Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 93-2934 | GaSonics | PULLEY A ROTATION,AT | New OEM | Contact Us | |
| 93-2935 | Gasonics | PULLEY MODS | New OEM | Contact Us | |
| 93-2938 | GaSonics | PULLEY, MAIN ROTATION | New OEM | Contact Us | |
| 93-2939 | Gasonics | PULLEY, DRIVE, ROTATION | New OEM | Contact Us | |
| 93-2940 | GaSonics | DONUT, PEEK, ATM ROBOT | New OEM | Contact Us | |
| 93-2942 | GaSonics | ROD, TENSIONER,BLADE | New OEM | Contact Us | |
| 93-2943 | GaSonics | ROD, IDLER, BLADE | New OEM | Contact Us | |
| 93-2947 | GaSonics | GASKET, BLOCK VAC,ATM ROBOT | New OEM | Contact Us | |
| 93-2948 | GaSonics | SHIM, PADDLE (MULAR), ATM ROBOT | New OEM | Contact Us | |
| 93-2952 | GaSonics | PULLEY C, ATM ROBOT | New OEM | Contact Us | |
| 93-2963 | GaSonics | HEATER 1/8 CABLE W/K-THERMOCPL,675W/240V | New OEM | Contact Us | |
| 93-2993 | GaSonics | CBL ASSY,RF GEN ENABLE,MODIFIED | New OEM | Contact Us | |
| 93-3036 | GaSonics | LINEAR FEEDTROUGH,ACTUATOR | New OEM | Contact Us | |
| 93-3105 | GaSonics | WSHR, 5/16, ALUMINUM MODIFIED | New OEM | Contact Us | |
| 93-3106 | GaSonics | NUT, 5/16-18 UNC ALUMINUM MODIFIED | New OEM | Contact Us | |
| 93-3109 | GaSonics | SCREW, SLTD, RNDHD, 40-40 X 1/4, AL MODIFIED | New OEM | Contact Us | |
| 93-3116 | GaSonics | BLOWER- MODIFIED,138 CFM 115V, 50/60 HZ | New OEM | Contact Us | |
| 93-3133 | Gasonics | MODIFIED MOTOR, STEPPER, 5-PH, 3A/ PHAS | New OEM | Contact Us | |
| 93-3138 | GaSonics | BLOWER, MODIFIED,230VAC, 1 PH. | New OEM | Contact Us | |
| 94-0037-01 | GaSonics | SEAL KIT,AIR DRIVE | New OEM | Contact Us | |
| 94-0114-01 | GaSonics | CONTROLLER,PRESS,VACUUM | New OEM | Contact Us | |
| 94-0150 | GaSonics | MITUTOYO-DIAL-INDICATOR | New OEM | Contact Us | |
| 94-1005-01 | GaSonics | ASSY,LIQUID END PEEK | New OEM | Contact Us | |
| 94-1104 | GaSonics | MICROWAVE POWER SOURCE,SIDE ACCESS | New OEM | Contact Us | |
| 94-1105 | GaSonics | PAN,VACUUM,Z-BOT,I & II (STANDARD) | New OEM | Contact Us | |
| 94-1112 | GaSonics | TUNER ASSY, W/3 MITUTOYO STUBS | New OEM | Contact Us | |
| 94-1120 | GaSonics | ASSY, SECS II CARD,MODIFIED | New OEM | Contact Us | |
| 94-1127 | GaSonics | MOTOR, ASSY, (Z-AXIS) | New OEM | Contact Us | |
| 94-1131 | GaSonics | TIMING BELT-155 TEETH (ROTATE) | New OEM | Contact Us | |
| 94-1133 | GaSonics | VACUUM SOLENOID | New OEM | Contact Us | |
| 94-1134 | GaSonics | VACUUM SENSOR | New OEM | Contact Us | |
| 94-1150 | GaSonics | VALVE, THROTTLE EXHAUST, MKS 653A | New OEM | Contact Us | |
| 94-2618 | GaSonics | MICROWAVE PWR SOURCE ASSY, PEP | New OEM | Contact Us | |
| 94-2623 | GaSonics | WAVEGUIDE,FLEX 6 IN,LEFT | New OEM | Contact Us | |
