Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 73762-01 | GaSonics | GaSonics | SWITCH,LIMIT-SUBMIN,SPDT | New OEM | Contact Us |
| 73785-02 | GaSonics | GaSonics | VALVE,VAC-AIR OP,NC,SS,FSFM- ULTRA PURE | New OEM | Contact Us |
| 73789-04 | GaSonics | GaSonics | LAMP,HG-OZONE FREE,2.125 IN | New OEM | Contact Us |
| 73792-03 | GaSonics | GaSonics | RIVET,3/16 IN X .325,MFG #FS-C-07-1 | New OEM | Contact Us |
| 73797-01 | GaSonics | GaSonics | INDICATOR LAMP | New OEM | Contact Us |
| 73797-03 | GaSonics | GaSonics | RECTIFIER,HIGH VOLTAGE | New OEM | Contact Us |
| 73797-04 | GaSonics | GaSonics | PWA, CONTROL | New OEM | Contact Us |
| 73797-05 | GaSonics | GaSonics | PWA,SCR CNTRL REV A, W/RETROFIT INSTRS T | New OEM | Contact Us |
| 73797-06 | GaSonics | GaSonics | MAGNETRON ASSY WITH FITTINGS | New OEM | Contact Us |
| 73797-20 | GaSonics | GaSonics | PLATE TRANSFORMER L3510 | New OEM | Contact Us |
| 73797-23 | GaSonics | GaSonics | PWA CONTROL | New OEM | Contact Us |
| 73822-09 | GaSonics | GaSonics | SCRW,SHLDR,10-32 X 1 1/4 L | New OEM | Contact Us |
| 73823-01 | GaSonics | GaSonics | PILLOW,BLCK, TWIN 1/4 IN SHFT,2-1/2 | New OEM | Contact Us |
| 73827-15 | GaSonics | GaSonics | ROD, SAPPHIRE .0625 X .360LG | New OEM | Contact Us |
| 73828-07 | GaSonics | GaSonics | SCRW,SET, 6-32 X 1/8 L, SST | New OEM | Contact Us |
| 73837-01 | GaSonics | GaSonics | ACTR,COIL,120V,50/60HZ,W/JCT 80(WAS 73837-02) | New OEM | Contact Us |
| 73842-01 | GaSonics | GaSonics | CAP,NYLON | New OEM | Contact Us |
| 73848-01 | GaSonics | GaSonics | SWITCH,HALL EFFECT | New OEM | Contact Us |
| 73849-01 | GaSonics | GaSonics | CYLINDER,1 1/4 IN BORE X 4 IN STRK MAG | New OEM | Contact Us |
| 73865-02 | GaSonics | GaSonics | SPRING,COMPRESSION 5/8 IN LG,.420 OD X .051 WD | New OEM | Contact Us |
| 73866-24 | GaSonics | GaSonics | HEATER, CARTRIDGE, 1/4 IN DIA X 1 IN LG, 12 | New OEM | Contact Us |
| 73874-06 | GaSonics | GaSonics | RELAY,4890,90A,4-32VDC,SS | New OEM | Contact Us |
| 73878-01 | GaSonics | GaSonics | FAN,12-28VDC,36CFM,3.15 IN SQ | New OEM | Contact Us |
| 73879-01 | GaSonics | GaSonics | W/G,WR284,STRT SECT 16 IN GOLD IRRIDITE FINISH | New OEM | Contact Us |
| 73903-01 | GaSonics | GaSonics | CBL ASSY,HV,4 P | New OEM | Contact Us |
| 73910-04 | GaSonics | GaSonics | SCREW, PH FLHD, 8-32 X 3/8 L, SST | New OEM | Contact Us |
| 73913-13 | GaSonics | GaSonics | SCRW,PH PNHD, 8-32 X 1.75 L, SST | New OEM | Contact Us |
| 73954-01 | GaSonics | GaSonics | CONNECTOR,THERMOCOUPLE,TYPE-K, CHROM-ALU | New OEM | Contact Us |
| 739-550096-001 | GaSonics | GaSonics | SEAL,SFT ROB | New OEM | Contact Us |
| 77-2002 | GaSonics | GaSonics | GREASE, 80G TUBE | New OEM | Contact Us |
| 78-0008-02 | GaSonics | GaSonics | O-RING, 2-116, .750 ID X .093 W, | New OEM | Contact Us |
| 78-0020-06 | GaSonics | GaSonics | GASKET, RING, .060 THK | New OEM | Contact Us |
| 78-0020-07 | GaSonics | GaSonics | GASKET, RING, .060 THK | New OEM | Contact Us |
| 78-0020-08 | GaSonics | GaSonics | GASKET,RING, .060 THK | New OEM | Contact Us |
| 78-0031-03 | GaSonics | GaSonics | GASKET,FITTINGS | New OEM | Contact Us |
