Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 01-0435 | GaSonics | GaSonics | PLATE,SPACER,CLAMP,2 IN OD TUBE | New OEM | Contact Us |
| 01-2854 | GaSonics | GaSonics | FLANGE, PISTON MOUNTING | New OEM | Contact Us |
| 01-2855 | GaSonics | GaSonics | NUT, DOOR ADJUSTING | New OEM | Contact Us |
| 02-3695 | GaSonics | GaSonics | COVER, RF, ENCLOSURE | New OEM | Contact Us |
| 03-450037-00 | GaSonics | GaSonics | CBL ASSY,TEMP CNTRLR TO LAMP CNTRLR | New OEM | Contact Us |
| 04-313049-00 | GaSonics | GaSonics | KIT,S/W,PEP,V4.70 | New OEM | Contact Us |
| 04-321963-00 | GaSonics | GaSonics | KIT,MAJOR SPARES IRIDIA DL | New OEM | Contact Us |
| 04-321974-00 | GaSonics | GaSonics | KIT,MAJOR SPARES PEP3510 | New OEM | Contact Us |
| 04-411014-00 | GaSonics | GaSonics | KIT,LAMP CURRENT MONITOR,PEP | New OEM | Contact Us |
| 05-3216 | GaSonics | GaSonics | WELDMENT, OUTLET- PROCESS, GAS BOX,IRIDI | New OEM | Contact Us |
| 06-2473 | GaSonics | GaSonics | WINDOW, SAPPHIRE,.999/1.001 OD X .124/.1 | New OEM | Contact Us |
| 15-175668-00 | GaSonics | GaSonics | INSERT, END EFFECTOR 300MM, SIERRA | New OEM | Contact Us |
| 16-367462-00 | GaSonics | GaSonics | HOLDER,SOCKET,STEAM-OUT,HASTEALLOY,REAR | New OEM | Contact Us |
| 16619-01 | GaSonics | GaSonics | PLATE,BACKING-DRIVER BD | New OEM | Contact Us |
| 18-2663 | GaSonics | GaSonics | SCREW, HEX SCH CAP, 2-56UNC X .38 L,SST | New OEM | Contact Us |
| 18-2822 | GaSonics | GaSonics | SCREW, HEX SCHD,5/16-18 X 1/2, SST | New OEM | Contact Us |
| 18-2877 | GaSonics | GaSonics | SCREW,CAP,BUTTON HEAD,M4X10L,SST | New OEM | Contact Us |
| 18-4054 | GaSonics | GaSonics | SCREW, HEX SCH,1/4-20 X 1 1/2 L,SST | New OEM | Contact Us |
| 19-4008 | GaSonics | GaSonics | NUT,1/4-20,RAIL MOUNTING | New OEM | Contact Us |
| 19-4010 | GaSonics | GaSonics | WASHER,FLAT,5/16 ID X 3/4 OD X .08 THK,S | New OEM | Contact Us |
| 20-1425 | GaSonics | GaSonics | GASKET, VCR, 1/2 IN,UNPLATED SS,W/RETAI | New OEM | Contact Us |
| 20-316917-00 | GaSonics | GaSonics | BELT,TIMING,13.6,.25IN,170,TEETH,ROTATE | New OEM | Contact Us |
| 20-8032 | GaSonics | GaSonics | ORIFICE TOP .9500DX .3121DX .04 THK | New OEM | Contact Us |
| 22-0312-03 | GaSonics | GaSonics | VALVE, SOLENOID 3 WAY WITH O-RING | New OEM | Contact Us |
| 22-324837-00 | GaSonics | GaSonics | O-RING,2-226,KALREZ 8085 | New OEM | Contact Us |
| 38-2688 | GaSonics | GaSonics | LENS, ROUND EXTENDED, GREEN | New OEM | Contact Us |
| 38-2691 | GaSonics | GaSonics | ILLUM., PUSHBUTTON OPER, EXT HEAD W/FULL | New OEM | Contact Us |
| 38-405915-00 | GaSonics | GaSonics | CABLE,POWER,18AWG 3SJT,4.57M,10A,250V,IE | New OEM | Contact Us |
| 60-1013 | GaSonics | GaSonics | XFMR,PWR,-115,24V@1.25A | New OEM | Contact Us |
| 61-377967-00 | GaSonics | GaSonics | OEM SPARE,CPU BOARD W/ MEMORY,SLIDER,L35 | New OEM | Contact Us |
| 71209-02 | GaSonics | GaSonics | SOCKET RELAY 11 PIN 3 POLE | New OEM | Contact Us |
