Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 05-2733 | GaSonics | GaSonics | WELDMENT, GAS CAP GAS FEED | New OEM | Contact Us |
| 05-2762 | GaSonics | GaSonics | WELDMENT, STR SECTION ISO-80,REACTOR CENTER | New OEM | Contact Us |
| 05-2793 | GaSonics | GaSonics | ELBOW/REDUCER, 90 DEGREE, W/ SIDE PORT - WELDMENT | New OEM | Contact Us |
| 05-2854 | GaSonics | GaSonics | ELECTRODE ASSY, SIX SPOKE WELDMENT | New OEM | Contact Us |
| 05-2869 | GaSonics | GaSonics | GASLINE, GAS BOX TO PREFIRE, PEP 3010 | New OEM | Contact Us |
| 05-2905 | GaSonics | GaSonics | WELDMENT, ELECTRODE, SIX SPOKE | New OEM | Contact Us |
| 05-2911 | GaSonics | GaSonics | PLATE, TOP QUARTZ WELDMENT | New OEM | Contact Us |
| 05-2967 | GaSonics | GaSonics | FITTING, NW50, 4 IN L, W/T NW40 1 IN L | New OEM | Contact Us |
| 05-3005 | GaSonics | GaSonics | JUNCTION BOX | New OEM | Contact Us |
| 05-3011 | GaSonics | GaSonics | WELDMENT ASSY, GAS INLET/PREFIRE | New OEM | Contact Us |
| 05-3024 | GaSonics | GaSonics | TUBE, QUARTZ FUNNEL,1/2 OUTLET, | New OEM | Contact Us |
| 05-304946-00 | GaSonics | GaSonics | RETROKIT,PEP 3010A LAMP CONTROLLER,SCR BOARD, OEM | New OEM | Contact Us |
| 05-3055 | GaSonics | GaSonics | BELLOWS, LIFT PIN,DDP, WELDMENT | New OEM | Contact Us |
| 05-3059 | GaSonics | GaSonics | DOCK-PLATE, ENCL, RF | New OEM | Contact Us |
| 05-3131 | GaSonics | GaSonics | COVER WELDMENT,CHAMBER, CLEAN-DL | New OEM | Contact Us |
| 05-3173 | GaSonics | GaSonics | COVER, HOUSING, LAMP TRAY-4, DDP/DL | New OEM | Contact Us |
| 05-317883-00 | GaSonics | GaSonics | EUROTHERM UPGRADE KIT | New OEM | Contact Us |
| 05-3197 | GaSonics | GaSonics | AIR DUCT, LEFT,PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us |
| 05-3198 | GaSonics | GaSonics | AIR DUCT, RIGHT,PLASMA SOURCE,CLEAN-DL | New OEM | Contact Us |
| 05-3241 | GaSonics | GaSonics | ADAPTOR, NW40,PLASMA ENCLOSURE | New OEM | Contact Us |
| 05-3285 | GaSonics | GaSonics | WELDMENT, OUTLET,GAS BOX TO ASTEX,IRIDIA | New OEM | Contact Us |
| 05-3332 | GaSonics | GaSonics | EXTENDER, TOP COVER,SAPPHIRE PLUG | New OEM | Contact Us |
| 05-3333 | GaSonics | GaSonics | LAMP HOUSING,4-WINDOW (QUARTZ) IRIDIA | New OEM | Contact Us |
| 05-3345 | GaSonics | GaSonics | MANIFOLD ASSY, BARATRON, LEFT IRIDIA-DL | New OEM | Contact Us |
| 05-3348 | GaSonics | GaSonics | HOUSING, SLIDE | New OEM | Contact Us |
| 05-3349 | GaSonics | GaSonics | MOUNT, ACTUATOR | New OEM | Contact Us |
| 05-3362 | GaSonics | GaSonics | WELDMENT,BELLOWS AND SHAFT,CLTC,ACTUATOR | New OEM | Contact Us |
| 05-3366 | GaSonics | GaSonics | CAVITY, PLASMA SOURCE, IRIDIA-DL | New OEM | Contact Us |
| 05-3370 | GaSonics | GaSonics | LAMP HOUSING,4-WINDOWS, IRIDIA-DL | New OEM | Contact Us |
| 05-3389 | GaSonics | GaSonics | WELDMENT, HEATER PLATEN, PEP PLUS | New OEM | Contact Us |
| 05-3391 | GaSonics | GaSonics | WELDMENT, GAS LINE ASSY, ADAPTER, FLEX,PEP PLUS | New OEM | Contact Us |
| 05-3413 | GaSonics | GaSonics | WELDMENT ASSY, GAS INPUT, PEP PLUS | New OEM | Contact Us |
