Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 73339-01 | GaSonics | ADAPTOR,SWIVEL-1/8-27 TO 10-32 | New OEM | Contact Us | |
| 73341-01 | GaSonics | BEARING,CYL-.254 X .376 X 3/8 | New OEM | Contact Us | |
| 73357-05 | GaSonics | PLUG-SST-MALE 1-5/16-12 | New OEM | Contact Us | |
| 73377-02 | GaSonics | NUT, BLIND-VCR,4-3/8 | New OEM | Contact Us | |
| 73378-01 | GaSonics | GASKET, RETAINER ASSY 1/4 | New OEM | Contact Us | |
| 734-006776-001 | Concept One | O-RING 5/32 ID X 1/16 C/S | New OEM | Contact Us | |
| 734-218747-001 | Concept One | O-RING, 31.12#ID X .275#W | New OEM | Contact Us | |
| 73464-01 | GaSonics | VALVE,FINE MTRG-1/4 VC4-ST | New OEM | Contact Us | |
| 73494-01 | GaSonics | PC ASSY, 1 PHASE-2 SCR 120V | New OEM | Contact Us | |
| 73495-01 | Concept One | RECTIFIER, SCR AC SW-4 | New OEM | Contact Us | |
| 73514-01 | GaSonics | SINGLE CHAN 12 BIT MAX172 | New OEM | Contact Us | |
| 73540-01 | GaSonics | REGULATOR,PRESSURE 30 105 PSI | New OEM | Contact Us | |
| 73563-02 | GaSonics | PLUG, HOUSING-JR.SER, 4 CIRCUITS | New OEM | Contact Us | |
| 73564-01 | GaSonics | CAP,PNL MT-JR.SER,2 CIRUITS | New OEM | Contact Us | |
| 73564-02 | GaSonics | CAP,PNL MT-JR.SER,4 CIRCUIT | New OEM | Contact Us | |
| 73565-02 | GaSonics | TERM, CRIMP-JR, F, 18-24AWG | New OEM | Contact Us | |
| 73602-10 | GaSonics | STUD, 8-32 X 2-1/2 SS | New OEM | Contact Us | |
| 73603-03 | GaSonics | FITTING,ULTRA-TORR,SLEEVE,3/4 IN | New OEM | Contact Us | |
| 73603-04 | GaSonics | FITTING,ULTRA-TORR,NUT,3/4 IN | New OEM | Contact Us | |
| 73603-05 | GaSonics | SLEEVE,ULTRA TORR,1 IN,FITTING | New OEM | Contact Us | |
| 73603-06 | GaSonics | NUT,ULTRA TORR,1 IN,FITTING | New OEM | Contact Us | |
| 73629-02 | GaSonics | TIMIMG BELT-150 TEETH(ROTATE) | New OEM | Contact Us | |
| 73629-14 | GaSonics | EPROM | New OEM | Contact Us | |
| 73657-07 | GaSonics | FUSE,PC PLUG-3 AMP | New OEM | Contact Us | |
| 73657-08 | GaSonics | FUSE, PC PLUG-5 AMP | New OEM | Contact Us | |
| 73661-01 | GaSonics | IC,DM74ALS808A,HEX 2 INPUT DRV | New OEM | Contact Us | |
| 73675-02 | GaSonics | ADAPTOR,PIPE-SS,1/4 NPT | New OEM | Contact Us | |
| 73683-01 | GaSonics | SWITCH OIL TIGHT RED MOM | New OEM | Contact Us | |
| 73691-04 | GaSonics | SPHERICAL WASHER,SS-.196 ID | New OEM | Contact Us | |
| 73720-03 | GaSonics | HANDLE, POCKET PULL-.160 THK | New OEM | Contact Us | |
| 73727-01 | GaSonics | BALL JOINT,CYL-ROD END,SS | New OEM | Contact Us | |
| 73728-01 | GaSonics | SCREW, SHLDR,1/4-20 X .31 X .75 L | New OEM | Contact Us | |
| 73730-10 | GaSonics | RELAY,PANEL MT-5VDC SPDT | New OEM | Contact Us | |
| 73732-01 | GaSonics | SENSOR,AIRFLOW-N/C,750 FPM | New OEM | Contact Us | |
| 73732-02 | GaSonics | SENSOR,AIR FLOW-NC,250 FT/MN | New OEM | Contact Us | |
