Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 17-3104 | GaSonics | GaSonics | SPRING, COMPRESSION,.875 OD X 1.00 L,URE | New OEM | Contact Us |
| 17-3147 | GaSonics | GaSonics | RING, RETAINER,.38 DIA | New OEM | Contact Us |
| 17-3149 | GaSonics | GaSonics | RING, RETAINER,.50 DIA. | New OEM | Contact Us |
| 17-3158 | GaSonics | GaSonics | SPRING, EXTENSION | New OEM | Contact Us |
| 17-3169 | GaSonics | GaSonics | DISC, SPRING | New OEM | Contact Us |
| 17317-01 | GaSonics | GaSonics | AC POWER MODULE,AURA 3000 | New OEM | Contact Us |
| 17-3171 | GaSonics | GaSonics | CLAMP, SPLIT, HUB | New OEM | Contact Us |
| 17-3179 | Gasonics | Gasonics | CAM, FOLLOWER 5/8 DIA, HEX SKT,SEALED | New OEM | Contact Us |
| 17-3181 | GaSonics | GaSonics | RETAINER, RING,7/8DIA | New OEM | Contact Us |
| 17-3182 | GaSonics | GaSonics | RING, RETAINER 3/8 DIA, E STYLE | New OEM | Contact Us |
| 17-3184 | GaSonics | GaSonics | SPRING, COMP .180 OD X 1.38 LG | New OEM | Contact Us |
| 17-3190 | GaSonics | GaSonics | SLIDE, BLADE | New OEM | Contact Us |
| 17-3197 | Gasonics | Gasonics | RING, RETAINER, .25 DIA | New OEM | Contact Us |
| 17-3206 | GaSonics | GaSonics | SPACER, SHAFT, 1/4 | New OEM | Contact Us |
| 17-3213 | Gasonics | Gasonics | CLAMP, SPLIT HUB | New OEM | Contact Us |
| 17-3215 | GaSonics | GaSonics | RING, RETAINER, .50 DIA | New OEM | Contact Us |
| 17-3226 | GaSonics | GaSonics | SPACER, SHAFT | New OEM | Contact Us |
| 17327-01 | GaSonics | GaSonics | LAMP TRAY ASSY,WATER COOLED, 8 INCH | New OEM | Contact Us |
| 17329-01 | GaSonics | GaSonics | DOOR ASSY, CHAMBER | New OEM | Contact Us |
| 17-3382 | GaSonics | GaSonics | SPRING, COMPRESSION,.140 O.D.,.31 FREE | New OEM | Contact Us |
| 17345-01 | GaSonics | GaSonics | TOGGLE, DOOR | New OEM | Contact Us |
| 17346-01 | GaSonics | GaSonics | BRKT, PIVOT CYL | New OEM | Contact Us |
| 17346-02 | GaSonics | GaSonics | BRKT,PIVOT,CYL,LEFT | New OEM | Contact Us |
| 17347-01 | GaSonics | GaSonics | TRUNNION BLOCK DOOR TOGGLE | New OEM | Contact Us |
| 17348-01 | GaSonics | GaSonics | SHAFT, PIVOT, DOOR | New OEM | Contact Us |
| 17349-01 | GaSonics | GaSonics | SHAFT, BEARING,DOOR | New OEM | Contact Us |
| 17352-01 | GaSonics | GaSonics | ROD CLOVIS - DOOR | New OEM | Contact Us |
| 17353-01 | GaSonics | GaSonics | SHIM, DOOR | New OEM | Contact Us |
| 17356-01 | GaSonics | GaSonics | ALIGNER,WAFER 200MM | New OEM | Contact Us |
| 17357-01 | GaSonics | GaSonics | ROD,SAPPHIRE | New OEM | Contact Us |
| 17363-01 | GaSonics | GaSonics | CLAMP, FASTENER | New OEM | Contact Us |
| 17364-01 | GaSonics | GaSonics | CLAMP, SHOWERHEAD | New OEM | Contact Us |
| 17373-01 | GaSonics | GaSonics | WELDMENT, WATER COOL, UPPER,CHANNEL | New OEM | Contact Us |
| 17377-01 | GaSonics | GaSonics | Weldment, water cool, lower channel | New OEM | Contact Us |
| 17383-01 | GaSonics | GaSonics | COVER, 3 POSITION | New OEM | Contact Us |
| 17390-01 | GaSonics | GaSonics | BLOCK, INSUL, 3 POSITION | New OEM | Contact Us |
