Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| A93-032-01 | GaSonics | GaSonics | MOD TBG,FLEX GL END.25 NOM OD,W/WELDED T | New OEM | Contact Us |
| A93-038-01 | GaSonics | GaSonics | GAS CAP,WELDMENT,GAS FEED | New OEM | Contact Us |
| A93-038-02 | GaSonics | GaSonics | GAS CAP,MOD,GAS FEED ASSY,AE | New OEM | Contact Us |
| A93-051-01 | GaSonics | GaSonics | WAVEGUIDE,LLE,LONG PLENUM | New OEM | Contact Us |
| a94-005-01 | GaSonics | GaSonics | ASSY CABLE, W7A | New OEM | Contact Us |
| A94-009-01 | GaSonics | GaSonics | CABLE ASSY, W13 | New OEM | Contact Us |
| A94-011-02 | GaSonics | GaSonics | ASSY,CABLE,W7B,23.5 IN LG | New OEM | Contact Us |
| A94-016-03/RW | GaSonics | GaSonics | ASSY,ELEVATOR,RECEIVE, P&P W/NITRIDE OP | New OEM | Contact Us |
| A94-016-04/RW | GaSonics | GaSonics | ASSY, ELEVATOR, SEND, P&P W/NITRIDE OPT SEN | New OEM | Contact Us |
| A94-021-01 | GaSonics | GaSonics | DETECTOR,DIODE,ZERO-BIAS 100 KHZ-4.0 GHZ | New OEM | Contact Us |
| A94-041-01/RW | GaSonics | GaSonics | REPAIR AND RESTORATION OF A GASONICS AURA 2000 INDEX | New OEM | Contact Us |
| A95-013-03 | GaSonics | GaSonics | ASSAY,AURA,MAGNETRON/WAVE,PLASMA DETECT | New OEM | Contact Us |
| A95-026-01 | GaSonics | GaSonics | BLOWER ASSY | New OEM | Contact Us |
| A95-028-01 | GaSonics | GaSonics | SWITCH ASSY,INTERLOCK, MODIFIED | New OEM | Contact Us |
| A95-031-01 | GaSonics | GaSonics | ASSY,AURA,MOD.ELECTRODE,PREFIRE | New OEM | Contact Us |
| A95-035-00 | GaSonics | GaSonics | ASSY,CORE DOOR NEST | New OEM | Contact Us |
| A95-041-01 | GaSonics | GaSonics | SENSOR, ASSY, LOAD | New OEM | Contact Us |
| A95-041-02 | GaSonics | GaSonics | SENSOR ASSY, UNLOAD | New OEM | Contact Us |
| A95-045-01 | GaSonics | GaSonics | MAGNETRON ASSY | New OEM | Contact Us |
| A95-053-02 | GaSonics | GaSonics | LAMP TRAY ASSY - WATER COOLED 8in | New OEM | Contact Us |
| A95-056-01 | GaSonics | GaSonics | DOWN STREAM ASSY, EOP,ELECTRONICS | New OEM | Contact Us |
| A95-060-01 | GaSonics | GaSonics | DOWN STREAM ASSY,EOP HOUSING | New OEM | Contact Us |
| A95-069-01 | GaSonics | GaSonics | ASSY,MOD.MICRO SWITCH,REV.A | New OEM | Contact Us |
| A95-070-01 | GaSonics | GaSonics | XFMR ASSY, 50/60HZ,HIGH VOLTAGE | New OEM | Contact Us |
| A95-072-01 | GaSonics | GaSonics | ASSY,STRIPPER,LAMP TRAY | New OEM | Contact Us |
| A95-097-01 | GaSonics | GaSonics | VACUUM SWITCH ASSY,GECO | New OEM | Contact Us |
| A95-100-01 | GaSonics | GaSonics | ASSY,AURA,GAS LINE,MFC-3,STD | New OEM | Contact Us |
| A95-105-03 | GaSonics | GaSonics | CABLE ASSY, PLATEN HEATER | New OEM | Contact Us |
| A95-125-02 | GaSonics | GaSonics | BLOWER ASSY,LOADLOCK | CE! | New OEM | Contact Us |
| A95-130-01 | GaSonics | GaSonics | TC GAUGE ASSY-LOADLOCK | CE! | New OEM | Contact Us |
| A95-143-01 | GaSonics | GaSonics | PANEL ASSY,DISPLAY, AE | New OEM | Contact Us |
| A95-175-01 | GaSonics | GaSonics | ASSY,LLE,CYLINDER-RETURN | New OEM | Contact Us |
| A95-206-01 | GaSonics | GaSonics | TUNING ROD ASSY,AURA | New OEM | Contact Us |
| A95-214-01 | GaSonics | GaSonics | HALOGEN-DUAL(BURN-IN) | New OEM | Contact Us |
