Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15999-01 | GaSonics | GaSonics | EOP BOX MODIFICATION | New OEM | Contact Us |
| 16018-01 | GaSonics | GaSonics | WAFER, PLASTIC-5 INCH | New OEM | Contact Us |
| 16018-02 | GaSonics | GaSonics | WAFER,PLASTIC-6 IN | New OEM | Contact Us |
| 16018-03 | GaSonics | GaSonics | WAFER,PLASTIC-8 IN | New OEM | Contact Us |
| 16065-01 | GaSonics | GaSonics | HARNESS ASSY,LIFT SENSOR | New OEM | Contact Us |
| 16092-01 | GaSonics | GaSonics | PLATEN ASSY,MODIFIED W/CONNECTORS | New OEM | Contact Us |
| 16096-01 | GaSonics | GaSonics | CLIP,PANEL-SPRING LATCH | New OEM | Contact Us |
| 16-1007 | GaSonics | GaSonics | SCRW,SHLDR, HEX SCH, .125DIA X .250 4-40 X 5/32 L, SST | New OEM | Contact Us |
| 16-1026 | GaSonics | GaSonics | SCREW, SHOULDER,SHCS 1/4 OD X 1/4,10-32 | New OEM | Contact Us |
| 16-1037 | GaSonics | GaSonics | PLUNGER, SPRING,SHORT, M4 X 7 | New OEM | Contact Us |
| 16-1071-16 | GaSonics | GaSonics | SCREW, SHLDR, SLTD HD, .187 DIA X 1.00 | New OEM | Contact Us |
| 16-1072-05 | GaSonics | GaSonics | SCRW,SHLDR, SLTD HD, .187DIA X .313,6-32 X 3/16. SST | New OEM | Contact Us |
| 16183-01 | GaSonics | GaSonics | LOCATOR,10-32,75MM-150MM | New OEM | Contact Us |
| 16205-01 | GaSonics | GaSonics | PLATE, BOTTOM | New OEM | Contact Us |
| 16206-01 | GaSonics | GaSonics | LIFT, CHAMBER | New OEM | Contact Us |
| 16207-01 | GaSonics | GaSonics | FLANGE,PLATEN FEEDTHRU | New OEM | Contact Us |
| 16209-01 | GaSonics | GaSonics | INSULATOR,STUD | New OEM | Contact Us |
| 16210-01 | GaSonics | GaSonics | WASHER,PLATEN STUD | New OEM | Contact Us |
| 16211-01 | GaSonics | GaSonics | BRACKET,SENSOR | New OEM | Contact Us |
| 16212-01 | GaSonics | GaSonics | BOARD,SENSOR MTG. | New OEM | Contact Us |
| 16-2271-20 | GaSonics | GaSonics | SCREW, SHLDR, HEX HD,1/4 DIA X 5/8,10-32 | New OEM | Contact Us |
| 16-2371-16 | GaSonics | GaSonics | SCRW,SHLDR, .3125 .3125DIA, 1/4-20 X 1 L, SST | New OEM | Contact Us |
| 16-267179-00 | GaSonics | GaSonics | DIFFUSER,LOADLOCK,GAMMA 2100 | New OEM | Contact Us |
| 16-282340-00 | GaSonics | GaSonics | GUIDE,WAVEGUIDE,FLEX 6 IN, RIGHT | New OEM | Contact Us |
| 16335-01 | GaSonics | GaSonics | PLATE, GAST DIST 5MM 6 IN | New OEM | Contact Us |
| 16336-01 | GaSonics | GaSonics | SHELF,PLASMA COLLAR | New OEM | Contact Us |
| 16337-01 | GaSonics | GaSonics | COLLAR, QTZ, 1.25 IN HOLE | New OEM | Contact Us |
| 16337-02 | GaSonics | GaSonics | COLLAR, QTZ, 1.00 IN HOLE | New OEM | Contact Us |
| 16-351766-00 | GaSonics | GaSonics | MANF,LL,VC,2100 (GAMMA) | New OEM | Contact Us |
| 16358-01 | GaSonics | GaSonics | SPOOL,QUARTZ | New OEM | Contact Us |
| 16359-01 | GaSonics | GaSonics | CHAMBER,QUARTZ PLASMA | New OEM | Contact Us |
| 16363-01 | GaSonics | GaSonics | PWB, INPUT/OUTPUT | New OEM | Contact Us |
| 16417-01 | GaSonics | GaSonics | BONDING BRAID-RF,RF SHIELD | New OEM | Contact Us |
