Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 01-2600 | GaSonics | GaSonics | LOCATOR, CASSETTE,REAR-FLUOROWARE #PA192-8H-XXX | New OEM | Contact Us |
| 01-2715 | GaSonics | GaSonics | STAND OFF, HEAT AND COOL PLATEN, 6 IN | New OEM | Contact Us |
| 01-2716 | Gasonics | Gasonics | PIN LIFTER, TEFLON COATED | New OEM | Contact Us |
| 01-2718 | GaSonics | GaSonics | FERRULE,ULTRA-TORR, PLASMA ENCLOSURE | New OEM | Contact Us |
| 01-2719 | GaSonics | GaSonics | NUT, ULTRA-TORR,PLASMA ENCLOSURE | New OEM | Contact Us |
| 01-2757 | GaSonics | GaSonics | HOLDER, LAMP,PLASMA ENCLOSURE | New OEM | Contact Us |
| 01-2819 | GaSonics | GaSonics | LIMIT PLATE | New OEM | Contact Us |
| 01-2830 | GaSonics | GaSonics | HOLDER, SPRING | New OEM | Contact Us |
| 01-2831 | GaSonics | GaSonics | ROD CLEVIS | New OEM | Contact Us |
| 01-2832 | GaSonics | GaSonics | HOLDER, PISTON | New OEM | Contact Us |
| 01-2835 | GaSonics | GaSonics | PIN, DOWEL, .187 DIA X .75 L, W/4-40 X .25 DP | New OEM | Contact Us |
| 01-2837 | GaSonics | GaSonics | SHOCK ABSORBER,.827 DIA, .40 ID,GREEN | New OEM | Contact Us |
| 01-2838 | Gasonics | Gasonics | SHOCK ABSORBER,I.D., .50 | New OEM | Contact Us |
| 01-2839 | GaSonics | GaSonics | PIN, 1.38 LG | New OEM | Contact Us |
| 01-2841 | GaSonics | GaSonics | PIN, .187 DIA X 2.484 LG, SST | New OEM | Contact Us |
| 01-2842 | GaSonics | GaSonics | PIN, O-RING | New OEM | Contact Us |
| 01-2843 | GaSonics | GaSonics | PIN, .187 DIA X 1.453 L, SS | New OEM | Contact Us |
| 01-2844 | GaSonics | GaSonics | PIN, SPRING | New OEM | Contact Us |
| 01-2845 | GaSonics | GaSonics | PIN, BEARING | New OEM | Contact Us |
| 01-2847 | GaSonics | GaSonics | CAM, BEARING | New OEM | Contact Us |
| 01-2851 | GaSonics | GaSonics | DISC, BEARING SHAFT | New OEM | Contact Us |
| 01-2852 | GaSonics | GaSonics | SHAFT, BEARING .50 DIA X 5.715 L, SS | New OEM | Contact Us |
| 01-2853 | GaSonics | GaSonics | HOUSING, BEARING | New OEM | Contact Us |
| 01-2857 | GaSonics | GaSonics | BASE, SPRING | New OEM | Contact Us |
| 01-2858 | Gasonics | Gasonics | HOLDER, PISTON BOTTOM | New OEM | Contact Us |
| 01-2859 | GaSonics | GaSonics | SUPPORT, SHAFT | New OEM | Contact Us |
| 01-2871 | GaSonics | GaSonics | DOOR, PROCESS CHAMBER, 3510A | New OEM | Contact Us |
| 01-2881 | GaSonics | GaSonics | SHIELD, EMI, LAMP HOLDER, UV LAMP | New OEM | Contact Us |
| 01-2895 | GaSonics | GaSonics | LIFTER ARM, RIGHT REAR | New OEM | Contact Us |
| 01-2897 | GaSonics | GaSonics | LIFTER ARM, LEFT REAR | New OEM | Contact Us |
| 01-2966 | GaSonics | GaSonics | KNOB KNURLED | New OEM | Contact Us |
| 01-3047 | GaSonics | GaSonics | SPOOL, CLAMP | New OEM | Contact Us |
| 01-3048 | GaSonics | GaSonics | HOUSING, SPOOL | New OEM | Contact Us |