| A95-215-01 | GaSonics | GaSonics | ASSY,LLS,LAMP.HGR,HAL-SGL(BN-IN) | New OEM | Contact Us |
| A96-013-01 | GaSonics | GaSonics | SERIAL COMMUNICATIONS KIT (RS232)REV.A | New OEM | Contact Us |
| A96-014-02 | GaSonics | GaSonics | ASSY, HARNESS,WAFER HANDLING | New OEM | Contact Us |
| A96-018-01 | GaSonics | GaSonics | CABLE ASSY, 60Hz,HV HOOK-UP, AURA | New OEM | Contact Us |
| A96-018-03 | GaSonics | GaSonics | CABLE ASSY, AURA, 50/60HZ HV HOOK-UP | New OEM | Contact Us |
| A96-018-04 | GaSonics | GaSonics | CBL ASSY,HIGH VOLTAGE HOOK-UP | New OEM | Contact Us |
| A96-032-01 | GaSonics | GaSonics | HARNESS ASSY,RELAY TUBE W/BRD SLV-LOAD | New OEM | Contact Us |
| A96-032-02 | GaSonics | GaSonics | HARNESS ASSY,RELAY TUBE W/BRD SLV-UNLOAD | New OEM | Contact Us |
| A96-058-02 | GaSonics | GaSonics | CABLE ASSY, PIN SENSOR, UP | New OEM | Contact Us |
| A96-062-01 | GaSonics | GaSonics | CABLE ASSY, AURA PLASMA SENSOR | New OEM | Contact Us |
| A96-062-02 | GaSonics | GaSonics | ASSY,CABLE,LLE,PLASMA SENSOR | New OEM | Contact Us |
| A96-062-03 | GaSonics | GaSonics | ASSY,CABLE-A3000,PLASMA SENSOR | New OEM | Contact Us |
| A96-110-01 | GaSonics | GaSonics | CABLE ASSY, RF ON INDICATOR | New OEM | Contact Us |
| A96-113-02 | GaSonics | GaSonics | CA a96-113-02 REV B, FP BUSS CABLE 11" | New OEM | Contact Us |
| A96-187-01 | GaSonics | GaSonics | CBL ASSY,LLE,LIMIT SENSOR,CYLINDER, PINS UP | New OEM | Contact Us |
| A96-187-02 | GaSonics | GaSonics | CABLE ASSY, LLE,LIMIT SENSOR,CYLINDER, P | New OEM | Contact Us |
| A96-187-03 | GaSonics | GaSonics | CBL ASSY,LLE LIMIT SENSOR,CYLINDER, PLATEN UP | New OEM | Contact Us |
| A96-187-04 | GaSonics | GaSonics | CBL ASSY,LLE LIMIT SENSOR,CYLINDER, PLATEN | New OEM | Contact Us |
| A96-190-01 | GaSonics | GaSonics | ASSY,CABLE,LLE,PROCESS CHAMBER GROUND | New OEM | Contact Us |
| A97-021-05 | GaSonics | GaSonics | KIT, AURA, WAFER SIZE 5 | New OEM | Contact Us |
| A97-095-01 | GaSonics | GaSonics | KIT,TOOLING REQT-FINE ADJ,P&P HANDLING SYSTEM | New OEM | Contact Us |
| AJ215018 | GaSonics | GaSonics | SCRW,SHLDR 8-32 X 3/16 X 1/2 SST (18-8) | New OEM | Contact Us |
| CPS-04-000004 | GaSonics | GaSonics | RETROKIT_FRONT TOUCH SCREEN_PEP IRIDIA | New OEM | Contact Us |
| CPS04-000303-00 | GaSonics | GaSonics | KIT,LAMP CONTROLLER, MULTIPLY UPGRADE | New OEM | Contact Us |
| CPS-04-10024 | GaSonics | GaSonics | KIT,UPGRADE 3 COMPUTERS PEP 3510,IRIDIA | New OEM | Contact Us |
| CPS-04-10025 | GaSonics | GaSonics | PEP Iridia Side Mount Screen Kit | New OEM | Contact Us |
| CPS-04-10027 | GaSonics | GaSonics | KIT,15" MONITOR REPLACEMENT,FRONT,PEP | New OEM | Contact Us |
| CPS-04-10030 | GaSonics | GaSonics | KIT,OPTIC FIBER TEMP. CNTRLR,OR4000T | New OEM | Contact Us |
| CPS-04-10032 | GaSonics | GaSonics | COMPUTER KIT,PEP,3510C | New OEM | Contact Us |
| CPS-04-10033 | GaSonics | GaSonics | COMPUTER KIT,PEP,3510A AND PLUS | New OEM | Contact Us |
| CPS-04-10034 | GaSonics | GaSonics | COMPUTER KIT,PEP,3010A | New OEM | Contact Us |
| CPS-04-10039 | GaSonics | GaSonics | YASKAWA ROBOT CORE REBURBISHMENT BOM | New OEM | Contact Us |
| CPS-04-10044 | GaSonics | GaSonics | KIT, SINGLE COMPUTER,PEP, 3510A AND PLUS | New OEM | Contact Us |
