Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
Ø Novellus: Concept One (C1D, C1W)
Ø Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
Ø Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 33-0004-044 | Ontrak | SEAL, ROT, .375IDX.625, 1/8, MED | New OEM | Contact Us | |
| 33-0008-025 | Ontrak | BSHG, 7/8"SHFT, 3/4LG, T500 | New OEM | Contact Us | |
| 35-0005-004 | Ontrak | SENSOR, MINI-FLO | New OEM | Contact Us | |
| 40-2006-09 | Ontrak | FUSE, 250V, 4A, DUAL ELEMENT | New OEM | Contact Us | |
| 70-8000-002 | Ontrak | CLAMP, 1/2" PIPE | New OEM | Contact Us | |
| 765-148429-001 | Ontrak | KIT, STEPPER MTR, DC | New OEM | Contact Us | |
| 80-0002-047 | Ontrak | SENSOR,HALL EFFECT,CLIPPARD | New OEM | Contact Us | |
| 80-0002-068 | Ontrak | SENSOR HALL EFFECT PNP 9/16 | New OEM | Contact Us | |
| 93-0021-000 | Ontrak | PLATE, STRIKE | New OEM | Contact Us | |
| 95-0003-002 | Ontrak | TBG, 1/4"TEFLON | New OEM | Contact Us | |
| 00-689213-01 | PVD | AIR CYLINDER | New OEM | Contact Us | |
| 04-705760-02 | PVD | RING,6"CERAMIC | New OEM | Contact Us | |
| 04-719408-03 | PVD | SENSOR,FLOW,0.25GPM | New OEM | Contact Us | |
| 04-720954-10 | PVD | ACTUATOR SERVICE KIT | New OEM | Contact Us | |
| 13-8800-266 | PVD | GEAR, SPUR | New OEM | Contact Us | |
| 13-8800-277 | PVD | BUSHING, INSIDE 1" SHAFT | New OEM | Contact Us | |
| 13-8800-297 | PVD | BUSHING, OUTSIDE, 1"SHAFT | New OEM | Contact Us | |
| 13-8800-357 | PVD | CAP | New OEM | Contact Us | |
| 13-8800-358 | PVD | SHAFT, DRIVE, CORE | New OEM | Contact Us | |
| 13-8800-433 | PVD | NUT, DRIVE, ROLLER TRUCK | New OEM | Contact Us | |
| 13-8800-708 | PVD | HUB, GEAR, SMALL | New OEM | Contact Us | |
| 202-022 | PVD | O-RING,.103WX7-17/32(2.297I.D) | New OEM | Contact Us | |
| 202-035 | PVD | O-RING,.139Wx4.764ID,83A,POLY | New OEM | Contact Us | |
| 202-044 | PVD | O-RING.103WX20-11/16(6.487I.D) | New OEM | Contact Us | |
| 202-113 | PVD | O-RING,.139WX19-19/32(6.098I.D) | New OEM | Contact Us | |
| 202-161 | PVD | O-RING,.103WX32-11/32(10.190ID) | New OEM | Contact Us | |
| 27-999797-00 | PVD | CYLINDER, AIR | New OEM | Contact Us | |
| 30-0008-018 | PVD | O-RING,2.3IDx.103W,POLYURETHAN | New OEM | Contact Us | |
| 30-0008-023 | PVD | O-RING,CNVYR.EXIT | New OEM | Contact Us | |
| 30-0008-024 | PVD | O-RING,CNVYR.ENTRY | New OEM | Contact Us | |
| 931119-30 | PVD | PIN,DOWEL, HDN GND MACH, 1/16 x 5/8, SST | New OEM | Contact Us | |
| 955-008403-001 | Rainbow | PAD SILICONE RUBBER | New OEM | Contact Us | |
| 02-257556-00 | Sabre | ASSY,EBR DISP ARM,W/MOLD,XT | New OEM | Contact Us | |