| 73760-01 | GaSonics | e14a0GSKT,EMI,0.040 IN X 0.375 IN, STRIP | New OEM | Contact Us | |
| 73762-01 | GaSonics | SWITCH,LIMIT-SUBMIN,SPDT | New OEM | Contact Us | |
| 73785-02 | GaSonics | VALVE,VAC-AIR OP,NC,SS,FSFM- ULTRA PURE | New OEM | Contact Us | |
| 73789-04 | GaSonics | LAMP,HG-OZONE FREE,2.125 IN | New OEM | Contact Us | |
| 73792-03 | GaSonics | RIVET,3/16 IN X .325,MFG #FS-C-07-1 | New OEM | Contact Us | |
| 73797-01 | GaSonics | INDICATOR LAMP | New OEM | Contact Us | |
| 73797-03 | GaSonics | RECTIFIER,HIGH VOLTAGE | New OEM | Contact Us | |
| 73797-04 | GaSonics | PWA, CONTROL | New OEM | Contact Us | |
| 73797-05 | GaSonics | PWA,SCR CNTRL REV A, W/RETROFIT INSTRS T | New OEM | Contact Us | |
| 73797-06 | GaSonics | MAGNETRON ASSY WITH FITTINGS | New OEM | Contact Us | |
| 73797-20 | GaSonics | PLATE TRANSFORMER L3510 | New OEM | Contact Us | |
| 73797-23 | GaSonics | PWA CONTROL | New OEM | Contact Us | |
| 73822-09 | GaSonics | SCRW,SHLDR,10-32 X 1 1/4 L | New OEM | Contact Us | |
| 73823-01 | GaSonics | PILLOW,BLCK, TWIN 1/4 IN SHFT,2-1/2 | New OEM | Contact Us | |
| 73827-15 | GaSonics | ROD, SAPPHIRE .0625 X .360LG | New OEM | Contact Us | |
| 73837-01 | GaSonics | ACTR,COIL,120V,50/60HZ,W/JCT 80(WAS 73837-02) | New OEM | Contact Us | |
| 73848-01 | GaSonics | SWITCH,HALL EFFECT | New OEM | Contact Us | |
| 73849-01 | GaSonics | CYLINDER,1 1/4 IN BORE X 4 IN STRK MAG | New OEM | Contact Us | |
| 73865-02 | GaSonics | SPRING,COMPRESSION 5/8 IN LG,.420 OD X .051 WD | New OEM | Contact Us | |
| 73866-24 | GaSonics | HEATER, CARTRIDGE, 1/4 IN DIA X 1 IN LG, 12 | New OEM | Contact Us | |
| 73874-06 | GaSonics | RELAY,4890,90A,4-32VDC,SS | New OEM | Contact Us | |
| 73879-01 | GaSonics | W/G,WR284,STRT SECT 16 IN GOLD IRRIDITE FINISH | New OEM | Contact Us | |
| 73903-01 | GaSonics | CBL ASSY,HV,4 P | New OEM | Contact Us | |
| 73910-04 | GaSonics | SCREW, PH FLHD, 8-32 X 3/8 L, SST | New OEM | Contact Us | |
| 73912-04 | CMP | NUT-5/16-24,JAM-SS | New OEM | Contact Us | |
| 73913-13 | GaSonics | SCRW,PH PNHD, 8-32 X 1.75 L, SST | New OEM | Contact Us | |
| 73954-01 | GaSonics | CONNECTOR,THERMOCOUPLE,TYPE-K, CHROM-ALU | New OEM | Contact Us | |
| 739-550096-001 | GaSonics | SEAL,SFT ROB | New OEM | Contact Us | |
| 742-218766-001 | Concept One | GSKT, DOOR SEAL, LEFT LL | New OEM | Contact Us | |
| 766-158146-001 | Concept One | VLV,ISLN,1.5"ID,PNEU,DBL ACT,ISO-KF40 | New OEM | Contact Us | |
| 771-213638-001 | CMP | XDCR,PRESSURE,0-25PSI | New OEM | Contact Us | |
| 77-2002 | GaSonics | GREASE, 80G TUBE | New OEM | Contact Us | |
| 78-0008-02 | GaSonics | O-RING, 2-116, .750 ID X .093 W, | New OEM | Contact Us | |
| 78-0020-06 | GaSonics | GASKET, RING, .060 THK | New OEM | Contact Us | |
