Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 78-2808 | GaSonics | GaSonics | GASKET, WINDOW,LAMP TRAY, IRIDIA-DL | New OEM | Contact Us |
| 78-2817 | GaSonics | GaSonics | O-RING, 2-158,4.737 ID X .103 W,VITON | New OEM | Contact Us |
| 78-2820 | GaSonics | GaSonics | O-RING, QUAD SEAL | New OEM | Contact Us |
| 78-2825 | GaSonics | GaSonics | O-RING, (2-177),VITON | New OEM | Contact Us |
| 78-2827 | GaSonics | GaSonics | O-RING, SILICON 2-269, S-70 | New OEM | Contact Us |
| 78-2828 | GaSonics | GaSonics | O-RING, 2-135, 1.925 IDX .103W, VITON | New OEM | Contact Us |
| 78-2829 | GaSonics | GaSonics | O-RING, VITON | New OEM | Contact Us |
| 78-2831 | GaSonics | GaSonics | O-RING, VITON,2-268 | New OEM | Contact Us |
| 78-2837 | GaSonics | GaSonics | O-RING, (2-226) KALREZ 8475 | New OEM | Contact Us |
| 78-2843 | GaSonics | GaSonics | O-RING, 2-123, 1.174 ID X .103 W VITON | New OEM | Contact Us |
| 78-2845 | GaSonics | GaSonics | O-RING, (2-131),VITON | New OEM | Contact Us |
| 78-2846 | GaSonics | GaSonics | O-RING, 2-136,1.987 ID x .103 W,VITON | New OEM | Contact Us |
| 78-2847 | GaSonics | GaSonics | 568-145 V75 FKM ORING DUROMETER | New OEM | Contact Us |
| 78-2850 | GaSonics | GaSonics | O-RING (2-234),VITON | New OEM | Contact Us |
| 78-2851 | GaSonics | GaSonics | O-RING, (2-223),VITON | New OEM | Contact Us |
| 78-2852 | GaSonics | GaSonics | O-RING, 2-236,3.234 ID x .139 W,VITON | New OEM | Contact Us |
| 78-2853 | Gasonics | Gasonics | 568-238 V75 FKM ORING DUROMETER | New OEM | Contact Us |
| 78-2855 | GaSonics | GaSonics | O-RING, (2-264) | New OEM | Contact Us |
| 78-2860 | GaSonics | GaSonics | O-RING, 2-276, 10-984 ID X .139W,VITON | New OEM | Contact Us |
| 78-2865 | GaSonics | GaSonics | O-RING, 2-380,11.475 ID X .207W,VITON | New OEM | Contact Us |
| 78-2867 | GaSonics | GaSonics | O-RING, 2-SPL,38.56 ID X .210W,VITON | New OEM | Contact Us |
| 78-2869 | GaSonics | GaSonics | O-RING, 2-016, VITON | New OEM | Contact Us |
| 78-2871 | GaSonics | GaSonics | LIP SEAL | New OEM | Contact Us |
| 78-2872 | GaSonics | GaSonics | O-RING, 2-272,9-484 ID X .135W,VITON | New OEM | Contact Us |
| 78-2879 | GaSonics | GaSonics | O-RING, 9-SPL, 3.10 ID X .103 W, CHEMRAZ | New OEM | Contact Us |
| 78-2901 | GaSonics | GaSonics | O-RING, 2-233,FLUOROSILICONE(F-70) | New OEM | Contact Us |
| 78-2905 | GaSonics | GaSonics | O-RING, 2-360 FLUOROSILICONE(F-70) | New OEM | Contact Us |
| 810-169214-001 | GaSonics | GaSonics | OEM CPU BOARD, L3510 A3010, CPS | New OEM | Contact Us |
| 82-0052 | GaSonics | GaSonics | CERAMIC, ROUND | New OEM | Contact Us |
| 84-0003 | GaSonics | GaSonics | PRIMER N, LOCTITE THREADLOCKER | New OEM | Contact Us |
| 853-200192-00 | GaSonics | GaSonics | ASSY,CLTC,STINGER,IRIDIA | New OEM | Contact Us |
| 853-234690-001 | GaSonics | GaSonics | ASSY, RF DUAL PLASMA COIL | New OEM | Contact Us |
| 857-171036-001 | GaSonics | GaSonics | KIT,VACUUM SNSR,YASKAWA ROBOT,PEP | New OEM | Contact Us |
