Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 15158-01 | GaSonics | GaSonics | MEMBRANE KEYBOARD,PANEL-FRONT | New OEM | Contact Us |
| 15-161435-00 | GaSonics | GaSonics | PLATE,ALUMINUM PEDESTAL (0.500 Lift pin ) | New OEM | Contact Us |
| 15-161439-00 | GaSonics | GaSonics | PLATE,QUARTZ MODIFIED ISOLATIO | New OEM | Contact Us |
| 15-161823-00 | GaSonics | GaSonics | PULLEY,BOTTOM, BLADE | New OEM | Contact Us |
| 15-166886-00 | GaSonics | GaSonics | ROD,IDLER, BOTTOM,BLADE | New OEM | Contact Us |
| 15-170768-00 | GaSonics | GaSonics | SHAFT,MOTOR, LL | New OEM | Contact Us |
| 15-171785-00 | GaSonics | GaSonics | INSULATOR, SLEEVE,TEFLON | New OEM | Contact Us |
| 15-176989-00 | GaSonics | GaSonics | CHAMBER, PLASMA,UNIFIED TUBE, QUARTZ | New OEM | Contact Us |
| 15-177233-00 | GaSonics | GaSonics | CHAMBER,SPOOL,UNIFIED TUBE, QUARTZ | New OEM | Contact Us |
| 15-177241-00 | GaSonics | GaSonics | SHIELD,SLEEVE, ULTRA TORR, QUARTZ | New OEM | Contact Us |
| 15-177385-00 | GaSonics | GaSonics | ROD,ASTEX MW TUBE CLEANING | New OEM | Contact Us |
| 15198-01 | GaSonics | GaSonics | CABLE ASSY, BULK-ZBOT | New OEM | Contact Us |
| 15198-02 | GaSonics | GaSonics | CABLE ASSY, BULK-ZBOT | New OEM | Contact Us |
| 15-262860-00 | GaSonics | GaSonics | SPACER, SCOPE, .46 H, IRIDIA, QUARTZ | New OEM | Contact Us |
| 15-263033-00 | GaSonics | GaSonics | BLADE, END EFFECTOR, SST | New OEM | Contact Us |
| 15-263337-00 | GaSonics | GaSonics | SHWRHD,150MM,HEMISPHERICAL | New OEM | Contact Us |
| 15-2676 | GaSonics | GaSonics | BEARING, BALL, .125 ID X .315 OD, SST | New OEM | Contact Us |
| 15-2714 | GaSonics | GaSonics | R-axis belt | New OEM | Contact Us |
| 15-2715 | GaSonics | GaSonics | Theta-axis belt | New OEM | Contact Us |
| 15-2716 | GaSonics | GaSonics | BELT, Z-AXIS | New OEM | Contact Us |
| 15-2721 | GaSonics | GaSonics | TRANTORQUE, 3/4 INCH, CE! | New OEM | Contact Us |
| 15-2722 | GaSonics | GaSonics | BELT, TENSIONER | New OEM | Contact Us |
| 15-2726 | GaSonics | GaSonics | BEARING, CAM | New OEM | Contact Us |
| 15-2727 | GaSonics | GaSonics | PULLEY, TIMING BELT W/DOUBLE FLANGE | New OEM | Contact Us |
| 15-2728 | GaSonics | GaSonics | BEARING, FOUR POINT CONTACT | New OEM | Contact Us |
| 15-2729 | GaSonics | GaSonics | PULLEY, TIMING | New OEM | Contact Us |
| 15-2731 | GaSonics | GaSonics | BELT, TIMING | New OEM | Contact Us |
| 15-2732 | GaSonics | GaSonics | BEARING, 3/8 W/BRAYCOTE | New OEM | Contact Us |
| 15-2736 | GaSonics | GaSonics | BELT, TIMING | New OEM | Contact Us |
| 15-2737 | GaSonics | GaSonics | BELT, TIMING | New OEM | Contact Us |
| 15-2738 | GaSonics | GaSonics | BEARING, BALL 1/4 INCH | New OEM | Contact Us |
| 15-2739 | GaSonics | GaSonics | BEARING, 1GU3 | New OEM | Contact Us |
| 15-2741 | GaSonics | GaSonics | MOD,PULLEY,40DP,.520PD | New OEM | Contact Us |
