Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 22-170735-00 | GaSonics | GaSonics | PULLEY,TIMING BELT,20 GROOVES | New OEM | Contact Us |
| 22-170740-00 | GaSonics | GaSonics | PULLEY, 0.489 O.D.,20 GROOVES | New OEM | Contact Us |
| 22-172315-00 | GaSonics | GaSonics | THERMOSTAT, LAMP TRAY, IRIDIA-DL | New OEM | Contact Us |
| 22-174348-00 | GaSonics | GaSonics | O-RING, DOVE TAIL, SEAL,CHEMRAZ, 513 | New OEM | Contact Us |
| 22-176564-00 | GaSonics | GaSonics | O-RING,38.560 ID X .210 W,KALREZ | New OEM | Contact Us |
| 22-176569-00 | GaSonics | GaSonics | O-RING,5.850 IDX .210 W,KALREZ 8 | New OEM | Contact Us |
| 22-2300 | GaSonics | GaSonics | MANIFOLD -10 POS TYPE A | New OEM | Contact Us |
| 22-262495-00 | GaSonics | GaSonics | O-RING, 2-166, KALREZ 8575 | New OEM | Contact Us |
| 22-264611-00 | GaSonics | GaSonics | O-RING,-226,FLUOROSILICONE | New OEM | Contact Us |
| 22-264779-00 | GaSonics | GaSonics | O-RING,-223,FLUOROSILICONE,1.609IDX.139W | New OEM | Contact Us |
| 22-2666 | GaSonics | GaSonics | ELBOW, FITTING, 90 DEGREE, NW80 | New OEM | Contact Us |
| 22-2667 | GaSonics | GaSonics | BELLOWS, NW50, 3.94L | New OEM | Contact Us |
| 22-2682 | GaSonics | GaSonics | VALVE, BELLOWS SEALED 1/2 VCR FEMALE | New OEM | Contact Us |
| 22-2683 | GaSonics | GaSonics | FITTING, DOUBLE MALE UNION 1/2 VCR | New OEM | Contact Us |
| 22-2685 | GaSonics | GaSonics | VALVE, FLOW CONTROL | New OEM | Contact Us |
| 22-2693 | GaSonics | GaSonics | REDUCER CONICAL, NW50-NW80, SS | New OEM | Contact Us |
| 22-269441-00 | GaSonics | GaSonics | BEARING,BALL,FLANGE,.25IN,.625IN,.196IN | New OEM | Contact Us |
| 22-2734 | GaSonics | GaSonics | VALVE, 4 WAY, SINGLE SOLENOID | New OEM | Contact Us |
| 22-2735 | GaSonics | GaSonics | VALVE, 4 WAY, DOUBLE SOLENOID,W/O MANIFO | New OEM | Contact Us |
| 22-2740 | GaSonics | GaSonics | VALVE, DIAPHRAM,1/4, FEM, VCR | New OEM | Contact Us |
| 22-2756 | GaSonics | GaSonics | VALVE, DIAPHRAM,AIR-OP NORMALLY CLOSED, 1/4 MALE VCR | New OEM | Contact Us |
| 22-2758 | GaSonics | GaSonics | VALVE, EXHAUST M5 X 0.8 PORTS | New OEM | Contact Us |
| 22-2786 | GaSonics | GaSonics | VALVE, SOLENOID | New OEM | Contact Us |
| 22-2804 | GaSonics | GaSonics | BELLOWS, THIN WALL,NW40 | New OEM | Contact Us |
| 22-2810 | GaSonics | GaSonics | VALVE, METERING | New OEM | Contact Us |
| 22-2814 | GaSonics | GaSonics | CONTROLLER, SPEED #10-32 X 5/32 | New OEM | Contact Us |
| 22-2816 | GaSonics | GaSonics | VALVE, SLIT,ROLL CAM GATE,SIZE 220 X 20 | New OEM | Contact Us |
| 22-2825 | Gasonics | Gasonics | VALVE, BELLOWS,NW40 W/O SOLENOID | New OEM | Contact Us |
| 22-2826 | Gasonics | Gasonics | VALVE, BELLOWS NW63 W/O SOLENOID | New OEM | Contact Us |
| 22-2829 | GaSonics | GaSonics | VALVE, THROTTLE,SIZE 2-1/2 | New OEM | Contact Us |
| 22-2848 | GaSonics | GaSonics | VALVE, DIAPHRAGM, PNEUMATIC, 1/4 VCR FE | New OEM | Contact Us |
| 22-284913-00 | GaSonics | GaSonics | O-RING,2-121,1.049 ID X 0.103 W,CHEMRAZ | New OEM | Contact Us |
| 22-299658-00 | GaSonics | GaSonics | RING, RETAIN, EXT, .187IN, E-TYPE | New OEM | Contact Us |