| 94-2634 | GaSonics | CAST HEAT AND COOL PLATEN, 6in | New OEM | Contact Us | |
| 94-2670 | GaSonics | KIT, PRESSURE CONTROLLER | New OEM | Contact Us | |
| 94-2767 | CMP | HUB, NETWORK, SPORT | New OEM | Contact Us | |
| 94-2975 | GaSonics | CABLE, INTERFACE | New OEM | Contact Us | |
| 94-2976 | GaSonics | CABLE, RF POWER TO MATCHING NETWORK | New OEM | Contact Us | |
| 94-3039 | GaSonics | CONTROLLER, SCR | New OEM | Contact Us | |
| 94-3040 | GaSonics | TEMPERATURE MEASURING SYSTEM,IR FIBER-OP | New OEM | Contact Us | |
| 94-3043 | GaSonics | LIGHT PROBE, 2 MM QUARTZ, W/ALUM SHEATH | New OEM | Contact Us | |
| 94-3044 | GaSonics | CBL ASSY, FIBER OPTIC | New OEM | Contact Us | |
| 94-3048 | GaSonics | CONTROLLER, CLTC PROBE | New OEM | Contact Us | |
| 94-3049 | GaSonics | LIGHT PROBE, 2 MM,SAPPHIRE, W/SS SHEATH | New OEM | Contact Us | |
| 94-3050 | GaSonics | CABLE, FIBER OPTIC | New OEM | Contact Us | |
| 94-3051 | GaSonics | POWER SUPPLY, CLTC PROBE | New OEM | Contact Us | |
| 94-3055 | GaSonics | WAVEGUIDE TAPER TRANSITION WELDMENT WR284 TO WR340 | New OEM | Contact Us | |
| 94-3073 | GaSonics | RIBBON CABLE, EXTEND/RETRACT, 16 PIN | New OEM | Contact Us | |
| 94-3076 | GaSonics | SAPPHIRE TUBE ASSY | New OEM | Contact Us | |
| 94-3077 | GaSonics | SAPPHIRE TUBE PLASMA APPLICATOR W/UV LAMP AND LAMP PWR SUPPLY | New OEM | Contact Us | |
| 94-3090 | GaSonics | WAVEGUIDE, TAPER TRANSITION, WR284 TO WR340-REC. TO REC. | New OEM | Contact Us | |
| 94-3108 | GaSonics | PENDANT, TEACHING,JZMQZ-TB40,W/KEY SHT | New OEM | Contact Us | |
| 94-3114 | GaSonics | DUAL COUPLER/E-BEND | New OEM | Contact Us | |
| 94-3121 | GaSonics | HEATED VAPOR LINE,3RD SECTION, WVDS TO R | New OEM | Contact Us | |
| 94-3122 | GaSonics | HEATED VAPOR LINE,4TH SECTION, WVDS TO L | New OEM | Contact Us | |
| 94-3131 | GaSonics | QUARTZ APPLICATOR, 3KW, WATER COOLED | New OEM | Contact Us | |
| 94-3132 | GaSonics | POWER HEAD, MICROWAVE, 2KW, WR284 INTERFAC | New OEM | Contact Us | |
| 94-3157 | GaSonics | MAGNETRON INTERLOCK ASSY, M5 STUD | New OEM | Contact Us | |
| 94-3158 | GaSonics | FLANGE INTERLOCK ASSY, CPR284 W/STANDARD BRACKET | New OEM | Contact Us | |
| 94-3159 | GaSonics | FLANGE, INTERLOCK ASSY, WR340 W/CENTER THRU HOLES | New OEM | Contact Us | |
| 94-3160 | GaSonics | FLANGE INTERLOCK ASSY, WR340 W/ALL THRU HOLES | New OEM | Contact Us | |
| 94-3162 | GaSonics | EL DISPLAY,EL640.400-CE5 | New OEM | Contact Us | |
| 94-3175 | GaSonics | UNIVERSAL WAFER PUSHER,YASKAWA ROBOT | New OEM | Contact Us | |
| 94-3243 | GaSonics | HARD DRIVE,PRELOADED, 7587-001 | New OEM | Contact Us | |
| 94-3245 | GaSonics | HARD DRIVE, PEP,PRELOADED, 7587-300 | New OEM | Contact Us | |