| 15-2743 | GaSonics | GaSonics | PULLEY, TIMING | CE! | New OEM | Contact Us |
| 15-2744 | GaSonics | GaSonics | BELT, TIMING, RO | New OEM | Contact Us |
| 15-2746 | GaSonics | GaSonics | BEARING, BALL 3/16 | New OEM | Contact Us |
| 15-2748 | GaSonics | GaSonics | BELT, TIMING | New OEM | Contact Us |
| 15-2749 | GaSonics | GaSonics | BELT TIMING | New OEM | Contact Us |
| 15-2750 | GaSonics | GaSonics | TRAN, TORQUE ID 0.25 | New OEM | Contact Us |
| 15-2751 | GaSonics | GaSonics | BEARING, BALL | CE! | New OEM | Contact Us |
| 15-2752 | GaSonics | GaSonics | BELT, TIMING, RO | New OEM | Contact Us |
| 15-2753 | GaSonics | GaSonics | BEARING, BALL 25X47X12MM | New OEM | Contact Us |
| 15-2754 | GaSonics | GaSonics | BEARING, W/MICROCOTE | New OEM | Contact Us |
| 15-2755 | GaSonics | GaSonics | BEARING, .25 ID X .625 OD | New OEM | Contact Us |
| 15-2756 | GaSonics | GaSonics | BEARING, BALL 3/8 | New OEM | Contact Us |
| 15-2759 | GaSonics | GaSonics | BEARING, THRUST | New OEM | Contact Us |
| 15-2760 | GaSonics | GaSonics | BEARING, OILLESS | New OEM | Contact Us |
| 15-2761 | Gasonics | Gasonics | BRG, .5# OD X .25# DIA SHAFT,50000 RPM | New OEM | Contact Us |
| 15-2764 | GaSonics | GaSonics | BEARING, BALL, .500 ID X 1.125 OD X .312 W | New OEM | Contact Us |
| 15-289403-00 | GaSonics | GaSonics | PIN,INNER,6061-T6 AL,RT,ROTATION | New OEM | Contact Us |
| 15-289404-00 | GaSonics | GaSonics | PIN,INNER,6061-T6 AL,LT ROTATION | New OEM | Contact Us |
| 15-297368-00 | GaSonics | GaSonics | SHAFT,TOP CAP,CLTC | New OEM | Contact Us |
| 15-297369-00 | GaSonics | GaSonics | CAP, TOP CLTC | New OEM | Contact Us |
| 15-304718-00 | GaSonics | GaSonics | SHWRHD,THIN WALL,DROP-IN,G-XPRS | New OEM | Contact Us |
| 15307-01 | GaSonics | GaSonics | REFLECTOR,PARABOLIC-9.5 | New OEM | Contact Us |
| 15310-01 | GaSonics | GaSonics | SPACER,BOTTOM PLATE | New OEM | Contact Us |
| 15312-01 | GaSonics | GaSonics | WELDMENT,CHAMBER-UPPER | New OEM | Contact Us |
| 15-320977-00 | GaSonics | GaSonics | PAD,MACHINED,END EFFECTR,ATM RBT,G400 | New OEM | Contact Us |
| 15322-01 | GaSonics | GaSonics | BASE PLATE,REFLECTOR | New OEM | Contact Us |
| 15-323594-00 | GaSonics | GaSonics | CHAMBER,8 INCH,A2000,CENTERING-WAFER | New OEM | Contact Us |
| 15-323599-00 | Gasonics | Gasonics | GUIDE,WAFER,8" PLATEN | New OEM | Contact Us |
| 15331-01 | GaSonics | GaSonics | MOUNTING BLOCK,EOP | New OEM | Contact Us |
| 15333-01 | GaSonics | GaSonics | DOOR,VACUUM | New OEM | Contact Us |
| 15336-01 | GaSonics | GaSonics | BRACKET CYLINDER | New OEM | Contact Us |
| 15337-01 | GaSonics | GaSonics | INSULATOR,CYLINDER | New OEM | Contact Us |
| 15-340720-00 | GaSonics | GaSonics | SHIELD, MODIFIED CLTC | New OEM | Contact Us |
| 15344-01 | GaSonics | GaSonics | ELECTRODE,GROUND- 1.80 X 4.00 | New OEM | Contact Us |
