Spare Parts
Intertec is an Asia Agent of CPS who has Lam authorized to supply New and OEM parts on below equipment model.
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
Intertec also provide the NEW OLD STOCK and AS IS condition semiconductor parts.
Search our available parts by Parts No, Description or OEM.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 78-2602 | GaSonics | O-RING, 9-226, 1.984 ID X .139 W, CHEMRA | New OEM | Contact Us | |
| 78-2606 | GaSonics | O-RING, 2-104,SILICONE | New OEM | Contact Us | |
| 78-2614 | GaSonics | O-RING, 9-216, 1.109 ID X .139 W,CHEMRAZ | New OEM | Contact Us | |
| 78-2615 | GaSonics | O-RING, 2-278,11.984 ID X .139 W,BUNA-N | New OEM | Contact Us | |
| 78-2679 | GaSonics | O-RING, 9-214, 1 ID X .139 W, CHEMRAZ 52 | New OEM | Contact Us | |
| 78-2683 | GaSonics | O-RING, 9-309, .412 ID X .210 W, CHEMRA | New OEM | Contact Us | |
| 78-2685 | GaSonics | O-RING, 9-123, 1.174 ID X .103 W,CHEMRA | New OEM | Contact Us | |
| 78-2709 | GaSonics | O-RING, 9-151, 2.987 ID X .103 W,CHEMRA | New OEM | Contact Us | |
| 78-2710 | GaSonics | O-RING, 9-274, 9.984 ID X .139 W,CHEMRA | New OEM | Contact Us | |
| 78-2712 | GaSonics | O-RING, 9-144,2.487 ID X .103 W,CHEMRAZ | New OEM | Contact Us | |
| 78-2713 | GaSonics | O-RING, 9-275, 10.484 ID X .139 W,CHEMR | New OEM | Contact Us | |
| 78-2733 | GaSonics | O-RING, 9-112,.487 ID X .103 W,CHEMRAZ 5 | New OEM | Contact Us | |
| 78-2737 | GaSonics | L.FT FLANGE SEAL | New OEM | Contact Us | |
| 78-2738 | GaSonics | O-RING, 9-363 6.475 ID X .210 W CHEMRAZ | New OEM | Contact Us | |
| 78-2743 | GaSonics | O-RING, CUSTOM DOVETAIL, 5.72 ID,CHEMRAZ | New OEM | Contact Us | |
| 78-2744 | GaSonics | O-RING, CUSTOM, 10.589 ID X .130 W,CHEM | New OEM | Contact Us | |
| 78-2750 | GaSonics | O-RING, 9-343, 3.725 ID X .210 W,CHEMRAZ | New OEM | Contact Us | |
| 78-2753 | GaSonics | O-RING, 9-331, 2.225 ID X .210 W, CHEMRA | New OEM | Contact Us | |
| 78-2761 | GaSonics | GASKET, EMI-.040 X .125 STRIP | New OEM | Contact Us | |
| 78-2770 | GaSonics | O-RING, DOVETAIL SEAL, 5.986 ID X .103 W | New OEM | Contact Us | |
| 78-2773 | GaSonics | CANTED COIL SPRING,CAVITY FLANGE | New OEM | Contact Us | |
| 78-2774 | GaSonics | CANTED COIL SPRING,GAS CAP | New OEM | Contact Us | |
| 78-2775 | GaSonics | O-RING, MOLDED,.070 W,PERFLUOROELASTOMER | New OEM | Contact Us | |
| 78-2782 | GaSonics | GASKET, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us | |
| 78-2783 | GaSonics | O-RING, #222,SILICONE | New OEM | Contact Us | |
| 78-2784 | GaSonics | O-RING, #223,SILICONE | New OEM | Contact Us | |
| 78-2786 | GaSonics | O-RING, #022,SILICONE | New OEM | Contact Us | |
| 78-2787 | GaSonics | O-RING, #022, PFA,CHEMRAZ520 | New OEM | Contact Us | |
| 78-2788 | GaSonics | O-RING, #014, PFA,VITON | New OEM | Contact Us | |