| 01-3049 | GaSonics | GaSonics | SPOOL | New OEM | Contact Us |
| 01-3065 | GaSonics | GaSonics | PIN PUSH LIFT ALIGNMENT PLATE | New OEM | Contact Us |
| 01-3066 | GaSonics | GaSonics | ROD ACTUATING ALIGNMENT PLATE | New OEM | Contact Us |
| 01-3084 | GaSonics | GaSonics | BLOCK, REAR ALIGN,CASS. PLATFORM,RED. LE | New OEM | Contact Us |
| 01-3107 | GaSonics | GaSonics | ADAPTER PLATE,PRESSURE RELIEF | New OEM | Contact Us |
| 01-3112 | GaSonics | GaSonics | LOCATOR, WAFER SHARP ANGLE | New OEM | Contact Us |
| 01-3113 | GaSonics | GaSonics | LOCATOR, WAFER, 8 IN SHARP ANGLE, PLATEN | New OEM | Contact Us |
| 01-3188 | GaSonics | GaSonics | WASHER PLATE, SPOOL | New OEM | Contact Us |
| 01-3241 | GaSonics | GaSonics | LOCATOR, CASSETTE ALIGN, REAR,PA182-60MC-06XX | New OEM | Contact Us |
| 01-3242 | Gasonics | Gasonics | LOCATOR,CASSETTE ALIGN, FRONT, MTG | New OEM | Contact Us |
| 01-3316 | GaSonics | GaSonics | VIEW PORT DOOR | New OEM | Contact Us |
| 01-3394 | GaSonics | GaSonics | PIN, LIFT, COOLING STATION | New OEM | Contact Us |
| 01-3409 | GaSonics | GaSonics | PAD, THERMOCOUPLE | New OEM | Contact Us |
| 01-3422 | GaSonics | GaSonics | MANIFOLD COOLING PEP 3010 | New OEM | Contact Us |
| 01-3457 | GaSonics | GaSonics | TRAVEL LINK, LIFT TILT | New OEM | Contact Us |
| 01-3458 | GaSonics | GaSonics | BASE, LIFT/TILT | New OEM | Contact Us |
| 01-3461 | GaSonics | GaSonics | CAM ARM, LIFT TILT | New OEM | Contact Us |
| 01-3462 | GaSonics | GaSonics | SHAFT, CAM | New OEM | Contact Us |
| 01-3464 | GaSonics | GaSonics | SHAFT, SUPPORT CAM,MECHANISM | New OEM | Contact Us |
| 01-3667 | GaSonics | GaSonics | HOLDER, PLASMA DETECTOR, CLEAN-DL | New OEM | Contact Us |
| 01-3800 | GaSonics | GaSonics | CAP, LOCK, BUTTON TOP | New OEM | Contact Us |
| 01-3802 | GaSonics | GaSonics | BLOCK, LOCK | New OEM | Contact Us |
| 01-3806 | GaSonics | GaSonics | CLAMP, GAS-INLET | New OEM | Contact Us |
| 01-3831 | GaSonics | GaSonics | FASTENER .25 CLAMP | New OEM | Contact Us |
| 01-3903 | GaSonics | GaSonics | BUTTON, LOCATOR, CASSETTE PLATE | New OEM | Contact Us |
| 01-3924 | GaSonics | GaSonics | WAFER SUPPORT 8 IN | New OEM | Contact Us |
| 01-3943 | GaSonics | GaSonics | PLATE, ADAPTOR, AL | New OEM | Contact Us |
| 01-3944 | GaSonics | GaSonics | FLANGE, AL, PRESSURE PROCESS CHAMBER | New OEM | Contact Us |
| 01-3999 | GaSonics | GaSonics | PLATE, SUPPORT | New OEM | Contact Us |
| 01-4001 | GaSonics | GaSonics | CHAMBER, BOTTOM, DDP, PEP | New OEM | Contact Us |
| 01-4012 | GaSonics | GaSonics | BLOCK, INSULATING, 2 POSITION | New OEM | Contact Us |
| 01-4016 | GaSonics | GaSonics | COVER, 2 POSITION, BLOCK, BOTTOM | New OEM | Contact Us |
| 01-4043 | GaSonics | GaSonics | CLAMP, NUT | New OEM | Contact Us |