| 78-0064-03 | GaSonics | GaSonics | O-RING, 2-468, 19.5 ID X .25W, DURO 70 | New OEM | Contact Us |
| 78-0087-01 | GaSonics | GaSonics | O-RING, 2-453,11.975 ID X .271 W,SILICON | New OEM | Contact Us |
| 78-0088-01 | GaSonics | GaSonics | O-RING, 2-448, 9.475 ID X .271 W,SILICON | New OEM | Contact Us |
| 78-0091-01 | GaSonics | GaSonics | O-RING, 2-373, 8.975 ID X .207 W, SILIC | New OEM | Contact Us |
| 78-0104-01 | GaSonics | GaSonics | O-RING, 2-167, 6.987 ID X .103 W,SILICONE | New OEM | Contact Us |
| 78-0110-09 | GaSonics | GaSonics | GASKET,BACKING RING,MONOLITHIC GRAPHITE,6 IN | New OEM | Contact Us |
| 78-0128 | GaSonics | GaSonics | O-RING, 9-024, 1.114 ID X .070 W, CHEMRA | New OEM | Contact Us |
| 78-0134 | GaSonics | GaSonics | O-RING, 9-326, 1.60 ID X .210 W, CHEMRAZ | New OEM | Contact Us |
| 78-0182 | GaSonics | GaSonics | INSULATOR,RIGHT,DOOR | New OEM | Contact Us |
| 78-0185 | GaSonics | GaSonics | TAPE, GFITE, CORR, .015 THICK X .50 WIDE, 1 | New OEM | Contact Us |
| 78-0199 | GaSonics | GaSonics | O-RING, 2-022, .989 ID X .070 W, VITON V747-75 | New OEM | Contact Us |
| 78-2550 | GaSonics | GaSonics | BUMPER O-RING | New OEM | Contact Us |
| 78-2553 | GaSonics | GaSonics | O-RING, 9-024, 1.114 ID X .070W, CHEMRAZ | New OEM | Contact Us |
| 78-2554 | GaSonics | GaSonics | O-RING, 9-012, .364 ID X .070 W, CHEMRAZ | New OEM | Contact Us |
| 78-2555 | GaSonics | GaSonics | O-RING, 9-114, .612 ID X .103 W, CHEMRAZ | New OEM | Contact Us |
| 78-2556 | GaSonics | GaSonics | O-RING, 9-116, 737 ID X .103 W, CHEMRAZ | New OEM | Contact Us |
| 78-2557 | GaSonics | GaSonics | O-RING, 9-120, .987 ID X .103 W, CHEMRAZ | New OEM | Contact Us |
| 78-2558 | GaSonics | GaSonics | O-RING, 9-121, 1.049 ID X .103W, CHEMRAZ | New OEM | Contact Us |
| 78-2560 | GaSonics | GaSonics | O-RING, 9-225, 1.859 ID X .139 W, CHEMRAZ 592 | New OEM | Contact Us |
| 78-2561 | GaSonics | GaSonics | O-RING, 9-260, 6.484 ID X .139 W, CHEMRA | New OEM | Contact Us |
| 78-2562 | GaSonics | GaSonics | O-RING, 9-261, 6.734 ID X .139 W, CHEMRA | New OEM | Contact Us |
| 78-2563 | GaSonics | GaSonics | O-RING, 9-276,10.984 ID X .139 W CHEMRAZ | New OEM | Contact Us |
| 78-2564 | GaSonics | GaSonics | O-RING, 9-330, 2.100 ID X .210 W, CHEMRA | New OEM | Contact Us |
| 78-2565 | GaSonics | GaSonics | O-RING, 9-326, 1.600 ID X .210 W, CHEMRA | New OEM | Contact Us |
| 78-2566 | GaSonics | GaSonics | O-RING, 9-376, 9.725 ID X .210 W, CHEMRA | New OEM | Contact Us |
| 78-2567 | GaSonics | GaSonics | O-RING, 9-378,10.475 ID X .210 W,CHEMRAZ | New OEM | Contact Us |
| 78-2568 | GaSonics | GaSonics | O-RING, 9-916, 1.171 ID X .116 W, CHEMRA | New OEM | Contact Us |
| 78-2569 | GaSonics | GaSonics | SEAL, DOVETAIL,4-201, CHEMRAZ 592 | New OEM | Contact Us |
| 78-2583-61 | GaSonics | GaSonics | O-RING, 2-261, 6.734 ID X .139 W, VITON V50 | New OEM | Contact Us |
| 78-2597 | GaSonics | GaSonics | GASKET, UPPER CHANNEL | New OEM | Contact Us |
| 78-2601 | GaSonics | GaSonics | O-RING, 9-233, 2.859 ID X .139 W, CHEMR | New OEM | Contact Us |
| 78-2602 | GaSonics | GaSonics | O-RING, 9-226, 1.984 ID X .139 W, CHEMRA | New OEM | Contact Us |