| 88-0061-01 | GaSonics | GaSonics | LABEL, DANGER HIGH VOLTAGE | New OEM | Contact Us |
| 89-2595 | GaSonics | GaSonics | PCB SENSOR BOARD | New OEM | Contact Us |
| 90-0038-046 | GaSonics | GaSonics | SCREW,8-32x7/8L SLT PH,KYNAR | New OEM | Contact Us |
| 90-1036-01 | GaSonics | GaSonics | PCB, MFM/MFC,INTERFACE BD | New OEM | Contact Us |
| 90-1057 | GaSonics | GaSonics | PCA,A3000,LAMP FAILURE DETECTION | New OEM | Contact Us |
| 90-1061 | GaSonics | GaSonics | PCA, A3000, FAIL SAFE | New OEM | Contact Us |
| 90-1080 | GaSonics | GaSonics | PCA, LAMP FAILURE DETECTION | New OEM | Contact Us |
| 90-2156 | GaSonics | GaSonics | PCA,CLUSTER MISC INTERFACE,MINI-CONTROLLER | New OEM | Contact Us |
| 90-2201 | GaSonics | GaSonics | PCA,PROCESS MISC INTERFACE MINI- CONTROL | New OEM | Contact Us |
| 90-2565 | GaSonics | GaSonics | PCA,EOP,INTERFACE,MINI-CONTROLLER | New OEM | Contact Us |
| 90-2572 | GaSonics | GaSonics | PCA, CONTROLLER W/LIGHT TOWER,AE2001 | New OEM | Contact Us |
| 90-2589 | GaSonics | GaSonics | PCA, I/O #1, W/O ADC | New OEM | Contact Us |
| 90-2590 | GaSonics | GaSonics | PCA, I/O, INTERFACE | New OEM | Contact Us |
| 90-2618 | GaSonics | GaSonics | PCA, SENSOR BOARD | New OEM | Contact Us |
| 90-2647 | GaSonics | GaSonics | PCA EXT BD LAMP CONTROLLER, CLEAN DL | New OEM | Contact Us |
| 90-2665 | GaSonics | GaSonics | PWA, 2 STAGE EOP,DETECTOR | New OEM | Contact Us |
| 90-2666 | GaSonics | GaSonics | PCA, LED DISPLAYS | CE! | New OEM | Contact Us |
| 90-2667 | GaSonics | GaSonics | PCA, MEMBRANE SWITCH AND LED | New OEM | Contact Us |
| 90-2674 | GaSonics | GaSonics | PCA, 5V, DC REGULATOR BOARD | New OEM | Contact Us |
| 90-2677 | GaSonics | GaSonics | PCA, PLASMA FAILURE DETECTION, IRIDIA,AS | New OEM | Contact Us |
| 90-2678 | GaSonics | GaSonics | PCA, DISPLAY PANEL | New OEM | Contact Us |
| 90-2679 | GaSonics | GaSonics | PCA, LED AND DRIVER BOARD | New OEM | Contact Us |
| 90-2696 | GaSonics | GaSonics | PWA, DC CONVERSER, RF MODULE | New OEM | Contact Us |
| 90-2701 | GaSonics | GaSonics | PWA, LOADER DI & DO | New OEM | Contact Us |
| 90-2702 | GaSonics | GaSonics | PWA, INTERFACE RF & DRY PUMP CONTROL | New OEM | Contact Us |
| 90-2705 | GaSonics | GaSonics | PWA, JUNCTION,MAIN FRAME | New OEM | Contact Us |
| 90-2709 | GaSonics | GaSonics | PCA,ENHANCED 8 GAS INTERLOCK CIRCUIT,IRIDIA | New OEM | Contact Us |
| 90-2724 | GaSonics | GaSonics | PCA,CURRENT SENSOR | New OEM | Contact Us |
| 90-2737 | Gasonics | Gasonics | PWA, I/O JUNCTION,W/JP3 STRAIGHT CONNECTOR | New OEM | Contact Us |
| 92-2681 | GaSonics | GaSonics | PIN, LIFT, ASH CHAMBER | New OEM | Contact Us |
| 92-2684 | GaSonics | GaSonics | PIN, LIFT,CHAMBER,PEP PLUS | New OEM | Contact Us |
| 93-0079 | GaSonics | GaSonics | MODIFICATION,FEEDTHRU,LINEAR | New OEM | Contact Us |
| 93-0130 | GaSonics | GaSonics | TAPESWITCH, I/O DOOR ALTERED ITEM | New OEM | Contact Us |