| 01-4044 | GaSonics | GaSonics | SPACER,NUT, MATCHED SET | New OEM | Contact Us |
| 01-4058 | GaSonics | GaSonics | FLANGE | New OEM | Contact Us |
| 01-4060 | GaSonics | GaSonics | ADAPTOR LIFT PIN, DDP | New OEM | Contact Us |
| 01-4068 | GaSonics | GaSonics | GUIDE BUSHING | New OEM | Contact Us |
| 01-4075 | GaSonics | GaSonics | HOLLOW PIN-RETAINER | New OEM | Contact Us |
| 01-4076 | GaSonics | GaSonics | CLAMP, FEED-THRU | New OEM | Contact Us |
| 01-4096 | GaSonics | GaSonics | STRAP, RF PEP DDP | New OEM | Contact Us |
| 01-4122 | GaSonics | GaSonics | SUPPORT, SPOSUPPORT, SPOOL, | New OEM | Contact Us |
| 01-4123 | GaSonics | GaSonics | CLAMP, SHIELD, RF, HOSE | New OEM | Contact Us |
| 01-4282 | GaSonics | GaSonics | BASE, BRAZE PLATEN | New OEM | Contact Us |
| 01-4323 | GaSonics | GaSonics | COVER TOP PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us |
| 01-4327 | GaSonics | GaSonics | CAVITY, PLASMA SOURCE, CLEAN-DL | New OEM | Contact Us |
| 01-4328 | GaSonics | GaSonics | PLATE, SUPPORT, CLTC COMPATIBLE | New OEM | Contact Us |
| 01-4334 | GaSonics | GaSonics | SHAFT, LIFT PIN,CLTC COMPATIBLE | New OEM | Contact Us |
| 01-4336 | GaSonics | GaSonics | BLOCK, TRAVEL ADJUSTER | New OEM | Contact Us |
| 01-4337 | GaSonics | GaSonics | PLATE, ACTUATOR,IRIDIA-DL | New OEM | Contact Us |
| 01-4338 | GaSonics | GaSonics | NUT, ACTUATOR EXTENSION | New OEM | Contact Us |
| 01-4339 | GaSonics | GaSonics | NUT, 3MM QUARTZ SEAL | New OEM | Contact Us |
| 01-4340 | GaSonics | GaSonics | BRACKET VERTICAL SUPPORT | New OEM | Contact Us |
| 01-4418 | GaSonics | GaSonics | RESTRICTOR, FLOW,CHAMBER, CLEAN-DL | New OEM | Contact Us |
| 01-4425 | GaSonics | GaSonics | STOP, ADJUSTABLE,7/16 | New OEM | Contact Us |
| 01-4488 | GaSonics | GaSonics | NUT, CAP, CLTC | New OEM | Contact Us |
| 01-4491 | GaSonics | GaSonics | CAP, TOP, CLTC | New OEM | Contact Us |
| 01-4500 | GaSonics | GaSonics | RING, LIFT, LOCKING | New OEM | Contact Us |
| 01-4552 | GaSonics | GaSonics | BEARING, LINEAR | New OEM | Contact Us |
| 01-4590 | GaSonics | GaSonics | RETAINER, LAMP TRAY,4 WINDOWS | New OEM | Contact Us |
| 01-4611 | GaSonics | GaSonics | PLATE, MOUNTING ACTUATOR, IRIDIA | New OEM | Contact Us |
| 01-4695 | GaSonics | GaSonics | PLATE, CONNECTOR | New OEM | Contact Us |
| 01-4697 | GaSonics | GaSonics | PLATE, COUPLING | New OEM | Contact Us |
| 01-4701 | GaSonics | GaSonics | BOLT, COUPLING PLATE | New OEM | Contact Us |
| 01-4709 | GaSonics | GaSonics | FLANGE, CLTC FEED-THRU, CHAMBER,IRIDIA-D | New OEM | Contact Us |
| 01-4713 | GaSonics | GaSonics | SPACER TUBE,URETHANE SPRING, PLASMA GAS | New OEM | Contact Us |
| 01-4715 | GaSonics | GaSonics | BEZEL | New OEM | Contact Us |
| 01-4738 | GaSonics | GaSonics | SHAFT, LIFT PIN,CLTC, IRIDIA-DL | New OEM | Contact Us |