| 78-0020-07 | GaSonics | GASKET, RING, .060 THK | New OEM | Contact Us | |
| 78-0020-08 | GaSonics | GASKET,RING, .060 THK | New OEM | Contact Us | |
| 78-0031-03 | GaSonics | GASKET,FITTINGS | New OEM | Contact Us | |
| 78-0087-01 | GaSonics | O-RING, 2-453,11.975 ID X .271 W,SILICON | New OEM | Contact Us | |
| 78-0088-01 | GaSonics | O-RING, 2-448, 9.475 ID X .271 W,SILICON | New OEM | Contact Us | |
| 78-0090-01 | CMP | O-RING, 2-380, 11.475 ID X .207 W,SILICONE | New OEM | Contact Us | |
| 78-0104-01 | GaSonics | O-RING, 2-167, 6.987 ID X .103 W,SILICONE | New OEM | Contact Us | |
| 78-0110-09 | GaSonics | GASKET,BACKING RING,MONOLITHIC GRAPHITE,6 IN | New OEM | Contact Us | |
| 78-0128 | GaSonics | O-RING, 9-024, 1.114 ID X .070 W, CHEMRA | New OEM | Contact Us | |
| 78-0134 | GaSonics | O-RING, 9-326, 1.60 ID X .210 W, CHEMRAZ | New OEM | Contact Us | |
| 78-0182 | GaSonics | INSULATOR,RIGHT,DOOR | New OEM | Contact Us | |
| 78-0185 | GaSonics | TAPE, GFITE, CORR, .015 THICK X .50 WIDE, 1 | New OEM | Contact Us | |
| 78-0199 | GaSonics | O-RING, 2-022, .989 ID X .070 W, VITON V747-75 | New OEM | Contact Us | |
| 78-2553 | GaSonics | O-RING, 9-024, 1.114 ID X .070W, CHEMRAZ | New OEM | Contact Us | |
| 78-2554 | GaSonics | O-RING, 9-012, .364 ID X .070 W, CHEMRAZ | New OEM | Contact Us | |
| 78-2555 | GaSonics | O-RING, 9-114, .612 ID X .103 W, CHEMRAZ | New OEM | Contact Us | |
| 78-2556 | GaSonics | O-RING, 9-116, 737 ID X .103 W, CHEMRAZ | New OEM | Contact Us | |
| 78-2557 | GaSonics | O-RING, 9-120, .987 ID X .103 W, CHEMRAZ | New OEM | Contact Us | |
| 78-2558 | GaSonics | O-RING, 9-121, 1.049 ID X .103W, CHEMRAZ | New OEM | Contact Us | |
| 78-2560 | GaSonics | O-RING, 9-225, 1.859 ID X .139 W, CHEMRAZ 592 | New OEM | Contact Us | |
| 78-2561 | GaSonics | O-RING, 9-260, 6.484 ID X .139 W, CHEMRA | New OEM | Contact Us | |
| 78-2562 | GaSonics | O-RING, 9-261, 6.734 ID X .139 W, CHEMRA | New OEM | Contact Us | |
| 78-2563 | GaSonics | O-RING, 9-276,10.984 ID X .139 W CHEMRAZ | New OEM | Contact Us | |
| 78-2564 | GaSonics | O-RING, 9-330, 2.100 ID X .210 W, CHEMRA | New OEM | Contact Us | |
| 78-2565 | GaSonics | O-RING, 9-326, 1.600 ID X .210 W, CHEMRA | New OEM | Contact Us | |
| 78-2566 | GaSonics | O-RING, 9-376, 9.725 ID X .210 W, CHEMRA | New OEM | Contact Us | |
| 78-2567 | GaSonics | O-RING, 9-378,10.475 ID X .210 W,CHEMRAZ | New OEM | Contact Us | |
| 78-2568 | GaSonics | O-RING, 9-916, 1.171 ID X .116 W, CHEMRA | New OEM | Contact Us | |
| 78-2583-61 | GaSonics | O-RING, 2-261, 6.734 ID X .139 W, VITON V50 | New OEM | Contact Us | |
| 78-2597 | GaSonics | GASKET, UPPER CHANNEL | New OEM | Contact Us | |
| 78-2601 | GaSonics | O-RING, 9-233, 2.859 ID X .139 W, CHEMR | New OEM | Contact Us |