| 15-345275-00 | GaSonics | GaSonics | BELL JAR,QUARTZ,LOW FE,12",2130 | New OEM | Contact Us |
| 15355-01 | GaSonics | GaSonics | ADAPTER,TRANSDUCER-QTZ | New OEM | Contact Us |
| 15361-01 | GaSonics | GaSonics | RETAINER,SPOOL | New OEM | Contact Us |
| 15366-01 | GaSonics | GaSonics | RING,LIFT | New OEM | Contact Us |
| 15367-01 | GaSonics | GaSonics | PIN,LIFT QUARTZ | New OEM | Contact Us |
| 15368-01 | GaSonics | GaSonics | HOLDER,PIN | New OEM | Contact Us |
| 15372-01 | GaSonics | GaSonics | STANDOFF,COOLING STATION | New OEM | Contact Us |
| 15375-01 | GaSonics | GaSonics | FLAG,LIFT | New OEM | Contact Us |
| 15377-01 | GaSonics | GaSonics | BRACKET,DOOR RIGHT | New OEM | Contact Us |
| 15377-02 | GaSonics | GaSonics | BRACKET,DOOR-LEFT | New OEM | Contact Us |
| 15378-01 | GaSonics | GaSonics | BLOCK,PLATEN HOLD | New OEM | Contact Us |
| 15380-01 | GaSonics | GaSonics | INSULATOR,PLATEN | New OEM | Contact Us |
| 15382-01 | GaSonics | GaSonics | FEEDTHRU,LINEAR,MODIFIED | New OEM | Contact Us |
| 15-389227-00 | GaSonics | GaSonics | PANEL, SIDE MONITOR ASSY | New OEM | Contact Us |
| 15429-01 | GaSonics | GaSonics | SHIELD PLATE, SPOOL COVER | New OEM | Contact Us |
| 15438-01 | GaSonics | GaSonics | CA ASSY,PWR,AC CONT - PLATTEN 52 IN | New OEM | Contact Us |
| 15451-01 | GaSonics | GaSonics | PWA,EOP/CONT PRESSURE | New OEM | Contact Us |
| 15-460582-00 | GaSonics | GaSonics | HOUSING,4-WINDOWS,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us |
| 15-460584-00 | GaSonics | GaSonics | MOUNT,BOTTOM PLATE,LAMP HOLDER,IRIDIA-DL | New OEM | Contact Us |
| 15-460585-00 | GaSonics | GaSonics | MOUNT,TOP PLATE,LAMP HODLER,IRIDIA-DL | New OEM | Contact Us |
| 15-464665-00 | GaSonics | GaSonics | RTNR,WINDOW,LAMP TRAY,IRIDIA-DL | New OEM | Contact Us |
| 15467-01 | GaSonics | GaSonics | WLDMNT,VCR-SOL-ELBOW-GAS MOD | New OEM | Contact Us |
| 15468-01 | GaSonics | GaSonics | WELDMENT, ELBOW-SOL-VCR GAS ASSEMBLY | New OEM | Contact Us |
| 15645-01 | GaSonics | GaSonics | CABLE ASSY, BULKHEAD TO EOP | New OEM | Contact Us |
| 15651-01 | GaSonics | GaSonics | CABLE ASSY,AC CONT-LAMP FAN | New OEM | Contact Us |
| 15683-01 | GaSonics | GaSonics | COOLING STATION-RPLCD 15199 | New OEM | Contact Us |
| 15684-01 | GaSonics | GaSonics | BRKT, SENSOR-COOLING STATION | New OEM | Contact Us |
| 15719-01 | GaSonics | GaSonics | SUPPORT,ISOLATOR-RF COVER | New OEM | Contact Us |
| 15753-01 | GaSonics | GaSonics | CHAMBER, LOWER | New OEM | Contact Us |
| 15784-01 | GaSonics | GaSonics | ASSY,RF FILTER | New OEM | Contact Us |
| 15869-01 | GaSonics | GaSonics | DETECTOR, EOP ASSY - L3300 | New OEM | Contact Us |
| 15884-02 | GaSonics | GaSonics | PWA EOP DETECTOR | New OEM | Contact Us |
| 15932-02 | GaSonics | GaSonics | CABLE ASSY, CONT-TEMP, BIS | New OEM | Contact Us |