| 931241-7 | GaSonics | GaSonics | NUT,LOCK,NYL INSERT,5/16-18UNC(JAM),SST | New OEM | Contact Us |
| 93-2005 | GaSonics | GaSonics | ACTUATOR, MODIFIED,SWITCH | New OEM | Contact Us |
| 93-2657 | GaSonics | GaSonics | LAMP,HG-OZONE FREE,2.125 IN, WITH 12 IN | New OEM | Contact Us |
| 93-2677 | GaSonics | GaSonics | COOLING STATIION PIN DOWN SENSOR,ASSY | New OEM | Contact Us |
| 93-2679 | GaSonics | GaSonics | COOLING STATION PINS SENSOR CABLE ASSY | New OEM | Contact Us |
| 93-2681 | GaSonics | GaSonics | CABLE ASSY, WATER FLOW SENSOR | New OEM | Contact Us |
| 93-2696 | GaSonics | GaSonics | ATM SENSOR, 0-15 PSIA, MODEL SA, MOD | New OEM | Contact Us |
| 93-2722 | GaSonics | GaSonics | PCA, SCR CONTROLLER, MOD W/TEST POINTS | New OEM | Contact Us |
| 93-2734 | GaSonics | GaSonics | SWITCH, PUSHBUTTON,ENGRAVED | New OEM | Contact Us |
| 93-2791 | GaSonics | GaSonics | MOTOR, SERVO,ENCODER | New OEM | Contact Us |
| 93-2812 | GaSonics | GaSonics | WASHER, .344 ID X .600 OD X .05 TH TITAN | New OEM | Contact Us |
| 93-2826 | GaSonics | GaSonics | SCREW, CAPTIVE, ALTERED | New OEM | Contact Us |
| 93-2858 | GaSonics | GaSonics | BEARING, FLANGED,LINEAR-ALTERED | New OEM | Contact Us |
| 93-2864 | GaSonics | GaSonics | KIT, PRESSURE CONTROLLER, ALTERED | New OEM | Contact Us |
| 93-2877 | GaSonics | GaSonics | NUT CENTERING 10 X 32 | New OEM | Contact Us |
| 93-2926 | GaSonics | GaSonics | SLIDE, ATM ROBOT | New OEM | Contact Us |
| 93-2930 | GaSonics | GaSonics | SMALL PULLEY MODIFICATION | New OEM | Contact Us |
| 93-2934 | GaSonics | GaSonics | PULLEY A ROTATION,AT | New OEM | Contact Us |
| 93-2935 | Gasonics | Gasonics | PULLEY MODS | New OEM | Contact Us |
| 93-2938 | GaSonics | GaSonics | PULLEY, MAIN ROTATION | New OEM | Contact Us |
| 93-2939 | Gasonics | Gasonics | PULLEY, DRIVE, ROTATION | New OEM | Contact Us |
| 93-2940 | GaSonics | GaSonics | DONUT, PEEK, ATM ROBOT | New OEM | Contact Us |
| 93-2942 | GaSonics | GaSonics | ROD, TENSIONER,BLADE | New OEM | Contact Us |
| 93-2943 | GaSonics | GaSonics | ROD, IDLER, BLADE | New OEM | Contact Us |
| 93-2947 | GaSonics | GaSonics | GASKET, BLOCK VAC,ATM ROBOT | New OEM | Contact Us |
| 93-2948 | GaSonics | GaSonics | SHIM, PADDLE (MULAR), ATM ROBOT | New OEM | Contact Us |
| 93-2951 | GaSonics | GaSonics | SLIDE,LLOADLOCK,GAMM | New OEM | Contact Us |
| 93-2952 | GaSonics | GaSonics | PULLEY C, ATM ROBOT | New OEM | Contact Us |
| 93-2963 | GaSonics | GaSonics | HEATER 1/8 CABLE W/K-THERMOCPL,675W/240V | New OEM | Contact Us |
| 93-2993 | GaSonics | GaSonics | CBL ASSY,RF GEN ENABLE,MODIFIED | New OEM | Contact Us |
| 93-3036 | GaSonics | GaSonics | LINEAR FEEDTROUGH,ACTUATOR | New OEM | Contact Us |
| 93-3105 | GaSonics | GaSonics | WSHR, 5/16, ALUMINUM MODIFIED | New OEM | Contact Us |
| 93-3106 | GaSonics | GaSonics | NUT, 5/16-18 UNC ALUMINUM MODIFIED | New OEM | Contact Us |
| 93-3109 | GaSonics | GaSonics | SCREW, SLTD, RNDHD, 40-40 X 1/4, AL MODIFIED | New OEM | Contact Us |