Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 02-352037-00/RW | GaSonics | GaSonics | ASSY,TC MODULE,TYPE K,200MM - Customer Core Required | New OEM | Contact Us |
| 02-3567 | GaSonics | GaSonics | COVER, JUNCTION BOX | New OEM | Contact Us |
| 02-3573 | GaSonics | GaSonics | PLATE, JUNCTION BOX, GROMMENT | New OEM | Contact Us |
| 02-3574 | GaSonics | GaSonics | BRACKET, JUNCTION BOX | New OEM | Contact Us |
| 02-3659 | GaSonics | GaSonics | COVER, SPOOL, RIGHT TAB, INTERLOCK | New OEM | Contact Us |
| 02-3660 | GaSonics | GaSonics | COVER, SPOOL, LEFT TAB, INTERLOCK | New OEM | Contact Us |
| 02-3696 | GaSonics | GaSonics | PANEL, PLASMA RIGHT CHAMBER, ACCESS | New OEM | Contact Us |
| 02-3697 | GaSonics | GaSonics | COVER, REAR ACCESS GAS INPUT BUBBLER | New OEM | Contact Us |
| 02-3706 | GaSonics | GaSonics | PANEL PLASMA,LEFT CHAMBER ACCESS | New OEM | Contact Us |
| 02-377012-00 | GaSonics | GaSonics | ASSY,150MM CLTC MODULE,.005TC,TYPE K,A1 | New OEM | Contact Us |
| 02-377012-00/RW | GaSonics | GaSonics | ASSY,150MM CLTC MODULE,.005"TC,TYPE K,A1-RW CUSTOMER CORE | New OEM | Contact Us |
| 02-3783 | GaSonics | GaSonics | COVER, SPOOL,VENTED REAR, L3510 | New OEM | Contact Us |
| 02-3949 | GaSonics | GaSonics | SUPPORT, SPOOL, LEFT PLASMA ENCLOSURE | New OEM | Contact Us |
| 02-3950 | GaSonics | GaSonics | ENCLOSURE SPOOL RIGHT | New OEM | Contact Us |
| 02-3994 | GaSonics | GaSonics | REFLECTOR,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us |
| 02-3995 | GaSonics | GaSonics | SHIELD, LAMP TRAY | New OEM | Contact Us |
| 02-4017 | GaSonics | GaSonics | SHIELD, REAR RIGHT,#4 BRUSHED | New OEM | Contact Us |
| 02-4020 | GaSonics | GaSonics | PANEL, LEFT, #4 BRUSHED | New OEM | Contact Us |
| 02-4025 | GaSonics | GaSonics | COVER, MONITOR DISPLAY, BOTTOM | New OEM | Contact Us |
| 02-4026 | GaSonics | GaSonics | PANEL, RIGHT, #4 BRUSHED | New OEM | Contact Us |
| 02-4028 | GaSonics | GaSonics | POST, CENTER DIVIDER, SMIF ARM | New OEM | Contact Us |
| 02-4124 | GaSonics | GaSonics | REFLECTOR, W/THERMOSTAT MOUNT LAMP TRAY | New OEM | Contact Us |
| 02-4136 | GaSonics | GaSonics | ENCLOSURE, SUPPORT, SPOOL, RIGHT, PEP PLU | New OEM | Contact Us |
| 02-4172 | GaSonics | GaSonics | INSERT, ALUM, ASTEX APPLICATOR | New OEM | Contact Us |
| 02-4281 | GaSonics | GaSonics | BLADE, ATM ROBOT | New OEM | Contact Us |
| 02-4282 | GaSonics | GaSonics | COVER, TUBE | New OEM | Contact Us |
| 02-4286 | GaSonics | GaSonics | COVER, ATM ROBOT | New OEM | Contact Us |
| 02-4483 | GaSonics | GaSonics | STRAP, RF, 150MM,IRIDIA-DL | New OEM | Contact Us |
| 02-4539 | GaSonics | GaSonics | BRACKET, SKIRT OUTER SLIP, NOVELLUS PAIN | New OEM | Contact Us |
| 02-4591 | GaSonics | GaSonics | WSHR,BEARING, BLADE | New OEM | Contact Us |
| 02-4763 | GaSonics | GaSonics | BRKT,MOUNTING,MFC | New OEM | Contact Us |
| 03-00143-01 | GaSonics | GaSonics | CABLE ASSY,CA96,OEM,50 | New OEM | Contact Us |
| 03-164905-01 | GaSonics | GaSonics | ASSY, CABLE, HEATER,26 IN. | New OEM | Contact Us |
| 03-164905-02 | GaSonics | GaSonics | ASSY, CABLE, HEATER,27 IN | New OEM | Contact Us |