| 94-3404 | GaSonics | AXICON FILAMENT POWER SUPPLY | New OEM | Contact Us | |
| 94-3418 | GaSonics | YASKAWA ONE PIECE END EFFECTOR | New OEM | Contact Us | |
| 94-3452 | GaSonics | FLANGE INTERLOCK ASSY CPR284 W/STD BRACKET, INVERTED | New OEM | Contact Us | |
| 94-3453 | GaSonics | FLANGE INTERLOCK ASSY, WR340 W/CENTER THRU HOLES, INVERTED | New OEM | Contact Us | |
| 95-0003-002 | Ontrak | TBG, 1/4"TEFLON | New OEM | Contact Us | |
| 95-0035-01 | GaSonics | ASSY,HIPOX,FEED THRU,SPIKE,TC, | New OEM | Contact Us | |
| 95-0070-04 | GaSonics | ASSY,HIPOX,FLEXLINE,8 IN,W/1/4 IN SWAG | New OEM | Contact Us | |
| 95-0070-05 | GaSonics | ASSY, HIPOX, FLEX LINE, 12 IN W/1/4 IN S | New OEM | Contact Us | |
| 95-0253-01 | GaSonics | ASSY, LIFT SENSOR L3500/1 | New OEM | Contact Us | |
| 95-0292 | GaSonics | POWER SUPPLY ASSY,486, CPU | New OEM | Contact Us | |
| 95-0349 | GaSonics | DOWN STREAM EOP HOUSING, ASSY | New OEM | Contact Us | |
| 95-0405 | GaSonics | PLATEN ASSY, AE2001 | New OEM | Contact Us | |
| 95-0430 | GaSonics | MODULE ASSY, TYPE K 150MM | New OEM | Contact Us | |
| 95-0430/RW | GaSonics | MODULE ASSY, TYPE K 150MM | New OEM | Contact Us | |
| 95-0460 | GaSonics | AIR CYLINDER BLOCK ASSY | New OEM | Contact Us | |
| 95-0507 | GaSonics | EOP DETECTOR,ASSEMBLY | New OEM | Contact Us | |
| 95-0509 | GaSonics | AC POWER CONTROL,PROCESS ASSY, LEFT | New OEM | Contact Us | |
| 95-0512 | GaSonics | PLASMA ENCLOSURE ASSY, LEFT - PEP 3510A | New OEM | Contact Us | |
| 95-0513 | GaSonics | LIFT CHAMBER ASSY,PEP1 | New OEM | Contact Us | |
| 95-0533 | GaSonics | COOLING STATION ASSY | New OEM | Contact Us | |
| 950609/RW | CMP | MOTOR,AC SERV0 WITH 9:1 GEARHEAD | New OEM | Contact Us | |
| 950623/RW | CMP | BASE,10 SLOT,120VAC,P/S REFURBISHED | New OEM | Contact Us | |
| 95-0705 | GaSonics | DI-WATER MODULE, GPW | New OEM | Contact Us | |
| 950727/RW | CMP | ASSY,MTR,SERVO/W | New OEM | Contact Us | |
| 950973/RW | CMP | MODULE, OUTPUT ANALOG CURRENT - REFURBISHED | New OEM | Contact Us | |
| 951116/RW | CMP | MOTOR, AC SERVO 58LB-IN | New OEM | Contact Us | |
| 951855/RW | CMP | REFURBISHED DRIVE,AC,30HP,460V | New OEM | Contact Us | |
| 95-2121 | GaSonics | PLASMA ENCLOSURE ASSY, RIGHT- PEP 3510A | New OEM | Contact Us | |
| 952314/RW | CMP | SPINDLE UNIT REFURBISHED | New OEM | Contact Us | |
| 95-2421 | GaSonics | LIGHT BOX ASSEMBLY,PEP | New OEM | Contact Us | |
| 95-2666 | GaSonics | UV LAMP HOLDER ASSY PLASMA, L3510 | New OEM | Contact Us | |
| 95-2700 | GaSonics | DOOR ASSY, REACTOR CENTER, 3510A | New OEM | Contact Us | |
| 95-2736 | GaSonics | AC POWER CONTROL,PROCESS ASSY, RIGHT | New OEM | Contact Us | |
| 95-2774 | GaSonics | DOOR ASSY, PROCESS CHAMBER, PEP 3510C | New OEM | Contact Us |