| 17-4021-01 | GaSonics | GaSonics | SPACER,3/8 ID x 9/16 OD x .06 THK,SST | New OEM | Contact Us |
| 17447-01 | GaSonics | GaSonics | ASSY,A3000,LAMP CONTROLLER | New OEM | Contact Us |
| 17-460579-00 | GaSonics | GaSonics | MOUNT,RELECTOR W/THERMOSTAT MOUNT,IRIDIA | New OEM | Contact Us |
| 17-460581-00 | GaSonics | GaSonics | MOUNT,REFLECTOR,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us |
| 17524-01 | GaSonics | GaSonics | HOLDER,SENSOR,A3000 | New OEM | Contact Us |
| 17553-01 | GaSonics | GaSonics | ELECTRODE ASSEMBLY,PREFIRE | New OEM | Contact Us |
| 17558-01 | GaSonics | GaSonics | HARNESS, WIRING/CON - WAVEGUIDE | New OEM | Contact Us |
| 17559-01 | GaSonics | GaSonics | HARNESS, WIRING - WAVEGUIDE | New OEM | Contact Us |
| 17613-01 | GaSonics | GaSonics | HARNESS,HEATER CARTRIDGE | New OEM | Contact Us |
| 17621-01 | GaSonics | GaSonics | PLATE, GAS DIST,6 IN (150MM), L3500 | New OEM | Contact Us |
| 17622-01 | GaSonics | GaSonics | PLATE,DIFFUSER-QUARTZ LAMP,4.0 IN | New OEM | Contact Us |
| 17657-01 | GaSonics | GaSonics | AC POWER MODULE-L3X00 | New OEM | Contact Us |
| 17688-01 | GaSonics | GaSonics | PLATE,GAS DIST,200MM,L3500 | New OEM | Contact Us |
| 17692-01 | GaSonics | GaSonics | OFFSET WAVEGUIDE | New OEM | Contact Us |
| 17697-01 | GaSonics | GaSonics | DISTRIBUTION-L3X00/A3000 | New OEM | Contact Us |
| 17760-01 | GaSonics | GaSonics | WAVEGUIDE, WR284,STRAIGHT, 16 IN | New OEM | Contact Us |
| 17818-02 | GaSonics | GaSonics | REFLECTOR, LAMP TRAY, (GOLD PLATED) | New OEM | Contact Us |
| 17886-01 | GaSonics | GaSonics | GAS ASSY, AP-TECH. VAL, ULTRA PURE | New OEM | Contact Us |
| 18-0271-42 | GaSonics | GaSonics | SCRW,HEX SCH, 2-56 X 3/16 L, SST | New OEM | Contact Us |
| 18-0273-42 | GaSonics | GaSonics | SCREW, PH FLHD,2-56 X 3/16 L, SST 100 DE | New OEM | Contact Us |
| 18-0281-01 | GaSonics | GaSonics | SCRW,HEX SCH, 2-56 X 1/4, BLK OX | New OEM | Contact Us |
| 18-0470-04 | GaSonics | GaSonics | SCRW,PAN, PHIL 4-40 X .438, SS | New OEM | Contact Us |
| 18-0471-00 | GaSonics | GaSonics | SCREW, HEX SCH, 4-40 X 1/8, SST | CE! | New OEM | Contact Us |
| 18-0471-01 | GaSonics | GaSonics | SCRW,HEX SCH, 4-40 X 1/4, SST | New OEM | Contact Us |
| 18-0471-02 | GaSonics | GaSonics | SCREW, HEX SCH, 4-40 X 5/16, SST | New OEM | Contact Us |
| 18-0471-03 | GaSonics | GaSonics | SCREW, HEX SCH, 4-40 X 3/8 L, SST | New OEM | Contact Us |
| 18-0471-99 | GaSonics | GaSonics | SCRW,SET, SLTD,4-40 X 3/32, CUP PT SST | New OEM | Contact Us |
| 18-0473-42S | GaSonics | GaSonics | SCRW,HEX FLHD,4-40 X 3/16 L, SST | New OEM | Contact Us |
| 18-0473-48 | GaSonics | GaSonics | 4-40 x 7/32 SK FL CS 18-8SS | New OEM | Contact Us |
| 18-0601-02 | GaSonics | GaSonics | SCRW,HEX SCH, 6-32 X 5/16 L, CPS | New OEM | Contact Us |
| 18-0671-01 | GaSonics | GaSonics | SCRW,HEX SCH, 6-32 X 1/4 L, SST | New OEM | Contact Us |
| 18-0671-10 | GaSonics | GaSonics | SCRW,HEX SCH, 6-32 X 7/8 L, SST | New OEM | Contact Us |