| 78-2606 | GaSonics | GaSonics | O-RING, 2-104,SILICONE | New OEM | Contact Us |
| 78-2614 | GaSonics | GaSonics | O-RING, 9-216, 1.109 ID X .139 W,CHEMRAZ | New OEM | Contact Us |
| 78-2615 | GaSonics | GaSonics | O-RING, 2-278,11.984 ID X .139 W,BUNA-N | New OEM | Contact Us |
| 78-2626 | GaSonics | GaSonics | O-RING, 2-012, .364 ID X .070W, VITON | New OEM | Contact Us |
| 78-2641 | GaSonics | GaSonics | O-RING, 2-214, DIA 1.237 X .103W, VITON | New OEM | Contact Us |
| 78-2679 | GaSonics | GaSonics | O-RING, 9-214, 1 ID X .139 W, CHEMRAZ 52 | New OEM | Contact Us |
| 78-2683 | GaSonics | GaSonics | O-RING, 9-309, .412 ID X .210 W, CHEMRA | New OEM | Contact Us |
| 78-2685 | GaSonics | GaSonics | O-RING, 9-123, 1.174 ID X .103 W,CHEMRA | New OEM | Contact Us |
| 78-2709 | GaSonics | GaSonics | O-RING, 9-151, 2.987 ID X .103 W,CHEMRA | New OEM | Contact Us |
| 78-2710 | GaSonics | GaSonics | O-RING, 9-274, 9.984 ID X .139 W,CHEMRA | New OEM | Contact Us |
| 78-2712 | GaSonics | GaSonics | O-RING, 9-144,2.487 ID X .103 W,CHEMRAZ | New OEM | Contact Us |
| 78-2713 | GaSonics | GaSonics | O-RING, 9-275, 10.484 ID X .139 W,CHEMR | New OEM | Contact Us |
| 78-2721 | GaSonics | GaSonics | O-RING, 2-108, .237 ID X .103 W,VITON | New OEM | Contact Us |
| 78-2733 | GaSonics | GaSonics | O-RING, 9-112,.487 ID X .103 W,CHEMRAZ 5 | New OEM | Contact Us |
| 78-2737 | GaSonics | GaSonics | L.FT FLANGE SEAL | New OEM | Contact Us |
| 78-2738 | GaSonics | GaSonics | O-RING, 9-363 6.475 ID X .210 W CHEMRAZ | New OEM | Contact Us |
| 78-2743 | GaSonics | GaSonics | O-RING, CUSTOM DOVETAIL, 5.72 ID,CHEMRAZ | New OEM | Contact Us |
| 78-2744 | GaSonics | GaSonics | O-RING, CUSTOM, 10.589 ID X .130 W,CHEM | New OEM | Contact Us |
| 78-2747 | GaSonics | GaSonics | O-RING, .320 ID X .040W, CHEMRAZ 513 | New OEM | Contact Us |
| 78-2750 | GaSonics | GaSonics | O-RING, 9-343, 3.725 ID X .210 W,CHEMRAZ | New OEM | Contact Us |
| 78-2753 | GaSonics | GaSonics | O-RING, 9-331, 2.225 ID X .210 W, CHEMRA | New OEM | Contact Us |
| 78-2761 | GaSonics | GaSonics | GASKET, EMI-.040 X .125 STRIP | New OEM | Contact Us |
| 78-2770 | GaSonics | GaSonics | O-RING, DOVETAIL SEAL, 5.986 ID X .103 W | New OEM | Contact Us |
| 78-2773 | GaSonics | GaSonics | CANTED COIL SPRING,CAVITY FLANGE | New OEM | Contact Us |
| 78-2774 | GaSonics | GaSonics | CANTED COIL SPRING,GAS CAP | New OEM | Contact Us |
| 78-2775 | GaSonics | GaSonics | O-RING, MOLDED,.070 W,PERFLUOROELASTOMER | New OEM | Contact Us |
| 78-2782 | GaSonics | GaSonics | GASKET, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us |
| 78-2783 | GaSonics | GaSonics | O-RING, #222,SILICONE | New OEM | Contact Us |
| 78-2784 | GaSonics | GaSonics | O-RING, #223,SILICONE | New OEM | Contact Us |
| 78-2786 | GaSonics | GaSonics | O-RING, #022,SILICONE | New OEM | Contact Us |
| 78-2787 | GaSonics | GaSonics | O-RING, #022, PFA,CHEMRAZ520 | New OEM | Contact Us |
| 78-2788 | GaSonics | GaSonics | O-RING, #014, PFA,VITON | New OEM | Contact Us |
| 78-2789 | GaSonics | GaSonics | O-RING, #025,CHEMRAZ520 | New OEM | Contact Us |