| 16498-01 | GaSonics | GaSonics | PWA, DISPLAY DRIVER | New OEM | Contact Us |
| 16531-01 | GaSonics | GaSonics | ROD,DIFFUSER-QUARTZ LAMP | New OEM | Contact Us |
| 16532-01 | GaSonics | GaSonics | PLATE,QUARTZ LAMP | New OEM | Contact Us |
| 16534-01 | GaSonics | GaSonics | BRKT, LAMP-HEATER | New OEM | Contact Us |
| 16535-01 | GaSonics | GaSonics | GUIDE, PIN | New OEM | Contact Us |
| 16756-01 | GaSonics | GaSonics | I/O BOARD, PAL-I ADDR BASE 380 | New OEM | Contact Us |
| 16757-01 | GaSonics | GaSonics | I/O BOARD,PAL-2,ADDR BASE 380 | New OEM | Contact Us |
| 16772-01 | GaSonics | GaSonics | MICROWAVE ENCLOSURE,L3500 | New OEM | Contact Us |
| 16777-01 | GaSonics | GaSonics | REAR COVER, ENCLOSURE | New OEM | Contact Us |
| 16783-01 | GaSonics | GaSonics | CHAMBER,PLASMA,QUARTZ | New OEM | Contact Us |
| 16784-01 | GaSonics | GaSonics | SPOOL,QUARTZ | New OEM | Contact Us |
| 16785-01 | GaSonics | GaSonics | BODY,FITTING,ULTRA-TORR | New OEM | Contact Us |
| 16788-01 | GaSonics | GaSonics | COVER PLATE,SWITCH PANEL | New OEM | Contact Us |
| 16797-01 | GaSonics | GaSonics | WELDMENT, GAS INPUT | New OEM | Contact Us |
| 16875-01 | Gasonics | Gasonics | CABLE ASSY_XHST NTRLK SW, L3300 | New OEM | Contact Us |
| 16889-01 | GaSonics | GaSonics | CABLE ASSY, DIST BD J1 - GEN | New OEM | Contact Us |
| 16893-01 | GaSonics | GaSonics | LEVER,DOOR | New OEM | Contact Us |
| 16894-01 | GaSonics | GaSonics | BLOCK,LEVER | New OEM | Contact Us |
| 16894-02 | GaSonics | GaSonics | BLOCK, LEVER | New OEM | Contact Us |
| 16898-01 | GaSonics | GaSonics | LOCATOR,WAFER 8 IN | New OEM | Contact Us |
| 16902-01 | GaSonics | GaSonics | HARNESS ASSY,KEYPAD-RECVR BD | New OEM | Contact Us |
| 16968-01 | GaSonics | GaSonics | SWITCH ASSY,HALL EFFECT-DR OPN | New OEM | Contact Us |
| 16969-01 | GaSonics | GaSonics | SWITCH ASSY,HALL EFFECT-DR CLS | New OEM | Contact Us |
| 16970-01 | GaSonics | GaSonics | SENSOR ASSY,COOLING STATION | New OEM | Contact Us |
| 17-0118-01 | GaSonics | GaSonics | RING,RETAINING | New OEM | Contact Us |
| 17-0170 | GaSonics | GaSonics | CLAMP,BODY,2 IN OD TUBE | New OEM | Contact Us |
| 17-0171 | GaSonics | GaSonics | CLAMP,PLATE COVER,2 IN OD TUBE | New OEM | Contact Us |
| 17-0247 | GaSonics | GaSonics | STANDOFF, 6-32X1/2, ALUM, HEX, M-F | New OEM | Contact Us |
| 17-0248 | GaSonics | GaSonics | SPRING,COMPRESS.,SS,3/8 FREE LGTH..032WIRE | New OEM | Contact Us |
| 17-0249 | GaSonics | GaSonics | SPACER, 1/4 OD,.166+.010 -.000ID,1 5/16LG,ALUM | New OEM | Contact Us |
| 17057-01 | GaSonics | GaSonics | SHIELD,TOP,ENCLOSURE | New OEM | Contact Us |
| 17060-01 | GaSonics | GaSonics | PWR SPLY,HG LAMP,120 VAC | New OEM | Contact Us |
| 17061-01 | GaSonics | GaSonics | TUNER,3 STUB,CPR 284 FLANGE | New OEM | Contact Us |
| 17062-01 | GaSonics | GaSonics | COVER,SPOOL,FRONT | New OEM | Contact Us |
| 17063-01 | GaSonics | GaSonics | COVER,SPOOL,REAR | New OEM | Contact Us |