| 27-049404-00 | Sabre | PWR SPLY,15V/12A,KEPCO | New OEM | Contact Us | |
| 953662 | Speedfam | Speedfam | VALVE,ASSY,BACKFILL,BLOWOFF | New OEM | Contact Us |
| 953663 | Speedfam | Speedfam | VALVE,ASSY,VACUUM | New OEM | Contact Us |
| 966424 | SNSR,VACUUM | New OEM | Contact Us | ||
| 02-135342-00 | Vector | NOVELLUS | ASSY,PCB,RF CURRENT SNSR | New OEM | Contact Us |
| 967846 | SWITCH,SERVSWITCH 8-PORT SLIM | New OEM | Contact Us | ||
| 0125-739966/RW | CARD,MOTION 8 AXIS | New OEM | Contact Us | ||
| 0150-112659 | MTR,SERVO 24V 110 IN OZ 2850RPM | New OEM | Contact Us | ||
| 02-289943-00 | ASSEMBLY, FEED-THRU/NOVELLUS | New OEM | Contact Us | ||
| 03-00308-00/OBS | ASSY,EXT PLTFRM,LOWER PCB | New OEM | Contact Us | ||
| 05-110416-02 | KIT,WINDOW,SAPPHIRE DUAL EP | New OEM | Contact Us | ||
| 0750-111515/RW | CYLINDER,AIR 8"BORE 6"STRK NON-ROTA - ASSUMES RETURN OF CUSTOMER CORE. | New OEM | Contact Us | ||
| 10-430544-00 | ASSY, S6 INJECTOR TUBE PAIR | New OEM | Contact Us | ||
| 27-029889-00 | PS,VDC MEGAPACK 7 OUTPUTS | New OEM | Contact Us | ||
| 34-433638-00 | BATTERY, UPS, 48 VDC, REFURISHED | New OEM | Contact Us | ||
| 95-3917 | ASSY, AURA, DISPLAY PANEL | New OEM | Contact Us | ||
| CPS-03-00019 | CBL ASSY, ROTATION SENSOR, DUO SAFETY | New OEM | Contact Us | ||
| CPS04-000305-00/OBS | KIT, SERVSWITCH,0250-740164 REPLACEMENT,776 | New OEM | Contact Us | ||
| CPS-20660 | VALVE, DUAL NC | New OEM | Contact Us | ||
| HG090018 | FILTER,ASSY (W/HG090019 40U ELMNT) | New OEM | Contact Us | ||
| 964485 | CONVERTER,DC/DC 24V 15VDC 2AMP | New OEM | Contact Us | ||
| 02-032615-00 | PCA,TERM PNL,C1,CVD-D | New OEM | Contact Us | ||
| 04-281177-00 | KIT,COMPUTER WITH CD-ROM DRIVE | New OEM | Contact Us | ||
| 04-450106-00 | KIT,15" MONITOR REPLACEMENT,FRONT,PEP | New OEM | Contact Us | ||
| 15-01063-00 | BRKT,PADDLE 200 MM | New OEM | Contact Us | ||
| 19-00155-01 | HEATER,BB 150MM | New OEM | Contact Us | ||
| 27-00081-00 | POWER SUPPLY 90V/12V | New OEM | Contact Us | ||
| 27-00149-01 | MANOMETER, DIFFERENTIAL, 1 TORR | New OEM | Contact Us | ||
| 27-034212-00 | GEN,2.75KW 13.56MHZ,CE MARK | New OEM | Contact Us | ||
| 34-00213-00 | SWITCH, PNEU 60PSI SPDT | New OEM | Contact Us | ||
| 61-182446-00 | CNTRLR,END POINT,200MM ORBITAL | New OEM | Contact Us | ||
| 72587-37 | TUBING MAYON 1-1/2 IN IDX.25WL | New OEM | Contact Us | ||
| 73333-05 | CYLINDER,AIR-DBLACT,2 IN STX1 IN B | New OEM | Contact Us | ||
| CPS04-000314-00 | KIT, SERVSWITCH, 16 CHANNEL, UPGRADE | New OEM | Contact Us | ||