| 71252-02 | GaSonics | GaSonics | FILTER,LINE-5A,5KV7 | New OEM | Contact Us |
| 73018-99 | GaSonics | GaSonics | O-RING KIT FOR 73018-05 | New OEM | Contact Us |
| 73-2331 | GaSonics | GaSonics | CRIMPING TOOL WITH LOCATOR | New OEM | Contact Us |
| 73679-01 | GaSonics | GaSonics | CONN,BULKHEAD-BNC,FEM/FEM | New OEM | Contact Us |
| 73962-01 | GaSonics | GaSonics | CONN. DIN RAIL, 50 PIN FLAT CABLE-DISCRE | New OEM | Contact Us |
| 73965-01 | GaSonics | GaSonics | I/O, 16-CHANNEL MOUNTING RACK | New OEM | Contact Us |
| 778-162117-001 | GaSonics | GaSonics | CNTRLR,TEMP,MNTR,0.02A,24VDC,MULTI CH,OR | New OEM | Contact Us |
| 78-2549 | GaSonics | GaSonics | STRIP,RF SHIELDING | New OEM | Contact Us |
| 78-2682 | GaSonics | GaSonics | O-RING, 9-SPL, .960 ID X .139 W, CHEMRAZ | New OEM | Contact Us |
| 78-2748 | GaSonics | GaSonics | RING, CENTERING, NW63, VITON, (2-336) | New OEM | Contact Us |
| 94-2809 | GaSonics | GaSonics | PCA, SEND INDEXER, 38A | New OEM | Contact Us |
| 94-3373 | GaSonics | GaSonics | VIDEO CARD, 16 BIT SVGA, FLAT PANEL DISP | New OEM | Contact Us |
| 95-3142 | GaSonics | GaSonics | PREFIRE ASSY | New OEM | Contact Us |
| 96-0121 | GaSonics | GaSonics | ASSY, CABLE, A3000,SEC II BULKHEAD | New OEM | Contact Us |
| 96-2653 | GaSonics | GaSonics | CABLE ASSY,RS 232 PORT 5 - PRESSURE CONT | New OEM | Contact Us |
| 97-2828 | GaSonics | GaSonics | KIT, RETROFIT,MOTHERBOARD REPLACEMENT, | New OEM | Contact Us |
| A01-168-01 | GaSonics | GaSonics | GUIDE,WAFER,REAR LEFT ARM | New OEM | Contact Us |
| A01-169-01 | GaSonics | GaSonics | GUIDE,WAFER,FRONT ARM | New OEM | Contact Us |
| A22-017-01 | GaSonics | GaSonics | VALVE,SOLENOID,3-WAY | New OEM | Contact Us |
| A78-040-01 | GaSonics | GaSonics | O-RING, 9-206, .484 ID X .139 W, CHEMRAZ | New OEM | Contact Us |
| A78-041-01 | GaSonics | GaSonics | O-RING, 9-108, .237 ID X .103 W, CHEMRA | New OEM | Contact Us |
| A95-090-01 | GaSonics | GaSonics | DOOR NEST ASSY, ETCHER | New OEM | Contact Us |
| R02-289533-00 | GaSonics | GaSonics | RFRB, ASSY,CLTC MODULE,TYPE K,200MM | New OEM | Contact Us |
| R27-274789-00 | GaSonics | GaSonics | RFRB, COMPUTER,IRIDIA CLUSTER AND PCM CO | New OEM | Contact Us |
| R94-3255 | GaSonics | GaSonics | R94-3255 | New OEM | Contact Us |
| 22-350753-00 | Novellus | O-RING, MLD, 30.120 X .275 V75, 75 DUROMETE | New OEM | Contact Us | |
| 12-8872-053 | On Trak | ASSY, CABLE, STEPPER MOTOR, CE96 | New OEM | Contact Us | |
| 14-8885-087 | On Trak | ASSY,CBL,PWR,IEC | New OEM | Contact Us | |
| 12-8800-097 | Ontrak | ASSY,SENSORS,AIR CYL.POS. | New OEM | Contact Us | |
| 12-8882-064 | Ontrak | ASSY, CABLE, DC MOTOR, CE | New OEM | Contact Us | |
| 12-8882-120 | Ontrak | ASSY, MOTOR, TRANSPORT | New OEM | Contact Us | |
| 12-8885-122 | Ontrak | ASSY,SENSOR,DIST.PNL,CE96 | New OEM | Contact Us | |