| 17065-01 | GaSonics | GaSonics | HOLDER,LAMP,UV NO OZONE | New OEM | Contact Us |
| 17069-01 | GaSonics | GaSonics | PANEL,DISTR BOARD-L3300/2 | New OEM | Contact Us |
| 17114-01 | GaSonics | GaSonics | SWITCH ASSY,CASSETTE | New OEM | Contact Us |
| 17-2256 | GaSonics | GaSonics | SLIDE, CHASSIS, 14 IN L, BALL BEARING WITHOUT GREASE | New OEM | Contact Us |
| 17-2566 | GaSonics | GaSonics | CLAMP, 3 IN OD PIPE, POLYPROPYLENE | New OEM | Contact Us |
| 17-258841-00 | GaSonics | GaSonics | STRAP,AL1100-O,RF PWR | New OEM | Contact Us |
| 17-2656 | GaSonics | GaSonics | CLAMP, DOUBLE CLAW,ISO-80, SS | New OEM | Contact Us |
| 17-2684 | GaSonics | GaSonics | MOUNTING,FINGER-FLEX, SHOCK,BUSHING,LOWER, LG. | New OEM | Contact Us |
| 17-2685 | GaSonics | GaSonics | MOUNTING,FINGER-FLEX,SHOCK,RING, UPPER | New OEM | Contact Us |
| 17-2722 | GaSonics | GaSonics | BEARING BALL .875DIA | New OEM | Contact Us |
| 17-2723 | GaSonics | GaSonics | RING, RETAINING,.875 DIA. | New OEM | Contact Us |
| 17-2724 | GaSonics | GaSonics | RING, RETAINING .19 DIA. | New OEM | Contact Us |
| 17-2725 | GaSonics | GaSonics | SPRING,.360 DIA X 2.00 LG X .055 THK,S | New OEM | Contact Us |
| 17-2727 | GaSonics | GaSonics | PIN, DOWEL, 0.187 X .625 LG | New OEM | Contact Us |
| 17-2730 | GaSonics | GaSonics | FLAT WIRE COMPRESSION SPRING | New OEM | Contact Us |
| 17-2736 | Gasonics | Gasonics | BEARING, LINEAR | New OEM | Contact Us |
| 17-2739 | GaSonics | GaSonics | SPRING, WIRE, SS, 1.22 X 1.25 LG X .112 | New OEM | Contact Us |
| 17-274037-00 | GaSonics | GaSonics | FLAG,BLADE,BOTTOM,G2100 | New OEM | Contact Us |
| 17-2747 | GaSonics | GaSonics | PIN, DOWEL, .125 DIA X .312 L, SST | New OEM | Contact Us |
| 17280-01 | GaSonics | GaSonics | VALVE GATE-910X VER | New OEM | Contact Us |
| 17-2846 | GaSonics | GaSonics | CLAMP, WAVEGUIDE, OVER CENTER, SST | New OEM | Contact Us |
| 17289-01 | GaSonics | GaSonics | PIN,QUARTZ,LIFT,PLATEN,75MM WAFERS | New OEM | Contact Us |
| 17291-01 | GaSonics | GaSonics | PIN,QTZ,COOL STAT,10-32 HOLE,.060 HEAD | New OEM | Contact Us |
| 17291-02 | GaSonics | GaSonics | PIN,QTZ,COOL STAT,10-32 HOLE,.030 HEAD | New OEM | Contact Us |
| 17299-01 | GaSonics | GaSonics | LAMP PLATE,DIP BRAZED A-3000 | New OEM | Contact Us |
| 17-3020 | GaSonics | GaSonics | CLAMP, WAVEGUIDE,WR284, SST | New OEM | Contact Us |
| 17302-01 | GaSonics | GaSonics | WELDMENT,TOP,SHOWERHEAD A3000 | New OEM | Contact Us |
| 17-3029 | GaSonics | GaSonics | SLIDE, LINEAR, CLTC | New OEM | Contact Us |
| 17303-01 | Gasonics | Gasonics | PLATE,MIDDLE,SHOWERHEAD A3000 | New OEM | Contact Us |
| 17304-01 | GaSonics | GaSonics | SHOWERHEAD,BOTTM,WELDMNT A3000 | New OEM | Contact Us |
| 17-3072 | GaSonics | GaSonics | SPRING, CLTC, LOCK,1.90 L, .188 O.D.,SST | New OEM | Contact Us |
| 17-3073 | GaSonics | GaSonics | SPRING, COMPRESSION,.240 OD X .75 L X .016 WIRE DIA, SS | New OEM | Contact Us |