| 22-315669-00 | GaSonics | GaSonics | O-RING,2-114,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-315671-00 | GaSonics | GaSonics | O-RING,2-121,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315796-00 | GaSonics | GaSonics | O-RING,3-916,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315799-00 | GaSonics | GaSonics | O-RING,2-261,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315800-00 | GaSonics | GaSonics | O-RING,2-330,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315801-00 | GaSonics | GaSonics | O-RING,2-378,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315802-00 | GaSonics | GaSonics | O-RING,2-276,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315803-00 | GaSonics | GaSonics | O-RING,2-376,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-315804-00 | GaSonics | GaSonics | O-RING,2-120,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315805-00 | GaSonics | GaSonics | O-RING,2-260,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315806-00 | GaSonics | GaSonics | O-RING,2-024,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315807-00 | GaSonics | GaSonics | O-RING,2-012,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315808-00 | GaSonics | GaSonics | O-RING,2-340,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315809-00 | GaSonics | GaSonics | O-RING,2-226,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-315810-00 | GaSonics | GaSonics | O-RING,2-233,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-315811-00 | GaSonics | GaSonics | O-RING,2-326,KALREZ 8575 UP ,PER AS-568A | New OEM | Contact Us |
| 22-317213-00 | GaSonics | GaSonics | O-RING,2-116,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-317215-00 | GaSonics | GaSonics | O-RING,2-216,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-324784-00 | GaSonics | GaSonics | O-RING,2-214,PERLAST G74P | New OEM | Contact Us |
| 22-339004-00 | GaSonics | GaSonics | O-RING,2-122,KALREZ 8575 UP,PER AS-568A | New OEM | Contact Us |
| 22-342148-01 | GaSonics | GaSonics | VALVE,DIAPH,3PORT,1/4 FLARE,AOV,PFA-17 | New OEM | Contact Us |
| 22-342148-02 | GaSonics | GaSonics | VALVE,DIAPH,3PORT,1/4 FLARE,AOV,PFA-18 | New OEM | Contact Us |
| 22-359229-00 | GaSonics | GaSonics | O-RING,K-123,1.174 ID X .103W,KALREZ 857 | New OEM | Contact Us |
| 22-6000 | Gasonics | Gasonics | VALVE, SPEED CONTROLLER, SERIES AS ELBOE | New OEM | Contact Us |
| 23-0028-01 | GaSonics | GaSonics | SWITCH, FLUID FLOW | New OEM | Contact Us |
| 23-0071 | GaSonics | GaSonics | MFC, O2, 4 SLPM, HOV, 1/4 VCR, UNIT 810 | New OEM | Contact Us |
| 23-0075 | GaSonics | GaSonics | MFC, N2, 200 SCCM,HOV, 1/4 VCR,UNIT 8100 | New OEM | Contact Us |
| 23-0089 | GaSonics | GaSonics | TRANSDUCER,PRESSURE-ABSOLUTE (500 PSI) | New OEM | Contact Us |
| 23-2545 | GaSonics | GaSonics | ROTAMETER, 0-60GPH,1/4 IN NPT | New OEM | Contact Us |
| 23-2637 | GaSonics | GaSonics | ROTAMETER W/VALVE 6.5GPH, 1/4 - FNPT | New OEM | Contact Us |
| 23-2644 | GaSonics | GaSonics | XDUCER, PRESSURE 11T NW8 VCR,F,+13TO+32 | New OEM | Contact Us |
| 23-2810/RW | GaSonics | GaSonics | Refurbished: MFC, VAPOR, 500 SCCM, H2O, NO | New OEM | Contact Us |
| 23-2846 | GaSonics | GaSonics | SWITCH 12T GAS BOX, IRIDIA | New OEM | Contact Us |