| 03-171851-00 | GaSonics | GaSonics | CABLE ASSY THERMOSTAT | New OEM | Contact Us |
| 03-178114-00 | GaSonics | GaSonics | CBL ASSY,JMP,PWR,HTR 5,G 2100 | New OEM | Contact Us |
| 03-178114-03 | GaSonics | GaSonics | CBL ASSY,JMP,PWR,HTR 2,G 2100 | New OEM | Contact Us |
| 03-178115-00 | GaSonics | GaSonics | HARN ASSY,SINGLE STAGE,HEATER,G2100 | New OEM | Contact Us |
| 03-2000-01 | GaSonics | GaSonics | TBG, TEFLON, HIPRESS | New OEM | Contact Us |
| 03-2502 | GaSonics | GaSonics | HOSE, FLEX, LITE 2 ID HIGH TEMP | New OEM | Contact Us |
| 03-2530 | GaSonics | GaSonics | WL PROTEUS UNIT TO TEE | New OEM | Contact Us |
| 03-2557 | GaSonics | GaSonics | TUBE, COOLING BLK UPR EXIT FTG. 90 DEG | New OEM | Contact Us |
| 03-2579 | GaSonics | GaSonics | COIL, COOLING, LAMP TRAY | New OEM | Contact Us |
| 03-262022-00 | GaSonics | GaSonics | CBL ASSY,CONTROL,MW CONTROLLER TO GENERATOR,140,RFL POWER | New OEM | Contact Us |
| 03-262226-00 | GaSonics | GaSonics | CBL ASSY,RF MODULE 3 INTERLOCKS,G2100 | New OEM | Contact Us |
| 03-2630 | GaSonics | GaSonics | WATER LINE, QUICK DISC-TEE | New OEM | Contact Us |
| 03-264240-00 | GaSonics | GaSonics | CBL ASSY,GATE CLAM RELEASE SNS,G2100 | New OEM | Contact Us |
| 03-2655 | GaSonics | GaSonics | TUBING, SILICONE,.250 I.D. X .530 O.D. | New OEM | Contact Us |
| 03-2656 | GaSonics | GaSonics | TUBING, POLY 4MM O.D. X 2.5 MM ID; BLUE | New OEM | Contact Us |
| 03-266892-03 | GaSonics | GaSonics | CBL ASSY,GATE DN SNS,G2100 | New OEM | Contact Us |
| 03-267737-00 | GaSonics | GaSonics | CBL ASSY,RF MODULE INTERLOCKS RF3,G2100 | New OEM | Contact Us |
| 03-269456-00 | GaSonics | GaSonics | CBL ASSY,MAGNETIC PISTON,SENSOR,16,DOOR | New OEM | Contact Us |
| 03-269457-00 | GaSonics | GaSonics | CBL ASSY,MAGNETIC PISTON,SENSOR,19,DOOR | New OEM | Contact Us |
| 03-277387-00 | GaSonics | GaSonics | CBL ASSY,DC PWR,LONGVIEW | New OEM | Contact Us |
| 03-357307-00 | GaSonics | GaSonics | CBL ASSY,HEATER CARTRIDGE,#10,33 IN | New OEM | Contact Us |
| 03470-01 | GaSonics | GaSonics | CAPACITOR ASSY INPUT 702 | New OEM | Contact Us |
| 03471-01 | GaSonics | GaSonics | MOTOR ASSY AUTOMATCH INPUT | New OEM | Contact Us |
| 03-6007-01 | GaSonics | GaSonics | TBG,FLEXLINE 8IN | New OEM | Contact Us |
| 04-0050 | GaSonics | GaSonics | TUBE PLASMA CERAMIC (8.660 LG) | New OEM | Contact Us |
| 04-2420 | GaSonics | GaSonics | HEATER, 100 W,120 V,3/8 DIA. X 7.38 L,96 IN LEAD | New OEM | Contact Us |
| 04-264423-00 | GaSonics | GaSonics | CABLE KIT,HEATER,2100 | New OEM | Contact Us |
| 04-264530-00 | GaSonics | GaSonics | PM KIT,L3510 CONSUMABLE,ST CATANIA,L3510 | New OEM | Contact Us |
| 04-264531-00 | GaSonics | GaSonics | PM KIT,QUARTZ CONSUMABLE,ST CATANIA,L351 | New OEM | Contact Us |
| 04-266798-00 | GaSonics | GaSonics | KIT, S/W, L3510, V7.50, REL | New OEM | Contact Us |
| 04-266866-00 | GaSonics | GaSonics | KIT,S/W,L3510,SMIF, V1.50,REL | New OEM | Contact Us |
| 04-268489-00 | Gasonics | Gasonics | KIT,S/W,PEP,V4.50,EPROM SET | New OEM | Contact Us |