| 78-2789 | GaSonics | O-RING, #025,CHEMRAZ520 | New OEM | Contact Us | |
| 78-2808 | GaSonics | GASKET, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us | |
| 78-2817 | GaSonics | O-RING, 2-158,4.737 ID X .103 W,VITON | New OEM | Contact Us | |
| 78-2825 | GaSonics | O-RING, (2-177),VITON | New OEM | Contact Us | |
| 78-2827 | GaSonics | O-RING, SILICON 2-269, S-70 | New OEM | Contact Us | |
| 78-2828 | GaSonics | O-RING, 2-135, 1.925 IDX .103W, VITON | New OEM | Contact Us | |
| 78-2829 | GaSonics | O-RING, VITON | New OEM | Contact Us | |
| 78-2831 | GaSonics | O-RING, VITON,2-268 | New OEM | Contact Us | |
| 78-2836 | CMP | SEAL, LIP | New OEM | Contact Us | |
| 78-2837 | GaSonics | O-RING, (2-226) KALREZ 8475 | New OEM | Contact Us | |
| 78-2843 | GaSonics | O-RING, 2-123, 1.174 ID X .103 W VITON | New OEM | Contact Us | |
| 78-2845 | GaSonics | O-RING, (2-131),VITON | New OEM | Contact Us | |
| 78-2846 | GaSonics | O-RING, 2-136,1.987 ID x .103 W,VITON | New OEM | Contact Us | |
| 78-2847 | GaSonics | 568-145 V75 FKM ORING DUROMETER | New OEM | Contact Us | |
| 78-2850 | GaSonics | O-RING (2-234),VITON | New OEM | Contact Us | |
| 78-2851 | GaSonics | O-RING, (2-223),VITON | New OEM | Contact Us | |
| 78-2852 | GaSonics | O-RING, 2-236,3.234 ID x .139 W,VITON | New OEM | Contact Us | |
| 78-2853 | Gasonics | 568-238 V75 FKM ORING DUROMETER | New OEM | Contact Us | |
| 78-2855 | GaSonics | O-RING, (2-264) | New OEM | Contact Us | |
| 78-2860 | GaSonics | O-RING, 2-276, 10-984 ID X .139W,VITON | New OEM | Contact Us | |
| 78-2865 | GaSonics | O-RING, 2-380,11.475 ID X .207W,VITON | New OEM | Contact Us | |
| 78-2867 | GaSonics | O-RING, 2-SPL,38.56 ID X .210W,VITON | New OEM | Contact Us | |
| 78-2871 | GaSonics | LIP SEAL | New OEM | Contact Us | |
| 78-2872 | GaSonics | O-RING, 2-272,9-484 ID X .135W,VITON | New OEM | Contact Us | |
| 78-2901 | GaSonics | O-RING, 2-233,FLUOROSILICONE(F-70) | New OEM | Contact Us | |
| 78-2905 | GaSonics | O-RING, 2-360 FLUOROSILICONE(F-70) | New OEM | Contact Us | |
| 790-168059-001 | CMP | STOP WAFER ARRESTOR | New OEM | Contact Us | |
| 79-110893-00 | Concept One | LABEL,WARNING,RF,VOLT HAZ | New OEM | Contact Us | |
| 79-412684-00 | CMP | LABEL,ADHESIVE STRIPED SVID2 | New OEM | Contact Us | |
| 799-205339-001 | CMP | CPU,COMPACT,AC PWR SPLY,RLY,8KB DATA | New OEM | Contact Us | |
| 810-169214-001 | GaSonics | OEM CPU BOARD, L3510 A3010, CPS | New OEM | Contact Us | |
| 82-0052 | GaSonics | CERAMIC, ROUND | New OEM | Contact Us | |
| 853-190259-001 | CMP | ASSY, STPR MTR, ARM DRV EXT | New OEM | Contact Us | |
| 853-200192-00 | GaSonics | ASSY,CLTC,STINGER,IRIDIA | New OEM | Contact Us | |
| 853-200944-001 | CMP | KIT,REFURB,SST,ONSERT,B/S,NO FTGS/SCREWS KTI for OnSemi | New OEM | Contact Us | |
| 853-200951-001 | CMP | KIT,REFURB,PLASTIC ONSERT,BAYSEAL KTI for TI | New OEM | Contact Us | |