| EM130022/RW | VERTICAL AUTUATOR-APP1000 | New OEM | Contact Us | ||
| 23978959 | DNS SSEW | DNS | VACUUMLESS ARM 12 INCH | New OEM | Contact Us |
| 23967645 | DNS SSEW | DNS | WAFER SUPPORT | New OEM | Contact Us |
| 2J4F4047 | DNS SSEW | DNS | PIN GUIDE | New OEM | Contact Us |
| 2J3F7762 | DNS SSEW | DNS | IHU WAFER GUIDES R*1 | New OEM | Contact Us |
| 2J3F7763 | DNS SSEW | DNS | IHU WAFER GUIDE *1 | New OEM | Contact Us |
| 2F4F1561 | DNS SSEW | DNS | PIN(反轉)UNIT（黑色） | New OEM | Contact Us |
| 2AEF0452 | DNS SSEW | DNS | CHUCK(反轉UNIT) | New OEM | Contact Us |
| 23960449 | DNS SSEW | DNS | PORTABLE SERVICE PANEL | New OEM | Contact Us |
| 23974472 | DNS SSEW | DNS | SHOCK ABSORBER | New OEM | Contact Us |
| 23969965 | DNS SSEW | DNS | MASS FLOW CONTROLLER (HORIBA) | New OEM | Contact Us |
| 23971527 | DNS SSEW | DNS | MHU NOTCH PLATE | New OEM | Contact Us |
| 2AEF004901 | DNS SSEW | DNS | SSR PIN(可動PIN) | New OEM | Contact Us |
| 2AEF0051 | DNS SSEW | DNS | SSR PIN2（PEEK PIN） | New OEM | Contact Us |
| 2AEF0050 | DNS SSEW | DNS | SSR PIN | New OEM | Contact Us |
| 23958498 | DNS SSEW | DNS | REVERSE CYLINDER | New OEM | Contact Us |
| 23986538 | DNS SSEW | DNS | SLIDE NOZZLE CYLINDER | New OEM | Contact Us |
| 23957787 | DNS SSEW | DNS | SC-1 FILTER | New OEM | Contact Us |
| 23959469 | DNS SSEW | DNS | SPIN MOTOR | New OEM | Contact Us |
| 0200-35018 | AMAT | EXHAUST INSERT 'APPLIED' 'GRANDWAY' PN:0 | As Is | Contact Us | |
| 2-J4-80098 | SCREEN | PTFE GASKET M5 | As Is | Contact Us | |
| 0242-36354 | AMAT | FLAPPER DISK APPLIED PN:0242-36354 FOR A | As Is | Contact Us | |
| 908078-015 | SVG | HEATER JACKET LOWER ELBO FOR SVG FURNACE | As Is | Contact Us | |
| 908078-012 | SVG | JACKET HEATER VACUUM LIN FOR SVG FURNACE | As Is | Contact Us | |
| 908078-022 | SVG | HEATER JACKET FOR SVG FURNACE | As Is | Contact Us | |
| 9700-2990-01 | MAXON MOTOR | POD LATCH ASSEMBLY ASYST PN:9700-2990-01 | As Is | Contact Us | |
| 9700-3149-01 | ZZ-OEM | HOME & LIMIT SENSOR ASSY V-MOVE LEFT RIG | As Is | Contact Us | |
| 6200-3021-01 | BANNER ENGINEERING CORP | LED IR EMITTER NARROW BEAM ASYST PN:6200 | As Is | Contact Us | |
| 3200-1023-01 | WILCO WIRE | PCB ASSY,MINI OPTICAL SWITCH GRIPPER OP/ | As Is | Contact Us | |
| 3201-0600-02 | ASYST | PCB ASSY DUAL OPTICAL SW W/963N51 ASYST | As Is | Contact Us | |
| 3200-1000-09 | ASYST | PCB ASSY ARM CONTROL ASYST PN:3200-1000- | As Is | Contact Us | |
| 4001-1979-02 | VEXTA | MODIFIED MOTOR LEADSCREW & GEARBOX ASYST | As Is | Contact Us | |
| 804-7008-49 | LAM | VCE SCREW SBHS M4X8MM SST VENTED FOR LAM | As Is | Contact Us |