| 04-279926-00 | GaSonics | GaSonics | KIT,POWER SUPPLY REPLACEMENT,200W,5V,24V | New OEM | Contact Us |
| 04-304988-00 | GaSonics | GaSonics | KIT,INSTALLATION,RF GEN, 5KW, | New OEM | Contact Us |
| 04-305036-00 | GaSonics | GaSonics | KIT,PEP SCR BOARD UPGRADE | New OEM | Contact Us |
| 04-321956-00 | GaSonics | GaSonics | KIT,WET IRIDIA SPRING DL | New OEM | Contact Us |
| 04-321959-00 | GaSonics | GaSonics | KIT,STANDARD SPARES IRIDIA DL | New OEM | Contact Us |
| 04-321972-00 | GaSonics | GaSonics | KIT,MAJOR QUARTZ PEP3510 | New OEM | Contact Us |
| 04-375970-00 | GaSonics | GaSonics | KIT,SWITCH,HALL EFFECT,L3510 | New OEM | Contact Us |
| 04-412392-00 | GaSonics | GaSonics | DISPLAY,OPEN FRAME LCD TOUCH,15",30W,100 | New OEM | Contact Us |
| 04416-01 | GaSonics | GaSonics | MOTOR ASSY OUTPUT DRIVE | New OEM | Contact Us |
| 04440-01 | GaSonics | GaSonics | CAPACITOR ASSY,AUTOMATCH OUTPUT | New OEM | Contact Us |
| 04-460796-00 | GaSonics | GaSonics | KIT,LAMP TRAY,IRIDIA DL | New OEM | Contact Us |
| 04-461905-00 | GaSonics | GaSonics | ASSY,LAMP HOLDER,IRIDIA-DL | New OEM | Contact Us |
| 04-719409-01 | GaSonics | GaSonics | SENSOR,FLOW,2.5GPM | New OEM | Contact Us |
| 04-8004-01 | GaSonics | GaSonics | WET WRAP,1/4 IN T,2 FT X3 FT | New OEM | Contact Us |
| 04-8005-00 | GaSonics | GaSonics | KAOWOOL,CERAMIC FIBRE(ISSUE 25 LB INCREM | New OEM | Contact Us |
| 05-0127 | GaSonics | GaSonics | WELDMENT,ELECTRODE ASSY-L3500 | New OEM | Contact Us |
| 05-0130 | GaSonics | GaSonics | WELDMENT,TEE,PRESSURE GUAGE | New OEM | Contact Us |
| 05-0132 | GaSonics | GaSonics | WELDMENT,ADAPTER,BELLOWS,FLANGEE | New OEM | Contact Us |
| 05-0153 | GaSonics | GaSonics | ASSY,DOOR,BEARING PLATE,TWO PIECE | New OEM | Contact Us |
| 05-0234 | GaSonics | GaSonics | FLANGE, PLATEN FEEDTHRU, ALUM | New OEM | Contact Us |
| 05-0236 | GaSonics | GaSonics | WELDMENT, EMI SHIELD | New OEM | Contact Us |
| 05-161155-00 | GaSonics | GaSonics | KIT,RETROFIT,ENHANCED PLATEN,IRIDIA-DL | New OEM | Contact Us |
| 05-162425-00 | GaSonics | GaSonics | KIT, MAGNETRON, 2 KW POWER HEAD, AIXCON, | New OEM | Contact Us |
| 05-175653-00 | GaSonics | GaSonics | RETROFIT KIT,POWER CABLE, PCM AC,LEFT | New OEM | Contact Us |
| 05-175654-00 | GaSonics | GaSonics | RETROFIT KIT,POWER CABLE,PCM AC, RIGHT | New OEM | Contact Us |
| 05-176061-00 | GaSonics | GaSonics | RETROKIT,J1-P1 UPGRADE,IRIDIA DL | New OEM | Contact Us |
| 05-2399 | GaSonics | GaSonics | WELDMENT, STR SECTION, ISO80, RECT CENTER | New OEM | Contact Us |
| 05-2576 | GaSonics | GaSonics | WELDMENT, ISO VALVE XDUCER ASSY | New OEM | Contact Us |
| 05-2646 | GaSonics | GaSonics | WELDMENT,FRONT PANEL, TOP SUPPORT | New OEM | Contact Us |
| 05-268596-00 | GaSonics | GaSonics | RETROFIT KIT,L3510/A3010,I/O BOARD | New OEM | Contact Us |
| 05-2701 | GaSonics | GaSonics | WELDMENT ASSY, GAS INPUT | New OEM | Contact Us |
| 05-2704 | GaSonics | GaSonics | WELDMENT, SPRT BRK,VAC | New OEM | Contact Us |
| 05-2714 | GaSonics | GaSonics | WELDMENT, HEATER PLATEN | New OEM | Contact Us |
| 05-2716 | GaSonics | GaSonics | BRACKET, SUPPORT VACUUM EXHAUST | New OEM | Contact Us |