LG | New OEM | Contact Us | |
| 71-00026-00 | Concept One | INDICATOR FIXTURE | New OEM | Contact Us | |
| 71-00062-00 | Concept One | FIXTURE, PLATTEN | New OEM | Contact Us | |
| 71002-05 | GaSonics | O-RING, 2-005, .101 ID X .070 W, VITON | New OEM | Contact Us | |
| 71002-12 | GaSonics | O-RING, 2-012, .364 ID X .070 W, VITON | New OEM | Contact Us | |
| 71003-13 | GaSonics | O-RING, 2-114, .612 ID X .103 W, VITON | New OEM | Contact Us | |
| 71003-15 | GaSonics | O-RING, 2-116, .737 ID X .103 W, VITON | New OEM | Contact Us | |
| 71003-19 | GaSonics | O-RING, 2-120, .987 ID X .103 W, VITON | New OEM | Contact Us | |
| 71003-20 | GaSonics | O-RING, 2-121, 1.049 ID X .103 W, VITON | New OEM | Contact Us | |
| 71004-16 | GaSonics | (METRO) O RING 1-1/8 ID PARKER 2-216 | New OEM | Contact Us | |
| 71004-19 | GaSonics | O-RING, 2-219, 1.296 ID X .139 W, VITON | New OEM | Contact Us | |
| 71004-60 | GaSonics | O-RING, 2-260, 6.484 ID X .139 W, VITON | New OEM | Contact Us | |
| 71004-61 | GaSonics | O-RING, 2-261, 6.734 ID X .139 W, VITON | New OEM | Contact Us | |
| 71004-76 | GaSonics | O-RING, 2-276,10.984 ID X .139 W,VITON, | New OEM | Contact Us | |
| 71005-10 | GaSonics | O-RING, 2-318, .975 ID X .210 W, VITON | New OEM | Contact Us | |
| 71005-68 | GaSonics | O-RING, 2-376, 9.725 ID X .210, VITON V8 | New OEM | Contact Us | |
| 71005-70 | GaSonics | O-RING, 2-378, 10.475 ID X .210 W,VITON, V 884 | New OEM | Contact Us | |
| 71023-05 | GaSonics | BEARING,RADIAL 1/4 IN IDX3/4 IN OD | New OEM | Contact Us | |
| 71047-04 | GaSonics | BEARING,BRNZ 1/4 IN IDX1/2 FT L | New OEM | Contact Us | |
| 71-047543-00 | Concept One | TAP,8-32 BOTTOMING | New OEM | Contact Us | |
| 71209-01 | GaSonics | SOCKET, RELAY, 8 PIN | New OEM | Contact Us | |
| 71244-02 | GaSonics | TRANSFORMER PWR 115-230 | New OEM | Contact Us | |
| 71275-02 | GaSonics | FAN 220V 760-120VZ-281-11220 | New OEM | Contact Us | |
| 71-284590-00 | CMP | TOOL,GAUGE BLOCK,GRADE2 CERAMIC,2MM | New OEM | Contact Us | |
| 713-028230-001 | CMP | SLEEVE, INSULATOR, BANANA JACK | New OEM | Contact Us | |
| 71311-01 | GaSonics | LAMP TI 3/4 SUBMINI 28V | New OEM | Contact Us | |
| 713-175280-001 | CMP | SHLD, APM SPEED SENSOR, M | New OEM | Contact Us | |
| 71325-22 | GaSonics | FUSE,3AG,250V | New OEM | Contact Us | |
| 71326-25 | GaSonics | FUSE 30AMP 600V | New OEM | Contact Us | |
| 71353-02 | GaSonics | ALARM, AUDIBLE SC-110 MALLORY | New OEM | Contact Us | |
| 71357-01 | GaSonics | TUBE OSCILLATOR RCA 6JT6A | New OEM | Contact Us | |
| 71-361148-00 | CMP | SPECTROGRAPH,OEP,FIBER OPTICS 7 CHANNEL | New OEM | Contact Us | |
| 71414-01 | GaSonics | CONN, PLUG, 2 POS, M-N-L, AMP | CE! | New OEM | Contact Us | |
| 71423-01 | GaSonics | CONT, F, 24-18 AWG,CRP, MNL AMP | New OEM | Contact Us | |
| 71438-02 | GaSonics | CONN, F, PNL MT, 19 POS, 16 AWG | New OEM | Contact Us |