| CPS-04-10045 | GaSonics | GaSonics | KIT,14” MONITOR REPLACEMENT, AGV, SMIF | New OEM | Contact Us |
| CPS-04-10067 | GaSonics | GaSonics | KIT, RETROFIT, VIDEO CARD AND DISPLAY, L3510 | New OEM | Contact Us |
| CPS-04-10068 | GaSonics | GaSonics | KIT, SINGLE COMPUTER, PEP IRIDIA AND 3600 | New OEM | Contact Us |
| CPS-04-10120 | GaSonics | GaSonics | KIT, 2 MFC TOOL CONFIGURATION, A1000 | New OEM | Contact Us |
| CPS-04-10121 | GaSonics | GaSonics | KIT, 3 MFC TOOL CONFIGURATION, A1000 | New OEM | Contact Us |
| CPS-04-10124 | GaSonics | GaSonics | KIT, BLADE DRIVE MOTOR RETROFIT | New OEM | Contact Us |
| CPS-04-10128 | GaSonics | GaSonics | KIT,UNIFIED PLASMA TUBE,MODIFIED | New OEM | Contact Us |
| CPS-15-00072 | GaSonics | GaSonics | PIN, LIFT, SAPPHIRE, 3.16L, IRIDIA-DL | New OEM | Contact Us |
| CPS-15-00121 | GaSonics | GaSonics | YASKAWA ONE PIECE END EFFECTOR | New OEM | Contact Us |
| CPS-20105 | GaSonics | GaSonics | ASSY., CLTC, IRIDIA, NO GIMBAL | New OEM | Contact Us |
| CPS-20109 | GaSonics | GaSonics | LAMP HALOGEN,1000W,120VAC - Ushio | New OEM | Contact Us |
| CPS-20120 | GaSonics | GaSonics | HARD DRIVE,PEP GEN 5 REPLACEMENT W OS2 INSTALLED | New OEM | Contact Us |
| CPS-20121 | GaSonics | GaSonics | BATTERY LITHIUM 3V COIN 23MM | New OEM | Contact Us |
| CPS-20128 | GaSonics | GaSonics | COMPUTER,UI,GAMMA 2100 | New OEM | Contact Us |
| CPS-20177 | GaSonics | GaSonics | ASSY, PREFIRE | New OEM | Contact Us |
| CPS-20178 | GaSonics | GaSonics | PREFIRE ASSY, VCR GAS LINE, NEXUS 3 | New OEM | Contact Us |
| CPS-20179 | GaSonics | GaSonics | ASSY, PREFIRE-AURA | New OEM | Contact Us |
| CPS-20180 | GaSonics | GaSonics | ASSY, PREFIRE, STRIPPER MODULE | New OEM | Contact Us |
| CPS-20181 | GaSonics | GaSonics | PREFIRE ASSY, VCR GAS LINE APPLICATION,CE! | New OEM | Contact Us |
| CPS-20182 | GaSonics | GaSonics | ASSY,AURA,PREFIRE W/ELECTRODE | New OEM | Contact Us |
| CPS-20183 | GaSonics | GaSonics | PREFIRE ASSY | New OEM | Contact Us |
| CPS-20187 | GaSonics | GaSonics | ASSY,PREFIRE,STRIPPER MODULE | New OEM | Contact Us |
| CPS-20202 | GaSonics | GaSonics | ASSY, BATTERY, ROBOT, REPLACED 61-2344 | New OEM | Contact Us |
| CPS-20228 | GaSonics | GaSonics | ASSY, SHIPPING HANDLES, YASAKAWA ROBOT | New OEM | Contact Us |
| CPS-20261 | GaSonics | GaSonics | PCB, CONTROLLER BOARD ASSY | New OEM | Contact Us |
| CPS-20265 | GaSonics | GaSonics | HARD DRIVE, PEP, PRELOADED, GEN 5 | New OEM | Contact Us |
| CPS-20316-50 | GaSonics | GaSonics | XFMR ASSY, 50HZ, HIGH VOLTAGE | New OEM | Contact Us |
| CPS-20316-60 | GaSonics | GaSonics | XFMR ASSY, 60HZ, HIGH VOLTAGE | New OEM | Contact Us |
| CPS-20317 | GaSonics | GaSonics | BRACKET, SAFETY, WALL MOUNT | New OEM | Contact Us |
| CPS-20460 | GaSonics | GaSonics | FLANGE, BOTTOM ADAPTOR, AX7610 | New OEM | Contact Us |
| CPS-20667 | GaSonics | GaSonics | ASSY, CPU, PLC, 24VDC, 24 INPUTS, 16 OUTPUTS N | New OEM | Contact Us |
| QT330151 | GaSonics | GaSonics | CABLE ASSY,DISTB-THRTL VALVE | New OEM | Contact Us |
| R311-8020 | GaSonics | GaSonics | RETAINER RING,1/8 DIA,BERG Q1-12 | New OEM | Contact Us |