| 853-200974-001 | CMP | KIT,ONSERT REFURB,CUSTOMER,KT1 | New OEM | Contact Us | |
| 853-200975-001 | CMP | KIT,ONSERT REFURB,CUSTOMER,W-EPDM (W-EPDM for IFX) | New OEM | Contact Us | |
| 857-159412-001 | CMP | KIT,CUST REFURB,KEVLAR T1 BLADDER,VER 2 (Type RT1 for IFX) | New OEM | Contact Us | |
| 857-171036-001 | GaSonics | KIT,VACUUM SNSR,YASKAWA ROBOT,PEP | New OEM | Contact Us | |
| 857-203090-001 | CMP | KIT,CYLINDER,ARM ACTUATOR, 372 | New OEM | Contact Us | |
| 857-205342-001 | CMP | KIT,INSTL,CPU,COMPACT,MDL,ANALOG | New OEM | Contact Us | |
| 857-213659-001 | CMP | KIT,XDCR,PRESSURE,0-25 PSI | New OEM | Contact Us | |
| 857-215970-001 | CMP | KIT, CYL,63MM BORE W/ SENSOR | New OEM | Contact Us | |
| 857-221014-001 | Concept One | KIT,PM, REACTOR CHAMB | New OEM | Contact Us | |
| 857-221017-001 | Concept One | KIT,C2 WCVD/DCVD,CHAMBER SEALS | New OEM | Contact Us | |
| 88-0061-01 | GaSonics | LABEL, DANGER HIGH VOLTAGE | New OEM | Contact Us | |
| 89-2595 | GaSonics | PCB SENSOR BOARD | New OEM | Contact Us | |
| 90-0038-046 | GaSonics | SCREW,8-32x7/8L SLT PH,KYNAR | New OEM | Contact Us | |
| 90-1036-01 | GaSonics | PCB, MFM/MFC,INTERFACE BD | New OEM | Contact Us | |
| 90-1057 | GaSonics | PCA,A3000,LAMP FAILURE DETECTION | New OEM | Contact Us | |
| 90-1061 | GaSonics | PCA, A3000, FAIL SAFE | New OEM | Contact Us | |
| 90-1080 | GaSonics | PCA, LAMP FAILURE DETECTION | New OEM | Contact Us | |
| 90-2201 | GaSonics | PCA,PROCESS MISC INTERFACE MINI- CONTROL | New OEM | Contact Us | |
| 90-2572 | GaSonics | PCA, CONTROLLER W/LIGHT TOWER,AE2001 | New OEM | Contact Us | |
| 90-2590 | GaSonics | PCA, I/O, INTERFACE | New OEM | Contact Us | |
| 90-2618 | GaSonics | PCA, SENSOR BOARD | New OEM | Contact Us | |
| 90-2647 | GaSonics | PCA EXT BD LAMP CONTROLLER, CLEAN DL | New OEM | Contact Us | |
| 90-2665 | GaSonics | PWA, 2 STAGE EOP,DETECTOR | New OEM | Contact Us | |
| 90-2666 | GaSonics | PCA, LED DISPLAYS | CE! | New OEM | Contact Us | |
| 90-2667 | GaSonics | PCA, MEMBRANE SWITCH AND LED | New OEM | Contact Us | |
| 90-2670 | CMP | PCA, INTERFACE BOARD | CE! | New OEM | Contact Us | |
| 90-2674 | GaSonics | PCA, 5V, DC REGULATOR BOARD | New OEM | Contact Us | |
| 90-2677 | GaSonics | PCA, PLASMA FAILURE DETECTION, IRIDIA,AS | New OEM | Contact Us | |
| 90-2678 | GaSonics | PCA, DISPLAY PANEL | New OEM | Contact Us | |
| 90-2679 | GaSonics | PCA, LED AND DRIVER BOARD | New OEM | Contact Us | |
| 90-2696 | GaSonics | PWA, DC CONVERSER, RF MODULE | New OEM | Contact Us | |
| 90-2709 | GaSonics | PCA,ENHANCED 8 GAS INTERLOCK CIRCUIT,IRIDIA | New OEM | Contact Us | |
| 90-2724 | GaSonics | PCA,CURRENT SENSOR | New OEM | Contact Us | |
| 90-2737 | Gasonics | PWA, I/O JUNCTION,W/JP3 STRAIGHT CONNECTOR | New OEM | Contact Us | |
| 92-2681 | GaSonics | PIN, LIFT, ASH CHAMBER | New OEM | Contact Us |