| 05-3499 | GaSonics | GaSonics | WELDMENT, GAS CAP,PLASMA SOURCE,IRIDIA | New OEM | Contact Us |
| 05-3519 | GaSonics | GaSonics | WELDMENT, BELLOWS FLANGE, ROTATION | New OEM | Contact Us |
| 05-3606 | GaSonics | GaSonics | PROCESS CHAMBER,WELDMENT, IRIDIA-DL | New OEM | Contact Us |
| 05-3636 | GaSonics | GaSonics | PLATEN, BRAZE,W/CLTC, 200MM,IRIDIA-DL | New OEM | Contact Us |
| 05-3718 | GaSonics | GaSonics | WELDMENT, RF DUAL PLASMA COIL | New OEM | Contact Us |
| 05-460466-00 | GaSonics | GaSonics | RETROKIT,LAMP TRAY,IRIDIA | New OEM | Contact Us |
| 05-5142-02 | GaSonics | GaSonics | HEAT BAND, 6 IN | New OEM | Contact Us |
| 06-0091 | GaSonics | GaSonics | CHAMBER,PLASMA,QUARTZ,4MM | New OEM | Contact Us |
| 06-0109 | GaSonics | GaSonics | CHAMBER,LOWER PROCESS-VHP | New OEM | Contact Us |
| 06-0121 | GaSonics | GaSonics | BOILER, EXTERNAL,VHP | New OEM | Contact Us |
| 06-0142 | GaSonics | GaSonics | QUARTZ,MIDDLE SHOWER HEAD PLATE | New OEM | Contact Us |
| 06-0152 | GaSonics | GaSonics | QTZ,SHOWER HEAD,BOTTOM,6 IN GRID | New OEM | Contact Us |
| 06-0153 | GaSonics | GaSonics | QTZ,SHOWER HEAD,BOTTOM,5 IN GRID | New OEM | Contact Us |
| 06-2431 | GaSonics | GaSonics | PIN, QTZ, COOL STA,.030 HEAD, 1.25LG | New OEM | Contact Us |
| 06-2447 | GaSonics | GaSonics | PIN, QTZ MUSHROOM HD - COOLING STATION | New OEM | Contact Us |
| 06-2475 | GaSonics | GaSonics | BALL, SAPPHIRE, 2MM (.0787) | New OEM | Contact Us |
| 06-2509 | Gasonics | Gasonics | SPACER, TOP, QUARTZ | New OEM | Contact Us |
| 06-2516 | GaSonics | GaSonics | PLATE, TOP, QUARTZ | New OEM | Contact Us |
| 06-2521 | GaSonics | GaSonics | PLATE, QUARTZ, 4.08 OD X 1.25 ID | New OEM | Contact Us |
| 06-2567 | GaSonics | GaSonics | ISOLATING PLATE,RING CARRIER | New OEM | Contact Us |
| 06-2568 | GaSonics | GaSonics | CENTERING RING, 200MM PLATEN WALL ISOLA | New OEM | Contact Us |
| 06-2592 | GaSonics | GaSonics | SHOWERHEAD, 1.83 ID,CLEAN-DL | New OEM | Contact Us |
| 06-2593 | GaSonics | GaSonics | CENTERING RING,150MM, PLATEN WALL ISOLATION | New OEM | Contact Us |
| 06-2598 | GaSonics | GaSonics | PIN, LIFT | New OEM | Contact Us |
| 06-2599 | GaSonics | GaSonics | PLATE, QTZ 4.08 OD 1.75 ID | New OEM | Contact Us |
| 06-2605 | GaSonics | GaSonics | KEY, ISOLATING PLATE TO CENTERING RING, ALUMINA | New OEM | Contact Us |
| 06-2612 | GaSonics | GaSonics | KEY, ISOLATING PLATE TO CENTERING RING | New OEM | Contact Us |
| 06-2614 | GaSonics | GaSonics | PIN, ALIGNMENT 3/16 DIA X .35 L ALUMINA | New OEM | Contact Us |
| 06-2619 | GaSonics | GaSonics | PLATE, QUARTZ,TRI, ADAPTOR | New OEM | Contact Us |
| 06-2620 | GaSonics | GaSonics | PIN, PLUG, QUARTZ | New OEM | Contact Us |
| 06-2624 | GaSonics | GaSonics | PLATE, TOP, UPPER | New OEM | Contact Us |
| 06-2625 | GaSonics | GaSonics | PLATE, BOTTOM SAPPHIRE | New OEM | Contact Us |
| 06-2626 | GaSonics | GaSonics | PLATE, TOP SAPPHIRE | New OEM | Contact Us |
| 06-2629 | GaSonics | GaSonics | PLATE, MIDDLE,SAPPHIRE | New OEM | Contact Us |