| 18-0673-03 | GaSonics | GaSonics | SCRW, PH FLHD, 6-32 X 3/8L, SS | New OEM | Contact Us |
| 18-0675-02 | GaSonics | GaSonics | SCREW, HEX SCH BTNHD 6-32 X 5/16 L, SST, CE! | New OEM | Contact Us |
| 18-0801-40 | GaSonics | GaSonics | SCREW, HEX SCH, 8-32 X 1-7/8, SST | New OEM | Contact Us |
| 18-0805-01 | GaSonics | GaSonics | SCRW,HEX SCH BTNHD 8-32 X 1/4 L, SST | New OEM | Contact Us |
| 18-0822-05 | GaSonics | GaSonics | SCRW,SLTD RNDHD,8-32 X 1/2 L, NYL | New OEM | Contact Us |
| 18-0870-05 | GaSonics | GaSonics | SCREW, PH PNHD, 8-32 X 1/2 L, SST | New OEM | Contact Us |
| 18-0871-07 | GaSonics | GaSonics | SCRW,HEX SCH, 8-32 X 5/8 L, SST | New OEM | Contact Us |
| 18-0879-01C | GaSonics | GaSonics | SCREW, SET, 8-32 UNC X 1/4 L, SST, CONE | New OEM | Contact Us |
| 18101-01 | GaSonics | GaSonics | ASSY,CLOSED LOOP TMEPERATURE CONTROL | New OEM | Contact Us |
| 18-1012-01 | GaSonics | GaSonics | SCREW, PH PNHD 10-32 X 1/4L BRS | New OEM | Contact Us |
| 18-1071-05 | GaSonics | GaSonics | SCRW,HEX SCH,10-32 X 1/2 L, SST | New OEM | Contact Us |
| 18-1071-07 | GaSonics | GaSonics | SCRW,SKT,HEX,10-32X.625,SS | New OEM | Contact Us |
| 18-1071-09 | GaSonics | GaSonics | SCRW,SKT,HEX,10-32x.75,SS | New OEM | Contact Us |
| 18-1071-13 | GaSonics | GaSonics | SCRW,HEX SCH,10-32 X 1 L, SST | New OEM | Contact Us |
| 18108-01 | GaSonics | GaSonics | ASSY,CLTC,AMPLIFIER MODULE | New OEM | Contact Us |
| 18151-01 | GaSonics | GaSonics | KIT, 200MM WAFERS-L3500 SYSTEMS | New OEM | Contact Us |
| 18170-01 | GaSonics | GaSonics | MANIFOLD ASSY, FILTER TO R/C | New OEM | Contact Us |
| 18-2271-05 | GaSonics | GaSonics | SCRW,HEX SCH, 1/4-20 X 1/2 L, SST | New OEM | Contact Us |
| 18-2271-09 | GaSonics | GaSonics | SCREW, HEX SCH,1/4-20 X 3/4 L, SST | New OEM | Contact Us |
| 18-2271-13 | GaSonics | GaSonics | SCREW, HEX SCH,1/4-20 X 1 L, SST | New OEM | Contact Us |
| 18-2271-29 | GaSonics | GaSonics | SCRW,HEX SCH, 1/4-20 X 2 L, SST | New OEM | Contact Us |
| 18-2271-34 | GaSonics | GaSonics | SCRW,HEX SCH,1/4-20 X 3-1/4 L, SST | New OEM | Contact Us |
| 18-2271-35 | GaSonics | GaSonics | SCREW, HEX SCH,1/4-20 X 4 L, SST | New OEM | Contact Us |
| 18-2271-43 | GaSonics | GaSonics | SCREW, HEX SCH,1/4-20 X 1 1/8 L,SST | New OEM | Contact Us |
| 18-2279-13 | GaSonics | GaSonics | SCREW, SET, HEX SCH,1/4-20 X 1 L, SST,CU | New OEM | Contact Us |
| 18-2591 | GaSonics | GaSonics | SCREW, THUMB, 8-32 X 13/16 L, SST,KNURLE | New OEM | Contact Us |
| 18-2741 | GaSonics | GaSonics | SCREW, FLTHD, SLOT 8-32 X 1in, AL | New OEM | Contact Us |
| 18-2742 | GaSonics | GaSonics | SCREW, FLTHD, SLOT 8-32 X 3/8in, AL | New OEM | Contact Us |
| 18-2800 | GaSonics | GaSonics | SCREW, PH FLHD,8-32 X 1 1/8 L, AL | New OEM | Contact Us |
| 18-2801 | GaSonics | GaSonics | SCRW,4-40 X 3/8,FLHD, SLOT, AL | New OEM | Contact Us |
| 18-2876 | GaSonics | GaSonics | SCREW,HEX SCH,1/4-20 X1/2 BRASS | New OEM | Contact Us |
| 18-2928 | GaSonics | GaSonics | SCRW,SCHD, 4-40 X 3/8 L, 18-8 SST,VENTED | New OEM | Contact Us |