| 12-8885-123 | Ontrak | ASSY,DC MTR,DIST.PNL,CE96 | New OEM | Contact Us | |
| 12-8892-026 | Ontrak | ASSY, CBL, TRNSPRT MOTOR, CE | New OEM | Contact Us | |
| 13-0092-031 | Ontrak | PULLEY, CNVYR.MTR, DELRIN | New OEM | Contact Us | |
| 13-0092-059 | Ontrak | PULLEY, IDLER | New OEM | Contact Us | |
| 13-8800-244 | Ontrak | PULLEY, CONVEYOR COMPOUND | New OEM | Contact Us | |
| 13-8800-273 | Ontrak | COVER.1"SHAFT | New OEM | Contact Us | |
| 13-8800-294 | Ontrak | CLAMP,PIVOT | New OEM | Contact Us | |
| 13-8800-428 | Ontrak | PULLEY, CONVEYOR, LONG | New OEM | Contact Us | |
| 13-8800-431 | Ontrak | COVER PLATE DRIVE NUT | New OEM | Contact Us | |
| 13-8800-432 | Ontrak | PULLEY, CONVEYOR, SHORT | New OEM | Contact Us | |
| 13-8800-545 | Ontrak | PULLEY, DRIVE, X-PORT CONVEYOR | New OEM | Contact Us | |
| 13-8800-569 | Ontrak | PULLEY, DRIVE, TRANSPORT CONVER | New OEM | Contact Us | |
| 13-8885-072 | Ontrak | LAMP, WINDOW | New OEM | Contact Us | |
| 13-8892-199 | Ontrak | PULLEY, REAR, LARGE | New OEM | Contact Us | |
| 13-8892-200 | Ontrak | PULLEY, FRONT, SMALL | New OEM | Contact Us | |
| 14-8800-005 | Ontrak | HRNSS, DC MTR.CONN, ROLLER, CMC | New OEM | Contact Us | |
| 14-8892-026 | Ontrak | HRNSS, INPUT, PRE-PROD. | New OEM | Contact Us | |
| 202-019 | Ontrak | O-RING, .362 IDx.103W, CLR.POLT | New OEM | Contact Us | |
| 202-023 | Ontrak | O-RING, .103WX6-23/32(2.036I.D) | New OEM | Contact Us | |
| 26-8800-902 | Ontrak | ASSY, BRUSH MOTOR UPG, S2CE | New OEM | Contact Us | |
| 30-0008-003 | Ontrak | O-RING, VITON #-114 | New OEM | Contact Us | |
| 30-0008-026 | Ontrak | O-RING,.103W,1.925 ID,POLY | New OEM | Contact Us | |
| 30-0008-028 | Ontrak | O-RING, .103W, 2.800 ID, POLY | New OEM | Contact Us | |
| 30-0008-036 | Ontrak | O-RING, .103Wx2.237 ID, 83A PYR. | New OEM | Contact Us | |
| 30-0008-052 | Ontrak | O-RING, PLYRTHN 83A, .139W X 9-7/8LG, CLAN | New OEM | Contact Us | |
| 30-0008-067 | Ontrak | O-RING, .103x1.987ID, 83A PYRATH | New OEM | Contact Us | |
| 30-0008-076 | Ontrak | O-RING 103X2.237IN, 83A PYRATH | New OEM | Contact Us | |
| 30-0008-078 | Ontrak | O-RING, .103X2.800ID, 83A PYRATH | New OEM | Contact Us | |
| 30-0008-079 | Ontrak | O-RING, .103X2.425ID, 83A PYRATH | New OEM | Contact Us | |
| 30-0008-081 | Ontrak | O-RING, 2.114 IDx.07W, 62270, URE | New OEM | Contact Us | |
| 30-0008-083 | Ontrak | O-RING, .989ID, .070W, U62270, TC | New OEM | Contact Us | |
| 30-0008-105 | Ontrak | O-RING, PLYRTHN83A, .139WX9-13/32LG, CL AN | New OEM | Contact Us | |
| 30-0008-122 | Ontrak | O-RING, PLYRTHN 62270, 2-145, CL AN | New OEM | Contact Us | |
| 30-0023-002 | Ontrak | FTG, 1/4FPTx1/4T, TFE | New OEM | Contact Us | |
| 30-0024-056 | Ontrak | FTG, 1/8MPTx1/4T | New OEM | Contact Us | |
| 33-0002-033 | Ontrak | BEARING, FLANGED, 3/16IDX1/4OD | New OEM | Contact Us | |
| 33-0004-043 | Ontrak | SEAL, ROT, .375IDX.563X3/32, LGT | New OEM | Contact Us |