| 06-2632 | GaSonics | GaSonics | CAP, ISOLATOR, QUARTZ | New OEM | Contact Us |
| 06-2640 | GaSonics | GaSonics | SPOOL, PLASMA,PRTRSN .50 LG,3510A | New OEM | Contact Us |
| 06-2654 | GaSonics | GaSonics | ORIFICE, BOTTOM SAPPHIRE, ASTEX SAPPHIRE | New OEM | Contact Us |
| 06-2657 | GaSonics | GaSonics | ISOLATING PLATE,RING CARRIER | New OEM | Contact Us |
| 06-2679 | GaSonics | GaSonics | SPOOL, QUARTZ,PLASMA, SHORT, PEP PLUS | New OEM | Contact Us |
| 06-2694 | GaSonics | GaSonics | CHAMBER, PLASMA,QUARTZ, PEP PLUS | New OEM | Contact Us |
| 06-2696 | GaSonics | GaSonics | WINDOW, SAPPHIRE,1.25 OD X .04 THK | New OEM | Contact Us |
| 06-2697 | GaSonics | GaSonics | WINDOW, SAPPHIRE,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us |
| 06-2705 | GaSonics | GaSonics | RING, LINER, QUARTZ,ASTEX, IRIDIA-DL | New OEM | Contact Us |
| 06-2706 | GaSonics | GaSonics | COLLAR, QUARTZ,PEP PLUS | New OEM | Contact Us |
| 06-2707 | GaSonics | GaSonics | INSERT, SAPPHIRE,ASTEX | New OEM | Contact Us |
| 06-2724 | GaSonics | GaSonics | ISOLATION PLATE,RING CARRIER, 150 MM, IR | New OEM | Contact Us |
| 06-2725 | GaSonics | GaSonics | SHOWER HEAD, TUBE 1.83 ID, SAPPHIRE,IRID | New OEM | Contact Us |
| 06-2726 | GaSonics | GaSonics | SHOWER HEAD, BOTTOM,SAPPHIRE, IRIDIA-DL | New OEM | Contact Us |
| 06-2735 | GaSonics | GaSonics | TUBE, QUARTZ W/FLANGE | New OEM | Contact Us |
| 06-2751 | GaSonics | GaSonics | SHOWERHHEAD,HEMISPHERICAL,150MM,IRIDIA-DL | New OEM | Contact Us |
| 06-2753 | GaSonics | GaSonics | SAPPHIRE EOP WINDOW PEP-IRIDIA | New OEM | Contact Us |
| 06-2767 | GaSonics | GaSonics | ORIFICE, BOTTOM,.375 I.D. SAPPHIRE ASTEX | New OEM | Contact Us |
| 06-2768 | GaSonics | GaSonics | TUBE, 1.615 L,SAPPHIRE, ASTEX | New OEM | Contact Us |
| 06-2773 | Gasonics | Gasonics | QUARTZ DISTRIBUITON PLATE | New OEM | Contact Us |
| 06-2783 | GaSonics | GaSonics | SHOWERHEAD,HEMISPHERICAL,SAPPHIRE,SIERRA | New OEM | Contact Us |
| 06-2792 | Gasonics | Gasonics | QUARTZ,SLEEVE,REMOVABLE,VHP,LG NECK | New OEM | Contact Us |
| 06-2793 | GaSonics | GaSonics | WINDOW,QUARTZ,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us |
| 06-2802 | GaSonics | GaSonics | PIN, LIFT, SAPPHIRE,3.27L, IRIDIA-DL | New OEM | Contact Us |
| 0710-110959 | GaSonics | GaSonics | BAND,ROLLER 86 DUROMETER | New OEM | Contact Us |
| 1_4491 | GaSonics | GaSonics | CAP, TOP, CLTC | New OEM | Contact Us |
| 10-2001 | GaSonics | GaSonics | BELLOWS, KF50 3.25 LENGTH | New OEM | Contact Us |
| 10-358187-00 | GaSonics | GaSonics | TUBE,ASSY,PURGE VALVE | New OEM | Contact Us |
| 13-8000-008 | GaSonics | GaSonics | COUPLING,BR.MTR. | New OEM | Contact Us |
| 14138-01 | GaSonics | GaSonics | FITTING,SHOWERHEAD | New OEM | Contact Us |
| 14738-01 | GaSonics | GaSonics | BUBBLER, QUARTZ | New OEM | Contact Us |
| 15114-01 | GaSonics | GaSonics | CABLE ASSY,BUS EXPANSION | New OEM | Contact Us |
| 15115-01 | GaSonics | GaSonics | CBL ASSY,RS232-ZBOT | New OEM | Contact Us |
| 15129-01 | GaSonics | GaSonics | CABLE ASSY,DISTB-THRTL VALVE | New OEM | Contact Us |