| 23-2918 | GaSonics | GaSonics | TRANSDUCER, PRESSURE TYPE 722A | New OEM | Contact Us |
| 23-2919 | GaSonics | GaSonics | TRANSDUCER, PRESSURE TYPE 622A | New OEM | Contact Us |
| 23-2931 | GaSonics | GaSonics | TRANSDUCER, VACUUM,.001 TO 100 TORR,NW16 | New OEM | Contact Us |
| 24-0012 | GaSonics | GaSonics | GAUGE, VACUUM, 0-30 INCH HG | New OEM | Contact Us |
| 24-0226 | GaSonics | GaSonics | GUAGE, VAC. THERMOCOUPLE GUAGE TUBE | New OEM | Contact Us |
| 25-2009 | GaSonics | GaSonics | ACTUATOR, ROTARY | New OEM | Contact Us |
| 27-169988-00 | GaSonics | GaSonics | GEN, MICROWAVE, 2 KW AIXCON, PEP PLUS | New OEM | Contact Us |
| 27-264482-00 | GaSonics | GaSonics | RF MATCH,& CNTRLR,13.56MHZ,HI EFFICIENCY | New OEM | Contact Us |
| 27-277770-00 | GaSonics | GaSonics | KYBD,PORTABLE,INTEGRATED PS/2 TRACKBALL | New OEM | Contact Us |
| 27-313089-00 | GaSonics | GaSonics | CNTRLR,TYPE 3504,TEMP CONT/PROGRAMMER | New OEM | Contact Us |
| 27-316926-00 | GaSonics | GaSonics | OEM SPARE,CONTROL CARD II,ZBOT,BROOKS | New OEM | Contact Us |
| 27-316931-00 | GaSonics | GaSonics | OEM SPARE,VAC SWITCH,ZBOT,BROOKS,PCA | New OEM | Contact Us |
| 27-340861-00 | GaSonics | GaSonics | RF MATCH,13.56MHZ,5KW,COMDEL | New OEM | Contact Us |
| 27-345764-00 | GaSonics | GaSonics | CONTROLLER, WVDS, TEMP ON/OFF 120 | New OEM | Contact Us |
| 27-345766-00 | GaSonics | GaSonics | PWR SPLY,24VDC,4.2A,DIN RAIL | New OEM | Contact Us |
| 27-345767-00 | GaSonics | GaSonics | CONTROLLER, WVDS, TEMP, RTD 24V | New OEM | Contact Us |
| 27-345769-00 | GaSonics | GaSonics | DISPLAY, LCD, OPTR INTERFACE, 2X16, 6F-KEY, 0 | New OEM | Contact Us |
| 27-425639-00 | GaSonics | GaSonics | PWR SPLY,MICROWAVE,208VAC,16A,1.8KW,SINGLE PHASE | New OEM | Contact Us |
| 31-424769-00 | GaSonics | GaSonics | SKT,LAMP,HALOGEN,2 CONT,TP-22-XL,WIRE | New OEM | Contact Us |
| 33-316924-00 | GaSonics | GaSonics | MOTOR,DRIVE,24V,E/R | New OEM | Contact Us |
| 34-00128-00 | GaSonics | GaSonics | CNTOR, NEMA 1/2 24VAC | New OEM | Contact Us |
| 34-0032-01 | GaSonics | GaSonics | LUG, SPADE, FLANGED 18 GA., CE! | New OEM | Contact Us |
| 34-0040-01 | GaSonics | GaSonics | PIN, MALE, MOLEX | New OEM | Contact Us |
| 34-0041-01 | GaSonics | GaSonics | PIN, FEMALE | New OEM | Contact Us |
| 34-0073-01 | GaSonics | GaSonics | TERM,RING LUG,1/4",22-18 AWG | New OEM | Contact Us |
| 34-10222-00 | GaSonics | GaSonics | SWITCH,6GPM WATER FL W/RELAYS | New OEM | Contact Us |
| 34-118662-02 | GaSonics | GaSonics | CB, 2A, 1P, ABB, RNG LUG | New OEM | Contact Us |
| 34-118662-06 | GaSonics | GaSonics | CB,6A,1P,ABB,RNG LUG | New OEM | Contact Us |
| 34-130687-32 | GaSonics | GaSonics | CB, 32A, 2P, ABB, RNG LUG | New OEM | Contact Us |
| 34-162394-00 | GaSonics | GaSonics | SW,TEMP, 2KW PWRHEAD AIXCON | New OEM | Contact Us |
| 34-165626-00 | GaSonics | GaSonics | SENSOR OPTICAL | New OEM | Contact Us |
| 34-170657-00 | GaSonics | GaSonics | CB, 60A, 3 POLE,240V | New OEM | Contact Us |
| 34-172631-00 | GaSonics | GaSonics | HEATER, CARTRIDGE, 150W, 29 INCH, IRIDIA | New OEM | Contact Us |
| 34-172632-00 | GaSonics | GaSonics | HEATER, CARTRIDGE,150 W, 1/4 OD, 32 ,120 VAC, UL | New OEM | Contact Us |